[Scan]
initial_time=2016-01-18T16:21:47
final_time=2016-01-18T16:22:07
ip_count=19
run=1024
dataset=1
scan=1
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.12368E-2
qbias_imon=-3.71836E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-7.68268E-10
ql2_vset=
ql2_vmon=-9.53674E-5
ql2_imon=1.20265E-9
ql3_vset=
ql3_vmon=-8.80022E1
ql3_imon=-2.41973E-9
ql4_vset=
ql4_vmon=1.00136E-3
ql4_imon=1.35093E-8
mult1=-1.11732E-8
mult2=-2.86433E-9
rf_tmon=-4.32617E-3
rf_agc=3.2913E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=2.95639E-3
ql5_imon=6.64437E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64701E0
bslens_imon=2.46831E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19564E1
lens5a_imon=1.98586E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12568E2
lens4a_imon=2.04909E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54009E1
cs_ef1b_imon=2.88E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04678E2
lens23_imon=1.02135E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04493E1
cs_ea1_imon=2.52512E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97109E0
lens1_imon=1.46765E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64562E1
os_ef1alow_imon=2.98183E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03576E1
cs_ea2_imon=1.47255E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84556E1
cs_ef1a_imon=2.95507E-5
olens2_vset=0.0E0
olens2_vmon=1.45435E-3
olens2_imon=1.10726E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11442E1
os_restr1_imon=4.26107E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15117E1
os_ea1_imon=2.3168E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63798E1
os_ef1bup_imon=3.09338E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21168E0
cs_ionrep_imon=1.18875E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92069E2
cs_nozzle_imon=1.93512E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02163E1
cs_anode1_imon=3.00407E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99969E1
olens4_imon=4.34474E-9
tplens_vset=0.0E0
tplens_vmon=-1.69494E0
tplens_imon=-2.50205E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99846E1
iondef3_imon=8.75573E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98176E1
iondef2_imon=9.34998E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03318E2
lens6_imon=2.98107E-4
ql6_vset=1.0E-1
ql6_vmon=9.73463E-2
ql6_imon=8.86035E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22591E0
ionrepsh_imon=1.77343E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33874E1
lens5b_imon=2.19214E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7464E1
cs_ef2b_imon=3.12431E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.24413E0
os_ea2_imon=-8.06885E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06214E2
lens4b_imon=2.00503E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71177E1
cs_ef2a_imon=3.16219E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05398E0
os_ef2alow_imon=-2.55026E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.2735E-1
os_ef2bup_imon=-5.20187E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11454E1
os_restr2_imon=3.41971E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23081E2
cs_ionfoca_imon=6.28186E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0196E1
cs_anode2_imon=2.23395E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57861E1
iondef1_imon=5.08437E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49908E1
iondef4_imon=5.4046E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27949E1
olens3_imon=2.56821E-8
olens1_vset=0.0E0
olens1_vmon=1.45435E-3
olens1_imon=1.27912E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14115E0
cs_ionaccel_imon=-1.84478E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02162E2
cs_ionfocb_imon=1.47396E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56278E1
einzel_imon=7.66699E-6
window_vset=0.0E0
window_vmon=2.59968E-1
window_imon=-8.54332E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82855E2
mask1_imon=2.39303E-4
mask2_vset=0.0E0
mask2_vmon=-1.87983E1
mask2_imon=-4.58153E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92668E3
multa_neg_imon=7.6048E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.14992E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=6.93542E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38463E0
defgridb_imon=5.95866E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33184E1
os_fil1_imon=9.47465E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06339E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.67148E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30438E1
cs_fil1_imon=1.00137E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62899E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68082E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.89247E-2
os_fil2_imon=-2.77344E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90077E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=7.1433E-2
