[Scan]
initial_time=2016-01-18T16:37:59
final_time=2016-01-18T16:38:21
ip_count=19
run=1024
dataset=1
scan=31
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.21643E-2
qbias_imon=-3.76836E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-7.17509E-10
ql2_vset=
ql2_vmon=-5.00679E-4
ql2_imon=1.24856E-9
ql3_vset=
ql3_vmon=-8.80017E1
ql3_imon=-2.5238E-9
ql4_vset=
ql4_vmon=6.91414E-4
ql4_imon=1.37593E-8
mult1=-9.55978E-9
mult2=-2.77849E-9
rf_tmon=-2.19324E-3
rf_agc=3.44932E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.3617E-3
ql5_imon=6.9294E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66621E0
bslens_imon=2.43354E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.196E1
lens5a_imon=2.00138E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1257E2
lens4a_imon=2.04934E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5413E1
cs_ef1b_imon=2.82787E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04661E2
lens23_imon=1.02025E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04286E1
cs_ea1_imon=2.57158E-5
lens1_vset=-2.7E0
lens1_vmon=-2.94512E0
lens1_imon=1.43188E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6466E1
os_ef1alow_imon=2.98669E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03271E1
cs_ea2_imon=1.46693E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84556E1
cs_ef1a_imon=2.96514E-5
olens2_vset=0.0E0
olens2_vmon=1.12057E-3
olens2_imon=1.06603E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11494E1
os_restr1_imon=4.26558E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14969E1
os_ea1_imon=2.36523E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63624E1
os_ef1bup_imon=3.08435E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24561E0
cs_ionrep_imon=1.18094E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92025E2
cs_nozzle_imon=1.93399E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0196E1
cs_anode1_imon=2.94116E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99973E1
olens4_imon=4.22211E-9
tplens_vset=0.0E0
tplens_vmon=-1.70396E0
tplens_imon=-2.49335E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99534E1
iondef3_imon=8.58149E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98392E1
iondef2_imon=9.2292E-6
lens6_vset=-6.0E2
lens6_vmon=-6.033E2
lens6_imon=2.98233E-4
ql6_vset=1.0E-1
ql6_vmon=9.72748E-2
ql6_imon=9.34541E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24561E0
ionrepsh_imon=1.74123E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3397E1
lens5b_imon=2.19251E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74756E1
cs_ef2b_imon=3.12779E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.26626E0
os_ea2_imon=-5.60803E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06204E2
lens4b_imon=2.00577E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71327E1
cs_ef2a_imon=3.16115E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04124E0
os_ef2alow_imon=-2.5016E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.04181E-1
os_ef2bup_imon=-5.34436E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11216E1
os_restr2_imon=3.39086E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23093E2
cs_ionfoca_imon=6.30742E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01728E1
cs_anode2_imon=2.23882E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57909E1
iondef1_imon=5.27214E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50316E1
iondef4_imon=5.49496E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27952E1
olens3_imon=2.55818E-8
olens1_vset=0.0E0
olens1_vmon=1.40667E-3
olens1_imon=1.25237E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15852E0
cs_ionaccel_imon=-1.82393E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02165E2
cs_ionfocb_imon=1.47351E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56312E1
einzel_imon=7.68089E-6
window_vset=0.0E0
window_vmon=2.86032E-1
window_imon=-8.05679E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82835E2
mask1_imon=2.3899E-4
mask2_vset=0.0E0
mask2_vmon=-1.87172E1
mask2_imon=-6.8752E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=7.36393E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9369E3
defgrida_imon=6.22778E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=6.67375E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42918E0
defgridb_imon=5.99064E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33242E1
os_fil1_imon=9.43127E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0741E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64725E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3057E1
cs_fil1_imon=9.95267E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62233E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65664E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.36988E-2
