[Scan]
initial_time=2016-01-18T16:26:35
final_time=2016-01-18T16:27:03
ip_count=19
run=1024
dataset=1
scan=11
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17007E-2
qbias_imon=-3.83173E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-7.38323E-10
ql2_vset=
ql2_vmon=-2.86102E-4
ql2_imon=1.21233E-9
ql3_vset=
ql3_vmon=-8.8002E1
ql3_imon=-2.47476E-9
ql4_vset=
ql4_vmon=9.29832E-4
ql4_imon=1.35141E-8
mult1=-1.00195E-8
mult2=-2.80361E-9
rf_tmon=-3.90778E-3
rf_agc=3.43414E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=2.90871E-3
ql5_imon=6.53815E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63095E0
bslens_imon=2.63547E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19822E1
lens5a_imon=2.03572E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12509E2
lens4a_imon=2.04978E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53916E1
cs_ef1b_imon=2.87531E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04655E2
lens23_imon=1.02225E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05533E1
cs_ea1_imon=2.53108E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96703E0
lens1_imon=1.39447E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65011E1
os_ef1alow_imon=2.99645E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03603E1
cs_ea2_imon=1.5115E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=2.96658E-5
olens2_vset=0.0E0
olens2_vmon=5.96046E-4
olens2_imon=1.10507E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11174E1
os_restr1_imon=4.24432E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15213E1
os_ea1_imon=2.32007E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63669E1
os_ef1bup_imon=3.08335E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21386E0
cs_ionrep_imon=1.17779E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9202E2
cs_nozzle_imon=1.93663E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01994E1
cs_anode1_imon=2.99041E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99976E1
olens4_imon=4.26599E-9
tplens_vset=0.0E0
tplens_vmon=-1.72834E0
tplens_imon=-2.21968E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.9936E1
iondef3_imon=8.55545E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98405E1
iondef2_imon=9.42798E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03284E2
lens6_imon=2.97939E-4
ql6_vset=1.0E-1
ql6_vmon=9.7537E-2
ql6_imon=9.20308E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27238E0
ionrepsh_imon=1.79516E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34063E1
lens5b_imon=2.2057E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74166E1
cs_ef2b_imon=3.12697E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.25557E0
os_ea2_imon=-7.67732E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06209E2
lens4b_imon=2.00748E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71386E1
cs_ef2a_imon=3.17495E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05456E0
os_ef2alow_imon=-2.51598E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.25572E-1
os_ef2bup_imon=-5.32782E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11179E1
os_restr2_imon=3.41419E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23141E2
cs_ionfoca_imon=6.30623E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01787E1
cs_anode2_imon=2.2304E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58415E1
iondef1_imon=5.12444E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50138E1
iondef4_imon=5.44978E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27953E1
olens3_imon=2.56405E-8
olens1_vset=0.0E0
olens1_vmon=1.04904E-3
olens1_imon=1.27785E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14077E0
cs_ionaccel_imon=-1.7241E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02158E2
cs_ionfocb_imon=1.47283E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56388E1
einzel_imon=7.76501E-6
window_vset=0.0E0
window_vmon=2.56033E-1
window_imon=-7.51033E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82835E2
mask1_imon=2.39101E-4
mask2_vset=0.0E0
mask2_vmon=-1.87138E1
mask2_imon=-6.93991E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=6.90078E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93746E3
defgrida_imon=6.28549E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=6.97378E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2644E0
defgridb_imon=5.79187E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3317E1
os_fil1_imon=9.42599E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0729E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.67158E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30463E1
cs_fil1_imon=9.97745E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62417E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68353E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.12069E-2
os_fil2_imon=-2.62744E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85763E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=7.74013E-2
