[Scan]
initial_time=2016-01-18T16:25:57
final_time=2016-01-18T16:26:25
ip_count=19
run=1024
dataset=1
scan=10
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23964E-2
qbias_imon=-3.79186E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-7.1969E-10
ql2_vset=
ql2_vmon=0.0E0
ql2_imon=1.1994E-9
ql3_vset=
ql3_vmon=-8.80019E1
ql3_imon=-2.48413E-9
ql4_vset=
ql4_vmon=8.10623E-4
ql4_imon=1.34305E-8
mult1=-9.56114E-9
mult2=-2.72599E-9
rf_tmon=-5.0848E-3
rf_agc=3.35487E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.40939E-3
ql5_imon=6.89876E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66193E0
bslens_imon=2.44763E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19586E1
lens5a_imon=1.99244E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12593E2
lens4a_imon=2.05154E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53881E1
cs_ef1b_imon=2.88107E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0465E2
lens23_imon=1.02042E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04622E1
cs_ea1_imon=2.52706E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96145E0
lens1_imon=1.60767E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64831E1
os_ef1alow_imon=2.99495E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03684E1
cs_ea2_imon=1.49027E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84574E1
cs_ef1a_imon=2.95567E-5
olens2_vset=0.0E0
olens2_vmon=1.07288E-3
olens2_imon=1.10455E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11334E1
os_restr1_imon=4.22787E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14975E1
os_ea1_imon=2.32086E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63539E1
os_ef1bup_imon=3.07388E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22266E0
cs_ionrep_imon=1.19539E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92078E2
cs_nozzle_imon=1.93485E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02061E1
cs_anode1_imon=3.00468E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9997E1
olens4_imon=4.21902E-9
tplens_vset=0.0E0
tplens_vmon=-1.73937E0
tplens_imon=-2.74111E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99249E1
iondef3_imon=8.9041E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98477E1
iondef2_imon=9.35832E-6
lens6_vset=-6.0E2
lens6_vmon=-6.0333E2
lens6_imon=2.98349E-4
ql6_vset=1.0E-1
ql6_vmon=9.74417E-2
ql6_imon=9.41229E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22326E0
ionrepsh_imon=1.77471E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3379E1
lens5b_imon=2.1763E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7473E1
cs_ef2b_imon=3.13226E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.30076E0
os_ea2_imon=-7.8962E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06218E2
lens4b_imon=2.0085E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71047E1
cs_ef2a_imon=3.16398E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05035E0
os_ef2alow_imon=-2.41047E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.84209E-1
os_ef2bup_imon=-5.12426E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11472E1
os_restr2_imon=3.41446E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23107E2
cs_ionfoca_imon=6.29027E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01845E1
cs_anode2_imon=2.22875E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58313E1
iondef1_imon=5.21984E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5001E1
iondef4_imon=5.19029E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27948E1
olens3_imon=2.56661E-8
olens1_vset=0.0E0
olens1_vmon=1.50204E-3
olens1_imon=1.28162E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14696E0
cs_ionaccel_imon=-1.95277E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02177E2
cs_ionfocb_imon=1.47468E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56657E1
einzel_imon=7.69865E-6
window_vset=0.0E0
window_vmon=2.90623E-1
window_imon=-9.25639E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82827E2
mask1_imon=2.39235E-4
mask2_vset=0.0E0
mask2_vmon=-1.87461E1
mask2_imon=-5.36411E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.38281E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93679E3
defgrida_imon=6.5032E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.27106E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.28728E0
defgridb_imon=6.09584E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33169E1
os_fil1_imon=9.44865E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07347E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.67115E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30469E1
cs_fil1_imon=1.00099E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61999E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68643E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.99632E-2
os_fil2_imon=-2.68999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91107E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=6.47371E-2
