[Scan]
initial_time=2016-01-18T16:23:34
final_time=2016-01-18T16:23:53
ip_count=19
run=1024
dataset=1
scan=5
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.80547E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-7.3477E-10
ql2_vset=
ql2_vmon=1.19209E-4
ql2_imon=1.23767E-9
ql3_vset=
ql3_vmon=-8.8002E1
ql3_imon=-2.48803E-9
ql4_vset=
ql4_vmon=9.53674E-4
ql4_imon=1.34447E-8
mult1=-9.22746E-9
mult2=-2.63311E-9
rf_tmon=-5.51231E-3
rf_agc=3.3079E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.26633E-3
ql5_imon=6.72066E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64369E0
bslens_imon=2.69457E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19892E1
lens5a_imon=1.99956E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12574E2
lens4a_imon=2.04905E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53997E1
cs_ef1b_imon=2.89112E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04687E2
lens23_imon=1.02048E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0431E1
cs_ea1_imon=2.51509E-5
lens1_vset=-2.7E0
lens1_vmon=-2.93053E0
lens1_imon=1.60304E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6502E1
os_ef1alow_imon=2.97626E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03696E1
cs_ea2_imon=1.47466E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84545E1
cs_ef1a_imon=2.95854E-5
olens2_vset=0.0E0
olens2_vmon=1.19209E-3
olens2_imon=1.1103E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1154E1
os_restr1_imon=4.24647E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14784E1
os_ea1_imon=2.33988E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63687E1
os_ef1bup_imon=3.08191E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20517E0
cs_ionrep_imon=1.19204E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92091E2
cs_nozzle_imon=1.93462E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01896E1
cs_anode1_imon=2.98947E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99972E1
olens4_imon=4.20564E-9
tplens_vset=0.0E0
tplens_vmon=-1.72023E0
tplens_imon=-1.48968E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99366E1
iondef3_imon=8.86831E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98133E1
iondef2_imon=9.16379E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03313E2
lens6_imon=2.9813E-4
ql6_vset=1.0E-1
ql6_vmon=9.75132E-2
ql6_imon=9.35912E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23819E0
ionrepsh_imon=1.79203E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34057E1
lens5b_imon=2.18867E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74356E1
cs_ef2b_imon=3.12744E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.2857E0
os_ea2_imon=-8.30304E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06233E2
lens4b_imon=2.00633E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71379E1
cs_ef2a_imon=3.1754E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0424E0
os_ef2alow_imon=-2.54678E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.40092E-1
os_ef2bup_imon=-5.23315E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11459E1
os_restr2_imon=3.435E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23098E2
cs_ionfoca_imon=6.29824E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01838E1
cs_anode2_imon=2.23465E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58221E1
iondef1_imon=5.05491E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50445E1
iondef4_imon=5.26906E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27948E1
olens3_imon=2.56538E-8
olens1_vset=0.0E0
olens1_vmon=1.52588E-3
olens1_imon=1.27728E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.22571E0
cs_ionaccel_imon=-1.82045E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0217E2
cs_ionfocb_imon=1.47264E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56249E1
einzel_imon=7.62876E-6
window_vset=0.0E0
window_vmon=2.43171E-1
window_imon=-8.1958E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82833E2
mask1_imon=2.39098E-4
mask2_vset=0.0E0
mask2_vmon=-1.87439E1
mask2_imon=-4.61629E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.38049E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.49754E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=7.30749E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3166E0
defgridb_imon=5.92744E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33184E1
os_fil1_imon=9.46399E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06912E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.67234E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30434E1
cs_fil1_imon=9.9942E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62343E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68558E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.82221E-2
os_fil2_imon=-2.76186E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.81389E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=5.76385E-2
