[Scan]
initial_time=2016-01-18T23:42:44
final_time=2016-01-18T23:43:04
ip_count=19
run=1024
dataset=11
scan=877
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09611E0
qbias_imon=-1.08801E-4
ql1_vset=
ql1_vmon=-7.56264E-1
ql1_imon=1.4146E-8
ql2_vset=
ql2_vmon=-7.34687E-1
ql2_imon=1.99771E-9
ql3_vset=
ql3_vmon=-9.19492E0
ql3_imon=1.0004E-10
ql4_vset=
ql4_vmon=-9.18994E0
ql4_imon=-2.54405E-10
mult1=-1.02727E-8
mult2=-2.88869E-9
rf_tmon=-3.86047E-3
rf_agc=3.4063E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.36306E-3
ql5_imon=1.70194E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65232E0
bslens_imon=2.50531E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19899E1
lens5a_imon=2.01588E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1245E2
lens4a_imon=2.05039E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53826E1
cs_ef1b_imon=3.16903E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04643E2
lens23_imon=1.02319E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04357E1
cs_ea1_imon=1.0894E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38337E0
lens1_imon=2.71439E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64855E1
os_ef1alow_imon=2.9827E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03756E1
cs_ea2_imon=1.35329E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84322E1
cs_ef1a_imon=3.04685E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.17371E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11532E1
os_restr1_imon=4.29166E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15017E1
os_ea1_imon=2.42179E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63509E1
os_ef1bup_imon=3.07568E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21244E0
cs_ionrep_imon=9.53497E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91922E2
cs_nozzle_imon=1.93571E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02091E1
cs_anode1_imon=1.9617E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20387E0
olens4_imon=3.17338E-8
tplens_vset=1.4E-1
tplens_vmon=1.68109E0
tplens_imon=-2.53695E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.2656E1
iondef3_imon=1.50253E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26811E1
iondef2_imon=1.55805E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02949E2
lens6_imon=2.98292E-4
ql6_vset=1.0E-1
ql6_vmon=9.5129E-2
ql6_imon=4.05267E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31939E0
ionrepsh_imon=8.51477E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3358E1
lens5b_imon=2.17846E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74555E1
cs_ef2b_imon=3.14128E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44376E0
os_ea2_imon=-2.59691E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06082E2
lens4b_imon=2.00587E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71071E1
cs_ef2a_imon=3.17263E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03594E0
os_ef2alow_imon=-2.33119E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95021E-1
os_ef2bup_imon=-5.09182E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11159E1
os_restr2_imon=3.38815E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23025E2
cs_ionfoca_imon=6.29135E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01617E1
cs_anode2_imon=2.09468E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73461E1
iondef1_imon=1.10959E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67992E1
iondef4_imon=1.10828E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.74807E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=7.1058E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12774E0
cs_ionaccel_imon=-7.995E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02032E2
cs_ionfocb_imon=1.47403E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56447E1
einzel_imon=7.81758E-6
window_vset=0.0E0
window_vmon=2.43772E-1
window_imon=-7.20213E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8266E2
mask1_imon=2.3912E-4
mask2_vset=0.0E0
mask2_vmon=-1.86548E1
mask2_imon=-5.65243E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92676E3
multa_neg_imon=7.83343E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.77357E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.1557E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4166E0
defgridb_imon=6.11026E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33264E1
os_fil1_imon=9.40444E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07882E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61506E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31879E1
cs_fil1_imon=7.3891E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=8.89676E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63565E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.51823E-2
