[Scan]
initial_time=2016-01-18T16:22:14
final_time=2016-01-18T16:22:33
ip_count=19
run=1024
dataset=1
scan=2
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.05415E-2
qbias_imon=-3.76499E-6
ql1_vset=
ql1_vmon=-8.80012E1
ql1_imon=-7.29203E-10
ql2_vset=
ql2_vmon=1.19209E-4
ql2_imon=1.22052E-9
ql3_vset=
ql3_vmon=-8.80024E1
ql3_imon=-2.45738E-9
ql4_vset=
ql4_vmon=8.10623E-4
ql4_imon=1.34442E-8
mult1=-9.49958E-9
mult2=-2.75654E-9
rf_tmon=-6.5312E-3
rf_agc=3.19817E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=2.95639E-3
ql5_imon=6.68311E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61326E0
bslens_imon=2.28541E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19604E1
lens5a_imon=1.99785E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1259E2
lens4a_imon=2.05201E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54223E1
cs_ef1b_imon=2.89584E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04664E2
lens23_imon=1.02016E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04477E1
cs_ea1_imon=2.52814E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00651E0
lens1_imon=1.74106E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64614E1
os_ef1alow_imon=2.97009E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03955E1
cs_ea2_imon=1.4827E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84442E1
cs_ef1a_imon=2.97045E-5
olens2_vset=0.0E0
olens2_vmon=1.12057E-3
olens2_imon=1.10758E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11778E1
os_restr1_imon=4.25202E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14567E1
os_ea1_imon=2.32518E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63479E1
os_ef1bup_imon=3.05766E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24008E0
cs_ionrep_imon=1.20656E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92066E2
cs_nozzle_imon=1.93586E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01743E1
cs_anode1_imon=3.00649E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9997E1
olens4_imon=4.2354E-9
tplens_vset=0.0E0
tplens_vmon=-1.71293E0
tplens_imon=-1.94802E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99179E1
iondef3_imon=8.98701E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98218E1
iondef2_imon=9.46287E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03339E2
lens6_imon=2.98223E-4
ql6_vset=1.0E-1
ql6_vmon=9.77278E-2
ql6_imon=9.07207E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23527E0
ionrepsh_imon=1.76389E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33796E1
lens5b_imon=2.17341E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74844E1
cs_ef2b_imon=3.1438E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.27193E0
os_ea2_imon=-7.86015E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06194E2
lens4b_imon=2.00713E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71414E1
cs_ef2a_imon=3.15605E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04315E0
os_ef2alow_imon=-2.35641E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.09437E-1
os_ef2bup_imon=-5.04858E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11538E1
os_restr2_imon=3.41121E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.231E2
cs_ionfoca_imon=6.30829E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01869E1
cs_anode2_imon=2.23812E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57927E1
iondef1_imon=5.17658E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5004E1
iondef4_imon=5.23714E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27949E1
olens3_imon=2.56128E-8
olens1_vset=0.0E0
olens1_vmon=1.78814E-3
olens1_imon=1.27982E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14696E0
cs_ionaccel_imon=-1.67526E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02165E2
cs_ionfocb_imon=1.4728E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56207E1
einzel_imon=7.68063E-6
window_vset=0.0E0
window_vmon=2.32359E-1
window_imon=-6.33718E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82836E2
mask1_imon=2.39048E-4
mask2_vset=0.0E0
mask2_vmon=-1.87113E1
mask2_imon=-6.51738E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.372E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93698E3
defgrida_imon=6.60774E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50092E3
multb_neg_imon=6.73752E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48878E0
defgridb_imon=6.067E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33181E1
os_fil1_imon=9.42901E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07269E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.67036E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3045E1
cs_fil1_imon=9.98023E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62258E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68409E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.76417E-2
