[Scan]
initial_time=2016-01-18T16:38:29
final_time=2016-01-18T16:38:50
ip_count=19
run=1024
dataset=1
scan=32
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.72683E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-7.29239E-10
ql2_vset=
ql2_vmon=-2.38419E-4
ql2_imon=1.22488E-9
ql3_vset=
ql3_vmon=-8.80014E1
ql3_imon=-2.47399E-9
ql4_vset=
ql4_vmon=5.72205E-4
ql4_imon=1.37304E-8
mult1=-9.66815E-9
mult2=-2.74057E-9
rf_tmon=-5.02313E-3
rf_agc=3.27628E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.21865E-3
ql5_imon=6.68681E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67891E0
bslens_imon=2.52102E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19841E1
lens5a_imon=1.99493E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12584E2
lens4a_imon=2.05107E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5411E1
cs_ef1b_imon=2.83282E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04635E2
lens23_imon=1.02103E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04333E1
cs_ea1_imon=2.5624E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99125E0
lens1_imon=1.62114E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64621E1
os_ef1alow_imon=2.99075E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03562E1
cs_ea2_imon=1.47373E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84419E1
cs_ef1a_imon=2.93836E-5
olens2_vset=0.0E0
olens2_vmon=7.39098E-4
olens2_imon=1.05838E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11747E1
os_restr1_imon=4.26997E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14889E1
os_ea1_imon=2.35084E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6361E1
os_ef1bup_imon=3.09105E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22455E0
cs_ionrep_imon=1.18761E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92104E2
cs_nozzle_imon=1.93534E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01865E1
cs_anode1_imon=2.92601E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99968E1
olens4_imon=4.30317E-9
tplens_vset=0.0E0
tplens_vmon=-1.71306E0
tplens_imon=-4.02665E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.9927E1
iondef3_imon=8.69161E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98464E1
iondef2_imon=9.28663E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03273E2
lens6_imon=2.98383E-4
ql6_vset=1.0E-1
ql6_vmon=9.68456E-2
ql6_imon=8.96692E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23924E0
ionrepsh_imon=1.75582E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33982E1
lens5b_imon=2.17968E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74776E1
cs_ef2b_imon=3.13409E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.2521E0
os_ea2_imon=-7.58944E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06195E2
lens4b_imon=2.00476E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71158E1
cs_ef2a_imon=3.16216E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05206E0
os_ef2alow_imon=-2.5818E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.79543E-1
os_ef2bup_imon=-5.22406E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11311E1
os_restr2_imon=3.40131E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.29524E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01871E1
cs_anode2_imon=2.23213E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58119E1
iondef1_imon=5.26473E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49896E1
iondef4_imon=5.45352E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27953E1
olens3_imon=2.55163E-8
olens1_vset=0.0E0
olens1_vmon=1.69277E-3
olens1_imon=1.24146E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14449E0
cs_ionaccel_imon=-1.73598E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02156E2
cs_ionfocb_imon=1.47368E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56337E1
einzel_imon=7.81883E-6
window_vset=0.0E0
window_vmon=2.7124E-1
window_imon=-8.75184E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82841E2
mask1_imon=2.3911E-4
mask2_vset=0.0E0
mask2_vmon=-1.86862E1
mask2_imon=-7.06768E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92628E3
multa_neg_imon=7.39873E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.47681E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50104E3
multb_neg_imon=7.01674E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45564E0
defgridb_imon=6.1242E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33246E1
os_fil1_imon=9.41902E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07716E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64581E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3061E1
cs_fil1_imon=9.9501E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62939E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6538E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.69936E-2
