[Scan]
initial_time=2016-01-18T23:41:48
final_time=2016-01-18T23:42:09
ip_count=19
run=1024
dataset=11
scan=875
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09402E0
qbias_imon=-1.0879E-4
ql1_vset=
ql1_vmon=-7.56359E-1
ql1_imon=1.4114E-8
ql2_vset=
ql2_vmon=-7.34615E-1
ql2_imon=2.00363E-9
ql3_vset=
ql3_vmon=-9.19466E0
ql3_imon=1.04344E-10
ql4_vset=
ql4_vmon=-9.18989E0
ql4_imon=-2.70152E-10
mult1=-9.91312E-9
mult2=-2.70758E-9
rf_tmon=-4.14374E-3
rf_agc=3.37456E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.50611E-3
ql5_imon=1.69086E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66193E0
bslens_imon=2.37553E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19034E1
lens5a_imon=2.00434E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12458E2
lens4a_imon=2.05039E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53754E1
cs_ef1b_imon=3.15533E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02056E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04321E1
cs_ea1_imon=1.10599E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34192E0
lens1_imon=2.74323E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64879E1
os_ef1alow_imon=2.98666E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03738E1
cs_ea2_imon=1.37852E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84478E1
cs_ef1a_imon=3.03712E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.16986E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1143E1
os_restr1_imon=4.29743E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15101E1
os_ea1_imon=2.43513E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63755E1
os_ef1bup_imon=3.08902E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21425E0
cs_ionrep_imon=9.45926E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91951E2
cs_nozzle_imon=1.93471E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01869E1
cs_anode1_imon=1.95197E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20492E0
olens4_imon=3.16426E-8
tplens_vset=1.4E-1
tplens_vmon=1.68409E0
tplens_imon=-4.25519E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26337E1
iondef3_imon=1.52993E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26402E1
iondef2_imon=1.55336E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02935E2
lens6_imon=2.98162E-4
ql6_vset=1.0E-1
ql6_vmon=9.50336E-2
ql6_imon=4.05284E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27914E0
ionrepsh_imon=8.45348E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3355E1
lens5b_imon=2.18639E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74657E1
cs_ef2b_imon=3.13515E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45698E0
os_ea2_imon=-8.25669E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06083E2
lens4b_imon=2.00583E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71474E1
cs_ef2a_imon=3.17659E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02272E0
os_ef2alow_imon=-2.4321E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.00427E-1
os_ef2bup_imon=-5.10264E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11268E1
os_restr2_imon=3.37914E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23052E2
cs_ionfoca_imon=6.2982E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01797E1
cs_anode2_imon=2.0918E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73246E1
iondef1_imon=1.08976E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68226E1
iondef4_imon=1.10431E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.70492E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81402E-1
olens1_imon=7.10964E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13194E0
cs_ionaccel_imon=-7.59857E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02096E2
cs_ionfocb_imon=1.4737E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56393E1
einzel_imon=7.70946E-6
window_vset=0.0E0
window_vmon=2.66597E-1
window_imon=-7.09401E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82673E2
mask1_imon=2.39185E-4
mask2_vset=0.0E0
mask2_vmon=-1.86044E1
mask2_imon=-5.9047E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.43328E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.69066E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50159E3
multb_neg_imon=7.40083E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45269E0
defgridb_imon=6.05258E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33245E1
os_fil1_imon=9.40408E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08002E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61389E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31859E1
cs_fil1_imon=6.54817E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.89986E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63534E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.46664E-2
