[Scan]
initial_time=2016-01-18T16:38:57
final_time=2016-01-18T16:39:18
ip_count=19
run=1024
dataset=1
scan=33
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.78818E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-7.33304E-10
ql2_vset=
ql2_vmon=-2.6226E-4
ql2_imon=1.23827E-9
ql3_vset=
ql3_vmon=-8.80017E1
ql3_imon=-2.42488E-9
ql4_vset=
ql4_vmon=5.00679E-4
ql4_imon=1.38417E-8
mult1=-9.23928E-9
mult2=-2.75265E-9
rf_tmon=-5.41792E-3
rf_agc=3.29139E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.3617E-3
ql5_imon=6.86443E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65137E0
bslens_imon=2.55775E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19743E1
lens5a_imon=2.00301E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12566E2
lens4a_imon=2.05118E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53977E1
cs_ef1b_imon=2.82953E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04646E2
lens23_imon=1.01996E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04492E1
cs_ea1_imon=2.59509E-5
lens1_vset=-2.7E0
lens1_vmon=-2.95819E0
lens1_imon=1.61747E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64783E1
os_ef1alow_imon=2.97765E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03439E1
cs_ea2_imon=1.46675E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84628E1
cs_ef1a_imon=2.94882E-5
olens2_vset=0.0E0
olens2_vmon=8.10623E-4
olens2_imon=1.06765E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1149E1
os_restr1_imon=4.26896E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14706E1
os_ea1_imon=2.38169E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64002E1
os_ef1bup_imon=3.06667E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27965E0
cs_ionrep_imon=1.17181E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92062E2
cs_nozzle_imon=1.93431E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01959E1
cs_anode1_imon=2.93873E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99968E1
olens4_imon=4.17854E-9
tplens_vset=0.0E0
tplens_vmon=-1.6953E0
tplens_imon=-4.02665E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99514E1
iondef3_imon=8.89362E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98334E1
iondef2_imon=9.30867E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03277E2
lens6_imon=2.98166E-4
ql6_vset=1.0E-1
ql6_vmon=9.71794E-2
ql6_imon=8.87835E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22822E0
ionrepsh_imon=1.76206E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34135E1
lens5b_imon=2.18298E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74579E1
cs_ef2b_imon=3.13767E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.22884E0
os_ea2_imon=-6.59773E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06182E2
lens4b_imon=2.00645E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.713E1
cs_ef2a_imon=3.16002E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03293E0
os_ef2alow_imon=-2.55824E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.08836E-1
os_ef2bup_imon=-5.23598E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1149E1
os_restr2_imon=3.40653E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23091E2
cs_ionfoca_imon=6.3092E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01935E1
cs_anode2_imon=2.22515E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58174E1
iondef1_imon=5.02966E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5019E1
iondef4_imon=5.30562E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27952E1
olens3_imon=2.54601E-8
olens1_vset=0.0E0
olens1_vmon=1.57356E-3
olens1_imon=1.23722E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14636E0
cs_ionaccel_imon=-1.80501E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02163E2
cs_ionfocb_imon=1.47378E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56531E1
einzel_imon=7.58693E-6
window_vset=0.0E0
window_vmon=2.8762E-1
window_imon=-8.93203E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82808E2
mask1_imon=2.39185E-4
mask2_vset=0.0E0
mask2_vmon=-1.87107E1
mask2_imon=-6.04886E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92611E3
multa_neg_imon=7.61176E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.41437E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.51626E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30243E0
defgridb_imon=5.92219E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33246E1
os_fil1_imon=9.41453E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06837E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6455E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30627E1
cs_fil1_imon=9.95879E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62318E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6534E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.63365E-2
os_fil2_imon=-2.7861E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.72486E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.41514E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3742E-1
