[Scan]
initial_time=2016-01-18T16:25:20
final_time=2016-01-18T16:25:47
ip_count=19
run=1024
dataset=1
scan=9
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.84263E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-7.19368E-10
ql2_vset=
ql2_vmon=4.76837E-5
ql2_imon=1.23985E-9
ql3_vset=
ql3_vmon=-8.80019E1
ql3_imon=-2.50486E-9
ql4_vset=
ql4_vmon=1.09673E-3
ql4_imon=1.34249E-8
mult1=-9.29489E-9
mult2=-2.61481E-9
rf_tmon=-3.89357E-3
rf_agc=3.38623E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=2.83718E-3
ql5_imon=6.6644E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64871E0
bslens_imon=2.50891E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1964E1
lens5a_imon=2.01516E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1259E2
lens4a_imon=2.04974E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54331E1
cs_ef1b_imon=2.89548E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04655E2
lens23_imon=1.02092E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04447E1
cs_ea1_imon=2.5303E-5
lens1_vset=-2.7E0
lens1_vmon=-2.94102E0
lens1_imon=1.4779E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64879E1
os_ef1alow_imon=2.97045E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03234E1
cs_ea2_imon=1.4827E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84406E1
cs_ef1a_imon=2.95964E-5
olens2_vset=0.0E0
olens2_vmon=8.10623E-4
olens2_imon=1.11054E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11754E1
os_restr1_imon=4.26679E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14783E1
os_ea1_imon=2.31833E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63623E1
os_ef1bup_imon=3.06847E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23347E0
cs_ionrep_imon=1.18566E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92035E2
cs_nozzle_imon=1.93557E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01833E1
cs_anode1_imon=2.9964E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9997E1
olens4_imon=4.3308E-9
tplens_vset=0.0E0
tplens_vmon=-1.71714E0
tplens_imon=-1.98407E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99642E1
iondef3_imon=8.60128E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98446E1
iondef2_imon=9.21413E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03342E2
lens6_imon=2.98256E-4
ql6_vset=1.0E-1
ql6_vmon=9.72748E-2
ql6_imon=9.21106E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26231E0
ionrepsh_imon=1.76822E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33742E1
lens5b_imon=2.17702E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7494E1
cs_ef2b_imon=3.12902E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.29596E0
os_ea2_imon=-5.19248E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06198E2
lens4b_imon=2.00504E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71288E1
cs_ef2a_imon=3.15281E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07198E0
os_ef2alow_imon=-2.36002E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.08836E-1
os_ef2bup_imon=-5.14228E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11406E1
os_restr2_imon=3.41193E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2309E2
cs_ionfoca_imon=6.29315E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01719E1
cs_anode2_imon=2.24749E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58041E1
iondef1_imon=5.38206E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50292E1
iondef4_imon=5.20831E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27949E1
olens3_imon=2.56918E-8
olens1_vset=0.0E0
olens1_vmon=1.33514E-3
olens1_imon=1.28431E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15477E0
cs_ionaccel_imon=-1.71851E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02171E2
cs_ionfocb_imon=1.47374E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56129E1
einzel_imon=7.78515E-6
window_vset=0.0E0
window_vmon=2.35362E-1
window_imon=-6.58946E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82836E2
mask1_imon=2.38915E-4
mask2_vset=0.0E0
mask2_vmon=-1.87029E1
mask2_imon=-6.76965E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92628E3
multa_neg_imon=7.35037E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.30132E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.14488E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.26021E0
defgridb_imon=5.99851E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33149E1
os_fil1_imon=9.45676E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07377E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.67162E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30445E1
cs_fil1_imon=9.99237E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62264E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68238E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.85445E-2
