[Scan]
initial_time=2016-01-18T16:32:52
final_time=2016-01-18T16:33:14
ip_count=19
run=1024
dataset=1
scan=21
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17779E-2
qbias_imon=-3.74845E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-7.33793E-10
ql2_vset=
ql2_vmon=9.53674E-5
ql2_imon=1.22491E-9
ql3_vset=
ql3_vmon=-8.80018E1
ql3_imon=-2.44102E-9
ql4_vset=
ql4_vmon=7.15256E-4
ql4_imon=1.35628E-8
mult1=-9.84875E-9
mult2=-2.7266E-9
rf_tmon=-4.89695E-3
rf_agc=3.28769E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.43323E-3
ql5_imon=6.68848E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65052E0
bslens_imon=2.38274E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19947E1
lens5a_imon=1.98451E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12547E2
lens4a_imon=2.04999E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54073E1
cs_ef1b_imon=2.86201E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0465E2
lens23_imon=1.02283E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04525E1
cs_ea1_imon=2.56347E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00471E0
lens1_imon=1.48871E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64827E1
os_ef1alow_imon=2.98439E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03714E1
cs_ea2_imon=1.49604E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84787E1
cs_ef1a_imon=2.95632E-5
olens2_vset=0.0E0
olens2_vmon=1.00136E-3
olens2_imon=1.09442E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11385E1
os_restr1_imon=4.25687E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14813E1
os_ea1_imon=2.36051E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6381E1
os_ef1bup_imon=3.06972E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20163E0
cs_ionrep_imon=1.18962E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92072E2
cs_nozzle_imon=1.93319E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01753E1
cs_anode1_imon=2.97953E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99957E1
olens4_imon=4.26775E-9
tplens_vset=0.0E0
tplens_vmon=-1.71413E0
tplens_imon=-2.30852E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99276E1
iondef3_imon=8.94015E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98452E1
iondef2_imon=9.34751E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03352E2
lens6_imon=2.98184E-4
ql6_vset=1.0E-1
ql6_vmon=9.73463E-2
ql6_imon=9.53138E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23107E0
ionrepsh_imon=1.7455E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34102E1
lens5b_imon=2.17341E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74757E1
cs_ef2b_imon=3.13335E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.26111E0
os_ea2_imon=-4.54359E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06186E2
lens4b_imon=2.00525E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71414E1
cs_ef2a_imon=3.16628E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05269E0
os_ef2alow_imon=-2.47701E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.13226E-1
os_ef2bup_imon=-5.26523E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11541E1
os_restr2_imon=3.4204E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23094E2
cs_ionfoca_imon=6.28486E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.24448E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58389E1
iondef1_imon=5.23065E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49854E1
iondef4_imon=5.27388E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27951E1
olens3_imon=2.56823E-8
olens1_vset=0.0E0
olens1_vmon=1.45435E-3
olens1_imon=1.2739E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14948E0
cs_ionaccel_imon=-1.89691E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02153E2
cs_ionfocb_imon=1.47327E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56536E1
einzel_imon=7.72901E-6
window_vset=0.0E0
window_vmon=2.68745E-1
window_imon=-8.30273E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82851E2
mask1_imon=2.3926E-4
mask2_vset=0.0E0
mask2_vmon=-1.87436E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92608E3
multa_neg_imon=7.1593E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.95022E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50162E3
multb_neg_imon=6.87451E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.19103E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33132E1
os_fil1_imon=9.42776E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0577E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66218E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30424E1
cs_fil1_imon=9.98453E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61867E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67362E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.20268E-2
os_fil2_imon=-2.80597E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9284E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.19003E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35299E-1
