[Scan]
initial_time=2016-01-18T16:35:56
final_time=2016-01-18T16:36:19
ip_count=19
run=1024
dataset=1
scan=27
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.11597E-2
qbias_imon=-3.80349E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-7.67648E-10
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=1.21473E-9
ql3_vset=
ql3_vmon=-8.80015E1
ql3_imon=-2.47866E-9
ql4_vset=
ql4_vmon=1.0252E-3
ql4_imon=1.35981E-8
mult1=-9.64406E-9
mult2=-2.70663E-9
rf_tmon=-4.28411E-3
rf_agc=3.31473E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.71933E-3
ql5_imon=6.82747E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65565E0
bslens_imon=2.39614E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19627E1
lens5a_imon=2.00411E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12576E2
lens4a_imon=2.04872E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53898E1
cs_ef1b_imon=2.87062E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04665E2
lens23_imon=1.02029E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04633E1
cs_ea1_imon=2.5411E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97533E0
lens1_imon=1.62481E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64752E1
os_ef1alow_imon=2.9799E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03605E1
cs_ea2_imon=1.46198E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84874E1
cs_ef1a_imon=2.94435E-5
olens2_vset=0.0E0
olens2_vmon=1.21593E-3
olens2_imon=1.08407E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1141E1
os_restr1_imon=4.27446E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14694E1
os_ea1_imon=2.31117E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63847E1
os_ef1bup_imon=3.08245E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24292E0
cs_ionrep_imon=1.18136E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92079E2
cs_nozzle_imon=1.93413E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02052E1
cs_anode1_imon=2.94173E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99969E1
olens4_imon=4.24733E-9
tplens_vset=0.0E0
tplens_vmon=-1.71489E0
tplens_imon=-3.07168E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99179E1
iondef3_imon=8.95974E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98158E1
iondef2_imon=9.33805E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03285E2
lens6_imon=2.98372E-4
ql6_vset=1.0E-1
ql6_vmon=9.70125E-2
ql6_imon=9.17113E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25638E0
ionrepsh_imon=1.76243E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34099E1
lens5b_imon=2.17637E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74695E1
cs_ef2b_imon=3.13784E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.24904E0
os_ea2_imon=-7.2956E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06212E2
lens4b_imon=2.00494E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71233E1
cs_ef2a_imon=3.16067E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06204E0
os_ef2alow_imon=-2.70905E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.77048E-1
os_ef2bup_imon=-5.25026E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11566E1
os_restr2_imon=3.42414E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.30773E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01684E1
cs_anode2_imon=2.23251E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58029E1
iondef1_imon=5.12883E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5016E1
iondef4_imon=5.30756E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27953E1
olens3_imon=2.56462E-8
olens1_vset=0.0E0
olens1_vmon=1.4782E-3
olens1_imon=1.26021E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1632E0
cs_ionaccel_imon=-1.97176E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02165E2
cs_ionfocb_imon=1.47454E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56168E1
einzel_imon=7.6841E-6
window_vset=0.0E0
window_vmon=2.6126E-1
window_imon=-9.79976E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82827E2
mask1_imon=2.39204E-4
mask2_vset=0.0E0
mask2_vmon=-1.86918E1
mask2_imon=-6.58114E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.33629E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.59802E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.02408E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37291E0
defgridb_imon=5.90383E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33179E1
os_fil1_imon=9.43961E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06762E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65471E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30496E1
cs_fil1_imon=9.96962E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62815E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66956E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.34456E-2
