[Scan]
initial_time=2016-01-18T16:36:58
final_time=2016-01-18T16:37:20
ip_count=19
run=1024
dataset=1
scan=29
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.35556E-2
qbias_imon=-3.72455E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-7.34961E-10
ql2_vset=
ql2_vmon=-5.24521E-4
ql2_imon=1.25809E-9
ql3_vset=
ql3_vmon=-8.80017E1
ql3_imon=-2.48684E-9
ql4_vset=
ql4_vmon=1.09673E-3
ql4_imon=1.36477E-8
mult1=-1.01498E-8
mult2=-2.73658E-9
rf_tmon=-3.6232E-3
rf_agc=3.33696E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.19481E-3
ql5_imon=6.93524E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62829E0
bslens_imon=2.3539E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19767E1
lens5a_imon=1.99641E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12574E2
lens4a_imon=2.04898E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54223E1
cs_ef1b_imon=2.85228E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04669E2
lens23_imon=1.0215E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04459E1
cs_ea1_imon=2.5577E-5
lens1_vset=-2.7E0
lens1_vmon=-2.9987E0
lens1_imon=1.5536E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64714E1
os_ef1alow_imon=2.96905E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03564E1
cs_ea2_imon=1.49604E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8475E1
cs_ef1a_imon=2.96231E-5
olens2_vset=0.0E0
olens2_vmon=7.86781E-4
olens2_imon=1.07741E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1156E1
os_restr1_imon=4.27109E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15029E1
os_ea1_imon=2.34393E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63348E1
os_ef1bup_imon=3.06785E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20103E0
cs_ionrep_imon=1.19178E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92076E2
cs_nozzle_imon=1.93705E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01902E1
cs_anode1_imon=2.96081E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99968E1
olens4_imon=4.24037E-9
tplens_vset=0.0E0
tplens_vmon=-1.70332E0
tplens_imon=-2.77716E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99384E1
iondef3_imon=8.69501E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98525E1
iondef2_imon=9.22494E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03308E2
lens6_imon=2.98249E-4
ql6_vset=1.0E-1
ql6_vmon=9.72271E-2
ql6_imon=9.22239E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.20523E0
ionrepsh_imon=1.7538E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33634E1
lens5b_imon=2.18964E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74707E1
cs_ef2b_imon=3.12025E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.27193E0
os_ea2_imon=-8.22064E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06226E2
lens4b_imon=2.00497E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71233E1
cs_ef2a_imon=3.15655E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05206E0
os_ef2alow_imon=-2.45455E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.0886E-1
os_ef2bup_imon=-5.3588E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11404E1
os_restr2_imon=3.40581E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.29856E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01884E1
cs_anode2_imon=2.24037E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58449E1
iondef1_imon=5.18739E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5013E1
iondef4_imon=5.44229E-6
olens3_vset=-1.28E1
olens3_vmon=-1.2795E1
olens3_imon=2.55845E-8
olens1_vset=0.0E0
olens1_vmon=1.54972E-3
olens1_imon=1.25751E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17443E0
cs_ionaccel_imon=-1.78463E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0215E2
cs_ionfocb_imon=1.4723E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56424E1
einzel_imon=7.64667E-6
window_vset=0.0E0
window_vmon=2.93696E-1
window_imon=-9.05124E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82816E2
mask1_imon=2.39148E-4
mask2_vset=0.0E0
mask2_vmon=-1.87236E1
mask2_imon=-5.45837E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92573E3
multa_neg_imon=7.82982E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.25085E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.32874E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38653E0
defgridb_imon=6.04177E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33203E1
os_fil1_imon=9.44354E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07136E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65439E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30597E1
cs_fil1_imon=9.97804E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62172E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66302E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.35745E-2
os_fil2_imon=-2.66874E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.78493E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.86674E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37585E-1