os_fil2_imon=-2.62285E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.76755E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.28744E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37018E-1
cs_fil2_imon=-2.42013E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.09136E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22241E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.11666E-2
chamber_ion_pmon=2.21401E-9
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.35662E-1
res40_imon=-2.53288E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.394E3	1.0E0	1.47E2	4.1E1	-7.19325E-2	-8.80027E1	-7.86781E-4	-8.80015E1	8.34465E-4	3.38554E-3	9.71317E-2	1.58119E1	-1.98092E1	-1.99288E1	1.49992E1	2.23392E-9	2.52169E-3	2.52169E-3	6.33436E-3	2.12232E-2
2.0E0	3.21E3	2.0E0	3.16E2	1.6E2	-7.22418E-2	-8.80024E1	-4.29153E-4	-8.8002E1	5.96046E-4	2.93255E-3	9.74178E-2	1.58154E1	-1.98337E1	-1.99028E1	1.50004E1	2.22821E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.11689E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.11597E-2	-8.80025E1	-3.57628E-4	-8.80017E1	6.91414E-4	3.33786E-3	9.72986E-2	1.57973E1	-1.98476E1	-1.9926E1	1.50064E1	2.22974E-9	2.51915E-3	2.51915E-3	6.29067E-3	2.10148E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.11597E-2	-8.80024E1	-3.09944E-4	-8.80018E1	6.91414E-4	3.45707E-3	9.70125E-2	1.58319E1	-1.98301E1	-1.99211E1	1.4997E1	2.21882E-9	2.51552E-3	2.51552E-3	6.3074E-3	2.10931E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.201E-2	-8.80027E1	-3.33786E-4	-8.80021E1	8.34465E-4	3.33786E-3	9.71317E-2	1.58442E1	-1.98233E1	-1.99255E1	1.50166E1	2.23825E-9	2.52236E-3	2.52236E-3	6.33919E-3	2.12422E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.17007E-2	-8.80025E1	-4.29153E-4	-8.8002E1	8.34465E-4	3.45707E-3	9.7084E-2	1.5759E1	-1.98074E1	-1.99343E1	1.50238E1	2.23963E-9	2.52139E-3	2.52139E-3	6.31299E-3	2.11641E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17007E-2	-8.80021E1	-1.66893E-4	-8.80018E1	9.53674E-4	3.17097E-3	9.7084E-2	1.58462E1	-1.98741E1	-1.99504E1	1.50208E1	2.23773E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.12594E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.09279E-2	-8.80021E1	-2.38419E-4	-8.80021E1	7.39098E-4	3.6478E-3	9.71317E-2	1.5788E1	-1.98266E1	-1.99636E1	1.50348E1	2.23623E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.12772E-2
1.2E1	9.3E1	0.0E0	4.85E2	3.23E2	-7.05415E-2	-8.80023E1	-1.66893E-4	-8.80019E1	1.09673E-3	3.40939E-3	9.72271E-2	1.58335E1	-1.98567E1	-1.99161E1	1.50292E1	2.23707E-9	2.51601E-3	2.51601E-3	6.31773E-3	2.11798E-2
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.05415E-2	-8.80023E1	-3.09944E-4	-8.8002E1	7.62939E-4	3.57628E-3	9.7084E-2	1.58113E1	-1.9829E1	-1.99155E1	1.50064E1	2.24012E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.12403E-2
1.4E1	1.01E2	0.0E0	5.66E2	3.82E2	-7.10825E-2	-8.80023E1	-3.8147E-4	-8.8002E1	1.33514E-3	3.45707E-3	9.71079E-2	1.58087E1	-1.98463E1	-1.99141E1	1.50028E1	2.23526E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.12957E-2
1.5E1	6.0E1	1.0E0	6.06E2	4.11E2	-7.17779E-2	-8.80021E1	-1.66893E-4	-8.8002E1	8.58307E-4	3.31402E-3	9.71079E-2	1.5805E1	-1.98484E1	-1.99316E1	1.50241E1	2.23637E-9	2.52025E-3	2.52025E-3	6.30212E-3	2.11889E-2
1.6E1	3.32E2	0.0E0	6.47E2	4.41E2	-7.08504E-2	-8.8002E1	1.19209E-4	-8.80019E1	8.34465E-4	3.17097E-3	9.69172E-2	1.58333E1	-1.98617E1	-1.99272E1	1.50254E1	2.23764E-9	2.52027E-3	2.52027E-3	6.31858E-3	2.12016E-2
1.7E1	8.09E2	0.0E0	6.87E2	4.7E2	-7.07733E-2	-8.80019E1	-3.8147E-4	-8.80018E1	1.00136E-3	3.12328E-3	9.70364E-2	1.58101E1	-1.98585E1	-1.99053E1	1.50232E1	2.23583E-9	2.52599E-3	2.52599E-3	6.34518E-3	2.12051E-2
1.8E1	3.377E3	1.0E0	7.27E2	5.0E2	-7.11597E-2	-8.80025E1	-5.48363E-4	-8.80017E1	1.07288E-3	3.52859E-3	9.7084E-2	1.58263E1	-1.98164E1	-1.99071E1	1.50485E1	2.23332E-9	2.51552E-3	2.51552E-3	6.31288E-3	2.11482E-2
1.9E1	1.795E3	1.0E0	7.68E2	5.29E2	-7.21643E-2	-8.80025E1	-4.52995E-4	-8.80017E1	6.91414E-4	3.31402E-3	9.73225E-2	1.58071E1	-1.98266E1	-1.99288E1	1.50418E1	2.21401E-9	2.51552E-3	2.51552E-3	6.32936E-3	2.1185E-2
2.0E1	2.4E1	0.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80023E1	-4.29153E-4	-8.8002E1	8.58307E-4	3.14713E-3	9.70602E-2	1.58338E1	-1.98361E1	-1.99353E1	1.50304E1	2.21401E-9	2.51007E-3	2.51007E-3	6.31288E-3	2.12034E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80026E1	-4.29153E-4	-8.8002E1	1.21593E-3	2.83718E-3	9.68695E-2	1.58191E1	-1.98428E1	-1.99288E1	1.50178E1	2.21793E-9	2.51581E-3	2.51581E-3	6.29624E-3	2.10707E-2
2.2E1	1.4E1	0.0E0	8.89E2	6.17E2	-7.30146E-2	-8.80024E1	-2.38419E-4	-8.80018E1	7.86781E-4	3.24249E-3	9.70364E-2	1.57796E1	-1.98369E1	-1.99125E1	1.501E1	2.22631E-9	2.51525E-3	2.51525E-3	6.31278E-3	2.1187E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.21643E-2	-8.80022E1	-5.00679E-4	-8.80017E1	6.91414E-4	3.3617E-3	9.72748E-2	1.57909E1	-1.98392E1	-1.99534E1	1.50316E1	2.21401E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.11666E-2