[Scan]
initial_time=2016-01-18T23:42:16
final_time=2016-01-18T23:42:36
ip_count=19
run=1024
dataset=11
scan=876
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09333E0
qbias_imon=-1.088E-4
ql1_vset=
ql1_vmon=-7.56431E-1
ql1_imon=1.41352E-8
ql2_vset=
ql2_vmon=-7.34711E-1
ql2_imon=2.08378E-9
ql3_vset=
ql3_vmon=-9.19476E0
ql3_imon=1.18124E-10
ql4_vset=
ql4_vmon=-9.18987E0
ql4_imon=-2.44486E-10
mult1=-9.84875E-9
mult2=-2.75654E-9
rf_tmon=-5.91836E-3
rf_agc=3.23122E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=1.65938E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65833E0
bslens_imon=2.49449E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19749E1
lens5a_imon=1.99965E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.05244E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54103E1
cs_ef1b_imon=3.17515E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.02233E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04646E1
cs_ea1_imon=1.12617E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41702E0
lens1_imon=2.73242E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64759E1
os_ef1alow_imon=2.96901E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03372E1
cs_ea2_imon=1.35617E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8437E1
cs_ef1a_imon=3.05262E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.16925E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11484E1
os_restr1_imon=4.29202E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14735E1
os_ea1_imon=2.42576E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63299E1
os_ef1bup_imon=3.06343E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2521E0
cs_ionrep_imon=9.50613E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91913E2
cs_nozzle_imon=1.93438E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01779E1
cs_anode1_imon=1.97936E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20444E0
olens4_imon=3.15872E-8
tplens_vset=1.4E-1
tplens_vmon=1.64984E0
tplens_imon=-1.22703E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2611E1
iondef3_imon=1.51335E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26554E1
iondef2_imon=1.56706E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02924E2
lens6_imon=2.98223E-4
ql6_vset=1.0E-1
ql6_vmon=9.44138E-2
ql6_imon=4.02713E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28574E0
ionrepsh_imon=8.60849E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33838E1
lens5b_imon=2.16945E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74633E1
cs_ef2b_imon=3.12542E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43415E0
os_ea2_imon=-7.13916E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06062E2
lens4b_imon=2.00702E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71186E1
cs_ef2a_imon=3.17587E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.096E0
os_ef2alow_imon=-2.35641E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.58381E-1
os_ef2bup_imon=-5.14588E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10865E1
os_restr2_imon=3.39247E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.28342E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01713E1
cs_anode2_imon=2.09685E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72781E1
iondef1_imon=1.09517E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68118E1
iondef4_imon=1.1126E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.7479E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81259E-1
olens1_imon=7.09788E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17399E0
cs_ionaccel_imon=-8.82392E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02098E2
cs_ionfocb_imon=1.47363E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56519E1
einzel_imon=7.86443E-6
window_vset=0.0E0
window_vmon=2.57587E-1
window_imon=-8.5356E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39315E-4
mask2_vset=0.0E0
mask2_vmon=-1.8653E1
mask2_imon=-5.07579E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.43328E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.83846E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.10162E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.26923E0
defgridb_imon=6.11387E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33252E1
os_fil1_imon=9.41669E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08188E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61238E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31882E1
cs_fil1_imon=7.98375E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.00801E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63991E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.36346E-2
