[Scan]
initial_time=2016-01-18T23:41:14
final_time=2016-01-18T23:41:41
ip_count=19
run=1024
dataset=11
scan=874
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08869E-4
ql1_vset=
ql1_vmon=-7.56621E-1
ql1_imon=1.41213E-8
ql2_vset=
ql2_vmon=-7.34687E-1
ql2_imon=2.03643E-9
ql3_vset=
ql3_vmon=-9.19497E0
ql3_imon=1.3653E-10
ql4_vset=
ql4_vmon=-9.18977E0
ql4_imon=-2.2155E-10
mult1=-9.39296E-9
mult2=-2.70954E-9
rf_tmon=-5.46512E-3
rf_agc=3.27074E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=1.76411E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64195E0
bslens_imon=2.21833E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1948E1
lens5a_imon=2.01694E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05041E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53736E1
cs_ef1b_imon=3.14812E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04563E2
lens23_imon=1.02051E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04756E1
cs_ea1_imon=1.10653E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39863E0
lens1_imon=2.51033E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64753E1
os_ef1alow_imon=2.99315E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03505E1
cs_ea2_imon=1.37489E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84454E1
cs_ef1a_imon=3.03352E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.17455E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=4.28698E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15555E1
os_ea1_imon=2.4393E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63659E1
os_ef1bup_imon=3.07785E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21096E0
cs_ionrep_imon=9.1464E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91924E2
cs_nozzle_imon=1.93729E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01653E1
cs_anode1_imon=1.95701E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20432E0
olens4_imon=3.16634E-8
tplens_vset=1.4E-1
tplens_vmon=1.66461E0
tplens_imon=-2.53254E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26018E1
iondef3_imon=1.51707E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26626E1
iondef2_imon=1.56851E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02906E2
lens6_imon=2.97877E-4
ql6_vset=1.0E-1
ql6_vmon=9.50098E-2
ql6_imon=4.01611E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29439E0
ionrepsh_imon=8.7814E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3393E1
lens5b_imon=2.16468E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7476E1
cs_ef2b_imon=3.13371E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4178E0
os_ea2_imon=-7.74685E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00769E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71102E1
cs_ef2a_imon=3.16326E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07138E0
os_ef2alow_imon=-2.38885E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.13041E-1
os_ef2bup_imon=-5.18192E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11213E1
os_restr2_imon=3.37589E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23028E2
cs_ionfoca_imon=6.26556E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01581E1
cs_anode2_imon=2.08243E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73293E1
iondef1_imon=1.13017E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68227E1
iondef4_imon=1.1126E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.77735E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8176E-1
olens1_imon=7.10453E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14215E0
cs_ionaccel_imon=-8.93203E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47504E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56585E1
einzel_imon=7.80317E-6
window_vset=0.0E0
window_vmon=2.93026E-1
window_imon=-8.10312E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82663E2
mask1_imon=2.39268E-4
mask2_vset=0.0E0
mask2_vmon=-1.86302E1
mask2_imon=-7.38233E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=7.34921E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93698E3
defgrida_imon=7.03287E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50146E3
multb_neg_imon=6.99463E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.66172E0
defgridb_imon=6.22639E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33234E1
os_fil1_imon=9.42384E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07798E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61517E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31876E1
cs_fil1_imon=7.22091E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=8.87273E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6356E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.3395E-2
os_fil2_imon=-2.58188E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.07925E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.26047E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30947E-1
