[Scan]
initial_time=2016-01-18T16:33:53
final_time=2016-01-18T16:34:16
ip_count=19
run=1024
dataset=1
scan=23
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.14689E-2
qbias_imon=-3.82371E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-7.46739E-10
ql2_vset=
ql2_vmon=-5.00679E-4
ql2_imon=1.24819E-9
ql3_vset=
ql3_vmon=-8.80018E1
ql3_imon=-2.51611E-9
ql4_vset=
ql4_vmon=1.07288E-3
ql4_imon=1.35321E-8
mult1=-1.01614E-8
mult2=-2.64094E-9
rf_tmon=-3.30018E-3
rf_agc=3.39875E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.50475E-3
ql5_imon=7.04241E-10
bslens_vset=-6.2E0
bslens_vmon=-6.60605E0
bslens_imon=2.33948E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20049E1
lens5a_imon=2.00578E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12577E2
lens4a_imon=2.05014E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53905E1
cs_ef1b_imon=2.86737E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0466E2
lens23_imon=1.02218E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04105E1
cs_ea1_imon=2.53932E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97647E0
lens1_imon=1.53558E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64981E1
os_ef1alow_imon=2.97874E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03834E1
cs_ea2_imon=1.49424E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84652E1
cs_ef1a_imon=2.96792E-5
olens2_vset=0.0E0
olens2_vmon=1.07288E-3
olens2_imon=1.09004E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11406E1
os_restr1_imon=4.25778E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15191E1
os_ea1_imon=2.34609E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63605E1
os_ef1bup_imon=3.07568E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24729E0
cs_ionrep_imon=1.20116E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92036E2
cs_nozzle_imon=1.93337E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01761E1
cs_anode1_imon=2.96396E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99972E1
olens4_imon=4.25304E-9
tplens_vset=0.0E0
tplens_vmon=-1.70632E0
tplens_imon=-3.57025E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99278E1
iondef3_imon=8.87886E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98222E1
iondef2_imon=9.44845E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03299E2
lens6_imon=2.98212E-4
ql6_vset=1.0E-1
ql6_vmon=9.72509E-2
ql6_imon=9.31489E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24969E0
ionrepsh_imon=1.75127E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33952E1
lens5b_imon=2.18711E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74669E1
cs_ef2b_imon=3.13587E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.29896E0
os_ea2_imon=-6.31002E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06257E2
lens4b_imon=2.00778E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71252E1
cs_ef2a_imon=3.16074E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04675E0
os_ef2alow_imon=-2.46814E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99827E-1
os_ef2bup_imon=-5.36212E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11226E1
os_restr2_imon=3.41157E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.30361E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01995E1
cs_anode2_imon=2.23055E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57938E1
iondef1_imon=5.24147E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50427E1
iondef4_imon=5.34887E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27951E1
olens3_imon=2.5724E-8
olens1_vset=0.0E0
olens1_vmon=1.71661E-3
olens1_imon=1.27113E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17639E0
cs_ionaccel_imon=-1.73653E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0215E2
cs_ionfocb_imon=1.4736E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56441E1
einzel_imon=7.7419E-6
window_vset=0.0E0
window_vmon=2.84617E-1
window_imon=-8.7158E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8284E2
mask1_imon=2.39041E-4
mask2_vset=0.0E0
mask2_vmon=-1.87185E1
mask2_imon=-6.69758E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.2314E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93694E3
defgrida_imon=6.44192E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=6.83486E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36247E0
defgridb_imon=5.97688E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33134E1
os_fil1_imon=9.43189E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06753E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66093E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30459E1
cs_fil1_imon=9.97699E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62354E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6703E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.35745E-2
