[Scan]
initial_time=2016-01-18T16:24:00
final_time=2016-01-18T16:24:20
ip_count=19
run=1024
dataset=1
scan=6
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.13915E-2
qbias_imon=-3.83485E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-7.1224E-10
ql2_vset=
ql2_vmon=4.29153E-4
ql2_imon=1.20348E-9
ql3_vset=
ql3_vmon=-8.80021E1
ql3_imon=-2.52162E-9
ql4_vset=
ql4_vmon=9.77516E-4
ql4_imon=1.34703E-8
mult1=-1.00579E-8
mult2=-2.77933E-9
rf_tmon=-3.77531E-3
rf_agc=3.40767E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.14713E-3
ql5_imon=6.85704E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65112E0
bslens_imon=2.40437E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19941E1
lens5a_imon=1.99064E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12575E2
lens4a_imon=2.04949E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53935E1
cs_ef1b_imon=2.87999E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0464E2
lens23_imon=1.02272E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04387E1
cs_ea1_imon=2.50939E-5
lens1_vset=-2.7E0
lens1_vmon=-2.9969E0
lens1_imon=1.63651E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64656E1
os_ef1alow_imon=2.97117E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03342E1
cs_ea2_imon=1.48559E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84478E1
cs_ef1a_imon=2.95423E-5
olens2_vset=0.0E0
olens2_vmon=5.96046E-4
olens2_imon=1.108E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11514E1
os_restr1_imon=4.25166E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14939E1
os_ea1_imon=2.31076E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63833E1
os_ef1bup_imon=3.07604E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23227E0
cs_ionrep_imon=1.19359E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92059E2
cs_nozzle_imon=1.93514E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01833E1
cs_anode1_imon=2.99171E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99972E1
olens4_imon=4.2241E-9
tplens_vset=0.0E0
tplens_vmon=-1.70873E0
tplens_imon=-4.07495E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99527E1
iondef3_imon=8.88247E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.9807E1
iondef2_imon=9.3403E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03312E2
lens6_imon=2.98375E-4
ql6_vset=1.0E-1
ql6_vmon=9.75847E-2
ql6_imon=9.45461E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2509E0
ionrepsh_imon=1.76497E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33922E1
lens5b_imon=2.17377E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74567E1
cs_ef2b_imon=3.12938E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.28454E0
os_ea2_imon=-5.94952E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06242E2
lens4b_imon=2.00572E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71318E1
cs_ef2a_imon=3.17335E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02813E0
os_ef2alow_imon=-2.56184E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.16044E-1
os_ef2bup_imon=-5.38014E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11262E1
os_restr2_imon=3.42094E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.28703E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01749E1
cs_anode2_imon=2.23272E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57759E1
iondef1_imon=5.31357E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50369E1
iondef4_imon=5.40653E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27948E1
olens3_imon=2.56533E-8
olens1_vset=0.0E0
olens1_vmon=1.62125E-3
olens1_imon=1.285E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.28932E0
cs_ionaccel_imon=-1.71491E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02164E2
cs_ionfocb_imon=1.47273E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56339E1
einzel_imon=7.69865E-6
window_vset=0.0E0
window_vmon=2.67197E-1
window_imon=-7.81481E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82832E2
mask1_imon=2.39106E-4
mask2_vset=0.0E0
mask2_vmon=-1.87365E1
mask2_imon=-7.05797E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92624E3
multa_neg_imon=7.48375E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93737E3
defgrida_imon=7.04755E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.05836E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.27224E0
defgridb_imon=6.00211E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33172E1
os_fil1_imon=9.44817E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06704E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66865E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30447E1
cs_fil1_imon=9.98876E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6236E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68567E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.81576E-2
os_fil2_imon=-2.70801E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.78493E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=8.70365E-2