os_fil2_imon=-2.83415E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.69483E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=7.02797E-2
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3742E-1
cs_fil2_imon=-2.07131E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.8572E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22626E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.12051E-2
chamber_ion_pmon=2.23678E-9
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.23563E-1
res40_imon=-2.69879E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.557E3	0.0E0	1.47E2	4.1E1	-7.40192E-2	-8.80016E1	-3.8147E-4	-8.80017E1	6.4373E-4	3.29018E-3	9.78231E-2	1.57778E1	-1.98234E1	-1.99372E1	1.50232E1	2.23583E-9	2.51632E-3	2.51632E-3	6.30202E-3	2.12051E-2
2.0E0	3.599E3	4.0E0	3.16E2	1.6E2	-7.40192E-2	-8.80014E1	-3.8147E-4	-8.80018E1	8.10623E-4	3.29018E-3	9.7537E-2	1.5786E1	-1.98226E1	-1.99396E1	1.50166E1	2.2406E-9	2.51632E-3	2.51632E-3	6.32356E-3	2.1187E-2
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80019E1	-2.6226E-4	-8.80018E1	8.34465E-4	2.93255E-3	9.76324E-2	1.58251E1	-1.9808E1	-1.9963E1	1.50124E1	2.23508E-9	2.51952E-3	2.51952E-3	6.3245E-3	2.11807E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.23189E-2	-8.80014E1	-9.53674E-5	-8.80018E1	7.62939E-4	2.76566E-3	9.78231E-2	1.58256E1	-1.98192E1	-1.99396E1	1.50064E1	2.23487E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.10429E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.17007E-2	-8.80018E1	-2.14577E-4	-8.80019E1	6.67572E-4	2.81334E-3	9.75847E-2	1.57909E1	-1.98585E1	-1.99312E1	1.5013E1	2.2406E-9	2.51417E-3	2.51417E-3	6.29665E-3	2.10788E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.13143E-2	-8.80021E1	-1.19209E-4	-8.80019E1	1.00136E-3	3.00407E-3	9.74417E-2	1.57945E1	-1.98152E1	-1.99336E1	1.50052E1	2.22284E-9	2.51693E-3	2.51693E-3	6.34099E-3	2.12016E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.10825E-2	-8.80018E1	-4.76837E-4	-8.80018E1	8.10623E-4	3.0756E-3	9.76324E-2	1.57867E1	-1.98558E1	-1.99337E1	1.50352E1	2.21978E-9	2.51443E-3	2.51443E-3	6.32386E-3	2.10565E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.17779E-2	-8.80016E1	-2.6226E-4	-8.8002E1	7.15256E-4	2.90871E-3	9.7394E-2	1.57897E1	-1.98446E1	-1.99306E1	1.5025E1	2.22916E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.12413E-2
1.2E1	9.2E1	0.0E0	4.85E2	3.23E2	-7.23189E-2	-8.80017E1	4.76837E-5	-8.8002E1	1.04904E-3	3.00407E-3	9.76324E-2	1.58299E1	-1.98362E1	-1.99071E1	1.50358E1	2.21401E-9	2.5188E-3	2.5188E-3	6.33486E-3	2.12587E-2
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.30146E-2	-8.80014E1	-4.76837E-5	-8.80018E1	7.39098E-4	2.64645E-3	9.74894E-2	1.58311E1	-1.98495E1	-1.99354E1	1.50285E1	2.21401E-9	2.51552E-3	2.51552E-3	6.3514E-3	2.1185E-2
1.4E1	1.05E2	0.0E0	5.66E2	3.82E2	-7.23964E-2	-8.80019E1	1.43051E-4	-8.80018E1	9.05991E-4	2.86102E-3	9.76324E-2	1.58263E1	-1.9841E1	-1.98915E1	1.50099E1	2.21873E-9	2.51739E-3	2.51739E-3	6.30202E-3	2.11689E-2
1.5E1	6.5E1	0.0E0	6.06E2	4.11E2	-7.21643E-2	-8.80019E1	7.15256E-5	-8.80021E1	5.72205E-4	3.12328E-3	9.76086E-2	1.58356E1	-1.98588E1	-1.99284E1	1.50268E1	2.22481E-9	2.52585E-3	2.52585E-3	6.32978E-3	2.11641E-2
1.6E1	3.27E2	2.0E0	6.47E2	4.41E2	-7.18554E-2	-8.80016E1	1.43051E-4	-8.80021E1	1.16825E-3	2.90871E-3	9.75609E-2	1.57885E1	-1.98328E1	-1.99148E1	1.50381E1	2.23297E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.12232E-2
1.7E1	9.28E2	1.0E0	6.87E2	4.7E2	-7.14689E-2	-8.80015E1	2.6226E-4	-8.80019E1	9.29832E-4	2.74181E-3	9.71079E-2	1.58161E1	-1.98356E1	-1.99354E1	1.5034E1	2.22442E-9	2.51847E-3	2.51847E-3	6.30202E-3	2.12232E-2
1.8E1	3.656E3	3.0E0	7.27E2	5.0E2	-7.201E-2	-8.80015E1	2.38419E-5	-8.8002E1	9.53674E-4	3.14713E-3	9.73225E-2	1.58137E1	-1.98248E1	-1.99504E1	1.49962E1	2.23011E-9	2.51954E-3	2.51954E-3	6.3074E-3	2.12051E-2
1.9E1	1.864E3	1.0E0	7.68E2	5.29E2	-7.201E-2	-8.80019E1	-1.43051E-4	-8.80019E1	1.16825E-3	3.19481E-3	9.76086E-2	1.58026E1	-1.98269E1	-1.99125E1	1.50286E1	2.22678E-9	2.51915E-3	2.51915E-3	6.32418E-3	2.1052E-2
2.0E1	1.4E1	0.0E0	8.08E2	5.58E2	-7.13915E-2	-8.80017E1	9.53674E-5	-8.80018E1	7.62939E-4	3.02792E-3	9.75609E-2	1.58263E1	-1.98134E1	-1.99444E1	1.50196E1	2.23869E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.12957E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.18554E-2	-8.80019E1	1.90735E-4	-8.80017E1	7.86781E-4	2.88486E-3	9.7537E-2	1.57826E1	-1.98151E1	-1.99502E1	1.50248E1	2.23297E-9	2.52276E-3	2.52276E-3	6.3074E-3	2.12232E-2
2.2E1	1.2E1	0.0E0	8.89E2	6.17E2	-7.22418E-2	-8.80015E1	-9.53674E-5	-8.80015E1	9.29832E-4	2.95639E-3	9.7394E-2	1.58492E1	-1.98248E1	-1.99642E1	1.50262E1	2.23818E-9	2.52209E-3	2.52209E-3	6.33486E-3	2.12403E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.80015E1	4.76837E-5	-8.80019E1	1.09673E-3	2.83718E-3	9.72748E-2	1.58041E1	-1.98446E1	-1.99642E1	1.50292E1	2.23678E-9	2.51203E-3	2.51203E-3	6.30202E-3	2.12051E-2