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37728E-1
cs_fil2_imon=-2.70574E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.12503E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22596E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29372E-3
inlet_lpb_pmon=2.12218E-2
chamber_ion_pmon=2.21401E-9
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.26794E-1
res40_imon=-2.51263E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=269
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.576E3	0.0E0	1.47E2	4.1E1	-7.27828E-2	-8.80017E1	2.14577E-4	-8.80021E1	7.62939E-4	3.33786E-3	9.73701E-2	1.58113E1	-1.98404E1	-1.99408E1	1.49985E1	2.22821E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.12322E-2
2.0E0	3.509E3	1.0E0	3.16E2	1.6E2	-7.27053E-2	-8.80017E1	9.53674E-5	-8.80018E1	9.53674E-4	3.29018E-3	9.7394E-2	1.58356E1	-1.98199E1	-1.99116E1	1.50209E1					
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.23964E-2	-8.80017E1	0.0E0	-8.80021E1	1.07288E-3	3.3617E-3	9.7084E-2	1.58014E1	-1.98493E1	-1.9929E1	1.5028E1	2.21401E-9	2.51611E-3	2.51611E-3	6.3074E-3	2.10854E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.34782E-2	-8.80018E1	-3.09944E-4	-8.80019E1	6.91414E-4	3.24249E-3	9.75609E-2	1.58309E1	-1.98316E1	-1.99284E1	1.50016E1	2.21873E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.10968E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.80017E1	-1.90735E-4	-8.80019E1	7.39098E-4	3.43323E-3	9.72271E-2	1.58071E1	-1.98507E1	-1.99131E1	1.5007E1	2.23623E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.10931E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.22418E-2	-8.80018E1	-4.76837E-5	-8.80021E1	8.82149E-4	3.21865E-3	9.7394E-2	1.5812E1	-1.98316E1	-1.99048E1	1.5034E1	2.23869E-9	2.51632E-3	2.51632E-3	6.32356E-3	2.12232E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.19325E-2	-8.80019E1	-4.76837E-5	-8.80023E1	7.86781E-4	3.0756E-3	9.75132E-2	1.58023E1	-1.98158E1	-1.99161E1	1.50208E1	2.23332E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.11482E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80018E1	1.43051E-4	-8.80023E1	9.05991E-4	3.05176E-3	9.72509E-2	1.58245E1	-1.98386E1	-1.9933E1	1.49926E1	2.23332E-9	2.52099E-3	2.52099E-3	6.29098E-3	2.11298E-2
1.2E1	9.3E1	0.0E0	4.85E2	3.23E2	-7.17779E-2	-8.80019E1	-7.15256E-5	-8.80022E1	1.00136E-3	3.19481E-3	9.76801E-2	1.58107E1	-1.98422E1	-1.99456E1	1.50088E1	2.23964E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.12051E-2
1.3E1	1.3E1	0.0E0	5.25E2	3.53E2	-7.12368E-2	-8.8002E1	-4.76837E-5	-8.80023E1	8.34465E-4	3.29018E-3	9.77278E-2	1.58281E1	-1.9838E1	-1.9939E1	1.50274E1	2.2372E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.11115E-2
1.4E1	1.3E2	0.0E0	5.66E2	3.82E2	-7.20871E-2	-8.8002E1	9.53674E-5	-8.80019E1	9.77516E-4	3.17097E-3	9.75609E-2	1.57723E1	-1.97912E1	-1.99432E1	1.50274E1	2.24207E-9	2.51443E-3	2.51443E-3	6.3074E-3	2.12034E-2
1.5E1	6.3E1	0.0E0	6.06E2	4.11E2	-7.11597E-2	-8.80018E1	2.6226E-4	-8.80019E1	8.34465E-4	2.95639E-3	9.74417E-2	1.57897E1	-1.98062E1	-1.99396E1	1.50136E1	2.23623E-9	2.52099E-3	2.52099E-3	6.33486E-3	2.12034E-2
1.6E1	3.48E2	0.0E0	6.47E2	4.41E2	-7.11597E-2	-8.80018E1	4.05312E-4	-8.80017E1	7.39098E-4	3.26633E-3	9.77278E-2	1.58005E1	-1.98308E1	-1.9954E1	1.50485E1	2.23526E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.12034E-2
1.7E1	9.29E2	0.0E0	6.87E2	4.7E2	-7.14689E-2	-8.80018E1	2.6226E-4	-8.80018E1	7.62939E-4	2.93255E-3	9.75609E-2	1.58023E1	-1.98446E1	-1.99432E1	1.5034E1	2.24012E-9	2.52647E-3	2.52647E-3	6.30192E-3	2.11666E-2
1.8E1	3.598E3	0.0E0	7.27E2	5.0E2	-7.15461E-2	-8.80018E1	7.15256E-5	-8.8002E1	1.07288E-3	2.93255E-3	9.75609E-2	1.58203E1	-1.98212E1	-1.98867E1	1.50072E1	2.22945E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.11115E-2
1.9E1	1.864E3	0.0E0	7.68E2	5.29E2	-7.11597E-2	-8.8002E1	2.14577E-4	-8.80019E1	1.16825E-3	2.86102E-3	9.76324E-2	1.57856E1	-1.98138E1	-1.99647E1	1.50262E1	2.23332E-9	2.52209E-3	2.52209E-3	6.33486E-3	2.10931E-2
2.0E1	1.9E1	0.0E0	8.08E2	5.58E2	-7.14689E-2	-8.80019E1	-4.76837E-5	-8.80023E1	1.19209E-3	2.88486E-3	9.74655E-2	1.57723E1	-1.98279E1	-1.99583E1	1.50247E1	2.23966E-9	2.52301E-3	2.52301E-3	6.3126E-3	2.11211E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.18554E-2	-8.80019E1	-1.90735E-4	-8.80022E1	9.53674E-4	2.64645E-3	9.74894E-2	1.5848E1	-1.98358E1	-1.99307E1	1.50202E1	2.23407E-9	2.51271E-3	2.51271E-3	6.29603E-3	2.12765E-2
2.2E1	7.0E0	0.0E0	8.89E2	6.17E2	-7.19325E-2	-8.80017E1	-4.29153E-4	-8.8002E1	9.29832E-4	3.05176E-3	9.72986E-2	1.58257E1	-1.98218E1	-1.99816E1	1.50232E1	2.22726E-9	2.51847E-3	2.51847E-3	6.30202E-3	2.12232E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.17007E-2	-8.80015E1	-2.86102E-4	-8.8002E1	9.29832E-4	2.90871E-3	9.7537E-2	1.58415E1	-1.98405E1	-1.9936E1	1.50138E1	2.21401E-9	2.51662E-3	2.51662E-3	6.29372E-3	2.12218E-2