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.39492E-1
cs_fil2_imon=-2.40768E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.59912E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22608E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31299E-3
inlet_lpb_pmon=2.11454E-2
chamber_ion_pmon=2.24161E-9
chamber_cvt_pmon=2.51581E-3
foreline_cvt_pmon=2.51581E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.73708E-1
res40_imon=-2.63752E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.592E3	0.0E0	1.47E2	4.1E1	-7.21643E-2	-8.80017E1	-3.09944E-4	-8.80019E1	9.53674E-4	3.02792E-3	9.7847E-2	1.58351E1	-1.98487E1	-1.99301E1	1.50491E1	2.21401E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.11115E-2
2.0E0	3.5E3	3.0E0	3.16E2	1.6E2	-7.21643E-2	-8.80017E1	7.15256E-5	-8.80022E1	7.86781E-4	3.0756E-3	9.76563E-2	1.58014E1	-1.98453E1	-1.99334E1	1.50088E1	2.22726E-9	2.52707E-3	2.52707E-3	6.31817E-3	2.11328E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80017E1	-4.76837E-5	-8.80019E1	9.53674E-4	2.90871E-3	9.76563E-2	1.57955E1	-1.98181E1	-1.99425E1	1.50328E1	2.2426E-9	2.52473E-3	2.52473E-3	6.30182E-3	2.1108E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.19325E-2	-8.80019E1	2.38419E-5	-8.80023E1	1.07288E-3	3.02792E-3	9.75132E-2	1.57997E1	-1.98251E1	-1.99414E1	1.50254E1	2.23487E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.12232E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80018E1	-1.19209E-4	-8.80017E1	9.29832E-4	2.86102E-3	9.76563E-2	1.58103E1	-1.98387E1	-1.9949E1	1.5013E1	2.24442E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.12051E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.201E-2	-8.80018E1	-2.86102E-4	-8.80018E1	9.53674E-4	3.02792E-3	9.77755E-2	1.57909E1	-1.98248E1	-1.9933E1	1.50238E1	2.23964E-9	2.5131E-3	2.5131E-3	6.28056E-3	2.10788E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.80018E1	-2.38419E-5	-8.80019E1	7.62939E-4	3.21865E-3	9.76324E-2	1.5782E1	-1.98806E1	-1.9906E1	1.50358E1	2.23915E-9	2.52099E-3	2.52099E-3	6.34037E-3	2.11666E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80018E1	0.0E0	-8.80022E1	6.67572E-4	3.14713E-3	9.78231E-2	1.5805E1	-1.98018E1	-1.99365E1	1.50292E1	2.23678E-9	2.52169E-3	2.52169E-3	6.30202E-3	2.11509E-2
1.2E1	9.9E1	0.0E0	4.85E2	3.23E2	-7.201E-2	-8.8002E1	2.38419E-5	-8.80019E1	6.67572E-4	3.40939E-3	9.76563E-2	1.57342E1	-1.98694E1	-1.99178E1	1.50346E1	2.23332E-9	2.51771E-3	2.51771E-3	6.28552E-3	2.11115E-2
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.10825E-2	-8.80018E1	-1.43051E-4	-8.80018E1	6.4373E-4	3.29018E-3	9.75132E-2	1.58095E1	-1.98416E1	-1.9951E1	1.50352E1	2.24109E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.10748E-2
1.4E1	1.25E2	0.0E0	5.66E2	3.82E2	-7.10825E-2	-8.80015E1	2.38419E-5	-8.80019E1	8.10623E-4	3.45707E-3	9.77516E-2	1.58125E1	-1.98356E1	-1.98789E1	1.4998E1	2.24499E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.11115E-2
1.5E1	7.1E1	1.0E0	6.06E2	4.11E2	-7.14689E-2	-8.80016E1	9.53674E-5	-8.80022E1	7.15256E-4	3.05176E-3	9.77039E-2	1.57933E1	-1.98693E1	-1.99246E1	1.50479E1	2.23487E-9	2.51417E-3	2.51417E-3	6.32356E-3	2.11148E-2
1.6E1	3.82E2	0.0E0	6.47E2	4.41E2	-7.11597E-2	-8.80017E1	-9.53674E-5	-8.80022E1	9.77516E-4	3.26633E-3	9.7537E-2	1.58132E1	-1.98452E1	-1.99184E1	1.50364E1	2.23963E-9	2.52139E-3	2.52139E-3	6.3074E-3	2.1108E-2
1.7E1	8.68E2	1.0E0	6.87E2	4.7E2	-7.20871E-2	-8.80019E1	1.19209E-4	-8.80022E1	6.67572E-4	2.95639E-3	9.76324E-2	1.57999E1	-1.98308E1	-1.9939E1	1.49998E1	2.23487E-9	2.51632E-3	2.51632E-3	6.28056E-3	2.10968E-2
1.8E1	3.682E3	1.0E0	7.27E2	5.0E2	-7.18554E-2	-8.80014E1	2.14577E-4	-8.80021E1	6.91414E-4	3.3617E-3	9.77516E-2	1.58155E1	-1.98308E1	-1.9924E1	1.50244E1	2.23138E-9	2.51443E-3	2.51443E-3	6.34037E-3	2.10748E-2
1.9E1	1.805E3	0.0E0	7.68E2	5.29E2	-7.15461E-2	-8.80018E1	1.43051E-4	-8.80021E1	5.48363E-4	3.19481E-3	9.74417E-2	1.58293E1	-1.98116E1	-1.99101E1	1.5001E1	2.24012E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.10565E-2
2.0E1	2.1E1	0.0E0	8.08E2	5.58E2	-7.10825E-2	-8.80013E1	1.90735E-4	-8.80022E1	5.72205E-4	3.09944E-3	9.74894E-2	1.57933E1	-1.98266E1	-1.99252E1	1.50521E1	2.23915E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.11115E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.12368E-2	-8.80015E1	9.53674E-5	-8.80021E1	7.15256E-4	3.19481E-3	9.76801E-2	1.58116E1	-1.98359E1	-1.99564E1	1.50068E1	2.24207E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.12218E-2
2.2E1	1.2E1	0.0E0	8.89E2	6.17E2	-7.08504E-2	-8.8002E1	4.29153E-4	-8.80023E1	1.07288E-3	3.0756E-3	9.74894E-2	1.58399E1	-1.98618E1	-1.99292E1	1.50172E1	2.23356E-9	2.51709E-3	2.51709E-3	6.32328E-3	2.11712E-2
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.13915E-2	-8.8002E1	4.29153E-4	-8.80021E1	9.77516E-4	3.14713E-3	9.75847E-2	1.57759E1	-1.9807E1	-1.99527E1	1.50369E1	2.24161E-9	2.51581E-3	2.51581E-3	6.31299E-3	2.11454E-2