[Scan]
initial_time=2016-01-18T16:34:24
final_time=2016-01-18T16:34:46
ip_count=19
run=1024
dataset=1
scan=24
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.16233E-2
qbias_imon=-3.78458E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-6.81591E-10
ql2_vset=
ql2_vmon=-1.90735E-4
ql2_imon=1.2164E-9
ql3_vset=
ql3_vmon=-8.80021E1
ql3_imon=-2.37532E-9
ql4_vset=
ql4_vmon=7.62939E-4
ql4_imon=1.35848E-8
mult1=-9.72835E-9
mult2=-2.73059E-9
rf_tmon=-3.3288E-3
rf_agc=3.40245E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.31402E-3
ql5_imon=6.79851E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6373E0
bslens_imon=2.58101E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19977E1
lens5a_imon=2.00074E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12605E2
lens4a_imon=2.05006E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54019E1
cs_ef1b_imon=2.85872E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0464E2
lens23_imon=1.0224E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04531E1
cs_ea1_imon=2.55374E-5
lens1_vset=-2.7E0
lens1_vmon=-2.9975E0
lens1_imon=1.72664E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64578E1
os_ef1alow_imon=2.98414E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03588E1
cs_ea2_imon=1.49388E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84658E1
cs_ef1a_imon=2.93981E-5
olens2_vset=0.0E0
olens2_vmon=9.05991E-4
olens2_imon=1.0871E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11532E1
os_restr1_imon=4.25418E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15276E1
os_ea1_imon=2.33636E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63695E1
os_ef1bup_imon=3.07496E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21605E0
cs_ionrep_imon=1.19359E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92091E2
cs_nozzle_imon=1.93377E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01989E1
cs_anode1_imon=2.94954E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99971E1
olens4_imon=4.29595E-9
tplens_vset=0.0E0
tplens_vmon=-1.6883E0
tplens_imon=-3.39E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99222E1
iondef3_imon=8.92212E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.9838E1
iondef2_imon=9.23936E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03289E2
lens6_imon=2.98194E-4
ql6_vset=1.0E-1
ql6_vmon=9.71794E-2
ql6_imon=9.56965E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27793E0
ionrepsh_imon=1.7675E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34114E1
lens5b_imon=2.18279E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74784E1
cs_ef2b_imon=3.13839E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.26532E0
os_ea2_imon=-7.93225E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06205E2
lens4b_imon=2.00612E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71456E1
cs_ef2a_imon=3.17011E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04855E0
os_ef2alow_imon=-2.6195E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.06434E-1
os_ef2bup_imon=-5.26481E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11286E1
os_restr2_imon=3.42022E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.2964E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01851E1
cs_anode2_imon=2.2374E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58005E1
iondef1_imon=5.25589E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50323E1
iondef4_imon=5.32364E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27949E1
olens3_imon=2.56464E-8
olens1_vset=0.0E0
olens1_vmon=1.35899E-3
olens1_imon=1.26965E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14876E0
cs_ionaccel_imon=-1.93115E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02174E2
cs_ionfocb_imon=1.4737E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56393E1
einzel_imon=7.86443E-6
window_vset=0.0E0
window_vmon=2.79211E-1
window_imon=-8.82392E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82837E2
mask1_imon=2.39149E-4
mask2_vset=0.0E0
mask2_vmon=-1.87251E1
mask2_imon=-6.55342E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92626E3
multa_neg_imon=7.50538E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.65461E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50112E3
multb_neg_imon=6.89975E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30231E0
defgridb_imon=6.25085E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33166E1
os_fil1_imon=9.47886E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07371E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6582E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30445E1
cs_fil1_imon=9.98462E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62276E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66928E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.43484E-2