os_fil2_imon=-2.80412E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97113E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.32795E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38327E-1
cs_fil2_imon=-2.59389E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.01958E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22319E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.12218E-2
chamber_ion_pmon=2.22558E-9
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.1244E-1
res40_imon=-2.56544E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.463E3	0.0E0	1.47E2	4.1E1	-7.286E-2	-8.80019E1	7.15256E-5	-8.80018E1	6.4373E-4	3.38554E-3	9.73225E-2	1.58038E1	-1.98328E1	-1.99532E1	1.50148E1	2.22364E-9	2.52428E-3	2.52428E-3	6.31288E-3	2.11482E-2
2.0E0	3.324E3	4.0E0	3.16E2	1.6E2	-7.201E-2	-8.80022E1	-1.66893E-4	-8.8002E1	9.53674E-4	3.17097E-3	9.72509E-2	1.58191E1	-1.9836E1	-1.99414E1	1.50212E1	2.22347E-9	2.51632E-3	2.51632E-3	6.32356E-3	2.11148E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.14689E-2	-8.80021E1	-2.6226E-4	-8.80021E1	5.72205E-4	3.62396E-3	9.72033E-2	1.57985E1	-1.98086E1	-1.99213E1	1.50234E1	2.24062E-9	2.51915E-3	2.51915E-3	6.30182E-3	2.12957E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.18554E-2	-8.80023E1	-4.76837E-5	-8.80022E1	8.82149E-4	3.52859E-3	9.74655E-2	1.57755E1	-1.98216E1	-1.99036E1	1.50154E1	2.24538E-9	2.52707E-3	2.52707E-3	6.32896E-3	2.1187E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.201E-2	-8.80023E1	2.38419E-5	-8.80021E1	1.00136E-3	3.0756E-3	9.73701E-2	1.57903E1	-1.98314E1	-1.99462E1	1.5028E1	2.23623E-9	2.5188E-3	2.5188E-3	6.33486E-3	2.1185E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.17007E-2	-8.80024E1	-1.43051E-4	-8.8002E1	1.00136E-3	3.67165E-3	9.76563E-2	1.58119E1	-1.98374E1	-1.99306E1	1.50045E1	2.23583E-9	2.51954E-3	2.51954E-3	6.32896E-3	2.11328E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.18554E-2	-8.80023E1	-1.19209E-4	-8.80022E1	1.38283E-3	3.3617E-3	9.73225E-2	1.58123E1	-1.98423E1	-1.99624E1	1.50358E1	2.24012E-9	2.52099E-3	2.52099E-3	6.26916E-3	2.1185E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80021E1	-1.19209E-4	-8.80024E1	1.19209E-3	3.45707E-3	9.72748E-2	1.57995E1	-1.98465E1	-1.9923E1	1.50406E1	2.23506E-9	2.52093E-3	2.52093E-3	6.30221E-3	2.11908E-2
1.2E1	9.1E1	0.0E0	4.85E2	3.23E2	-7.22418E-2	-8.80021E1	-1.90735E-4	-8.80025E1	1.00136E-3	3.50475E-3	9.72271E-2	1.58041E1	-1.98212E1	-1.99197E1	1.50485E1	2.23566E-9	2.52027E-3	2.52027E-3	6.32978E-3	2.12016E-2
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.17007E-2	-8.80022E1	-4.29153E-4	-8.80024E1	7.86781E-4	3.3617E-3	9.74178E-2	1.58029E1	-1.98134E1	-1.99456E1	1.50053E1	2.24012E-9	2.52318E-3	2.52318E-3	6.33486E-3	2.12218E-2
1.4E1	1.35E2	0.0E0	5.66E2	3.82E2	-7.27828E-2	-8.80021E1	-1.66893E-4	-8.80022E1	9.53674E-4	3.09944E-3	9.72509E-2	1.57909E1	-1.9835E1	-1.99216E1	1.50394E1	2.23863E-9	2.52362E-3	2.52362E-3	6.32978E-3	2.12204E-2
1.5E1	5.9E1	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.80021E1	-2.14577E-4	-8.80023E1	1.07288E-3	3.02792E-3	9.71317E-2	1.58297E1	-1.98434E1	-1.99207E1	1.50259E1	2.24402E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.12403E-2
1.6E1	3.29E2	0.0E0	6.47E2	4.41E2	-7.29374E-2	-8.80021E1	-1.90735E-4	-8.80023E1	1.07288E-3	3.14713E-3	9.70125E-2	1.5815E1	-1.98269E1	-1.99312E1	1.50359E1	2.23487E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.12594E-2
1.7E1	8.63E2	0.0E0	6.87E2	4.7E2	-7.25507E-2	-8.8002E1	-2.14577E-4	-8.80022E1	8.82149E-4	3.05176E-3	9.7537E-2	1.57867E1	-1.98281E1	-1.99125E1	1.50178E1	2.23862E-9	2.5154E-3	2.5154E-3	6.33282E-3	2.131E-2
1.8E1	3.497E3	3.0E0	7.27E2	5.0E2	-7.27053E-2	-8.80022E1	-2.6226E-4	-8.80021E1	1.09673E-3	3.60012E-3	9.76324E-2	1.58107E1	-1.98068E1	-1.99336E1	1.50154E1	2.23429E-9	2.51334E-3	2.51334E-3	6.31288E-3	2.12587E-2
1.9E1	1.845E3	0.0E0	7.68E2	5.29E2	-7.286E-2	-8.80021E1	-5.24521E-4	-8.8002E1	1.0252E-3	3.21865E-3	9.74655E-2	1.57584E1	-1.97161E1	-1.99792E1	1.50425E1	2.23583E-9	2.51954E-3	2.51954E-3	6.3074E-3	2.11328E-2
2.0E1	1.4E1	0.0E0	8.08E2	5.58E2	-7.25507E-2	-8.80022E1	-2.38419E-5	-8.80018E1	1.00136E-3	3.14713E-3	9.7537E-2	1.58065E1	-1.98657E1	-1.99366E1	1.5037E1	2.23764E-9	2.52362E-3	2.52362E-3	6.32418E-3	2.11267E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.8002E1	-1.43051E-4	-8.80017E1	1.04904E-3	3.24249E-3	9.75132E-2	1.57902E1	-1.98782E1	-1.99419E1	1.49944E1	2.22157E-9	2.5131E-3	2.5131E-3	6.35601E-3	2.1187E-2
2.2E1	8.0E0	0.0E0	8.89E2	6.17E2	-7.16233E-2	-8.80021E1	-4.76837E-4	-8.80019E1	7.86781E-4	3.33786E-3	9.73463E-2	1.58317E1	-1.98675E1	-1.9927E1	1.50497E1	2.22157E-9	2.51525E-3	2.51525E-3	6.33436E-3	2.11148E-2
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.14689E-2	-8.80023E1	-5.00679E-4	-8.80018E1	1.07288E-3	3.50475E-3	9.72509E-2	1.57938E1	-1.98222E1	-1.99278E1	1.50427E1	2.22558E-9	2.51334E-3	2.51334E-3	6.30192E-3	2.12218E-2