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34271E-1
cs_fil2_imon=-2.5823E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17676E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22364E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=2.10931E-2
chamber_ion_pmon=2.21401E-9
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.39979E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.18082E-1
res40_imon=-2.49465E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=189
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.548E3	2.0E0	1.47E2	4.1E1	-7.13915E-2	-8.80013E1	1.19209E-4	-8.80023E1	8.10623E-4	2.74181E-3	9.80139E-2	1.58107E1	-1.98248E1	-1.99234E1	1.5045E1	2.21401E-9	2.52659E-3	2.52659E-3	6.31269E-3	2.11889E-2
2.0E0	3.459E3	2.0E0	3.16E2	1.6E2	-7.13915E-2	-8.80014E1	-2.14577E-4	-8.8002E1	9.05991E-4	2.88486E-3	9.77039E-2	1.58335E1	-1.98362E1	-1.99378E1	1.4989E1	2.21401E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.12594E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.09279E-2	-8.80016E1	9.53674E-5	-8.80024E1	9.05991E-4	2.98023E-3	9.78231E-2	1.58109E1	-1.98352E1	-1.99125E1	1.50124E1	2.21401E-9	2.5188E-3	2.5188E-3	6.33486E-3	2.10931E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.06958E-2	-8.80017E1	-7.15256E-5	-8.80024E1	1.12057E-3	2.95639E-3	9.80616E-2	1.5825E1	-1.98157E1	-1.99012E1	1.50311E1	2.21401E-9	2.51847E-3	2.51847E-3	6.32896E-3	2.1187E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.10825E-2	-8.80016E1	3.8147E-4	-8.80024E1	1.12057E-3	3.12328E-3	9.79662E-2	1.58233E1	-1.98038E1	-1.99234E1	1.50455E1	2.23138E-9	2.52538E-3	2.52538E-3	6.3074E-3	2.10565E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.00776E-2	-8.80017E1	2.6226E-4	-8.80023E1	1.07288E-3	2.71797E-3	9.77993E-2	1.58356E1	-1.98181E1	-1.99301E1	1.4983E1	2.23202E-9	2.51417E-3	2.51417E-3	6.29665E-3	2.11689E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.07733E-2	-8.80014E1	5.24521E-4	-8.80022E1	1.09673E-3	2.40803E-3	9.7847E-2	1.57796E1	-1.98287E1	-1.99142E1	1.50479E1	2.23487E-9	2.52384E-3	2.52384E-3	6.29128E-3	2.11148E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.03094E-2	-8.80017E1	1.43051E-4	-8.80024E1	8.58307E-4	2.47955E-3	9.7847E-2	1.58143E1	-1.9802E1	-1.9939E1	1.50232E1	2.23107E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.12594E-2
1.2E1	1.09E2	0.0E0	4.85E2	3.23E2	-7.02322E-2	-8.80017E1	2.38419E-5	-8.80022E1	9.05991E-4	3.12328E-3	9.77039E-2	1.58185E1	-1.97874E1	-1.99537E1	1.50136E1	2.21401E-9	2.51334E-3	2.51334E-3	6.31837E-3	2.12218E-2
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.12368E-2	-8.80014E1	2.38419E-4	-8.80022E1	6.91414E-4	2.95639E-3	9.76086E-2	1.58281E1	-1.98086E1	-1.98927E1	1.49962E1	2.23202E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.12594E-2
1.4E1	1.04E2	0.0E0	5.66E2	3.82E2	-7.201E-2	-8.80015E1	-2.14577E-4	-8.80024E1	1.00136E-3	2.86102E-3	9.77993E-2	1.58023E1	-1.98236E1	-1.99318E1	1.50106E1	2.22654E-9	2.51334E-3	2.51334E-3	6.32936E-3	2.10931E-2
1.5E1	9.4E1	1.0E0	6.06E2	4.11E2	-7.14689E-2	-8.80015E1	9.53674E-5	-8.80023E1	9.77516E-4	2.45571E-3	9.77516E-2	1.57927E1	-1.9826E1	-1.99167E1	1.50256E1	2.22558E-9	2.52538E-3	2.52538E-3	6.31288E-3	2.11298E-2
1.6E1	3.63E2	1.0E0	6.47E2	4.41E2	-7.16233E-2	-8.80013E1	9.53674E-5	-8.80025E1	1.04904E-3	2.64645E-3	9.75132E-2	1.58215E1	-1.98278E1	-1.99318E1	1.50214E1	2.2372E-9	2.51443E-3	2.51443E-3	6.35692E-3	2.12403E-2
1.7E1	8.56E2	1.0E0	6.87E2	4.7E2	-7.17007E-2	-8.80013E1	1.90735E-4	-8.80023E1	1.3113E-3	2.86102E-3	9.76563E-2	1.58145E1	-1.98515E1	-1.99083E1	1.50225E1	2.23623E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.11482E-2
1.8E1	3.764E3	2.0E0	7.27E2	5.0E2	-7.06958E-2	-8.80013E1	-1.43051E-4	-8.80022E1	1.00136E-3	2.74181E-3	9.77039E-2	1.57855E1	-1.97551E1	-1.99426E1	1.5013E1	2.24012E-9	2.51709E-3	2.51709E-3	6.32858E-3	2.11534E-2
1.9E1	1.886E3	1.0E0	7.68E2	5.29E2	-7.12368E-2	-8.80015E1	-2.38419E-5	-8.80019E1	1.0252E-3	2.52724E-3	9.74894E-2	1.5723E1	-1.98464E1	-2.00639E1	1.4995E1	2.24207E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.12218E-2
2.0E1	1.5E1	0.0E0	8.08E2	5.58E2	-7.09279E-2	-8.80015E1	4.76837E-5	-8.80018E1	1.23978E-3	2.7895E-3	9.74655E-2	1.58321E1	-1.98635E1	-1.99431E1	1.50138E1	2.23818E-9	2.52209E-3	2.52209E-3	6.34588E-3	2.12403E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.11597E-2	-8.80015E1	-7.15256E-5	-8.80021E1	1.16825E-3	2.81334E-3	9.75132E-2	1.58203E1	-1.98355E1	-1.9909E1	1.50528E1	2.23107E-9	2.52276E-3	2.52276E-3	6.30202E-3	2.12051E-2
2.2E1	1.7E1	0.0E0	8.89E2	6.17E2	-7.16233E-2	-8.80012E1	-7.15256E-5	-8.80023E1	1.07288E-3	2.76566E-3	9.75847E-2	1.58017E1	-1.98362E1	-1.99408E1	1.50028E1	2.21401E-9	2.51248E-3	2.51248E-3	6.29067E-3	2.11454E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.12368E-2	-8.80017E1	-9.53674E-5	-8.80022E1	1.00136E-3	2.95639E-3	9.73463E-2	1.57861E1	-1.98176E1	-1.99846E1	1.49908E1	2.21401E-9	2.51662E-3	2.51662E-3	6.33486E-3	2.10931E-2