os_fil2_imon=-2.77409E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85701E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.48778E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37809E-1
cs_fil2_imon=-2.82815E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.56018E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22357E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.10968E-2
chamber_ion_pmon=2.24251E-9
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.01649E-1
res40_imon=-2.37443E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.509E3	1.0E0	1.47E2	4.1E1	-7.17779E-2	-8.80028E1	-2.14577E-4	-8.80018E1	1.16825E-3	3.74317E-3	9.72509E-2	1.58262E1	-1.98328E1	-1.9952E1	1.50316E1	2.23107E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.12051E-2
2.0E0	3.384E3	3.0E0	3.16E2	1.6E2	-7.18554E-2	-8.80023E1	-1.43051E-4	-8.8002E1	9.53674E-4	3.69549E-3	9.73701E-2	1.57929E1	-1.98279E1	-1.99308E1	1.50135E1	2.24499E-9	2.5188E-3	2.5188E-3	6.33486E-3	2.1185E-2
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.18554E-2	-8.80022E1	-4.52995E-4	-8.80018E1	7.15256E-4	3.6478E-3	9.72271E-2	1.58327E1	-1.98346E1	-1.9929E1	1.5019E1	2.24518E-9	2.52066E-3	2.52066E-3	6.3131E-3	2.14113E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.14689E-2	-8.80023E1	-9.53674E-5	-8.80018E1	9.53674E-4	3.95775E-3	9.72271E-2	1.5815E1	-1.98334E1	-1.9965E1	1.50545E1	2.242E-9	2.52765E-3	2.52765E-3	6.29684E-3	2.12067E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.15461E-2	-8.80023E1	3.33786E-4	-8.80016E1	4.29153E-4	3.62396E-3	9.71794E-2	1.57969E1	-1.98615E1	-1.99354E1	1.50322E1	2.23773E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.12413E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.13915E-2	-8.80022E1	9.53674E-5	-8.80018E1	3.57628E-4	3.29018E-3	9.72033E-2	1.57837E1	-1.98579E1	-1.9924E1	1.50238E1	2.23764E-9	2.52139E-3	2.52139E-3	6.3074E-3	2.12204E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.12368E-2	-8.80024E1	-1.19209E-4	-8.8002E1	6.91414E-4	3.48091E-3	9.73225E-2	1.57891E1	-1.98639E1	-1.99222E1	1.50575E1	2.23526E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.12034E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.201E-2	-8.80024E1	-1.66893E-4	-8.80018E1	6.4373E-4	3.33786E-3	9.70364E-2	1.57855E1	-1.98116E1	-1.99258E1	1.50399E1	2.23623E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.12218E-2
1.2E1	9.0E1	0.0E0	4.85E2	3.23E2	-7.18554E-2	-8.80019E1	-7.15256E-5	-8.80019E1	6.91414E-4	3.45707E-3	9.68933E-2	1.58305E1	-1.9817E1	-1.99438E1	1.50383E1	2.23773E-9	2.52276E-3	2.52276E-3	6.32896E-3	2.1187E-2
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.18554E-2	-8.8002E1	-9.53674E-5	-8.80016E1	6.19888E-4	3.29018E-3	9.70125E-2	1.58341E1	-1.98771E1	-1.99191E1	1.50445E1	2.22654E-9	2.52647E-3	2.52647E-3	6.30192E-3	2.11666E-2
1.4E1	1.03E2	0.0E0	5.66E2	3.82E2	-7.12368E-2	-8.80021E1	9.53674E-5	-8.80021E1	5.48363E-4	3.62396E-3	9.70602E-2	1.5833E1	-1.98504E1	-1.99303E1	1.50268E1	2.24012E-9	2.51334E-3	2.51334E-3	6.33486E-3	2.1185E-2
1.5E1	6.6E1	0.0E0	6.06E2	4.11E2	-7.21643E-2	-8.80023E1	2.14577E-4	-8.8002E1	8.34465E-4	3.40939E-3	9.71079E-2	1.58365E1	-1.98278E1	-1.99414E1	1.50208E1	2.22631E-9	2.52384E-3	2.52384E-3	6.33436E-3	2.10968E-2
1.6E1	3.3E2	1.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80025E1	4.76837E-5	-8.8002E1	7.62939E-4	3.60012E-3	9.71556E-2	1.5805E1	-1.97939E1	-1.99838E1	1.50045E1	2.2406E-9	2.51847E-3	2.51847E-3	6.30202E-3	2.12232E-2
1.7E1	8.54E2	0.0E0	6.87E2	4.7E2	-7.21643E-2	-8.80023E1	2.38419E-4	-8.80024E1	7.15256E-4	3.31402E-3	9.68695E-2	1.58167E1	-1.98236E1	-1.9933E1	1.50142E1	2.24012E-9	2.5199E-3	2.5199E-3	6.3514E-3	2.12034E-2
1.8E1	3.498E3	1.0E0	7.27E2	5.0E2	-7.17779E-2	-8.80024E1	1.43051E-4	-8.80021E1	6.91414E-4	3.60012E-3	9.7084E-2	1.57896E1	-1.98185E1	-1.99628E1	1.50149E1	2.2372E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.12218E-2
1.9E1	1.876E3	4.0E0	7.68E2	5.29E2	-7.12368E-2	-8.80023E1	7.15256E-5	-8.80018E1	8.58307E-4	3.26633E-3	9.7537E-2	1.58271E1	-1.98606E1	-1.99365E1	1.50153E1	2.23731E-9	2.51814E-3	2.51814E-3	6.31798E-3	2.11712E-2
2.0E1	1.4E1	0.0E0	8.08E2	5.58E2	-7.17007E-2	-8.80022E1	4.76837E-5	-8.80018E1	8.58307E-4	3.21865E-3	9.72271E-2	1.58059E1	-1.98555E1	-1.99486E1	1.50322E1	2.23764E-9	2.52139E-3	2.52139E-3	6.34099E-3	2.11641E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.17007E-2	-8.80025E1	2.6226E-4	-8.80018E1	7.86781E-4	3.17097E-3	9.71794E-2	1.58099E1	-1.98197E1	-1.99373E1	1.50196E1	2.24012E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.11666E-2
2.2E1	1.2E1	0.0E0	8.89E2	6.17E2	-7.14689E-2	-8.80023E1	1.19209E-4	-8.80018E1	7.15256E-4	3.21865E-3	9.73701E-2	1.5866E1	-1.98501E1	-1.99252E1	1.5013E1	2.24482E-9	2.51919E-3	2.51919E-3	6.32858E-3	2.11712E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.16233E-2	-8.80023E1	-1.90735E-4	-8.80021E1	7.62939E-4	3.31402E-3	9.71794E-2	1.58005E1	-1.9838E1	-1.99222E1	1.50323E1	2.24251E-9	2.5131E-3	2.5131E-3	6.30202E-3	2.10968E-2