[Scan]
initial_time=2016-01-18T16:31:40
final_time=2016-01-18T16:32:08
ip_count=19
run=1024
dataset=1
scan=19
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.00005E-2
qbias_imon=-3.7964E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-7.30979E-10
ql2_vset=
ql2_vmon=-3.8147E-4
ql2_imon=1.20827E-9
ql3_vset=
ql3_vmon=-8.80023E1
ql3_imon=-2.56362E-9
ql4_vset=
ql4_vmon=9.05991E-4
ql4_imon=1.35284E-8
mult1=-9.4305E-9
mult2=-2.66398E-9
rf_tmon=-5.48861E-3
rf_agc=3.16405E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.3617E-3
ql5_imon=6.48725E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65383E0
bslens_imon=2.37691E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19624E1
lens5a_imon=2.01341E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12633E2
lens4a_imon=2.05008E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53847E1
cs_ef1b_imon=2.86749E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04697E2
lens23_imon=1.02369E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0451E1
cs_ea1_imon=2.54291E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0395E0
lens1_imon=1.50267E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64568E1
os_ef1alow_imon=2.98426E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03637E1
cs_ea2_imon=1.48179E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84666E1
cs_ef1a_imon=2.95368E-5
olens2_vset=0.0E0
olens2_vmon=9.29832E-4
olens2_imon=1.10171E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11506E1
os_restr1_imon=4.25168E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15229E1
os_ea1_imon=2.34364E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.07253E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2167E0
cs_ionrep_imon=1.19085E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92058E2
cs_nozzle_imon=1.93753E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02058E1
cs_anode1_imon=2.97418E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99969E1
olens4_imon=4.20719E-9
tplens_vset=0.0E0
tplens_vmon=-1.72461E0
tplens_imon=-1.53771E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.98952E1
iondef3_imon=8.45761E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98912E1
iondef2_imon=9.44157E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03335E2
lens6_imon=2.98526E-4
ql6_vset=1.0E-1
ql6_vmon=9.72033E-2
ql6_imon=9.30083E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27215E0
ionrepsh_imon=1.73875E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33994E1
lens5b_imon=2.1872E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74785E1
cs_ef2b_imon=3.13057E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.3164E0
os_ea2_imon=-8.01483E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06217E2
lens4b_imon=2.00488E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7131E1
cs_ef2a_imon=3.16671E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10205E0
os_ef2alow_imon=-2.50508E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.01864E-1
os_ef2bup_imon=-5.24358E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11442E1
os_restr2_imon=3.4138E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23094E2
cs_ionfoca_imon=6.28442E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01885E1
cs_anode2_imon=2.23534E-5
iondef1_vset=1.6E1
iondef1_vmon=1.5785E1
iondef1_imon=4.87927E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50178E1
iondef4_imon=5.35942E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27953E1
olens3_imon=2.5665E-8
olens1_vset=0.0E0
olens1_vmon=1.40667E-3
olens1_imon=1.27745E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15389E0
cs_ionaccel_imon=-1.97336E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02146E2
cs_ionfocb_imon=1.47167E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56411E1
einzel_imon=7.68784E-6
window_vset=0.0E0
window_vmon=2.67498E-1
window_imon=-8.57807E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82822E2
mask1_imon=2.39188E-4
mask2_vset=0.0E0
mask2_vmon=-1.87439E1
mask2_imon=-6.66668E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92806E3
multa_neg_imon=5.84199E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.30565E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50241E3
multb_neg_imon=7.02061E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32288E0
defgridb_imon=6.43307E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3314E1
os_fil1_imon=9.45212E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07601E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.67049E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30427E1
cs_fil1_imon=9.97022E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62534E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67649E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.20526E-2