os_fil2_imon=-2.44372E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.27147E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.37896E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30817E-1
cs_fil2_imon=-2.25752E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.65919E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21776E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.78513E-1
res40_imon=-2.39966E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09356E0	-7.56502E-1	-7.34377E-1	-9.19507E0	-9.18992E0	4.3869E-3	9.48906E-2	2.73832E1	-3.26518E1	-3.26536E1	2.68695E1	1.20084E-7	2.52362E-3	2.52362E-3	6.30182E-3	2.98819E-1
2.0E0	4.0E1	1.0E0	3.16E2	1.6E2	-2.09449E0	-7.56407E-1	-7.34782E-1	-9.19511E0	-9.18994E0	4.55379E-3	9.49144E-2	2.73201E1	-3.26759E1	-3.26206E1	2.68196E1	1.19705E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00824E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0941E0	-7.56383E-1	-7.34854E-1	-9.19526E0	-9.18994E0	4.57764E-3	9.46999E-2	2.73163E1	-3.26413E1	-3.26354E1	2.68163E1	1.20122E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.00563E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-7.56526E-1	-7.34711E-1	-9.19497E0	-9.18963E0	4.41074E-3	9.48429E-2	2.73544E1	-3.26554E1	-3.26152E1	2.6783E1	1.19902E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.03027E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09426E0	-7.56574E-1	-7.34496E-1	-9.19473E0	-9.18963E0	4.45843E-3	9.49621E-2	2.73027E1	-3.26446E1	-3.26158E1	2.6816E1	1.20069E-7	2.52538E-3	2.52538E-3	6.3074E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-7.56526E-1	-7.34591E-1	-9.19507E0	-9.19003E0	4.50611E-3	9.5129E-2	2.73305E1	-3.26549E1	-3.26001E1	2.6789E1	1.20209E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.0071E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-7.56526E-1	-7.34854E-1	-9.19495E0	-9.18972E0	4.45843E-3	9.50098E-2	2.73255E1	-3.26585E1	-3.26296E1	2.68707E1	1.19757E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-7.56311E-1	-7.34806E-1	-9.19492E0	-9.18994E0	4.24385E-3	9.49621E-2	2.72803E1	-3.26148E1	-3.2616E1	2.6829E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01347E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09387E0	-7.56335E-1	-7.34854E-1	-9.19504E0	-9.18994E0	4.62532E-3	9.49383E-2	2.73129E1	-3.2644E1	-3.26224E1	2.68082E1	1.19891E-7	2.52025E-3	2.52025E-3	6.33919E-3	3.01609E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-7.56502E-1	-7.34878E-1	-9.19497E0	-9.18996E0	4.48227E-3	9.52005E-2	2.73039E1	-3.26113E1	-3.26054E1	2.68472E1	1.19913E-7	2.51552E-3	2.51552E-3	6.28552E-3	3.00563E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-7.56383E-1	-7.3483E-1	-9.19502E0	-9.19003E0	4.673E-3	9.48429E-2	2.73117E1	-3.26506E1	-3.26248E1	2.68538E1	1.20209E-7	2.50989E-3	2.50989E-3	6.31817E-3	2.99941E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-7.56335E-1	-7.34925E-1	-9.19499E0	-9.19001E0	4.41074E-3	9.49383E-2	2.7321E1	-3.26773E1	-3.26608E1	2.68343E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.9978E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09433E0	-7.56359E-1	-7.34854E-1	-9.19516E0	-9.19003E0	4.26769E-3	9.48429E-2	2.72904E1	-3.26627E1	-3.26444E1	2.68169E1	1.19953E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.00197E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-7.56168E-1	-7.34925E-1	-9.19511E0	-9.18994E0	4.31538E-3	9.46522E-2	2.73075E1	-3.26461E1	-3.26107E1	2.68528E1	1.19766E-7	2.51136E-3	2.51136E-3	6.31858E-3	2.99613E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0941E0	-7.56359E-1	-7.34925E-1	-9.19511E0	-9.18992E0	4.31538E-3	9.53436E-2	2.73003E1	-3.2632E1	-3.26308E1	2.67974E1	1.19965E-7	2.51007E-3	2.51007E-3	6.29098E-3	2.9874E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-7.56264E-1	-7.35188E-1	-9.19495E0	-9.1898E0	4.31538E-3	9.50098E-2	2.73424E1	-3.27017E1	-3.2614E1	2.68442E1	1.20004E-7	2.51632E-3	2.51632E-3	6.33436E-3	2.9943E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.0958E0	-7.56264E-1	-7.35188E-1	-9.19535E0	-9.1898E0	4.48227E-3	9.48668E-2	2.73502E1	-3.26705E1	-3.26182E1	2.68935E1	1.19913E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.98481E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-7.55978E-1	-7.35331E-1	-9.19499E0	-9.18984E0	4.64916E-3	9.49383E-2	2.73281E1	-3.26685E1	-3.26213E1	2.68034E1	1.20226E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.9952E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09634E0	-7.56049E-1	-7.34949E-1	-9.19514E0	-9.19006E0	4.48227E-3	9.50575E-2	2.7347E1	-3.26809E1	-3.26178E1	2.67897E1	1.20209E-7	2.52599E-3	2.52599E-3	6.31817E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09611E0	-7.56264E-1	-7.34687E-1	-9.19492E0	-9.18994E0	4.36306E-3	9.5129E-2	2.73461E1	-3.26811E1	-3.2656E1	2.67992E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00824E-1