cs_fil2_imon=-2.5098E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01608E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21759E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40057E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.01939E-1
res40_imon=-2.33119E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=112
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.0958E0	-7.5686E-1	-7.35116E-1	-9.19495E0	-9.1898E0	4.26769E-3	9.49144E-2	2.72761E1	-3.26654E1	-3.26075E1	2.68256E1	1.20004E-7	2.5131E-3	2.5131E-3	6.32896E-3	2.99686E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09518E0	-7.56431E-1	-7.34663E-1	-9.19492E0	-9.18999E0	4.57764E-3	9.48191E-2	2.73323E1	-3.2672E1	-3.26148E1	2.68215E1	1.20293E-7	2.52131E-3	2.52131E-3	6.3074E-3	3.02115E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-7.56383E-1	-7.34949E-1	-9.19509E0	-9.18999E0	4.88758E-3	9.48668E-2	2.73124E1	-3.26611E1	-3.26161E1	2.67893E1	1.20008E-7	2.51911E-3	2.51911E-3	6.3074E-3	3.011E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-7.56335E-1	-7.34806E-1	-9.1949E0	-9.19008E0	4.88758E-3	9.4986E-2	2.73243E1	-3.26623E1	-3.2632E1	2.68003E1	1.20264E-7	2.51829E-3	2.51829E-3	6.33161E-3	3.01753E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-7.56454E-1	-7.34663E-1	-9.19499E0	-9.19025E0	4.57764E-3	9.47475E-2	2.7326E1	-3.2658E1	-3.26081E1	2.68428E1	1.20065E-7	2.51265E-3	2.51265E-3	6.31519E-3	2.99383E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-7.56693E-1	-7.34878E-1	-9.19504E0	-9.19003E0	4.74453E-3	9.51052E-2	2.7328E1	-3.26593E1	-3.26334E1	2.68129E1	1.19776E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.99073E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-7.56359E-1	-7.35116E-1	-9.19483E0	-9.19011E0	4.81606E-3	9.47237E-2	2.73426E1	-3.26626E1	-3.26246E1	2.6804E1	1.20001E-7	2.51439E-3	2.51439E-3	6.3232E-3	2.9926E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09619E0	-7.56431E-1	-7.34878E-1	-9.19473E0	-9.19003E0	5.14984E-3	9.47714E-2	2.73135E1	-3.26432E1	-3.26196E1	2.68177E1	1.1977E-7	2.51287E-3	2.51287E-3	6.29473E-3	3.01609E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09634E0	-7.56598E-1	-7.34615E-1	-9.19471E0	-9.19003E0	4.72069E-3	9.4986E-2	2.7314E1	-3.26736E1	-3.26251E1	2.68235E1	1.1994E-7	2.51678E-3	2.51678E-3	6.30379E-3	3.00403E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09611E0	-7.5655E-1	-7.34615E-1	-9.19476E0	-9.18992E0	4.673E-3	9.44614E-2	2.73364E1	-3.26834E1	-3.26114E1	2.67971E1	1.20187E-7	2.51908E-3	2.51908E-3	6.33211E-3	2.99065E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-7.56526E-1	-7.34401E-1	-9.19478E0	-9.18984E0	4.57764E-3	9.47952E-2	2.73168E1	-3.26641E1	-3.26316E1	2.68372E1	1.19837E-7	2.51246E-3	2.51246E-3	6.34723E-3	2.96816E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09627E0	-7.56311E-1	-7.3483E-1	-9.19485E0	-9.18975E0	4.52995E-3	9.50575E-2	2.73239E1	-3.26545E1	-3.26248E1	2.68578E1	1.20102E-7	2.51653E-3	2.51653E-3	6.323E-3	2.98276E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09619E0	-7.56407E-1	-7.34854E-1	-9.19478E0	-9.18996E0	4.62532E-3	9.51529E-2	2.73273E1	-3.26598E1	-3.26385E1	2.68739E1	1.20008E-7	2.5211E-3	2.5211E-3	6.31101E-3	2.99888E-1
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09549E0	-7.56168E-1	-7.34615E-1	-9.1949E0	-9.18994E0	4.62532E-3	9.53436E-2	2.732E1	-3.26717E1	-3.26303E1	2.68218E1	1.19896E-7	2.51458E-3	2.51458E-3	6.3074E-3	3.01609E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-7.56335E-1	-7.34997E-1	-9.19502E0	-9.18994E0	4.57764E-3	9.50336E-2	2.73213E1	-3.2667E1	-3.26055E1	2.68551E1	1.20038E-7	2.51754E-3	2.51754E-3	6.31135E-3	3.02081E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-7.56502E-1	-7.3452E-1	-9.19499E0	-9.18975E0	4.62532E-3	9.51052E-2	2.7282E1	-3.26499E1	-3.26696E1	2.68236E1	1.19806E-7	2.51886E-3	2.51886E-3	6.3113E-3	2.99568E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-7.56526E-1	-7.34806E-1	-9.19471E0	-9.19037E0	4.74453E-3	9.48429E-2	2.73204E1	-3.26621E1	-3.26168E1	2.68274E1	1.20177E-7	2.52042E-3	2.52042E-3	6.3543E-3	2.97908E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-7.56717E-1	-7.34687E-1	-9.19495E0	-9.18992E0	4.41074E-3	9.47952E-2	2.73358E1	-3.26729E1	-3.26086E1	2.68458E1	1.20084E-7	2.51804E-3	2.51804E-3	6.33538E-3	2.97762E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-7.56598E-1	-7.34425E-1	-9.19497E0	-9.19006E0	4.60148E-3	9.48668E-2	2.7324E1	-3.26396E1	-3.26036E1	2.68364E1	1.1979E-7	2.51182E-3	2.51182E-3	6.31798E-3	2.99845E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-7.56621E-1	-7.34687E-1	-9.19497E0	-9.18977E0	4.62532E-3	9.50098E-2	2.73293E1	-3.26626E1	-3.26018E1	2.68227E1	1.19953E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.00453E-1
