[Scan]
initial_time=2016-01-18T16:32:18
final_time=2016-01-18T16:32:43
ip_count=19
run=1024
dataset=1
scan=20
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.16233E-2
qbias_imon=-3.70931E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-7.29239E-10
ql2_vset=
ql2_vmon=2.38419E-5
ql2_imon=1.25436E-9
ql3_vset=
ql3_vmon=-8.80017E1
ql3_imon=-2.48597E-9
ql4_vset=
ql4_vmon=9.05991E-4
ql4_imon=1.35587E-8
mult1=-9.41529E-9
mult2=-2.66072E-9
rf_tmon=-5.10724E-3
rf_agc=3.30572E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.48091E-3
ql5_imon=6.77896E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6409E0
bslens_imon=2.58101E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19448E1
lens5a_imon=2.022E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12554E2
lens4a_imon=2.04967E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53887E1
cs_ef1b_imon=2.86377E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04679E2
lens23_imon=1.02186E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04513E1
cs_ea1_imon=2.55662E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98788E0
lens1_imon=1.6978E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65077E1
os_ef1alow_imon=2.97009E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03684E1
cs_ea2_imon=1.48631E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84773E1
cs_ef1a_imon=2.96396E-5
olens2_vset=0.0E0
olens2_vmon=1.09673E-3
olens2_imon=1.09733E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11472E1
os_restr1_imon=4.24301E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15456E1
os_ea1_imon=2.35114E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63683E1
os_ef1bup_imon=3.08145E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23107E0
cs_ionrep_imon=1.17412E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92059E2
cs_nozzle_imon=1.93416E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01797E1
cs_anode1_imon=2.97009E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9997E1
olens4_imon=4.23819E-9
tplens_vset=0.0E0
tplens_vmon=-1.72254E0
tplens_imon=-2.27247E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99426E1
iondef3_imon=8.86084E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98086E1
iondef2_imon=9.18529E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03311E2
lens6_imon=2.98288E-4
ql6_vset=1.0E-1
ql6_vmon=9.72271E-2
ql6_imon=9.4403E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23467E0
ionrepsh_imon=1.77218E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34108E1
lens5b_imon=2.18315E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74735E1
cs_ef2b_imon=3.1247E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.27313E0
os_ea2_imon=-7.5357E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06211E2
lens4b_imon=2.00583E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71282E1
cs_ef2a_imon=3.17263E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03834E0
os_ef2alow_imon=-2.53661E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.14242E-1
os_ef2bup_imon=-5.16751E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1146E1
os_restr2_imon=3.41878E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23092E2
cs_ionfoca_imon=6.29496E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02001E1
cs_anode2_imon=2.24172E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58173E1
iondef1_imon=5.02157E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50166E1
iondef4_imon=5.26597E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27949E1
olens3_imon=2.56909E-8
olens1_vset=0.0E0
olens1_vmon=1.0252E-3
olens1_imon=1.27406E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15717E0
cs_ionaccel_imon=-1.7978E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02137E2
cs_ionfocb_imon=1.47486E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56555E1
einzel_imon=7.60855E-6
window_vset=0.0E0
window_vmon=2.87019E-1
window_imon=-7.34629E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82827E2
mask1_imon=2.39181E-4
mask2_vset=0.0E0
mask2_vmon=-1.87389E1
mask2_imon=-6.91381E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92624E3
multa_neg_imon=7.52701E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.44913E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50175E3
multb_neg_imon=6.56088E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34141E0
defgridb_imon=6.35179E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33138E1
os_fil1_imon=9.45261E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.05906E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66251E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30433E1
cs_fil1_imon=9.99603E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61753E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67568E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.21558E-2