os_fil2_imon=-2.77344E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.06295E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.04468E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37517E-1
cs_fil2_imon=-2.84295E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.98741E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22359E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.11482E-2
chamber_ion_pmon=2.23526E-9
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.88167E-1
res40_imon=-2.4877E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.469E3	1.0E0	1.47E2	4.1E1	-7.21643E-2	-8.80021E1	1.43051E-4	-8.80018E1	1.04904E-3	3.26633E-3	9.70125E-2	1.57753E1	-1.98164E1	-1.99882E1	1.49974E1	2.23773E-9	2.52384E-3	2.52384E-3	6.30202E-3	2.1187E-2
2.0E0	3.383E3	0.0E0	3.16E2	1.6E2	-7.17779E-2	-8.80021E1	3.57628E-4	-8.80015E1	1.07288E-3	2.90871E-3	9.7084E-2	1.57787E1	-1.98104E1	-1.9912E1	1.50665E1	2.2372E-9	2.5188E-3	2.5188E-3	6.29098E-3	2.12587E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.07733E-2	-8.80022E1	4.52995E-4	-8.80018E1	1.00136E-3	3.17097E-3	9.70602E-2	1.58325E1	-1.9844E1	-1.99129E1	1.50115E1	2.24062E-9	2.52027E-3	2.52027E-3	6.33538E-3	2.11641E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.17779E-2	-8.80023E1	3.8147E-4	-8.8002E1	7.39098E-4	3.31402E-3	9.68218E-2	1.58152E1	-1.98289E1	-1.99486E1	1.50352E1	2.2415E-9	2.51524E-3	2.51524E-3	6.32039E-3	2.11472E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.13915E-2	-8.80023E1	4.76837E-4	-8.8002E1	8.58307E-4	3.00407E-3	9.73225E-2	1.57808E1	-1.98188E1	-1.99155E1	1.50347E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.13915E-2	-8.80021E1	2.6226E-4	-8.80022E1	9.77516E-4	3.09944E-3	9.71556E-2	1.58347E1	-1.9823E1	-1.9936E1	1.5028E1	2.24222E-9	2.51793E-3	2.51793E-3	6.31925E-3	2.12159E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.15461E-2	-8.80019E1	2.38419E-4	-8.8002E1	1.07288E-3	3.14713E-3	9.71317E-2	1.57601E1	-1.98269E1	-1.99425E1	1.5024E1	2.24499E-9	2.5188E-3	2.5188E-3	6.29098E-3	2.12218E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.15461E-2	-8.80021E1	2.38419E-5	-8.80019E1	1.12057E-3	3.12328E-3	9.71317E-2	1.58431E1	-1.98705E1	-1.99185E1	1.50178E1	2.23773E-9	2.52923E-3	2.52923E-3	6.32896E-3	2.12051E-2
1.2E1	8.8E1	0.0E0	4.85E2	3.23E2	-7.10825E-2	-8.80019E1	4.76837E-5	-8.80021E1	1.12057E-3	2.90871E-3	9.7084E-2	1.57747E1	-1.98452E1	-1.99234E1	1.50226E1	2.2473E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.10788E-2
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.11597E-2	-8.8002E1	-9.53674E-5	-8.80023E1	5.48363E-4	3.40939E-3	9.70125E-2	1.58498E1	-1.98194E1	-1.99426E1	1.50364E1	2.24459E-9	2.53033E-3	2.53033E-3	6.29067E-3	2.12392E-2
1.4E1	1.44E2	0.0E0	5.66E2	3.82E2	-7.18554E-2	-8.80021E1	1.43051E-4	-8.8002E1	6.91414E-4	2.98023E-3	9.72509E-2	1.57957E1	-1.98164E1	-1.9936E1	1.50148E1	2.24694E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.12403E-2
1.5E1	9.9E1	0.0E0	6.06E2	4.11E2	-7.12368E-2	-8.80025E1	-7.15256E-5	-8.80021E1	6.91414E-4	2.95639E-3	9.74417E-2	1.5792E1	-1.98482E1	-1.99007E1	1.50166E1	2.24207E-9	2.5199E-3	2.5199E-3	6.33486E-3	2.11666E-2
1.6E1	3.66E2	0.0E0	6.47E2	4.41E2	-7.12368E-2	-8.80023E1	-2.38419E-4	-8.80021E1	5.72205E-4	3.40939E-3	9.73701E-2	1.58271E1	-1.98367E1	-1.99285E1	1.50256E1	2.23964E-9	2.51632E-3	2.51632E-3	6.30202E-3	2.12594E-2
1.7E1	8.4E2	0.0E0	6.87E2	4.7E2	-7.201E-2	-8.8002E1	-1.43051E-4	-8.80016E1	8.82149E-4	3.38554E-3	9.74417E-2	1.57997E1	-1.97921E1	-1.9949E1	1.50196E1	2.23429E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.11666E-2
1.8E1	3.553E3	2.0E0	7.27E2	5.0E2	-7.14689E-2	-8.80022E1	-4.76837E-5	-8.80021E1	5.24521E-4	3.19481E-3	9.72748E-2	1.58203E1	-1.98104E1	-1.99216E1	1.50074E1	2.23429E-9	2.51552E-3	2.51552E-3	6.28552E-3	2.1185E-2
1.9E1	1.828E3	0.0E0	7.68E2	5.29E2	-7.18554E-2	-8.80022E1	-4.76837E-5	-8.80019E1	1.0252E-3	3.31402E-3	9.72509E-2	1.58215E1	-1.98417E1	-1.99184E1	1.5019E1	2.23773E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.13139E-2
2.0E1	2.0E1	0.0E0	8.08E2	5.58E2	-7.14689E-2	-8.80022E1	-3.57628E-4	-8.80022E1	9.53674E-4	3.26633E-3	9.7084E-2	1.58321E1	-1.9821E1	-1.98971E1	1.50232E1	2.24012E-9	2.52209E-3	2.52209E-3	6.33486E-3	2.1185E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.13915E-2	-8.80022E1	-1.43051E-4	-8.80021E1	6.91414E-4	3.43323E-3	9.75847E-2	1.58293E1	-1.9838E1	-1.99654E1	1.50437E1	2.2406E-9	2.52492E-3	2.52492E-3	6.3074E-3	2.12413E-2
2.2E1	1.7E1	0.0E0	8.89E2	6.17E2	-7.09279E-2	-8.80018E1	-2.14577E-4	-8.8002E1	5.00679E-4	3.52859E-3	9.72986E-2	1.58131E1	-1.98302E1	-1.99191E1	1.50064E1	2.24109E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.1185E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.00005E-2	-8.80018E1	-3.8147E-4	-8.80023E1	9.05991E-4	3.3617E-3	9.72033E-2	1.5785E1	-1.98912E1	-1.98952E1	1.50178E1	2.23526E-9	2.51443E-3	2.51443E-3	6.3074E-3	2.11482E-2