[Scan]
initial_time=2016-01-18T16:24:53
final_time=2016-01-18T16:25:13
ip_count=19
run=1024
dataset=1
scan=8
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.36328E-2
qbias_imon=-3.81436E-6
ql1_vset=
ql1_vmon=-8.80011E1
ql1_imon=-6.79111E-10
ql2_vset=
ql2_vmon=-7.15256E-5
ql2_imon=1.21685E-9
ql3_vset=
ql3_vmon=-8.80021E1
ql3_imon=-2.47443E-9
ql4_vset=
ql4_vmon=9.53674E-4
ql4_imon=1.3486E-8
mult1=-9.67668E-9
mult2=-2.67426E-9
rf_tmon=-5.96063E-3
rf_agc=3.12798E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.21865E-3
ql5_imon=6.6824E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66013E0
bslens_imon=2.26017E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19809E1
lens5a_imon=2.01876E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1256E2
lens4a_imon=2.04934E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53736E1
cs_ef1b_imon=2.86269E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04641E2
lens23_imon=1.02222E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04694E1
cs_ea1_imon=2.53679E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97947E0
lens1_imon=1.62209E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6471E1
os_ef1alow_imon=2.9791E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03846E1
cs_ea2_imon=1.48919E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8455E1
cs_ef1a_imon=2.96252E-5
olens2_vset=0.0E0
olens2_vmon=1.07288E-3
olens2_imon=1.1103E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1134E1
os_restr1_imon=4.24697E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14807E1
os_ea1_imon=2.31148E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63677E1
os_ef1bup_imon=3.08974E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23828E0
cs_ionrep_imon=1.20981E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92091E2
cs_nozzle_imon=1.93445E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01995E1
cs_anode1_imon=2.99531E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99971E1
olens4_imon=4.22754E-9
tplens_vset=0.0E0
tplens_vmon=-1.73817E0
tplens_imon=-2.99346E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99573E1
iondef3_imon=8.93654E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98322E1
iondef2_imon=9.4124E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03318E2
lens6_imon=2.98303E-4
ql6_vset=1.0E-1
ql6_vmon=9.76563E-2
ql6_imon=9.59468E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23167E0
ionrepsh_imon=1.78228E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34084E1
lens5b_imon=2.17485E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74699E1
cs_ef2b_imon=3.1265E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.26892E0
os_ea2_imon=-6.85076E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0622E2
lens4b_imon=2.00605E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71294E1
cs_ef2a_imon=3.15028E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05156E0
os_ef2alow_imon=-2.58346E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.61695E-1
os_ef2bup_imon=-5.23238E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11346E1
os_restr2_imon=3.43248E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23106E2
cs_ionfoca_imon=6.30577E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01713E1
cs_anode2_imon=2.24569E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57967E1
iondef1_imon=5.14053E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50286E1
iondef4_imon=5.2876E-6
olens3_vset=-1.28E1
olens3_vmon=-1.2795E1
olens3_imon=2.56571E-8
olens1_vset=0.0E0
olens1_vmon=1.23978E-3
olens1_imon=1.2833E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12954E0
cs_ionaccel_imon=-1.85186E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02179E2
cs_ionfocb_imon=1.47406E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56591E1
einzel_imon=7.77434E-6
window_vset=0.0E0
window_vmon=2.63593E-1
window_imon=-9.68887E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82823E2
mask1_imon=2.39008E-4
mask2_vset=0.0E0
mask2_vmon=-1.87641E1
mask2_imon=-5.79658E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92606E3
multa_neg_imon=7.62074E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.5789E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50164E3
multb_neg_imon=6.53925E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33841E0
defgridb_imon=6.22201E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33172E1
os_fil1_imon=9.43922E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06164E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6715E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30458E1
cs_fil1_imon=9.98047E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61501E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6847E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.97053E-2
os_fil2_imon=-2.75006E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83899E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=8.13649E-2
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38197E-1
