[Scan]
initial_time=2016-01-18T16:33:22
final_time=2016-01-18T16:33:45
ip_count=19
run=1024
dataset=1
scan=22
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.80848E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-7.3384E-10
ql2_vset=
ql2_vmon=-2.38419E-5
ql2_imon=1.16177E-9
ql3_vset=
ql3_vmon=-8.80016E1
ql3_imon=-2.35108E-9
ql4_vset=
ql4_vmon=1.16825E-3
ql4_imon=1.35225E-8
mult1=-9.64406E-9
mult2=-2.03195E-9
rf_tmon=-7.07795E-3
rf_agc=3.2216E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.40939E-3
ql5_imon=6.58262E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65749E0
bslens_imon=2.26024E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19768E1
lens5a_imon=1.98391E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12567E2
lens4a_imon=2.05045E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53959E1
cs_ef1b_imon=2.86521E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04673E2
lens23_imon=1.02198E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04615E1
cs_ea1_imon=2.55248E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97533E0
lens1_imon=1.5183E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64753E1
os_ef1alow_imon=2.97117E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03562E1
cs_ea2_imon=1.4921E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84725E1
cs_ef1a_imon=2.95026E-5
olens2_vset=0.0E0
olens2_vmon=1.00136E-3
olens2_imon=1.09304E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11502E1
os_restr1_imon=4.25778E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14761E1
os_ea1_imon=2.33174E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63749E1
os_ef1bup_imon=3.07064E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23373E0
cs_ionrep_imon=1.17696E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92039E2
cs_nozzle_imon=1.93413E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=2.97045E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99972E1
olens4_imon=4.19804E-9
tplens_vset=0.0E0
tplens_vmon=-1.70571E0
tplens_imon=-4.76125E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99486E1
iondef3_imon=8.83486E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.97479E1
iondef2_imon=9.47028E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03302E2
lens6_imon=2.98214E-4
ql6_vset=1.0E-1
ql6_vmon=9.71556E-2
ql6_imon=9.65083E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23679E0
ionrepsh_imon=1.75802E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33437E1
lens5b_imon=2.17343E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74483E1
cs_ef2b_imon=3.12758E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.25638E0
os_ea2_imon=-7.55271E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0623E2
lens4b_imon=2.00667E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71564E1
cs_ef2a_imon=3.16398E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02453E0
os_ef2alow_imon=-2.60869E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.15444E-1
os_ef2bup_imon=-5.2504E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11256E1
os_restr2_imon=3.40725E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23091E2
cs_ionfoca_imon=6.28459E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01923E1
cs_anode2_imon=2.24245E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57686E1
iondef1_imon=5.31982E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50226E1
iondef4_imon=5.48221E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27952E1
olens3_imon=2.56946E-8
olens1_vset=0.0E0
olens1_vmon=1.40667E-3
olens1_imon=1.27248E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14816E0
cs_ionaccel_imon=-1.85546E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02176E2
cs_ionfocb_imon=1.4741E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56369E1
einzel_imon=7.77073E-6
window_vset=0.0E0
window_vmon=2.47976E-1
window_imon=-9.68887E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82806E2
mask1_imon=2.39199E-4
mask2_vset=0.0E0
mask2_vmon=-1.87119E1
mask2_imon=-6.69758E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.17835E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.63475E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.3069E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40049E0
defgridb_imon=5.95158E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33123E1
os_fil1_imon=9.44006E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06632E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66334E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30451E1
cs_fil1_imon=9.97435E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62504E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67326E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.23943E-2