cs_fil2_imon=-2.54399E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.9978E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2234E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.12772E-2
chamber_ion_pmon=2.22558E-9
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.21761E-1
res40_imon=-2.63045E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=216
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.359E3	0.0E0	1.47E2	4.1E1	-7.03869E-2	-8.80023E1	-2.38419E-5	-8.80017E1	7.86781E-4	3.55244E-3	9.72033E-2	1.58041E1	-1.9847E1	-1.99312E1	1.50075E1	2.24062E-9	2.52139E-3	2.52139E-3	6.31299E-3	2.12204E-2
2.0E0	3.236E3	8.0E0	3.16E2	1.6E2	-7.13915E-2	-8.80023E1	-1.66893E-4	-8.80014E1	8.82149E-4	3.26633E-3	9.71079E-2	1.58577E1	-1.98692E1	-1.99224E1	1.50242E1	2.23487E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.12775E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.08504E-2	-8.80019E1	-3.8147E-4	-8.80013E1	8.58307E-4	3.38554E-3	9.66787E-2	1.57949E1	-1.98476E1	-1.99242E1	1.50136E1	2.24359E-9	2.52139E-3	2.52139E-3	6.31299E-3	2.13145E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.08504E-2	-8.8002E1	-4.29153E-4	-8.80018E1	1.04904E-3	3.3617E-3	9.6941E-2	1.58239E1	-1.98236E1	-1.9948E1	1.50425E1	2.23869E-9	2.52492E-3	2.52492E-3	6.32356E-3	2.12232E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.06187E-2	-8.8002E1	-1.90735E-4	-8.80015E1	8.34465E-4	3.21865E-3	9.71317E-2	1.58251E1	-1.98134E1	-1.9936E1	1.50422E1	2.24109E-9	2.5188E-3	2.5188E-3	6.29645E-3	2.12218E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.07733E-2	-8.80026E1	0.0E0	-8.80016E1	8.34465E-4	3.31402E-3	9.7084E-2	1.58073E1	-1.98263E1	-1.99425E1	1.50214E1	2.24304E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.12403E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.15461E-2	-8.80027E1	-2.38419E-5	-8.80016E1	9.77516E-4	3.52859E-3	9.72033E-2	1.57849E1	-1.98561E1	-1.99185E1	1.50028E1	2.23869E-9	2.52599E-3	2.52599E-3	6.3074E-3	2.11689E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.13915E-2	-8.80026E1	0.0E0	-8.80019E1	1.21593E-3	3.62396E-3	9.74417E-2	1.57926E1	-1.98139E1	-1.99366E1	1.50593E1	2.23818E-9	2.5199E-3	2.5199E-3	6.33486E-3	2.12587E-2
1.2E1	9.8E1	0.0E0	4.85E2	3.23E2	-7.23189E-2	-8.80027E1	-4.76837E-5	-8.80019E1	9.53674E-4	3.57628E-3	9.72748E-2	1.5768E1	-1.98236E1	-1.99191E1	1.50485E1	2.23487E-9	2.51739E-3	2.51739E-3	6.30202E-3	2.12775E-2
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.18554E-2	-8.80021E1	-1.66893E-4	-8.80019E1	7.62939E-4	3.43323E-3	9.72033E-2	1.5822E1	-1.98568E1	-1.9957E1	1.5029E1	2.23863E-9	2.52027E-3	2.52027E-3	6.28511E-3	2.11829E-2
1.4E1	1.26E2	0.0E0	5.66E2	3.82E2	-7.19325E-2	-8.80022E1	-2.6226E-4	-8.80021E1	7.86781E-4	3.3617E-3	9.68933E-2	1.57999E1	-1.9844E1	-1.9933E1	1.50352E1	2.23345E-9	2.52123E-3	2.52123E-3	6.31242E-3	2.11943E-2
1.5E1	6.2E1	0.0E0	6.06E2	4.11E2	-7.34782E-2	-8.80021E1	-7.15256E-5	-8.80018E1	9.53674E-4	3.33786E-3	9.71317E-2	1.58407E1	-1.98476E1	-1.99324E1	1.50132E1	2.23429E-9	2.51225E-3	2.51225E-3	6.34037E-3	2.11666E-2
1.6E1	3.32E2	0.0E0	6.47E2	4.41E2	-7.10825E-2	-8.80024E1	-4.05312E-4	-8.80022E1	8.58307E-4	3.3617E-3	9.71317E-2	1.58026E1	-1.98428E1	-1.99632E1	1.50304E1	2.23235E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.12403E-2
1.7E1	8.26E2	0.0E0	6.87E2	4.7E2	-7.21643E-2	-8.80023E1	-3.09944E-4	-8.80019E1	6.91414E-4	3.02792E-3	9.7394E-2	1.58479E1	-1.98208E1	-1.9923E1	1.50118E1	2.23773E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.11689E-2
1.8E1	3.57E3	2.0E0	7.27E2	5.0E2	-7.32464E-2	-8.80022E1	-4.76837E-5	-8.80021E1	6.91414E-4	3.52859E-3	9.74417E-2	1.5805E1	-1.97927E1	-1.99473E1	1.50142E1	2.23369E-9	2.51804E-3	2.51804E-3	6.28511E-3	2.12204E-2
1.9E1	1.815E3	0.0E0	7.68E2	5.29E2	-7.27053E-2	-8.80022E1	-4.52995E-4	-8.80018E1	7.86781E-4	3.76701E-3	9.72033E-2	1.58041E1	-1.98404E1	-1.99258E1	1.50316E1	2.21684E-9	2.51632E-3	2.51632E-3	6.31278E-3	2.12594E-2
2.0E1	1.7E1	0.0E0	8.08E2	5.58E2	-7.35556E-2	-8.80025E1	-1.90735E-4	-8.80018E1	6.19888E-4	3.79086E-3	9.74417E-2	1.57927E1	-1.9844E1	-1.99306E1	1.50226E1	2.21978E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.1185E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.40967E-2	-8.80025E1	-4.76837E-4	-8.80017E1	1.00136E-3	3.52859E-3	9.7084E-2	1.58365E1	-1.98591E1	-1.99344E1	1.50479E1	2.21305E-9	2.51443E-3	2.51443E-3	6.34588E-3	2.12587E-2
2.2E1	6.0E0	0.0E0	8.89E2	6.17E2	-7.33239E-2	-8.80024E1	-3.8147E-4	-8.80016E1	1.0252E-3	3.79086E-3	9.7084E-2	1.57987E1	-1.98326E1	-1.99474E1	1.50268E1	2.23076E-9	2.52131E-3	2.52131E-3	6.31269E-3	2.11534E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.35556E-2	-8.80023E1	-5.24521E-4	-8.80017E1	1.09673E-3	3.19481E-3	9.72271E-2	1.58449E1	-1.98525E1	-1.99384E1	1.5013E1	2.22558E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.12772E-2