os_fil2_imon=-2.55785E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.13932E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.39056E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31723E-1
cs_fil2_imon=-2.4197E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23232E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21859E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.83318E-1
res40_imon=-2.42849E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=219
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09611E0	-7.56216E-1	-7.34735E-1	-9.19473E0	-9.18999E0	4.45843E-3	9.45807E-2	2.73075E1	-3.2639E1	-3.26296E1	2.6807E1	1.19902E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.01223E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.0958E0	-7.55954E-1	-7.34878E-1	-9.19483E0	-9.18987E0	4.07696E-3	9.45807E-2	2.73431E1	-3.27007E1	-3.26187E1	2.68262E1	1.19851E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-7.55906E-1	-7.34949E-1	-9.19511E0	-9.19006E0	4.3869E-3	9.46283E-2	2.73196E1	-3.26782E1	-3.26376E1	2.68599E1	1.20084E-7	2.52027E-3	2.52027E-3	6.3074E-3	3.00942E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-7.55978E-1	-7.34544E-1	-9.19514E0	-9.18996E0	4.57764E-3	9.46999E-2	2.73033E1	-3.26831E1	-3.26092E1	2.68713E1	1.20158E-7	2.52492E-3	2.52492E-3	6.32356E-3	2.99941E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-7.55954E-1	-7.34472E-1	-9.19523E0	-9.19006E0	4.33922E-3	9.46999E-2	2.73293E1	-3.26384E1	-3.25965E1	2.68238E1	1.2026E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.99175E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-7.5593E-1	-7.34305E-1	-9.1953E0	-9.18996E0	4.43459E-3	9.50336E-2	2.72877E1	-3.26122E1	-3.2608E1	2.6852E1	1.20004E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.02253E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-7.55906E-1	-7.34711E-1	-9.19542E0	-9.18987E0	4.48227E-3	9.50575E-2	2.73464E1	-3.26762E1	-3.26207E1	2.67872E1	1.20137E-7	2.52139E-3	2.52139E-3	6.31299E-3	3.00676E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-7.56049E-1	-7.34711E-1	-9.19504E0	-9.18984E0	4.69685E-3	9.48906E-2	2.73303E1	-3.26771E1	-3.2632E1	2.68448E1	1.19953E-7	2.51847E-3	2.51847E-3	6.29128E-3	2.9892E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-7.56216E-1	-7.34639E-1	-9.19504E0	-9.1903E0	4.55379E-3	9.48668E-2	2.73207E1	-3.26374E1	-3.26428E1	2.68514E1	1.19601E-7	2.51334E-3	2.51334E-3	6.29645E-3	2.98222E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09611E0	-7.56145E-1	-7.34711E-1	-9.19507E0	-9.19008E0	4.81606E-3	9.47475E-2	2.73216E1	-3.26296E1	-3.26478E1	2.68337E1	1.19913E-7	2.5188E-3	2.5188E-3	6.29098E-3	2.9952E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09642E0	-7.56264E-1	-7.34591E-1	-9.19468E0	-9.18982E0	4.3869E-3	9.50098E-2	2.73183E1	-3.26999E1	-3.25936E1	2.68226E1	1.19953E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.01738E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-7.56121E-1	-7.34806E-1	-9.19492E0	-9.1897E0	4.31538E-3	9.48191E-2	2.73092E1	-3.26649E1	-3.2626E1	2.68713E1	1.20055E-7	2.52061E-3	2.52061E-3	6.29128E-3	3.01995E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-7.56192E-1	-7.34472E-1	-9.19492E0	-9.18977E0	4.26769E-3	9.4986E-2	2.73257E1	-3.26803E1	-3.26183E1	2.67885E1	1.19965E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.9978E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09348E0	-7.56431E-1	-7.34329E-1	-9.19502E0	-9.18965E0	4.60148E-3	9.4676E-2	2.73265E1	-3.26352E1	-3.26254E1	2.6852E1	1.19902E-7	2.52061E-3	2.52061E-3	6.33436E-3	3.0071E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09402E0	-7.56383E-1	-7.34591E-1	-9.19511E0	-9.18999E0	4.55379E-3	9.45091E-2	2.73279E1	-3.27191E1	-3.25888E1	2.68629E1	1.20069E-7	2.51662E-3	2.51662E-3	6.3514E-3	2.9978E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09387E0	-7.5655E-1	-7.34568E-1	-9.1949E0	-9.18963E0	4.55379E-3	9.46283E-2	2.73423E1	-3.2675E1	-3.25959E1	2.681E1	1.20487E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.9952E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-7.56288E-1	-7.3483E-1	-9.19485E0	-9.18975E0	4.36306E-3	9.46522E-2	2.73123E1	-3.26549E1	-3.26128E1	2.68599E1	1.20278E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09348E0	-7.56359E-1	-7.3452E-1	-9.19495E0	-9.1897E0	4.43459E-3	9.46283E-2	2.73273E1	-3.26669E1	-3.26458E1	2.68466E1	1.20055E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.01223E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09364E0	-7.56359E-1	-7.34544E-1	-9.19499E0	-9.18989E0	4.48227E-3	9.44376E-2	2.73263E1	-3.26012E1	-3.26791E1	2.68749E1	1.20069E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00302E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09333E0	-7.56431E-1	-7.34711E-1	-9.19476E0	-9.18987E0	4.57764E-3	9.44138E-2	2.72781E1	-3.26554E1	-3.2611E1	2.68118E1	1.19953E-7	2.52384E-3	2.52384E-3	6.32356E-3	3.00453E-1