os_fil2_imon=-2.68399E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.851E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.22226E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35867E-1
cs_fil2_imon=-2.37765E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.29879E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22501E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.11328E-2
chamber_ion_pmon=2.21401E-9
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.47879E-1
res40_imon=-2.49336E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=182
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.453E3	1.0E0	1.47E2	4.1E1	-7.13915E-2	-8.80024E1	-1.90735E-4	-8.80021E1	8.82149E-4	3.43323E-3	9.72509E-2	1.57967E1	-1.98234E1	-1.99319E1	1.50335E1	2.23678E-9	2.51847E-3	2.51847E-3	6.33436E-3	2.1187E-2
2.0E0	3.26E3	1.0E0	3.16E2	1.6E2	-7.00005E-2	-8.80023E1	-2.14577E-4	-8.80018E1	7.86781E-4	3.17097E-3	9.74417E-2	1.58137E1	-1.982E1	-1.99282E1	1.5034E1	2.23392E-9	2.51632E-3	2.51632E-3	6.31278E-3	2.11689E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.08504E-2	-8.80022E1	-9.53674E-5	-8.80019E1	7.62939E-4	3.19481E-3	9.73225E-2	1.58018E1	-1.98527E1	-1.99494E1	1.50045E1	2.22579E-9	2.5147E-3	2.5147E-3	6.29067E-3	2.10707E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.05415E-2	-8.80021E1	-4.52995E-4	-8.80019E1	8.34465E-4	2.93255E-3	9.72271E-2	1.57891E1	-1.98398E1	-1.9909E1	1.50194E1	2.2345E-9	2.51709E-3	2.51709E-3	6.2863E-3	2.126E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.03869E-2	-8.80019E1	0.0E0	-8.80023E1	8.34465E-4	3.26633E-3	9.71079E-2	1.58221E1	-1.98122E1	-1.99276E1	1.50358E1	2.23468E-9	2.52585E-3	2.52585E-3	6.32978E-3	2.12392E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.10825E-2	-8.80023E1	-1.43051E-4	-8.80018E1	6.67572E-4	3.14713E-3	9.71317E-2	1.58292E1	-1.9844E1	-1.99331E1	1.5007E1	2.23202E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.11509E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.08504E-2	-8.80022E1	-1.90735E-4	-8.80022E1	1.04904E-3	3.09944E-3	9.70602E-2	1.58023E1	-1.98296E1	-1.99228E1	1.50172E1	2.21689E-9	2.51334E-3	2.51334E-3	6.3074E-3	2.11666E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.09279E-2	-8.80022E1	-1.19209E-4	-8.8002E1	8.34465E-4	3.14713E-3	9.72509E-2	1.5762E1	-1.98242E1	-1.99318E1	1.50292E1	2.22558E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.10931E-2
1.2E1	8.9E1	0.0E0	4.85E2	3.23E2	-7.12368E-2	-8.80021E1	-2.14577E-4	-8.8002E1	9.29832E-4	2.81334E-3	9.69648E-2	1.58044E1	-1.98417E1	-1.99178E1	1.50262E1	2.23041E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.12957E-2
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.13915E-2	-8.8002E1	-1.43051E-4	-8.8002E1	5.72205E-4	2.98023E-3	9.70125E-2	1.58344E1	-1.9819E1	-1.98869E1	1.50244E1	2.21779E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.12957E-2
1.4E1	1.25E2	1.0E0	5.66E2	3.82E2	-7.13915E-2	-8.8002E1	1.90735E-4	-8.80019E1	8.34465E-4	3.17097E-3	9.72033E-2	1.58425E1	-1.98326E1	-1.98705E1	1.50412E1	2.21401E-9	2.5147E-3	2.5147E-3	6.33538E-3	2.12392E-2
1.5E1	6.8E1	0.0E0	6.06E2	4.11E2	-7.13915E-2	-8.80024E1	-9.53674E-5	-8.8002E1	5.24521E-4	2.74181E-3	9.75609E-2	1.58221E1	-1.98352E1	-1.99166E1	1.50118E1	2.21786E-9	2.51334E-3	2.51334E-3	6.26916E-3	2.12034E-2
1.6E1	3.08E2	2.0E0	6.47E2	4.41E2	-7.16233E-2	-8.80024E1	-1.19209E-4	-8.80018E1	8.82149E-4	3.00407E-3	9.72986E-2	1.58173E1	-1.98428E1	-1.99276E1	1.50057E1	2.21684E-9	2.52276E-3	2.52276E-3	6.3074E-3	2.1187E-2
1.7E1	8.22E2	0.0E0	6.87E2	4.7E2	-7.22418E-2	-8.80022E1	-2.14577E-4	-8.8002E1	8.58307E-4	3.12328E-3	9.72748E-2	1.58056E1	-1.98393E1	-1.99384E1	1.5016E1	2.2159E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.13139E-2
1.8E1	3.716E3	2.0E0	7.27E2	5.0E2	-7.23189E-2	-8.8002E1	-9.53674E-5	-8.80017E1	9.53674E-4	3.57628E-3	9.72748E-2	1.58588E1	-1.98717E1	-1.99408E1	1.50118E1	2.21401E-9	2.51552E-3	2.51552E-3	6.29645E-3	2.12218E-2
1.9E1	1.833E3	0.0E0	7.68E2	5.29E2	-7.17007E-2	-8.80021E1	-2.6226E-4	-8.80019E1	8.34465E-4	3.40939E-3	9.72986E-2	1.58315E1	-1.9834E1	-1.99284E1	1.50346E1	2.22268E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.12587E-2
2.0E1	2.2E1	0.0E0	8.08E2	5.58E2	-7.17779E-2	-8.80018E1	-1.43051E-4	-8.80018E1	6.19888E-4	3.24249E-3	9.74894E-2	1.58157E1	-1.98377E1	-1.99595E1	1.5019E1	2.21401E-9	2.51393E-3	2.51393E-3	6.35514E-3	2.12422E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.06958E-2	-8.8002E1	-4.29153E-4	-8.80015E1	9.05991E-4	3.24249E-3	9.73463E-2	1.57754E1	-1.98416E1	-1.99695E1	1.50234E1	2.21401E-9	2.51182E-3	2.51182E-3	6.33919E-3	2.11534E-2
2.2E1	1.0E1	0.0E0	8.89E2	6.17E2	-7.14689E-2	-8.8002E1	7.15256E-5	-8.80017E1	1.21593E-3	3.40939E-3	9.71556E-2	1.56964E1	-1.97585E1	-2.00835E1	1.50225E1	2.21401E-9	2.52362E-3	2.52362E-3	6.31299E-3	2.12768E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.16233E-2	-8.80019E1	2.38419E-5	-8.80017E1	9.05991E-4	3.48091E-3	9.72271E-2	1.58173E1	-1.98086E1	-1.99426E1	1.50166E1	2.21401E-9	2.51954E-3	2.51954E-3	6.3074E-3	2.11328E-2