cs_fil2_imon=-2.70201E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19628E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22162E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.12413E-2
chamber_ion_pmon=2.21401E-9
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.28658E-1
res40_imon=-2.51138E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.369E3	0.0E0	1.47E2	4.1E1	-7.23964E-2	-8.80023E1	-5.96046E-4	-8.80018E1	8.34465E-4	3.43323E-3	9.73701E-2	1.58006E1	-1.98266E1	-1.9924E1	1.5025E1	2.23429E-9	2.52538E-3	2.52538E-3	6.30192E-3	2.12034E-2
2.0E0	3.152E3	0.0E0	3.16E2	1.6E2	-7.23964E-2	-8.80023E1	-9.29832E-4	-8.8002E1	5.72205E-4	3.40939E-3	9.68218E-2	1.58062E1	-1.98104E1	-1.99708E1	1.50262E1	2.23297E-9	2.52169E-3	2.52169E-3	6.30202E-3	2.11689E-2
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.15461E-2	-8.80022E1	-5.96046E-4	-8.80018E1	5.48363E-4	3.17097E-3	9.70125E-2	1.58168E1	-1.98287E1	-1.99313E1	1.50022E1	2.23764E-9	2.5225E-3	2.5225E-3	6.32978E-3	2.12016E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.15461E-2	-8.80024E1	-6.19888E-4	-8.80017E1	1.14441E-3	3.21865E-3	9.69172E-2	1.5782E1	-1.98393E1	-1.99266E1	1.50242E1	2.23297E-9	2.52492E-3	2.52492E-3	6.29128E-3	2.11509E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.18554E-2	-8.80023E1	-5.00679E-4	-8.80016E1	7.86781E-4	3.31402E-3	9.69648E-2	1.58274E1	-1.98594E1	-1.99461E1	1.50322E1	2.23583E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.1187E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.80024E1	-5.00679E-4	-8.80015E1	7.62939E-4	3.17097E-3	9.73463E-2	1.58216E1	-1.98361E1	-1.9923E1	1.5025E1	2.24155E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.12232E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80024E1	-4.05312E-4	-8.80014E1	7.86781E-4	3.12328E-3	9.73225E-2	1.58407E1	-1.98404E1	-1.99065E1	1.50382E1	2.22751E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.11115E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.201E-2	-8.80028E1	-2.14577E-4	-8.80018E1	7.15256E-4	3.50475E-3	9.75847E-2	1.58203E1	-1.98092E1	-1.98959E1	1.50167E1	2.24109E-9	2.51662E-3	2.51662E-3	6.30192E-3	2.10931E-2
1.2E1	8.7E1	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.80026E1	-1.43051E-4	-8.80017E1	6.91414E-4	3.17097E-3	9.68218E-2	1.57933E1	-1.98176E1	-1.9945E1	1.50157E1	2.23107E-9	2.51954E-3	2.51954E-3	6.29665E-3	2.11509E-2
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.29374E-2	-8.80024E1	-3.09944E-4	-8.80016E1	6.91414E-4	3.43323E-3	9.71556E-2	1.58359E1	-1.9838E1	-1.99372E1	1.50093E1	2.23665E-9	2.52809E-3	2.52809E-3	6.31858E-3	2.11454E-2
1.4E1	1.36E2	0.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80028E1	-1.90735E-4	-8.80017E1	7.86781E-4	3.21865E-3	9.72033E-2	1.58026E1	-1.9808E1	-1.99207E1	1.501E1	2.23869E-9	2.51203E-3	2.51203E-3	6.33436E-3	2.12413E-2
1.5E1	5.9E1	0.0E0	6.06E2	4.11E2	-7.37874E-2	-8.80026E1	-3.57628E-4	-8.80019E1	7.62939E-4	3.02792E-3	9.68933E-2	1.57933E1	-1.98242E1	-1.99119E1	1.50082E1	2.2372E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.12034E-2
1.6E1	3.4E2	0.0E0	6.47E2	4.41E2	-7.30146E-2	-8.80025E1	-4.29153E-4	-8.80015E1	6.67572E-4	3.19481E-3	9.7084E-2	1.58113E1	-1.98434E1	-1.99258E1	1.50172E1	2.23915E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.11298E-2
1.7E1	8.21E2	1.0E0	6.87E2	4.7E2	-7.34782E-2	-8.80027E1	-2.6226E-4	-8.80015E1	8.10623E-4	3.00407E-3	9.70125E-2	1.57999E1	-1.98392E1	-1.99486E1	1.5037E1	2.23235E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.12218E-2
1.8E1	3.472E3	2.0E0	7.27E2	5.0E2	-7.30918E-2	-8.80028E1	-3.09944E-4	-8.80014E1	7.39098E-4	2.90871E-3	9.71317E-2	1.57825E1	-1.98236E1	-1.9975E1	1.50431E1	2.23429E-9	2.5188E-3	2.5188E-3	6.29098E-3	2.12772E-2
1.9E1	1.836E3	1.0E0	7.68E2	5.29E2	-7.30146E-2	-8.80026E1	-5.00679E-4	-8.80014E1	6.4373E-4	3.17097E-3	9.69887E-2	1.58386E1	-1.9847E1	-1.99484E1	1.5004E1	2.23332E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.12218E-2
2.0E1	2.3E1	0.0E0	8.08E2	5.58E2	-7.32464E-2	-8.80022E1	0.0E0	-8.80012E1	6.67572E-4	3.33786E-3	9.72748E-2	1.57963E1	-1.98158E1	-1.9945E1	1.50184E1	2.22726E-9	2.51417E-3	2.51417E-3	6.28056E-3	2.12957E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.26282E-2	-8.80024E1	-4.29153E-4	-8.80016E1	7.39098E-4	3.29018E-3	9.70602E-2	1.58398E1	-1.98405E1	-1.99331E1	1.50323E1	2.21882E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.12587E-2
2.2E1	1.3E1	0.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80024E1	-5.24521E-4	-8.80018E1	6.19888E-4	3.50475E-3	9.71317E-2	1.57973E1	-1.98228E1	-1.99573E1	1.50382E1	2.21401E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.12051E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80023E1	-2.6226E-4	-8.80017E1	5.00679E-4	3.3617E-3	9.71794E-2	1.58174E1	-1.98334E1	-1.99514E1	1.5019E1	2.21401E-9	2.51954E-3	2.51954E-3	6.3074E-3	2.12413E-2