cs_fil2_imon=-2.65996E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.09747E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22669E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30182E-3
inlet_lpb_pmon=2.1258E-2
chamber_ion_pmon=2.24062E-9
chamber_cvt_pmon=2.51693E-3
foreline_cvt_pmon=2.51693E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.56889E-1
res40_imon=-2.57986E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=220
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.582E3	2.0E0	1.47E2	4.1E1	-7.18554E-2	-8.8002E1	-3.8147E-4	-8.80021E1	7.39098E-4	3.05176E-3	9.76324E-2	1.58215E1	-1.98364E1	-1.99048E1	1.50088E1	2.23297E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.11689E-2
2.0E0	3.479E3	6.0E0	3.16E2	1.6E2	-7.14689E-2	-8.80015E1	9.53674E-5	-8.80022E1	5.72205E-4	3.19481E-3	9.76324E-2	1.5802E1	-1.98343E1	-1.99438E1	1.50046E1	2.22461E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.11482E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.0464E-2	-8.80018E1	-4.05312E-4	-8.80021E1	1.00136E-3	3.05176E-3	9.75609E-2	1.58203E1	-1.98356E1	-1.99384E1	1.50292E1	2.23072E-9	2.51915E-3	2.51915E-3	6.32978E-3	2.11454E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.17007E-2	-8.80019E1	-1.43051E-4	-8.80018E1	1.00136E-3	3.02792E-3	9.74894E-2	1.58061E1	-1.98334E1	-1.99313E1	1.4995E1	2.24402E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.1185E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.10825E-2	-8.80019E1	0.0E0	-8.80018E1	9.77516E-4	2.71797E-3	9.77755E-2	1.57716E1	-1.98182E1	-1.99197E1	1.50557E1	2.23964E-9	2.51417E-3	2.51417E-3	6.29665E-3	2.11689E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23189E-2	-8.80021E1	-7.15256E-5	-8.8002E1	7.62939E-4	2.76566E-3	9.74655E-2	1.57909E1	-1.98242E1	-1.99402E1	1.5016E1	2.24109E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.12957E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.80018E1	-2.86102E-4	-8.80019E1	7.86781E-4	2.83718E-3	9.74178E-2	1.57801E1	-1.98194E1	-1.99324E1	1.50268E1	2.24304E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.12034E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.201E-2	-8.80018E1	-1.43051E-4	-8.80019E1	8.58307E-4	3.00407E-3	9.75132E-2	1.57837E1	-1.98146E1	-1.99288E1	1.50106E1	2.23623E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.1185E-2
1.2E1	9.2E1	0.0E0	4.85E2	3.23E2	-7.31692E-2	-8.80015E1	4.76837E-5	-8.80021E1	6.4373E-4	2.93255E-3	9.7394E-2	1.57969E1	-1.9829E1	-1.99342E1	1.50382E1	2.22945E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.10017E-2
1.3E1	1.3E1	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80016E1	-4.05312E-4	-8.80018E1	9.77516E-4	2.81334E-3	9.73463E-2	1.58059E1	-1.98675E1	-1.99486E1	1.50136E1	2.21497E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.12034E-2
1.4E1	1.38E2	0.0E0	5.66E2	3.82E2	-7.20871E-2	-8.80015E1	1.66893E-4	-8.8002E1	8.58307E-4	2.81334E-3	9.75609E-2	1.57843E1	-1.98181E1	-1.99661E1	1.50462E1	2.21779E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.12232E-2
1.5E1	8.2E1	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80017E1	-3.8147E-4	-8.80019E1	9.53674E-4	2.74181E-3	9.74894E-2	1.58161E1	-1.98969E1	-1.99125E1	1.50358E1	2.22654E-9	2.52428E-3	2.52428E-3	6.33486E-3	2.12403E-2
1.6E1	3.53E2	2.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80017E1	-2.86102E-4	-8.80018E1	1.00136E-3	3.05176E-3	9.75609E-2	1.58371E1	-1.9814E1	-1.99384E1	1.49878E1	2.21495E-9	2.51632E-3	2.51632E-3	6.33977E-3	2.12413E-2
1.7E1	9.46E2	3.0E0	6.87E2	4.7E2	-7.27053E-2	-8.80018E1	-1.66893E-4	-8.80018E1	9.77516E-4	3.12328E-3	9.76086E-2	1.57903E1	-1.98002E1	-1.99852E1	1.50244E1	2.21401E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.11298E-2
1.8E1	3.773E3	3.0E0	7.27E2	5.0E2	-7.25507E-2	-8.80015E1	-2.6226E-4	-8.80019E1	8.10623E-4	3.21865E-3	9.74655E-2	1.58017E1	-1.98458E1	-1.99522E1	1.50088E1	2.21401E-9	2.5199E-3	2.5199E-3	6.29098E-3	2.12403E-2
1.9E1	1.796E3	1.0E0	7.68E2	5.29E2	-7.23964E-2	-8.80015E1	-4.76837E-5	-8.80018E1	8.82149E-4	3.24249E-3	9.75132E-2	1.58377E1	-1.9841E1	-1.99396E1	1.5016E1	2.22268E-9	2.51771E-3	2.51771E-3	6.34037E-3	2.12218E-2
2.0E1	2.1E1	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.80014E1	-1.66893E-4	-8.80018E1	8.82149E-4	3.67165E-3	9.75132E-2	1.57877E1	-1.98452E1	-1.99155E1	1.50294E1	2.22268E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.11115E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.41738E-2	-8.80014E1	-1.90735E-4	-8.80021E1	8.58307E-4	3.48091E-3	9.76563E-2	1.58311E1	-1.98092E1	-1.99204E1	1.50461E1	2.23854E-9	2.52085E-3	2.52085E-3	6.31097E-3	2.11757E-2
2.2E1	9.0E0	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80014E1	-1.19209E-4	-8.80023E1	7.86781E-4	3.14713E-3	9.74655E-2	1.58299E1	-1.98609E1	-1.99258E1	1.50256E1	2.23773E-9	2.52169E-3	2.52169E-3	6.30202E-3	2.12594E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.36328E-2	-8.80011E1	-7.15256E-5	-8.80021E1	9.53674E-4	3.21865E-3	9.76563E-2	1.57967E1	-1.98322E1	-1.99573E1	1.50286E1	2.24062E-9	2.51693E-3	2.51693E-3	6.30182E-3	2.1258E-2