os_fil2_imon=-2.3356E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.04321E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.31322E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32371E-1
cs_fil2_imon=-2.20947E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.77892E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21835E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.99175E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.52815E-3
foreline_cvt_pmon=2.52815E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.55087E-1
res40_imon=-2.35641E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-7.56407E-1	-7.34782E-1	-9.19542E0	-9.18984E0	4.60148E-3	9.47475E-2	2.72906E1	-3.26735E1	-3.2622E1	2.68755E1	1.19757E-7	2.52318E-3	2.52318E-3	6.31837E-3	2.98222E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09449E0	-7.56168E-1	-7.34854E-1	-9.19518E0	-9.1897E0	4.64916E-3	9.47952E-2	2.73069E1	-3.26579E1	-3.26398E1	2.67559E1	1.20344E-7	2.51603E-3	2.51603E-3	6.30212E-3	2.98592E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-7.56264E-1	-7.34687E-1	-9.19516E0	-9.18953E0	4.43459E-3	9.47237E-2	2.73087E1	-3.2641E1	-3.2611E1	2.6855E1	1.20191E-7	2.51804E-3	2.51804E-3	6.30182E-3	3.0041E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-7.56168E-1	-7.34305E-1	-9.19476E0	-9.18977E0	4.81606E-3	9.48191E-2	2.73535E1	-3.26638E1	-3.26413E1	2.68424E1	1.2026E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.9943E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-7.56121E-1	-7.34544E-1	-9.19509E0	-9.18996E0	4.88758E-3	9.43899E-2	2.72986E1	-3.26738E1	-3.25812E1	2.6828E1	1.19749E-7	2.51847E-3	2.51847E-3	6.29128E-3	2.99175E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-7.56192E-1	-7.34758E-1	-9.19502E0	-9.18949E0	4.55379E-3	9.47952E-2	2.72833E1	-3.26826E1	-3.25829E1	2.68794E1	1.19861E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01609E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-7.56097E-1	-7.34591E-1	-9.19511E0	-9.18975E0	4.48227E-3	9.49144E-2	2.73186E1	-3.26609E1	-3.26138E1	2.68163E1	1.19697E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.00453E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-7.5593E-1	-7.34949E-1	-9.19514E0	-9.18989E0	4.50611E-3	9.50336E-2	2.72967E1	-3.26603E1	-3.26428E1	2.68192E1	1.20278E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00302E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-7.55954E-1	-7.34782E-1	-9.19502E0	-9.18994E0	4.55379E-3	9.50336E-2	2.73123E1	-3.26627E1	-3.26284E1	2.68313E1	1.19809E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-7.5593E-1	-7.34615E-1	-9.19483E0	-9.18989E0	4.72069E-3	9.48191E-2	2.73641E1	-3.26909E1	-3.26396E1	2.68487E1	1.20122E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.9978E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09371E0	-7.56216E-1	-7.34639E-1	-9.19507E0	-9.1898E0	4.69685E-3	9.46522E-2	2.73388E1	-3.26719E1	-3.2634E1	2.68298E1	1.19705E-7	2.52099E-3	2.52099E-3	6.29645E-3	2.9952E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-7.56288E-1	-7.34663E-1	-9.19504E0	-9.18992E0	4.55379E-3	9.50813E-2	2.73104E1	-3.26585E1	-3.26236E1	2.68412E1	1.19913E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09433E0	-7.56383E-1	-7.34663E-1	-9.19523E0	-9.19018E0	4.60148E-3	9.50336E-2	2.73375E1	-3.26524E1	-3.26428E1	2.6774E1	1.19705E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-7.56049E-1	-7.34472E-1	-9.19511E0	-9.19025E0	4.55379E-3	9.47475E-2	2.73045E1	-3.262E1	-3.26476E1	2.68911E1	1.198E-7	2.51739E-3	2.51739E-3	6.29665E-3	3.0071E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-7.56288E-1	-7.34591E-1	-9.19487E0	-9.19003E0	4.43459E-3	9.47237E-2	2.73616E1	-3.26645E1	-3.26651E1	2.68466E1	1.20174E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.9952E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-7.56216E-1	-7.34735E-1	-9.19511E0	-9.18989E0	4.1008E-3	9.50098E-2	2.73538E1	-3.26819E1	-3.26104E1	2.68238E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00824E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-7.56121E-1	-7.34878E-1	-9.1948E0	-9.19011E0	4.31538E-3	9.48668E-2	2.73225E1	-3.2638E1	-3.26062E1	2.68496E1	1.20435E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-7.5593E-1	-7.3483E-1	-9.19487E0	-9.18999E0	4.48227E-3	9.49144E-2	2.73322E1	-3.26655E1	-3.26207E1	2.68586E1	1.20069E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.9978E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-7.56049E-1	-7.34663E-1	-9.19504E0	-9.18999E0	4.62532E-3	9.46283E-2	2.73204E1	-3.26307E1	-3.26071E1	2.68532E1	1.20004E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.9943E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09402E0	-7.56359E-1	-7.34615E-1	-9.19466E0	-9.18989E0	4.50611E-3	9.50336E-2	2.73246E1	-3.26402E1	-3.26337E1	2.68226E1	1.20004E-7	2.52815E-3	2.52815E-3	6.33436E-3	2.99175E-1
