[Scan]
initial_time=2016-01-18T16:28:30
final_time=2016-01-18T16:28:57
ip_count=19
run=1024
dataset=1
scan=14
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.16233E-2
qbias_imon=-3.84532E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-7.53772E-10
ql2_vset=
ql2_vmon=-2.86102E-4
ql2_imon=1.24975E-9
ql3_vset=
ql3_vmon=-8.80018E1
ql3_imon=-2.49861E-9
ql4_vset=
ql4_vmon=6.91414E-4
ql4_imon=1.34786E-8
mult1=-9.22264E-9
mult2=-2.78648E-9
rf_tmon=-4.50041E-3
rf_agc=3.31954E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.0756E-3
ql5_imon=6.81281E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67815E0
bslens_imon=2.44402E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20031E1
lens5a_imon=2.00867E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12514E2
lens4a_imon=2.04776E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53925E1
cs_ef1b_imon=2.8554E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04665E2
lens23_imon=1.02125E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04952E1
cs_ea1_imon=2.54436E-5
lens1_vset=-2.7E0
lens1_vmon=-2.94883E0
lens1_imon=1.43824E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64877E1
os_ef1alow_imon=2.97748E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0324E1
cs_ea2_imon=1.46973E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84745E1
cs_ef1a_imon=2.95589E-5
olens2_vset=0.0E0
olens2_vmon=1.09673E-3
olens2_imon=1.10399E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11241E1
os_restr1_imon=4.24495E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15672E1
os_ea1_imon=2.33636E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63821E1
os_ef1bup_imon=3.08859E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21184E0
cs_ionrep_imon=1.20873E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9205E2
cs_nozzle_imon=1.93377E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02057E1
cs_anode1_imon=2.98491E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99969E1
olens4_imon=4.18911E-9
tplens_vset=0.0E0
tplens_vmon=-1.76881E0
tplens_imon=-2.48877E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99276E1
iondef3_imon=8.9798E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98434E1
iondef2_imon=9.2646E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03314E2
lens6_imon=2.98144E-4
ql6_vset=1.0E-1
ql6_vmon=9.76324E-2
ql6_imon=9.40275E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2539E0
ionrepsh_imon=1.79201E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33784E1
lens5b_imon=2.16873E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74625E1
cs_ef2b_imon=3.12326E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.28514E0
os_ea2_imon=-7.8962E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06228E2
lens4b_imon=2.00886E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71564E1
cs_ef2a_imon=3.16502E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0519E0
os_ef2alow_imon=-2.53825E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.34184E-1
os_ef2bup_imon=-5.28408E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11377E1
os_restr2_imon=3.42049E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23086E2
cs_ionfoca_imon=6.30144E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01803E1
cs_anode2_imon=2.23901E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58143E1
iondef1_imon=5.15495E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50004E1
iondef4_imon=5.37724E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27947E1
olens3_imon=2.57441E-8
olens1_vset=0.0E0
olens1_vmon=1.71661E-3
olens1_imon=1.2828E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13486E0
cs_ionaccel_imon=-1.88718E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02157E2
cs_ionfocb_imon=1.47421E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56623E1
einzel_imon=7.64892E-6
window_vset=0.0E0
window_vmon=2.72658E-1
window_imon=-8.99953E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82825E2
mask1_imon=2.39173E-4
mask2_vset=0.0E0
mask2_vmon=-1.87406E1
mask2_imon=-8.43338E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.5919E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93751E3
defgrida_imon=6.68705E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50155E3
multb_neg_imon=7.42967E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.18201E0
defgridb_imon=6.067E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33131E1
os_fil1_imon=9.439E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06863E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.67049E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30447E1
cs_fil1_imon=9.99088E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61393E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68351E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.1382E-2
