[Scan]
initial_time=2016-01-18T16:22:40
final_time=2016-01-18T16:23:00
ip_count=19
run=1024
dataset=1
scan=3
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17007E-2
qbias_imon=-3.74695E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-7.23851E-10
ql2_vset=
ql2_vmon=2.38419E-4
ql2_imon=1.24401E-9
ql3_vset=
ql3_vmon=-8.80018E1
ql3_imon=-2.47586E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=1.34299E-8
mult1=-9.28285E-9
mult2=-2.77051E-9
rf_tmon=-4.25407E-3
rf_agc=3.27988E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.14713E-3
ql5_imon=6.73497E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65953E0
bslens_imon=2.36471E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19935E1
lens5a_imon=2.01263E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12578E2
lens4a_imon=2.04895E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53905E1
cs_ef1b_imon=2.86954E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04674E2
lens23_imon=1.02247E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04417E1
cs_ea1_imon=2.51156E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96385E0
lens1_imon=1.42743E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64795E1
os_ef1alow_imon=2.98594E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03516E1
cs_ea2_imon=1.49172E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8455E1
cs_ef1a_imon=2.95747E-5
olens2_vset=0.0E0
olens2_vmon=1.3113E-3
olens2_imon=1.10856E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11568E1
os_restr1_imon=4.25562E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14915E1
os_ea1_imon=2.32518E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63695E1
os_ef1bup_imon=3.08361E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23227E0
cs_ionrep_imon=1.16871E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92091E2
cs_nozzle_imon=1.93463E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01893E1
cs_anode1_imon=2.9964E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99968E1
olens4_imon=4.26228E-9
tplens_vset=0.0E0
tplens_vmon=-1.72495E0
tplens_imon=-2.09222E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99438E1
iondef3_imon=8.86445E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98266E1
iondef2_imon=9.35832E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03329E2
lens6_imon=2.98104E-4
ql6_vset=1.0E-1
ql6_vmon=9.7537E-2
ql6_imon=9.32264E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.21725E0
ionrepsh_imon=1.77903E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33766E1
lens5b_imon=2.16909E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74591E1
cs_ef2b_imon=3.1247E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.28574E0
os_ea2_imon=-7.17521E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06219E2
lens4b_imon=2.00807E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71444E1
cs_ef2a_imon=3.15353E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04495E0
os_ef2alow_imon=-2.51499E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.23252E-1
os_ef2bup_imon=-5.35852E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11262E1
os_restr2_imon=3.42527E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.231E2
cs_ionfoca_imon=6.3E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01767E1
cs_anode2_imon=2.23668E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58059E1
iondef1_imon=5.17297E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50226E1
iondef4_imon=5.35247E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27949E1
olens3_imon=2.56841E-8
olens1_vset=0.0E0
olens1_vmon=1.0252E-3
olens1_imon=1.27854E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11272E0
cs_ionaccel_imon=-1.89871E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02172E2
cs_ionfocb_imon=1.4737E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56435E1
einzel_imon=7.68424E-6
window_vset=0.0E0
window_vmon=2.76808E-1
window_imon=-7.77877E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82855E2
mask1_imon=2.39044E-4
mask2_vset=0.0E0
mask2_vmon=-1.87545E1
mask2_imon=-6.4453E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92626E3
multa_neg_imon=7.46933E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.4311E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=6.97185E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.26021E0
defgridb_imon=6.04537E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33185E1
os_fil1_imon=9.44931E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0662E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.67264E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30446E1
cs_fil1_imon=9.9824E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6227E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68484E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.88025E-2