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36768E-1
cs_fil2_imon=-2.2174E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.32305E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22673E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=2.10931E-2
chamber_ion_pmon=2.23526E-9
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.6384E-1
res40_imon=-2.5016E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.57E3	1.0E0	1.47E2	4.1E1	-7.08504E-2	-8.80014E1	4.05312E-4	-8.80022E1	1.07288E-3	2.93255E-3	9.75132E-2	1.5841E1	-1.98257E1	-1.98953E1	1.50242E1	2.23637E-9	2.51919E-3	2.51919E-3	6.29684E-3	2.11003E-2
2.0E0	3.413E3	3.0E0	3.16E2	1.6E2	-7.15461E-2	-8.80014E1	2.14577E-4	-8.80021E1	1.21593E-3	3.14713E-3	9.74894E-2	1.58144E1	-1.98116E1	-1.99272E1	1.50094E1	2.24155E-9	2.51525E-3	2.51525E-3	6.32896E-3	2.1187E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.20871E-2	-8.80015E1	-2.38419E-5	-8.80021E1	1.16825E-3	3.17097E-3	9.72986E-2	1.58185E1	-1.98375E1	-1.99532E1	1.50126E1	2.24155E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.11509E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.14689E-2	-8.80014E1	2.38419E-5	-8.80023E1	1.19209E-3	3.02792E-3	9.74417E-2	1.58321E1	-1.98234E1	-1.99331E1	1.50184E1	2.23678E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.12232E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.15461E-2	-8.80015E1	-7.15256E-5	-8.80022E1	1.3113E-3	3.02792E-3	9.76324E-2	1.58056E1	-1.98464E1	-1.99331E1	1.5012E1	2.23869E-9	2.5131E-3	2.5131E-3	6.32356E-3	2.10788E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.17007E-2	-8.80014E1	-2.14577E-4	-8.80024E1	8.34465E-4	3.05176E-3	9.77516E-2	1.58239E1	-1.98398E1	-1.99612E1	1.50226E1	2.23869E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.11148E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.19325E-2	-8.80013E1	-2.6226E-4	-8.80022E1	8.82149E-4	3.19481E-3	9.77993E-2	1.58323E1	-1.98236E1	-1.99137E1	1.50473E1	2.23678E-9	2.52923E-3	2.52923E-3	6.31817E-3	2.11148E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80013E1	-2.14577E-4	-8.80022E1	8.58307E-4	3.09944E-3	9.7847E-2	1.58073E1	-1.98222E1	-1.99189E1	1.50412E1	2.23915E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.12218E-2
1.2E1	7.6E1	0.0E0	4.85E2	3.23E2	-7.17007E-2	-8.80011E1	-9.53674E-5	-8.8002E1	1.07288E-3	3.43323E-3	9.79424E-2	1.57873E1	-1.98194E1	-1.98873E1	1.49968E1	2.23332E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.11666E-2
1.3E1	1.3E1	0.0E0	5.25E2	3.53E2	-7.10825E-2	-8.80012E1	-9.53674E-5	-8.8002E1	5.48363E-4	3.48091E-3	9.77516E-2	1.58353E1	-1.9838E1	-1.99534E1	1.50431E1	2.23818E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.12034E-2
1.4E1	1.38E2	1.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80013E1	1.90735E-4	-8.80023E1	6.91414E-4	3.33786E-3	9.76563E-2	1.57957E1	-1.98272E1	-1.99474E1	1.50142E1	2.24442E-9	2.52061E-3	2.52061E-3	6.29128E-3	2.12051E-2
1.5E1	6.5E1	0.0E0	6.06E2	4.11E2	-7.30146E-2	-8.80017E1	1.66893E-4	-8.80023E1	7.62939E-4	3.24249E-3	9.79185E-2	1.58336E1	-1.98342E1	-1.991E1	1.50172E1	2.24304E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.11115E-2
1.6E1	3.4E2	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80014E1	2.38419E-4	-8.80021E1	1.00136E-3	3.19481E-3	9.77993E-2	1.58125E1	-1.98627E1	-1.99318E1	1.50406E1	2.23678E-9	2.51417E-3	2.51417E-3	6.30202E-3	2.10968E-2
1.7E1	8.75E2	0.0E0	6.87E2	4.7E2	-7.23964E-2	-8.80017E1	2.14577E-4	-8.80023E1	1.19209E-3	3.0756E-3	9.77039E-2	1.58041E1	-1.98416E1	-1.98975E1	1.50485E1	2.23818E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.11298E-2
1.8E1	3.637E3	1.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80017E1	2.38419E-4	-8.80021E1	1.21593E-3	3.12328E-3	9.78947E-2	1.58131E1	-1.98074E1	-1.98789E1	1.50214E1	2.23818E-9	2.5188E-3	2.5188E-3	6.33486E-3	2.10931E-2
1.9E1	1.846E3	1.0E0	7.68E2	5.29E2	-7.32464E-2	-8.80019E1	2.14577E-4	-8.80023E1	1.33514E-3	3.31402E-3	9.77278E-2	1.58014E1	-1.98889E1	-1.99101E1	1.50184E1	2.2406E-9	2.51417E-3	2.51417E-3	6.31278E-3	2.10429E-2
2.0E1	1.5E1	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.80015E1	3.33786E-4	-8.80023E1	9.29832E-4	3.43323E-3	9.74178E-2	1.58449E1	-1.98549E1	-1.99342E1	1.50052E1	2.2372E-9	2.5199E-3	2.5199E-3	6.33486E-3	2.10382E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.30146E-2	-8.80015E1	5.24521E-4	-8.80024E1	9.29832E-4	3.05176E-3	9.76324E-2	1.58419E1	-1.98062E1	-1.996E1	1.50244E1	2.23915E-9	2.51334E-3	2.51334E-3	6.29645E-3	2.12034E-2
2.2E1	1.5E1	0.0E0	8.89E2	6.17E2	-7.30146E-2	-8.80018E1	0.0E0	-8.80023E1	1.23978E-3	3.40939E-3	9.74655E-2	1.58292E1	-1.98316E1	-1.99278E1	1.50226E1	2.23392E-9	2.52169E-3	2.52169E-3	6.30202E-3	2.12775E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80015E1	1.19209E-4	-8.8002E1	9.53674E-4	3.26633E-3	9.75132E-2	1.58221E1	-1.98133E1	-1.99366E1	1.50445E1	2.23526E-9	2.5199E-3	2.5199E-3	6.34037E-3	2.10931E-2