os_fil2_imon=-2.74405E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.71285E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=7.31155E-2
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.39362E-1
cs_fil2_imon=-2.26353E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.23872E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22564E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.11509E-2
chamber_ion_pmon=2.23297E-9
chamber_cvt_pmon=2.52599E-3
foreline_cvt_pmon=2.52599E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.95332E-1
res40_imon=-2.72041E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.561E3	2.0E0	1.47E2	4.1E1	-7.201E-2	-8.80012E1	1.66893E-4	-8.80021E1	1.33514E-3	3.26633E-3	9.77993E-2	1.57902E1	-1.98237E1	-1.99228E1	1.49709E1	2.21401E-9	2.51225E-3	2.51225E-3	6.32936E-3	2.12587E-2
2.0E0	3.501E3	4.0E0	3.16E2	1.6E2	-7.17779E-2	-8.80012E1	1.19209E-4	-8.80021E1	1.54972E-3	3.05176E-3	9.75132E-2	1.58014E1	-1.98508E1	-1.99267E1	1.50521E1	2.21401E-9	2.52169E-3	2.52169E-3	6.32356E-3	2.11689E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.18554E-2	-8.80011E1	2.38419E-4	-8.80021E1	1.35899E-3	3.21865E-3	9.79662E-2	1.58115E1	-1.98629E1	-1.99349E1	1.50088E1	2.21401E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.12772E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.22418E-2	-8.80016E1	2.38419E-5	-8.80022E1	7.62939E-4	3.17097E-3	9.76801E-2	1.58077E1	-1.98098E1	-1.99161E1	1.50088E1	2.21401E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.10968E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.16233E-2	-8.80013E1	0.0E0	-8.80022E1	9.77516E-4	3.19481E-3	9.77993E-2	1.58125E1	-1.98212E1	-1.9945E1	1.50455E1	2.21401E-9	2.51225E-3	2.51225E-3	6.31288E-3	2.12034E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23964E-2	-8.80012E1	9.53674E-5	-8.80024E1	6.91414E-4	3.12328E-3	9.79662E-2	1.58128E1	-1.98388E1	-1.99286E1	1.50091E1	2.23818E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.11298E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.80012E1	1.90735E-4	-8.80026E1	9.77516E-4	3.24249E-3	9.79662E-2	1.58059E1	-1.9832E1	-1.99083E1	1.50034E1	2.23637E-9	2.52025E-3	2.52025E-3	6.31798E-3	2.11357E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80012E1	1.43051E-4	-8.80021E1	8.82149E-4	2.88486E-3	9.79662E-2	1.5796E1	-1.98162E1	-1.98921E1	1.50207E1	2.23818E-9	2.5199E-3	2.5199E-3	6.29645E-3	2.10931E-2
1.2E1	9.6E1	0.0E0	4.85E2	3.23E2	-7.13915E-2	-8.80012E1	3.33786E-4	-8.80023E1	6.4373E-4	3.0756E-3	9.77516E-2	1.5801E1	-1.9816E1	-1.99096E1	1.50222E1	2.23678E-9	2.51417E-3	2.51417E-3	6.33436E-3	2.10429E-2
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.11597E-2	-8.80012E1	1.19209E-4	-8.80023E1	9.05991E-4	2.67029E-3	9.79424E-2	1.58293E1	-1.9814E1	-1.99348E1	1.50196E1	2.23963E-9	2.51915E-3	2.51915E-3	6.31299E-3	2.11641E-2
1.4E1	1.12E2	0.0E0	5.66E2	3.82E2	-7.10051E-2	-8.80012E1	2.14577E-4	-8.80023E1	8.82149E-4	3.09944E-3	9.77278E-2	1.57713E1	-1.98269E1	-1.99396E1	1.503E1	2.23623E-9	2.52428E-3	2.52428E-3	6.30192E-3	2.11482E-2
1.5E1	7.4E1	0.0E0	6.06E2	4.11E2	-7.14689E-2	-8.80012E1	3.57628E-4	-8.80023E1	8.58307E-4	2.98023E-3	9.76801E-2	1.57902E1	-1.98552E1	-1.99184E1	1.50088E1	2.24155E-9	2.52276E-3	2.52276E-3	6.33977E-3	2.11328E-2
1.6E1	3.54E2	0.0E0	6.47E2	4.41E2	-7.18554E-2	-8.80011E1	1.90735E-4	-8.80021E1	1.0252E-3	3.24249E-3	9.77755E-2	1.57945E1	-1.98434E1	-1.98891E1	1.50154E1	2.23964E-9	2.52923E-3	2.52923E-3	6.29128E-3	2.11509E-2
1.7E1	9.12E2	0.0E0	6.87E2	4.7E2	-7.10051E-2	-8.80012E1	2.38419E-5	-8.80023E1	8.58307E-4	3.0756E-3	9.76324E-2	1.58846E1	-1.99798E1	-1.98302E1	1.50112E1	2.24109E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.11666E-2
1.8E1	3.678E3	6.0E0	7.27E2	5.0E2	-7.15461E-2	-8.80013E1	1.19209E-4	-8.80024E1	8.58307E-4	2.55108E-3	9.7537E-2	1.57927E1	-1.98476E1	-1.99155E1	1.50497E1	2.22848E-9	2.5188E-3	2.5188E-3	6.34037E-3	2.12034E-2
1.9E1	1.889E3	2.0E0	7.68E2	5.29E2	-7.13143E-2	-8.80014E1	2.14577E-4	-8.80023E1	7.86781E-4	2.7895E-3	9.77278E-2	1.58149E1	-1.98194E1	-1.9927E1	1.50659E1	2.23915E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.11666E-2
2.0E1	2.1E1	0.0E0	8.08E2	5.58E2	-7.21643E-2	-8.80012E1	3.8147E-4	-8.80021E1	1.12057E-3	2.81334E-3	9.7537E-2	1.58214E1	-1.98611E1	-1.99157E1	1.50234E1	2.23429E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.11298E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.25507E-2	-8.80012E1	4.05312E-4	-8.80021E1	1.12057E-3	2.69413E-3	9.77755E-2	1.58384E1	-1.98379E1	-1.99196E1	1.5011E1	2.23782E-9	2.51679E-3	2.51679E-3	6.323E-3	2.1069E-2
2.2E1	1.6E1	0.0E0	8.89E2	6.17E2	-7.15461E-2	-8.80015E1	2.86102E-4	-8.80023E1	1.0252E-3	3.02792E-3	9.77039E-2	1.57837E1	-1.98069E1	-1.99478E1	1.5022E1	2.22101E-9	2.51611E-3	2.51611E-3	6.3074E-3	2.11425E-2
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.05415E-2	-8.80012E1	1.19209E-4	-8.80024E1	8.10623E-4	2.95639E-3	9.77278E-2	1.57927E1	-1.98218E1	-1.99179E1	1.5004E1	2.23297E-9	2.52599E-3	2.52599E-3	6.33436E-3	2.11509E-2