os_fil2_imon=-2.68399E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.7549E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=6.67995E-2
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38197E-1
cs_fil2_imon=-2.86419E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.63806E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22662E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.10707E-2
chamber_ion_pmon=2.22088E-9
chamber_cvt_pmon=2.51359E-3
foreline_cvt_pmon=2.51359E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.94731E-1
res40_imon=-2.5222E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.639E3	2.0E0	1.47E2	4.1E1	-7.00776E-2	-8.80016E1	0.0E0	-8.80023E1	7.15256E-4	2.7895E-3	9.77278E-2	1.58151E1	-1.9815E1	-1.99014E1	1.50091E1	2.23526E-9	2.52538E-3	2.52538E-3	6.31288E-3	2.11115E-2
2.0E0	3.423E3	2.0E0	3.16E2	1.6E2	-7.09279E-2	-8.80016E1	2.38419E-4	-8.80023E1	1.90735E-4	3.05176E-3	9.77278E-2	1.57885E1	-1.9811E1	-1.99114E1	1.50256E1	2.24106E-9	2.51498E-3	2.51498E-3	6.29684E-3	2.11357E-2
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.09279E-2	-8.80018E1	5.24521E-4	-8.80023E1	7.62939E-4	3.24249E-3	9.73463E-2	1.58392E1	-1.98175E1	-1.99119E1	1.50352E1	2.23764E-9	2.52139E-3	2.52139E-3	6.32978E-3	2.11829E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.11597E-2	-8.80018E1	4.05312E-4	-8.80026E1	9.77516E-4	3.14713E-3	9.76086E-2	1.57983E1	-1.98324E1	-1.99384E1	1.50271E1	2.23869E-9	2.52169E-3	2.52169E-3	6.32356E-3	2.12051E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.17007E-2	-8.80018E1	-4.76837E-5	-8.80027E1	8.34465E-4	2.90871E-3	9.75132E-2	1.58062E1	-1.98447E1	-1.99249E1	1.504E1	2.23583E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.11328E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.80018E1	1.90735E-4	-8.80023E1	5.24521E-4	2.86102E-3	9.76563E-2	1.58156E1	-1.9857E1	-1.99242E1	1.5004E1	2.24499E-9	2.52538E-3	2.52538E-3	6.3074E-3	2.10748E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80015E1	7.15256E-5	-8.80022E1	5.48363E-4	2.88486E-3	9.7847E-2	1.58389E1	-1.98278E1	-1.99065E1	1.50082E1	2.23773E-9	2.52276E-3	2.52276E-3	6.32896E-3	2.10608E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.201E-2	-8.80014E1	2.38419E-4	-8.80023E1	8.34465E-4	2.86102E-3	9.77039E-2	1.58155E1	-1.98206E1	-1.9927E1	1.50226E1	2.24207E-9	2.52538E-3	2.52538E-3	6.32386E-3	2.11482E-2
1.2E1	1.0E2	0.0E0	4.85E2	3.23E2	-7.16233E-2	-8.80014E1	1.66893E-4	-8.80019E1	7.39098E-4	2.98023E-3	9.76324E-2	1.58311E1	-1.9841E1	-1.99047E1	1.50082E1	2.23526E-9	2.52647E-3	2.52647E-3	6.30192E-3	2.12403E-2
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80013E1	5.48363E-4	-8.8002E1	8.82149E-4	2.64645E-3	9.74178E-2	1.57879E1	-1.98338E1	-1.99155E1	1.50479E1	2.24304E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.11666E-2
1.4E1	1.25E2	0.0E0	5.66E2	3.82E2	-7.201E-2	-8.80013E1	1.19209E-4	-8.80019E1	1.00136E-3	2.86102E-3	9.76801E-2	1.58101E1	-1.98398E1	-1.99246E1	1.50148E1	2.23138E-9	2.52099E-3	2.52099E-3	6.30192E-3	2.12587E-2
1.5E1	8.9E1	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80016E1	1.66893E-4	-8.80021E1	1.00136E-3	2.81334E-3	9.75609E-2	1.5812E1	-1.98145E1	-1.99219E1	1.5008E1	2.22364E-9	2.5199E-3	2.5199E-3	6.34037E-3	2.1185E-2
1.6E1	3.48E2	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80013E1	7.15256E-5	-8.80024E1	1.0252E-3	2.93255E-3	9.7847E-2	1.57949E1	-1.98375E1	-1.99331E1	1.4992E1	2.21968E-9	2.51417E-3	2.51417E-3	6.3074E-3	2.10249E-2
1.7E1	8.66E2	0.0E0	6.87E2	4.7E2	-7.21643E-2	-8.80013E1	-4.76837E-5	-8.80023E1	6.67572E-4	3.48091E-3	9.79424E-2	1.57967E1	-1.98192E1	-1.99425E1	1.50167E1	2.23487E-9	2.52599E-3	2.52599E-3	6.32896E-3	2.11689E-2
1.8E1	3.641E3	5.0E0	7.27E2	5.0E2	-7.17779E-2	-8.80011E1	1.90735E-4	-8.80023E1	7.62939E-4	3.05176E-3	9.80139E-2	1.58498E1	-1.98771E1	-1.9933E1	1.50076E1	2.22157E-9	2.5131E-3	2.5131E-3	6.34518E-3	2.11148E-2
1.9E1	1.85E3	1.0E0	7.68E2	5.29E2	-7.23964E-2	-8.80012E1	2.38419E-4	-8.80023E1	6.67572E-4	3.09944E-3	9.80377E-2	1.58155E1	-1.98386E1	-1.9942E1	1.49836E1	2.24109E-9	2.5199E-3	2.5199E-3	6.29645E-3	2.11115E-2
2.0E1	2.3E1	0.0E0	8.08E2	5.58E2	-7.18554E-2	-8.80015E1	1.66893E-4	-8.80023E1	7.62939E-4	2.93255E-3	9.78231E-2	1.58026E1	-1.98128E1	-1.98983E1	1.50298E1	2.22848E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.10748E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80012E1	2.6226E-4	-8.80023E1	9.77516E-4	3.09944E-3	9.78708E-2	1.58174E1	-1.984E1	-1.99612E1	1.50526E1	2.21401E-9	2.51525E-3	2.51525E-3	6.31278E-3	2.12594E-2
2.2E1	1.8E1	0.0E0	8.89E2	6.17E2	-7.20871E-2	-8.80015E1	9.53674E-5	-8.80022E1	6.19888E-4	3.05176E-3	9.79662E-2	1.58165E1	-1.98435E1	-1.98912E1	1.49966E1	2.21401E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.10788E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.17007E-2	-8.80013E1	2.38419E-4	-8.80018E1	3.33786E-4	3.14713E-3	9.7537E-2	1.58059E1	-1.98266E1	-1.99438E1	1.50226E1	2.22088E-9	2.51359E-3	2.51359E-3	6.3074E-3	2.10707E-2