os_fil2_imon=-2.83716E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83483E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.81891E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38257E-1
cs_fil2_imon=-2.94943E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.46057E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22361E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31563E-3
inlet_lpb_pmon=2.1185E-2
chamber_ion_pmon=2.22654E-9
chamber_cvt_pmon=2.51935E-3
foreline_cvt_pmon=2.51935E-3
chamber_tmon=1.40076E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.32563E-1
res40_imon=-2.39093E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.484E3	2.0E0	1.47E2	4.1E1	-7.286E-2	-8.80023E1	-3.09944E-4	-8.80019E1	1.09673E-3	3.3617E-3	9.68933E-2	1.58179E1	-1.98158E1	-1.9975E1	1.50199E1	2.24315E-9	2.52066E-3	2.52066E-3	6.3245E-3	2.12381E-2
2.0E0	3.264E3	6.0E0	3.16E2	1.6E2	-7.18554E-2	-8.80023E1	-2.38419E-4	-8.80016E1	1.14441E-3	3.40939E-3	9.70125E-2	1.57958E1	-1.98533E1	-1.99518E1	1.50316E1	2.24442E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.12051E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80025E1	-3.09944E-4	-8.80017E1	8.82149E-4	3.26633E-3	9.66311E-2	1.58174E1	-1.98515E1	-1.99674E1	1.50115E1	2.23963E-9	2.52209E-3	2.52209E-3	6.29645E-3	2.12495E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.19325E-2	-8.80024E1	-5.96046E-4	-8.80018E1	9.05991E-4	3.50475E-3	9.73463E-2	1.58269E1	-1.98681E1	-1.99312E1	1.5028E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.17779E-2	-8.80024E1	-3.57628E-4	-8.80019E1	1.23978E-3	3.50475E-3	9.68456E-2	1.58154E1	-1.98551E1	-1.99285E1	1.50124E1	2.23392E-9	2.51954E-3	2.51954E-3	6.36144E-3	2.11509E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.14689E-2	-8.80025E1	-2.86102E-4	-8.80016E1	1.16825E-3	3.67165E-3	9.69172E-2	1.58327E1	-1.98228E1	-1.99384E1	1.50208E1	2.23963E-9	2.52027E-3	2.52027E-3	6.30182E-3	2.12016E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.80027E1	-4.52995E-4	-8.80016E1	1.04904E-3	3.8147E-3	9.7084E-2	1.58185E1	-1.97968E1	-1.99254E1	1.50082E1	2.23773E-9	2.52384E-3	2.52384E-3	6.31278E-3	2.11689E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.14689E-2	-8.80025E1	-3.09944E-4	-8.80017E1	1.40667E-3	3.40939E-3	9.69172E-2	1.58271E1	-1.98202E1	-1.99218E1	1.50064E1	2.24207E-9	2.51552E-3	2.51552E-3	6.33486E-3	2.12034E-2
1.2E1	8.8E1	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.80026E1	-1.66893E-4	-8.80017E1	1.23978E-3	3.62396E-3	9.71556E-2	1.58281E1	-1.98308E1	-1.99306E1	1.5028E1	2.24012E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.1185E-2
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80023E1	2.38419E-5	-8.80015E1	1.14441E-3	3.69549E-3	9.71794E-2	1.58215E1	-1.98573E1	-1.99005E1	1.50136E1	2.24304E-9	2.51334E-3	2.51334E-3	6.32386E-3	2.12772E-2
1.4E1	1.22E2	0.0E0	5.66E2	3.82E2	-7.24736E-2	-8.80023E1	-1.66893E-4	-8.80018E1	1.04904E-3	3.76701E-3	9.70364E-2	1.58371E1	-1.98278E1	-1.99149E1	1.50178E1	2.2372E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.1185E-2
1.5E1	6.1E1	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80023E1	-7.15256E-5	-8.80017E1	1.38283E-3	3.60012E-3	9.71079E-2	1.58002E1	-1.9831E1	-1.99355E1	1.5028E1	2.23915E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.1185E-2
1.6E1	3.41E2	0.0E0	6.47E2	4.41E2	-7.24736E-2	-8.80026E1	-2.38419E-5	-8.80017E1	1.16825E-3	3.55244E-3	9.71079E-2	1.58173E1	-1.9832E1	-1.99558E1	1.50034E1	2.24155E-9	2.51739E-3	2.51739E-3	6.32896E-3	2.1187E-2
1.7E1	8.83E2	1.0E0	6.87E2	4.7E2	-7.24736E-2	-8.80025E1	-4.76837E-5	-8.80019E1	9.77516E-4	3.50475E-3	9.71317E-2	1.58486E1	-1.98579E1	-1.99342E1	1.49992E1	2.24012E-9	2.52538E-3	2.52538E-3	6.29098E-3	2.12218E-2
1.8E1	3.541E3	6.0E0	7.27E2	5.0E2	-7.21643E-2	-8.80023E1	-3.57628E-4	-8.8002E1	1.33514E-3	3.0756E-3	9.69887E-2	1.58083E1	-1.98501E1	-1.99498E1	1.50491E1	2.23623E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.12403E-2
1.9E1	1.822E3	1.0E0	7.68E2	5.29E2	-7.19325E-2	-8.80024E1	0.0E0	-8.80021E1	1.33514E-3	3.0756E-3	9.7084E-2	1.58161E1	-1.98404E1	-1.996E1	1.50244E1	2.23623E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.12218E-2
2.0E1	1.4E1	0.0E0	8.08E2	5.58E2	-7.14689E-2	-8.80024E1	-2.6226E-4	-8.80018E1	1.26362E-3	3.12328E-3	9.71556E-2	1.57038E1	-1.97659E1	-2.00279E1	1.504E1	2.22945E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.11666E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80025E1	-5.72205E-4	-8.80017E1	1.00136E-3	3.19481E-3	9.71556E-2	1.57977E1	-1.98417E1	-1.9935E1	1.50028E1	2.24304E-9	2.52099E-3	2.52099E-3	6.30192E-3	2.12403E-2
2.2E1	1.3E1	0.0E0	8.89E2	6.17E2	-7.17007E-2	-8.80025E1	-5.48363E-4	-8.80015E1	1.14441E-3	3.8147E-3	9.72271E-2	1.58299E1	-1.98495E1	-1.993E1	1.50485E1	2.23637E-9	2.51498E-3	2.51498E-3	6.29684E-3	2.11889E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.11597E-2	-8.80024E1	-4.76837E-4	-8.80015E1	1.0252E-3	3.71933E-3	9.70125E-2	1.58029E1	-1.98158E1	-1.99179E1	1.5016E1	2.22654E-9	2.51935E-3	2.51935E-3	6.31563E-3	2.1185E-2