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38327E-1
cs_fil2_imon=-2.91825E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.05212E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22729E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31798E-3
inlet_lpb_pmon=2.10474E-2
chamber_ion_pmon=2.22703E-9
chamber_cvt_pmon=2.52131E-3
foreline_cvt_pmon=2.52131E-3
chamber_tmon=1.40045E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.09147E-1
res40_imon=-2.55103E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.53E3	1.0E0	1.47E2	4.1E1	-7.13143E-2	-8.80016E1	0.0E0	-8.80018E1	7.86781E-4	2.52724E-3	9.77039E-2	1.58135E1	-1.98485E1	-1.99322E1	1.49893E1	2.23773E-9	2.51417E-3	2.51417E-3	6.30202E-3	2.11328E-2
2.0E0	3.296E3	6.0E0	3.16E2	1.6E2	-7.17779E-2	-8.80018E1	4.76837E-5	-8.8002E1	1.12057E-3	2.7895E-3	9.74894E-2	1.57989E1	-1.98447E1	-1.99347E1	1.49947E1	2.23637E-9	2.52236E-3	2.52236E-3	6.31798E-3	2.11003E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.80018E1	9.53674E-5	-8.80019E1	1.33514E-3	2.81334E-3	9.7394E-2	1.5825E1	-1.986E1	-1.9916E1	1.50242E1	2.23764E-9	2.52362E-3	2.52362E-3	6.31299E-3	2.11267E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.25507E-2	-8.8002E1	-4.76837E-5	-8.80019E1	1.33514E-3	2.71797E-3	9.73225E-2	1.58197E1	-1.98302E1	-1.99077E1	1.50028E1	2.24155E-9	2.52061E-3	2.52061E-3	6.30202E-3	2.1187E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.20871E-2	-8.80018E1	2.38419E-5	-8.80021E1	1.09673E-3	2.90871E-3	9.75609E-2	1.58274E1	-1.98293E1	-1.99343E1	1.50322E1	2.24012E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.12218E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23189E-2	-8.80018E1	-1.66893E-4	-8.80023E1	9.05991E-4	3.05176E-3	9.72271E-2	1.58023E1	-1.98284E1	-1.99474E1	1.50034E1	2.23263E-9	2.51393E-3	2.51393E-3	6.31798E-3	2.12067E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.80016E1	-9.53674E-5	-8.80022E1	7.62939E-4	3.26633E-3	9.76086E-2	1.58032E1	-1.98364E1	-1.99172E1	1.50196E1	2.23566E-9	2.5225E-3	2.5225E-3	6.34661E-3	2.12204E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.24736E-2	-8.80016E1	1.43051E-4	-8.80023E1	9.05991E-4	2.88486E-3	9.76086E-2	1.58107E1	-1.98266E1	-1.98999E1	1.50244E1	2.24155E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.1187E-2
1.2E1	8.0E1	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80016E1	-9.53674E-5	-8.80019E1	5.00679E-4	3.0756E-3	9.75132E-2	1.58079E1	-1.98399E1	-1.99502E1	1.50262E1	2.23678E-9	2.51739E-3	2.51739E-3	6.33436E-3	2.12051E-2
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.201E-2	-8.80015E1	-2.14577E-4	-8.80019E1	9.77516E-4	3.14713E-3	9.7537E-2	1.58242E1	-1.98295E1	-1.99482E1	1.50161E1	2.24402E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.11482E-2
1.4E1	1.22E2	0.0E0	5.66E2	3.82E2	-7.17779E-2	-8.80015E1	-2.38419E-4	-8.8002E1	8.34465E-4	3.14713E-3	9.7847E-2	1.58437E1	-1.9844E1	-1.99107E1	1.50094E1	2.24012E-9	2.51538E-3	2.51538E-3	6.31541E-3	2.12148E-2
1.5E1	6.6E1	0.0E0	6.06E2	4.11E2	-7.16233E-2	-8.80015E1	-7.15256E-5	-8.80019E1	8.82149E-4	3.12328E-3	9.75609E-2	1.57867E1	-1.98368E1	-1.9927E1	1.50346E1	2.23566E-9	2.51804E-3	2.51804E-3	6.31858E-3	2.12392E-2
1.6E1	3.58E2	0.0E0	6.47E2	4.41E2	-7.19325E-2	-8.80014E1	-2.86102E-4	-8.8002E1	1.04904E-3	3.50475E-3	9.75847E-2	1.58413E1	-1.98464E1	-1.99228E1	1.5025E1	2.24109E-9	2.51771E-3	2.51771E-3	6.34037E-3	2.12587E-2
1.7E1	9.18E2	0.0E0	6.87E2	4.7E2	-7.21643E-2	-8.80016E1	-9.53674E-5	-8.80019E1	1.12057E-3	3.12328E-3	9.7537E-2	1.58359E1	-1.9835E1	-1.99173E1	1.50208E1	2.23138E-9	2.51443E-3	2.51443E-3	6.34037E-3	2.11666E-2
1.8E1	3.62E3	2.0E0	7.27E2	5.0E2	-7.27053E-2	-8.80014E1	9.53674E-5	-8.8002E1	9.77516E-4	3.24249E-3	9.74417E-2	1.57999E1	-1.98374E1	-1.99252E1	1.50268E1	2.23818E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.12218E-2
1.9E1	1.825E3	1.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80015E1	-7.15256E-5	-8.80021E1	9.05991E-4	3.09944E-3	9.75609E-2	1.58071E1	-1.98386E1	-1.99324E1	1.50142E1	2.23818E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.12403E-2
2.0E1	2.3E1	0.0E0	8.08E2	5.58E2	-7.23964E-2	-8.80016E1	2.38419E-5	-8.80021E1	7.86781E-4	3.19481E-3	9.77755E-2	1.57855E1	-1.98187E1	-1.99378E1	1.5013E1	2.23773E-9	2.52384E-3	2.52384E-3	6.33977E-3	2.11148E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30146E-2	-8.80016E1	4.76837E-5	-8.80023E1	8.82149E-4	3.09944E-3	9.76086E-2	1.58456E1	-1.98284E1	-1.98819E1	1.50304E1	2.23487E-9	2.52384E-3	2.52384E-3	6.3074E-3	2.10788E-2
2.2E1	1.0E1	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80018E1	-1.43051E-4	-8.80023E1	8.82149E-4	3.62396E-3	9.74417E-2	1.57947E1	-1.98366E1	-1.99533E1	1.50212E1	2.21497E-9	2.51116E-3	2.51116E-3	6.33486E-3	2.11666E-2
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.23964E-2	-8.80018E1	0.0E0	-8.80019E1	8.10623E-4	3.40939E-3	9.74417E-2	1.58313E1	-1.98477E1	-1.99249E1	1.5001E1	2.22703E-9	2.52131E-3	2.52131E-3	6.31798E-3	2.10474E-2