os_fil2_imon=-2.6126E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.67265E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.39544E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35299E-1
cs_fil2_imon=-2.3631E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.86909E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22232E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.12403E-2
chamber_ion_pmon=2.24109E-9
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40041E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.58761E-1
res40_imon=-2.48075E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.473E3	1.0E0	1.47E2	4.1E1	-7.08504E-2	-8.80023E1	-3.33786E-4	-8.80017E1	1.07288E-3	3.33786E-3	9.72033E-2	1.58504E1	-1.98539E1	-1.99483E1	1.50433E1	2.22088E-9	2.51804E-3	2.51804E-3	6.30182E-3	2.11454E-2
2.0E0	3.271E3	7.0E0	3.16E2	1.6E2	-7.0464E-2	-8.80023E1	-2.14577E-4	-8.8002E1	8.82149E-4	3.38554E-3	9.70602E-2	1.57893E1	-1.98503E1	-1.99317E1	1.50498E1	2.21401E-9	2.51603E-3	2.51603E-3	6.3074E-3	2.11889E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.10051E-2	-8.80025E1	-4.76837E-5	-8.80018E1	7.86781E-4	3.57628E-3	9.72271E-2	1.58291E1	-1.98659E1	-1.99553E1	1.50171E1	2.22866E-9	2.51682E-3	2.51682E-3	6.3074E-3	2.12178E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.09279E-2	-8.80025E1	-1.19209E-4	-8.80017E1	7.39098E-4	3.60012E-3	9.69887E-2	1.58038E1	-1.98489E1	-1.99369E1	1.50195E1	2.22759E-9	2.52719E-3	2.52719E-3	6.31384E-3	2.11874E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.17007E-2	-8.80027E1	-2.6226E-4	-8.80016E1	9.29832E-4	3.26633E-3	9.7084E-2	1.58359E1	-1.98117E1	-1.99447E1	1.50266E1	2.2379E-9	2.52324E-3	2.52324E-3	6.31744E-3	2.12112E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.17007E-2	-8.80026E1	-4.29153E-4	-8.80017E1	5.48363E-4	3.17097E-3	9.72748E-2	1.5808E1	-1.98317E1	-1.99502E1	1.50068E1	2.23173E-9	2.51793E-3	2.51793E-3	6.32518E-3	2.12957E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.14689E-2	-8.80027E1	-3.8147E-4	-8.80016E1	1.00136E-3	3.09944E-3	9.72033E-2	1.57957E1	-1.98234E1	-1.9972E1	1.50409E1	2.2356E-9	2.51549E-3	2.51549E-3	6.31251E-3	2.12613E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.17779E-2	-8.80026E1	-4.05312E-4	-8.80018E1	7.86781E-4	3.14713E-3	9.71317E-2	1.58119E1	-1.98248E1	-1.9945E1	1.50322E1	2.23802E-9	2.51557E-3	2.51557E-3	6.3074E-3	2.12358E-2
1.2E1	7.3E1	0.0E0	4.85E2	3.23E2	-7.23189E-2	-8.80025E1	-4.29153E-4	-8.80018E1	6.19888E-4	3.50475E-3	9.67979E-2	1.58079E1	-1.9821E1	-1.99201E1	1.5019E1	2.23678E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.12413E-2
1.3E1	6.0E0	0.0E0	5.25E2	3.53E2	-7.14689E-2	-8.80023E1	-4.52995E-4	-8.80021E1	3.33786E-4	3.14713E-3	9.68456E-2	1.58087E1	-1.98376E1	-1.99471E1	1.5041E1	2.24012E-9	2.51225E-3	2.51225E-3	6.33486E-3	2.12587E-2
1.4E1	1.1E2	0.0E0	5.66E2	3.82E2	-7.15461E-2	-8.80023E1	-2.6226E-4	-8.80018E1	6.19888E-4	3.3617E-3	9.67264E-2	1.58209E1	-1.98386E1	-1.99347E1	1.50029E1	2.23918E-9	2.50552E-3	2.50552E-3	6.32858E-3	2.12067E-2
1.5E1	6.7E1	0.0E0	6.06E2	4.11E2	-7.22418E-2	-8.80028E1	-4.76837E-4	-8.80017E1	7.62939E-4	3.48091E-3	9.71317E-2	1.57991E1	-1.98541E1	-1.99219E1	1.5008E1	2.23566E-9	2.5147E-3	2.5147E-3	6.3074E-3	2.11641E-2
1.6E1	3.21E2	0.0E0	6.47E2	4.41E2	-7.13143E-2	-8.80024E1	-5.96046E-4	-8.80013E1	1.07288E-3	3.43323E-3	9.71079E-2	1.58156E1	-1.98063E1	-1.99372E1	1.50124E1	2.24538E-9	2.51525E-3	2.51525E-3	6.29128E-3	2.11328E-2
1.7E1	8.46E2	1.0E0	6.87E2	4.7E2	-7.14689E-2	-8.80025E1	-2.86102E-4	-8.80015E1	6.19888E-4	3.60012E-3	9.73225E-2	1.5794E1	-1.98453E1	-1.99255E1	1.50358E1	2.23678E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.12232E-2
1.8E1	3.555E3	3.0E0	7.27E2	5.0E2	-7.15461E-2	-8.80026E1	-1.66893E-4	-8.80015E1	5.96046E-4	3.38554E-3	9.67979E-2	1.58238E1	-1.98428E1	-1.99591E1	1.50268E1	2.23863E-9	2.51581E-3	2.51581E-3	6.33538E-3	2.12392E-2
1.9E1	1.862E3	0.0E0	7.68E2	5.29E2	-7.13915E-2	-8.80025E1	-3.09944E-4	-8.80016E1	6.4373E-4	3.48091E-3	9.63688E-2	1.58209E1	-1.98177E1	-1.99518E1	1.50034E1	2.23964E-9	2.51847E-3	2.51847E-3	6.34518E-3	2.12232E-2
2.0E1	1.8E1	0.0E0	8.08E2	5.58E2	-7.08504E-2	-8.80025E1	-1.19209E-4	-8.80018E1	6.91414E-4	3.31402E-3	9.67264E-2	1.58079E1	-1.98712E1	-1.99467E1	1.50124E1	2.23332E-9	2.51826E-3	2.51826E-3	6.31837E-3	2.12218E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80022E1	-7.15256E-5	-8.80016E1	7.15256E-4	3.40939E-3	9.67503E-2	1.58119E1	-1.98368E1	-1.99468E1	1.50259E1					
2.2E1	1.4E1	0.0E0	8.89E2	6.17E2	-7.23964E-2	-8.80023E1	-2.38419E-4	-8.80018E1	7.86781E-4	3.17097E-3	9.66787E-2	1.5812E1	-1.98605E1	-1.99579E1	1.50106E1	2.22916E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.11689E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80023E1	-2.38419E-4	-8.80014E1	5.72205E-4	3.21865E-3	9.68456E-2	1.58119E1	-1.98464E1	-1.9927E1	1.49896E1	2.24109E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.12403E-2