[Scan]
initial_time=2016-01-18T16:36:27
final_time=2016-01-18T16:36:49
ip_count=19
run=1024
dataset=1
scan=28
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.16233E-2
qbias_imon=-3.77538E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-7.30073E-10
ql2_vset=
ql2_vmon=-4.29153E-4
ql2_imon=1.24818E-9
ql3_vset=
ql3_vmon=-8.80016E1
ql3_imon=-2.42577E-9
ql4_vset=
ql4_vmon=8.82149E-4
ql4_imon=1.3622E-8
mult1=-9.31897E-9
mult2=-2.70464E-9
rf_tmon=-4.59654E-3
rf_agc=3.31293E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.60012E-3
ql5_imon=6.81305E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61961E0
bslens_imon=2.24241E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19494E1
lens5a_imon=2.01306E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12577E2
lens4a_imon=2.04884E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53971E1
cs_ef1b_imon=2.83458E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02174E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04363E1
cs_ea1_imon=2.56556E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98759E0
lens1_imon=1.76813E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6462E1
os_ef1alow_imon=2.98486E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03584E1
cs_ea2_imon=1.47011E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84628E1
cs_ef1a_imon=2.95135E-5
olens2_vset=0.0E0
olens2_vmon=1.0252E-3
olens2_imon=1.08102E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1134E1
os_restr1_imon=4.25598E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15052E1
os_ea1_imon=2.34222E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63413E1
os_ef1bup_imon=3.07496E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22496E0
cs_ionrep_imon=1.17139E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92071E2
cs_nozzle_imon=1.93498E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01971E1
cs_anode1_imon=2.95819E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99968E1
olens4_imon=4.29559E-9
tplens_vset=0.0E0
tplens_vmon=-1.70042E0
tplens_imon=-1.67929E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99234E1
iondef3_imon=8.65582E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98176E1
iondef2_imon=9.48758E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03272E2
lens6_imon=2.98272E-4
ql6_vset=1.0E-1
ql6_vmon=9.72509E-2
ql6_imon=9.45771E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23558E0
ionrepsh_imon=1.75574E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33976E1
lens5b_imon=2.17092E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74724E1
cs_ef2b_imon=3.13335E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.28867E0
os_ea2_imon=-7.83786E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06192E2
lens4b_imon=2.00527E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71624E1
cs_ef2a_imon=3.14416E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04134E0
os_ef2alow_imon=-2.45012E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.06434E-1
os_ef2bup_imon=-5.254E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1146E1
os_restr2_imon=3.40977E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.283E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01923E1
cs_anode2_imon=2.23632E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58101E1
iondef1_imon=5.24029E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50196E1
iondef4_imon=5.35968E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27952E1
olens3_imon=2.5582E-8
olens1_vset=0.0E0
olens1_vmon=1.26362E-3
olens1_imon=1.25709E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12594E0
cs_ionaccel_imon=-1.7113E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02156E2
cs_ionfocb_imon=1.47406E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56573E1
einzel_imon=7.72748E-6
window_vset=0.0E0
window_vmon=2.58188E-1
window_imon=-1.03015E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82845E2
mask1_imon=2.39171E-4
mask2_vset=0.0E0
mask2_vmon=-1.87275E1
mask2_imon=-5.97678E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92609E3
multa_neg_imon=7.14449E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.52155E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50145E3
multb_neg_imon=7.11617E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2963E0
defgridb_imon=5.98002E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33192E1
os_fil1_imon=9.41033E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06963E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65459E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3052E1
cs_fil1_imon=9.96762E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61603E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66484E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26858E-2
os_fil2_imon=-2.79211E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.77892E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.85589E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38197E-1