os_fil2_imon=-2.78555E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88519E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=6.52527E-2
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35182E-1
cs_fil2_imon=-2.49658E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.20109E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22556E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=2.10931E-2
chamber_ion_pmon=2.2372E-9
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.42441E-1
res40_imon=-2.48517E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=214
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.425E3	2.0E0	1.47E2	4.1E1	-7.25507E-2	-8.80019E1	-4.76837E-5	-8.80023E1	6.4373E-4	3.24249E-3	9.75132E-2	1.58231E1	-1.98525E1	-1.98895E1	1.50124E1	2.24012E-9	2.52647E-3	2.52647E-3	6.34037E-3	2.12218E-2
2.0E0	3.315E3	3.0E0	3.16E2	1.6E2	-7.27828E-2	-8.8002E1	2.38419E-5	-8.80022E1	4.52995E-4	3.33786E-3	9.75132E-2	1.58167E1	-1.98404E1	-1.99677E1	1.50228E1	2.2369E-9	2.52093E-3	2.52093E-3	6.28667E-3	2.13132E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.30146E-2	-8.80022E1	-1.43051E-4	-8.80021E1	9.53674E-4	3.21865E-3	9.77039E-2	1.58197E1	-1.98381E1	-1.99443E1	1.499E1	2.24161E-9	2.52027E-3	2.52027E-3	6.31858E-3	2.11267E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.18554E-2	-8.80018E1	-2.38419E-4	-8.80023E1	9.77516E-4	3.12328E-3	9.74178E-2	1.57963E1	-1.98404E1	-1.99167E1	1.50202E1	2.24155E-9	2.5131E-3	2.5131E-3	6.31278E-3	2.11509E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.19325E-2	-8.80018E1	-3.09944E-4	-8.80022E1	7.62939E-4	3.38554E-3	9.75609E-2	1.58101E1	-1.98663E1	-1.99246E1	1.50166E1	2.23818E-9	2.51771E-3	2.51771E-3	6.29645E-3	2.12772E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.8002E1	-1.43051E-4	-8.8002E1	9.53674E-4	3.29018E-3	9.74417E-2	1.58329E1	-1.98248E1	-1.99276E1	1.50256E1	2.2372E-9	2.51443E-3	2.51443E-3	6.32386E-3	2.12403E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80017E1	-1.90735E-4	-8.8002E1	7.86781E-4	3.14713E-3	9.74178E-2	1.57807E1	-1.98086E1	-1.99348E1	1.50509E1	2.24109E-9	2.52538E-3	2.52538E-3	6.28552E-3	2.1185E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.80015E1	1.66893E-4	-8.80024E1	9.29832E-4	2.93255E-3	9.73225E-2	1.58309E1	-1.98582E1	-1.9936E1	1.5016E1	2.24694E-9	2.51662E-3	2.51662E-3	6.3514E-3	2.10748E-2
1.2E1	1.0E2	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.80013E1	0.0E0	-8.80019E1	9.77516E-4	3.00407E-3	9.71317E-2	1.5802E1	-1.9801E1	-1.99231E1	1.50277E1	2.23429E-9	2.52538E-3	2.52538E-3	6.32936E-3	2.10565E-2
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.15461E-2	-8.80014E1	-7.15256E-5	-8.80022E1	9.05991E-4	3.09944E-3	9.72033E-2	1.57783E1	-1.9841E1	-1.99216E1	1.50358E1	2.23583E-9	2.51739E-3	2.51739E-3	6.29665E-3	2.11509E-2
1.4E1	1.31E2	0.0E0	5.66E2	3.82E2	-7.10051E-2	-8.80016E1	-2.38419E-4	-8.80022E1	1.07288E-3	2.95639E-3	9.7394E-2	1.58065E1	-1.98314E1	-1.99474E1	1.49986E1	2.23107E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.12232E-2
1.5E1	6.6E1	0.0E0	6.06E2	4.11E2	-7.17007E-2	-8.80018E1	-4.76837E-5	-8.80022E1	7.62939E-4	3.09944E-3	9.74894E-2	1.57979E1	-1.98192E1	-1.99278E1	1.50154E1	2.24304E-9	2.51443E-3	2.51443E-3	6.31288E-3	2.1185E-2
1.6E1	3.39E2	1.0E0	6.47E2	4.41E2	-7.16233E-2	-8.80018E1	-5.00679E-4	-8.80019E1	9.77516E-4	3.40939E-3	9.71556E-2	1.57844E1	-1.9811E1	-1.99089E1	1.50307E1	2.23965E-9	2.51761E-3	2.51761E-3	6.3074E-3	2.12244E-2
1.7E1	8.96E2	0.0E0	6.87E2	4.7E2	-7.20871E-2	-8.80017E1	-1.43051E-4	-8.80015E1	9.05991E-4	3.14713E-3	9.74417E-2	1.58089E1	-1.98575E1	-1.99465E1	1.50094E1					
1.8E1	3.688E3	1.0E0	7.27E2	5.0E2	-7.23189E-2	-8.80019E1	-2.38419E-4	-8.80018E1	8.10623E-4	3.0756E-3	9.74655E-2	1.58256E1	-1.98181E1	-1.9926E1	1.50282E1	2.24993E-9	2.52222E-3	2.52222E-3	6.34231E-3	2.10425E-2
1.9E1	1.909E3	1.0E0	7.68E2	5.29E2	-7.18554E-2	-8.80016E1	-9.53674E-5	-8.80019E1	1.0252E-3	3.12328E-3	9.77278E-2	1.58407E1	-1.98224E1	-1.99498E1	1.50058E1	2.23964E-9	2.5131E-3	2.5131E-3	6.33436E-3	2.11148E-2
2.0E1	1.7E1	0.0E0	8.08E2	5.58E2	-7.23964E-2	-8.8002E1	-9.53674E-5	-8.8002E1	9.77516E-4	3.05176E-3	9.73463E-2	1.57983E1	-1.98067E1	-1.99316E1	1.50184E1	2.23138E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.11115E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.13915E-2	-8.80022E1	-2.38419E-4	-8.80017E1	6.4373E-4	3.38554E-3	9.72509E-2	1.58185E1	-1.98428E1	-1.99248E1	1.49704E1	2.23764E-9	2.52585E-3	2.52585E-3	6.31858E-3	2.10893E-2
2.2E1	8.0E0	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.80019E1	-5.00679E-4	-8.80018E1	8.82149E-4	3.43323E-3	9.73701E-2	1.5802E1	-1.98234E1	-1.99095E1	1.50364E1	2.23773E-9	2.52384E-3	2.52384E-3	6.30202E-3	2.11509E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.16233E-2	-8.80018E1	-2.86102E-4	-8.80018E1	6.91414E-4	3.0756E-3	9.76324E-2	1.58143E1	-1.98434E1	-1.99276E1	1.50004E1	2.2372E-9	2.51662E-3	2.51662E-3	6.34037E-3	2.10931E-2