os_fil2_imon=-2.81013E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85701E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.24631E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35996E-1
cs_fil2_imon=-2.73204E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.56018E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22326E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.12772E-2
chamber_ion_pmon=2.23526E-9
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.61094E-1
res40_imon=-2.59428E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.419E3	2.0E0	1.47E2	4.1E1	-7.17007E-2	-8.80025E1	-4.05312E-4	-8.80019E1	9.53674E-4	3.38554E-3	9.72509E-2	1.58351E1	-1.98364E1	-1.99201E1	1.50172E1	2.23526E-9	2.51771E-3	2.51771E-3	6.29098E-3	2.12218E-2
2.0E0	3.3E3	5.0E0	3.16E2	1.6E2	-7.16233E-2	-8.80021E1	-3.33786E-4	-8.80016E1	1.23978E-3	3.05176E-3	9.72986E-2	1.57965E1	-1.98177E1	-1.99445E1	1.5022E1	2.21786E-9	2.51116E-3	2.51116E-3	6.32936E-3	2.12957E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.19325E-2	-8.80023E1	-2.6226E-4	-8.80019E1	1.16825E-3	3.19481E-3	9.69887E-2	1.58061E1	-1.98169E1	-1.9965E1	1.50304E1	2.22186E-9	2.51915E-3	2.51915E-3	6.31858E-3	2.11641E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.24736E-2	-8.80023E1	-4.29153E-4	-8.80016E1	8.82149E-4	3.40939E-3	9.71079E-2	1.5805E1	-1.98269E1	-1.99154E1	1.49952E1	2.23107E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.12232E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80023E1	-2.6226E-4	-8.80015E1	9.53674E-4	3.17097E-3	9.73225E-2	1.58431E1	-1.98182E1	-1.99047E1	1.5022E1	2.23637E-9	2.51919E-3	2.51919E-3	6.32328E-3	2.12244E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.21643E-2	-8.80023E1	-9.53674E-5	-8.80016E1	6.91414E-4	3.50475E-3	9.73463E-2	1.57595E1	-1.98057E1	-1.98771E1	1.50088E1	2.22579E-9	2.51359E-3	2.51359E-3	6.31299E-3	2.11641E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.201E-2	-8.80026E1	-1.90735E-4	-8.80014E1	1.09673E-3	3.19481E-3	9.77516E-2	1.58263E1	-1.98537E1	-1.99324E1	1.50268E1	2.22916E-9	2.51203E-3	2.51203E-3	6.3074E-3	2.12957E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.18554E-2	-8.80021E1	1.90735E-4	-8.80016E1	8.82149E-4	3.57628E-3	9.77278E-2	1.58345E1	-1.98257E1	-1.99319E1	1.50254E1	2.23202E-9	2.51954E-3	2.51954E-3	6.32896E-3	2.12413E-2
1.2E1	8.4E1	0.0E0	4.85E2	3.23E2	-7.17779E-2	-8.80021E1	-1.90735E-4	-8.80015E1	1.12057E-3	3.33786E-3	9.7537E-2	1.57985E1	-1.98558E1	-1.99307E1	1.50202E1	2.23487E-9	2.51417E-3	2.51417E-3	6.30202E-3	2.12413E-2
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80022E1	-5.72205E-4	-8.80018E1	1.0252E-3	3.29018E-3	9.75609E-2	1.58179E1	-1.98826E1	-1.99426E1	1.50094E1	2.24012E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.11666E-2
1.4E1	1.24E2	0.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80019E1	-4.05312E-4	-8.80017E1	1.28746E-3	3.33786E-3	9.73701E-2	1.5816E1	-1.98208E1	-1.99261E1	1.50328E1	2.23963E-9	2.52362E-3	2.52362E-3	6.27954E-3	2.13712E-2
1.5E1	8.5E1	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.80019E1	-1.43051E-4	-8.80019E1	1.07288E-3	3.3617E-3	9.73463E-2	1.58811E1	-1.98293E1	-1.99237E1	1.49958E1	2.22974E-9	2.5225E-3	2.5225E-3	6.33538E-3	2.12392E-2
1.6E1	3.88E2	0.0E0	6.47E2	4.41E2	-7.29374E-2	-8.80021E1	-9.53674E-5	-8.80017E1	1.26362E-3	3.62396E-3	9.76563E-2	1.57951E1	-1.98308E1	-1.99047E1	1.50178E1	2.22916E-9	2.51417E-3	2.51417E-3	6.3074E-3	2.12413E-2
1.7E1	8.96E2	0.0E0	6.87E2	4.7E2	-7.30918E-2	-8.80021E1	-1.90735E-4	-8.8002E1	1.16825E-3	3.50475E-3	9.72986E-2	1.58251E1	-1.98182E1	-1.993E1	1.50112E1	2.23011E-9	2.52276E-3	2.52276E-3	6.32896E-3	2.12232E-2
1.8E1	3.533E3	1.0E0	7.27E2	5.0E2	-7.3401E-2	-8.8002E1	0.0E0	-8.80019E1	1.0252E-3	3.3617E-3	9.74894E-2	1.58368E1	-1.98487E1	-1.98936E1	1.504E1	2.21401E-9	2.52139E-3	2.52139E-3	6.32978E-3	2.12392E-2
1.9E1	1.92E3	1.0E0	7.68E2	5.29E2	-7.32464E-2	-8.80019E1	1.66893E-4	-8.80019E1	9.29832E-4	3.26633E-3	9.74655E-2	1.58085E1	-1.98223E1	-1.9924E1	1.50244E1	2.22821E-9	2.52061E-3	2.52061E-3	6.30202E-3	2.12051E-2
2.0E1	1.7E1	0.0E0	8.08E2	5.58E2	-7.30146E-2	-8.80018E1	-9.53674E-5	-8.80021E1	1.28746E-3	3.3617E-3	9.7394E-2	1.58085E1	-1.98269E1	-1.99237E1	1.50467E1	2.21643E-9	2.51787E-3	2.51787E-3	6.3379E-3	2.11932E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80019E1	-4.76837E-5	-8.80019E1	9.05991E-4	3.60012E-3	9.75847E-2	1.57969E1	-1.98326E1	-1.99384E1	1.50268E1					
2.2E1	1.2E1	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80017E1	-2.38419E-4	-8.80017E1	9.53674E-4	3.48091E-3	9.74655E-2	1.58008E1	-1.98458E1	-1.99467E1	1.5016E1	2.23869E-9	2.51525E-3	2.51525E-3	6.34518E-3	2.12775E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80018E1	-2.38419E-5	-8.80016E1	1.16825E-3	3.40939E-3	9.71556E-2	1.57686E1	-1.97479E1	-1.99486E1	1.50226E1	2.23526E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.12772E-2