cs_fil2_imon=-2.54584E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.62024E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22323E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33919E-3
inlet_lpb_pmon=2.11357E-2
chamber_ion_pmon=2.24294E-9
chamber_cvt_pmon=2.51919E-3
foreline_cvt_pmon=2.51919E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.33774E-1
res40_imon=-2.55103E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=219
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.413E3	2.0E0	1.47E2	4.1E1	-7.27053E-2	-8.80022E1	-2.6226E-4	-8.80017E1	1.00136E-3	3.02792E-3	9.72748E-2	1.58335E1	-1.98284E1	-1.99113E1	1.50497E1	2.21401E-9	2.5188E-3	2.5188E-3	6.28006E-3	2.12034E-2
2.0E0	3.212E3	1.0E0	3.16E2	1.6E2	-7.23189E-2	-8.80024E1	-3.57628E-4	-8.80017E1	9.53674E-4	3.26633E-3	9.71079E-2	1.58399E1	-1.9841E1	-1.99151E1	1.50124E1	2.21401E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.1187E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80025E1	-4.05312E-4	-8.80017E1	8.58307E-4	3.67165E-3	9.74178E-2	1.58032E1	-1.98299E1	-1.99467E1	1.50213E1	2.21401E-9	2.51581E-3	2.51581E-3	6.32978E-3	2.12016E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.35556E-2	-8.80026E1	-4.05312E-4	-8.80015E1	6.91414E-4	3.19481E-3	9.72509E-2	1.57837E1	-1.98251E1	-1.99207E1	1.4989E1	2.23678E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.1187E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.25507E-2	-8.80023E1	-3.8147E-4	-8.80017E1	8.34465E-4	3.31402E-3	9.71556E-2	1.5779E1	-1.98316E1	-1.99473E1	1.50142E1	2.21495E-9	2.50989E-3	2.50989E-3	6.32896E-3	2.1187E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.201E-2	-8.80023E1	-4.52995E-4	-8.80021E1	9.77516E-4	3.14713E-3	9.68933E-2	1.57993E1	-1.98206E1	-1.99246E1	1.50334E1	2.22075E-9	2.51443E-3	2.51443E-3	6.34037E-3	2.11482E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80026E1	-1.19209E-4	-8.80022E1	1.12057E-3	3.0756E-3	9.72748E-2	1.57885E1	-1.98128E1	-1.99678E1	1.50167E1	2.23202E-9	2.51847E-3	2.51847E-3	6.33436E-3	2.12232E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.14689E-2	-8.80024E1	-1.43051E-4	-8.80017E1	1.00136E-3	3.0756E-3	9.70602E-2	1.58227E1	-1.98573E1	-1.99438E1	1.50322E1	2.24109E-9	2.52538E-3	2.52538E-3	6.35692E-3	2.11115E-2
1.2E1	9.3E1	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.80024E1	-3.57628E-4	-8.80017E1	1.09673E-3	3.38554E-3	9.73225E-2	1.58103E1	-1.98133E1	-1.99012E1	1.5034E1	2.24402E-9	2.5188E-3	2.5188E-3	6.35692E-3	2.11298E-2
1.3E1	6.0E0	0.0E0	5.25E2	3.53E2	-7.22418E-2	-8.80026E1	-1.90735E-4	-8.80018E1	1.04904E-3	3.02792E-3	9.74417E-2	1.58167E1	-1.98135E1	-1.99445E1	1.50046E1	2.2406E-9	2.51632E-3	2.51632E-3	6.32896E-3	2.13139E-2
1.4E1	1.24E2	0.0E0	5.66E2	3.82E2	-7.20871E-2	-8.80026E1	7.15256E-5	-8.80015E1	8.58307E-4	3.29018E-3	9.7394E-2	1.57778E1	-1.98358E1	-1.9939E1	1.50016E1	2.24062E-9	2.51581E-3	2.51581E-3	6.30182E-3	2.1108E-2
1.5E1	7.3E1	0.0E0	6.06E2	4.11E2	-7.17007E-2	-8.80027E1	4.76837E-5	-8.80018E1	9.53674E-4	3.31402E-3	9.72509E-2	1.58131E1	-1.97924E1	-1.99492E1	1.50196E1	2.24155E-9	2.51954E-3	2.51954E-3	6.29665E-3	2.12232E-2
1.6E1	3.42E2	1.0E0	6.47E2	4.41E2	-7.09279E-2	-8.80027E1	-1.19209E-4	-8.80017E1	1.07288E-3	3.55244E-3	9.71079E-2	1.58454E1	-1.98282E1	-1.99365E1	1.5034E1	2.23818E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.12403E-2
1.7E1	8.56E2	0.0E0	6.87E2	4.7E2	-7.09279E-2	-8.80026E1	-5.48363E-4	-8.80015E1	1.14441E-3	3.48091E-3	9.71079E-2	1.58137E1	-1.98651E1	-1.9936E1	1.49998E1	2.23566E-9	2.52139E-3	2.52139E-3	6.32978E-3	2.11641E-2
1.8E1	3.498E3	2.0E0	7.27E2	5.0E2	-7.16233E-2	-8.80027E1	-1.90735E-4	-8.80014E1	1.16825E-3	3.79086E-3	9.71079E-2	1.57991E1	-1.98523E1	-1.99189E1	1.5028E1	2.23818E-9	2.51334E-3	2.51334E-3	6.32386E-3	2.12587E-2
1.9E1	1.793E3	0.0E0	7.68E2	5.29E2	-7.17779E-2	-8.80027E1	-1.66893E-4	-8.80013E1	8.82149E-4	3.60012E-3	9.73225E-2	1.58011E1	-1.98374E1	-1.99408E1	1.50202E1	2.24251E-9	2.52276E-3	2.52276E-3	6.33436E-3	2.1332E-2
2.0E1	2.7E1	0.0E0	8.08E2	5.58E2	-7.19325E-2	-8.80025E1	2.38419E-5	-8.80015E1	1.00136E-3	3.74317E-3	9.7394E-2	1.58035E1	-1.98597E1	-1.99185E1	1.50214E1	2.23072E-9	2.52139E-3	2.52139E-3	6.31858E-3	2.12204E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.16233E-2	-8.80025E1	-1.19209E-4	-8.80016E1	9.29832E-4	3.67165E-3	9.72033E-2	1.58029E1	-1.98489E1	-1.99125E1	1.50268E1	2.22252E-9	2.5131E-3	2.5131E-3	6.32896E-3	2.11328E-2
2.2E1	1.1E1	0.0E0	8.89E2	6.17E2	-7.17007E-2	-8.80025E1	-4.05312E-4	-8.80015E1	8.34465E-4	3.3617E-3	9.74178E-2	1.58209E1	-1.98324E1	-1.99442E1	1.50647E1	2.23818E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.12218E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.16233E-2	-8.80024E1	-4.29153E-4	-8.80016E1	8.82149E-4	3.60012E-3	9.72509E-2	1.58101E1	-1.98176E1	-1.99234E1	1.50196E1	2.24294E-9	2.51919E-3	2.51919E-3	6.33919E-3	2.11357E-2