cs_fil2_imon=-2.5128E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.02394E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22362E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.12218E-2
chamber_ion_pmon=2.22075E-9
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.35058E-1
res40_imon=-2.4321E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=208
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.467E3	0.0E0	1.47E2	4.1E1	-7.09279E-2	-8.80023E1	1.66893E-4	-8.80016E1	7.86781E-4	3.12328E-3	9.73463E-2	1.58262E1	-1.98133E1	-1.99561E1	1.50323E1	2.2426E-9	2.52473E-3	2.52473E-3	6.27954E-3	2.12204E-2
2.0E0	3.307E3	2.0E0	3.16E2	1.6E2	-7.21643E-2	-8.80021E1	-1.19209E-4	-8.80016E1	8.34465E-4	3.40939E-3	9.74417E-2	1.58167E1	-1.98049E1	-1.99457E1	1.50147E1	2.24155E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.11509E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.13915E-2	-8.80023E1	-2.38419E-4	-8.8002E1	8.58307E-4	3.50475E-3	9.74178E-2	1.57831E1	-1.98735E1	-1.99396E1	1.50196E1	2.24161E-9	2.51804E-3	2.51804E-3	6.35223E-3	2.11829E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.10051E-2	-8.80016E1	-7.15256E-5	-8.80018E1	1.00136E-3	3.50475E-3	9.72748E-2	1.58876E1	-1.98422E1	-1.98921E1	1.50196E1	2.23583E-9	2.52169E-3	2.52169E-3	6.32896E-3	2.11689E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.05415E-2	-8.80021E1	0.0E0	-8.8002E1	1.00136E-3	3.33786E-3	9.73463E-2	1.5857E1	-1.98507E1	-1.99504E1	1.5004E1	2.24155E-9	2.52599E-3	2.52599E-3	6.34518E-3	2.12594E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.03094E-2	-8.8002E1	1.66893E-4	-8.80019E1	9.53674E-4	3.3617E-3	9.72509E-2	1.58221E1	-1.98561E1	-1.99318E1	1.50346E1	2.23915E-9	2.51225E-3	2.51225E-3	6.33486E-3	2.12034E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17007E-2	-8.80023E1	1.90735E-4	-8.80018E1	7.15256E-4	3.17097E-3	9.7394E-2	1.58492E1	-1.98358E1	-1.99343E1	1.5016E1	2.24012E-9	2.52428E-3	2.52428E-3	6.34037E-3	2.11482E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80017E1	-1.43051E-4	-8.8002E1	9.53674E-4	3.69549E-3	9.72986E-2	1.58035E1	-1.98218E1	-1.99384E1	1.50256E1	2.22268E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.12403E-2
1.2E1	7.6E1	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.8002E1	4.76837E-5	-8.80021E1	9.53674E-4	3.45707E-3	9.72033E-2	1.58251E1	-1.97948E1	-1.99384E1	1.50155E1	2.21401E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.12772E-2
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.16233E-2	-8.80018E1	0.0E0	-8.8002E1	9.05991E-4	3.48091E-3	9.70125E-2	1.57807E1	-1.98458E1	-1.99462E1	1.50184E1	2.21401E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.12594E-2
1.4E1	1.11E2	0.0E0	5.66E2	3.82E2	-7.21643E-2	-8.8002E1	-1.66893E-4	-8.80019E1	1.16825E-3	3.12328E-3	9.74894E-2	1.57867E1	-1.98218E1	-1.99373E1	1.50004E1	2.23332E-9	2.51552E-3	2.51552E-3	6.34037E-3	2.12587E-2
1.5E1	9.0E1	0.0E0	6.06E2	4.11E2	-7.21643E-2	-8.80018E1	-1.66893E-4	-8.80021E1	8.58307E-4	3.21865E-3	9.72509E-2	1.58044E1	-1.98373E1	-1.9942E1	1.50196E1	2.23544E-9	2.51709E-3	2.51709E-3	6.30212E-3	2.11889E-2
1.6E1	3.02E2	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80024E1	-3.8147E-4	-8.80019E1	5.48363E-4	3.21865E-3	9.74417E-2	1.58125E1	-1.98272E1	-1.9924E1	1.50443E1	2.23041E-9	2.52647E-3	2.52647E-3	6.35692E-3	2.12034E-2
1.7E1	8.35E2	1.0E0	6.87E2	4.7E2	-7.33239E-2	-8.80023E1	-3.8147E-4	-8.80015E1	6.91414E-4	3.38554E-3	9.72748E-2	1.58297E1	-1.98322E1	-1.9913E1	1.5022E1	2.2372E-9	2.51334E-3	2.51334E-3	6.31837E-3	2.10748E-2
1.8E1	3.601E3	3.0E0	7.27E2	5.0E2	-7.30918E-2	-8.80018E1	-2.6226E-4	-8.80018E1	8.58307E-4	3.43323E-3	9.69648E-2	1.57935E1	-1.98263E1	-1.99106E1	1.50016E1	2.23773E-9	2.52492E-3	2.52492E-3	6.31817E-3	2.11509E-2
1.9E1	1.774E3	3.0E0	7.68E2	5.29E2	-7.30146E-2	-8.8002E1	-9.53674E-5	-8.80015E1	8.82149E-4	3.21865E-3	9.69648E-2	1.57957E1	-1.9829E1	-1.99384E1	1.50039E1	2.23731E-9	2.51393E-3	2.51393E-3	6.3445E-3	2.11534E-2
2.0E1	1.3E1	0.0E0	8.08E2	5.58E2	-7.286E-2	-8.80023E1	-2.6226E-4	-8.80016E1	1.09673E-3	3.26633E-3	9.68695E-2	1.57873E1	-1.98525E1	-1.99246E1	1.49944E1	2.23107E-9	2.51847E-3	2.51847E-3	6.29128E-3	2.12594E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80022E1	-4.76837E-4	-8.80017E1	7.86781E-4	3.57628E-3	9.71794E-2	1.58504E1	-1.98529E1	-1.98995E1	1.50473E1	2.22268E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.12218E-2
2.2E1	1.1E1	0.0E0	8.89E2	6.17E2	-7.22418E-2	-8.80022E1	-7.15256E-5	-8.80016E1	8.82149E-4	3.52859E-3	9.72033E-2	1.57482E1	-1.9811E1	-1.99684E1	1.49878E1	2.21305E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.11666E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.17779E-2	-8.80025E1	9.53674E-5	-8.80018E1	7.15256E-4	3.43323E-3	9.73463E-2	1.58389E1	-1.98452E1	-1.99276E1	1.49854E1	2.22075E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.12218E-2