[Scan]
initial_time=2016-01-18T16:39:25
final_time=2016-01-18T16:39:46
ip_count=19
run=1024
dataset=1
scan=34
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.18554E-2
qbias_imon=-3.7638E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-7.43794E-10
ql2_vset=
ql2_vmon=-3.8147E-4
ql2_imon=1.26719E-9
ql3_vset=
ql3_vmon=-8.80014E1
ql3_imon=-2.40244E-9
ql4_vset=
ql4_vmon=6.4373E-4
ql4_imon=1.37737E-8
mult1=-9.83671E-9
mult2=-2.77849E-9
rf_tmon=-5.41366E-3
rf_agc=3.27508E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=2.98023E-3
ql5_imon=6.61588E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65501E0
bslens_imon=2.50432E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19883E1
lens5a_imon=1.99501E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12601E2
lens4a_imon=2.05029E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53991E1
cs_ef1b_imon=2.81362E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04679E2
lens23_imon=1.02178E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04351E1
cs_ea1_imon=2.5553E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97992E0
lens1_imon=1.56638E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64579E1
os_ef1alow_imon=2.97626E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03732E1
cs_ea2_imon=1.48427E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84498E1
cs_ef1a_imon=2.93804E-5
olens2_vset=0.0E0
olens2_vmon=1.00136E-3
olens2_imon=1.05555E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11685E1
os_restr1_imon=4.26628E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15081E1
os_ea1_imon=2.37408E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63207E1
os_ef1bup_imon=3.08226E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22083E0
cs_ionrep_imon=1.17493E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92053E2
cs_nozzle_imon=1.93558E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01925E1
cs_anode1_imon=2.94777E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99969E1
olens4_imon=4.24367E-9
tplens_vset=0.0E0
tplens_vmon=-1.71281E0
tplens_imon=-3.23663E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99324E1
iondef3_imon=8.83279E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.9835E1
iondef2_imon=9.37078E-6
lens6_vset=-6.0E2
lens6_vmon=-6.0328E2
lens6_imon=2.98123E-4
ql6_vset=1.0E-1
ql6_vmon=9.68933E-2
ql6_imon=9.70101E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24856E0
ionrepsh_imon=1.73238E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33929E1
lens5b_imon=2.16631E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74797E1
cs_ef2b_imon=3.13161E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.26744E0
os_ea2_imon=-7.37774E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0622E2
lens4b_imon=2.00605E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7146E1
cs_ef2a_imon=3.14898E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04413E0
os_ef2alow_imon=-2.58501E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.1229E-1
os_ef2bup_imon=-5.25053E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11511E1
os_restr2_imon=3.39747E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23084E2
cs_ionfoca_imon=6.2915E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01746E1
cs_anode2_imon=2.24055E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58053E1
iondef1_imon=5.17658E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49981E1
iondef4_imon=5.26211E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27953E1
olens3_imon=2.54876E-8
olens1_vset=0.0E0
olens1_vmon=1.4782E-3
olens1_imon=1.23521E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15621E0
cs_ionaccel_imon=-1.82393E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02155E2
cs_ionfocb_imon=1.47473E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56509E1
einzel_imon=7.80947E-6
window_vset=0.0E0
window_vmon=2.68656E-1
window_imon=-8.71708E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82814E2
mask1_imon=2.39126E-4
mask2_vset=0.0E0
mask2_vmon=-1.87277E1
mask2_imon=-6.00639E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=7.2082E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.56403E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50107E3
multb_neg_imon=7.07724E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.22838E0
defgridb_imon=6.02958E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33241E1
os_fil1_imon=9.43544E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07155E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64024E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3062E1
cs_fil1_imon=9.96721E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62354E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65291E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.64847E-2
os_fil2_imon=-2.8024E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.71543E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.81391E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35894E-1
cs_fil2_imon=-2.5128E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.42354E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22164E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=2.1185E-2
chamber_ion_pmon=2.24207E-9
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.87384E-1
res40_imon=-2.52593E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.383E3	0.0E0	1.47E2	4.1E1	-7.14689E-2	-8.80024E1	4.76837E-5	-8.80015E1	1.04904E-3	2.81334E-3	9.71079E-2	1.58197E1	-1.98195E1	-1.99362E1	1.50463E1	2.23731E-9	2.52659E-3	2.52659E-3	6.31269E-3	2.12422E-2
2.0E0	3.209E3	0.0E0	3.16E2	1.6E2	-7.09279E-2	-8.80024E1	-1.43051E-4	-8.80015E1	1.07288E-3	3.09944E-3	9.71317E-2	1.58136E1	-1.98355E1	-1.992E1	1.50446E1	2.24058E-9	2.51886E-3	2.51886E-3	6.3074E-3	2.12607E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.06958E-2	-8.80021E1	-1.90735E-4	-8.80013E1	9.29832E-4	3.3617E-3	9.71079E-2	1.58449E1	-1.98002E1	-1.99264E1	1.5019E1	2.2327E-9	2.52362E-3	2.52362E-3	6.28511E-3	2.12392E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27053E-2	-8.80023E1	-5.00679E-4	-8.80019E1	1.04904E-3	3.24249E-3	9.72509E-2	1.5807E1	-1.9815E1	-1.99054E1	1.50282E1	2.2327E-9	2.51581E-3	2.51581E-3	6.30182E-3	2.11641E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.17779E-2	-8.80024E1	-3.8147E-4	-8.80016E1	9.05991E-4	3.00407E-3	9.70602E-2	1.58179E1	-1.98263E1	-1.99555E1	1.50151E1	2.23731E-9	2.52236E-3	2.52236E-3	6.36047E-3	2.11712E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.17779E-2	-8.80023E1	-9.53674E-5	-8.80015E1	1.04904E-3	3.33786E-3	9.71079E-2	1.58152E1	-1.98098E1	-1.99231E1	1.50266E1	2.24062E-9	2.51915E-3	2.51915E-3	6.32978E-3	2.12392E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.14689E-2	-8.80026E1	-1.43051E-4	-8.80016E1	8.10623E-4	3.09944E-3	9.71079E-2	1.58038E1	-1.98308E1	-1.9923E1	1.50228E1	2.24103E-9	2.51854E-3	2.51854E-3	6.31761E-3	2.12613E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.18554E-2	-8.80022E1	-3.57628E-4	-8.80014E1	6.91414E-4	3.17097E-3	9.72986E-2	1.58191E1	-1.98495E1	-1.99216E1	1.50274E1	2.23446E-9	2.51874E-3	2.51874E-3	6.29581E-3	2.13349E-2
1.2E1	8.6E1	0.0E0	4.85E2	3.23E2	-7.286E-2	-8.80023E1	-3.8147E-4	-8.80016E1	8.34465E-4	3.00407E-3	9.71794E-2	1.58023E1	-1.98561E1	-1.99131E1	1.50178E1	2.24109E-9	2.52647E-3	2.52647E-3	6.31288E-3	2.11482E-2
1.3E1	6.0E0	0.0E0	5.25E2	3.53E2	-7.11597E-2	-8.80025E1	-4.76837E-4	-8.80015E1	1.04904E-3	3.05176E-3	9.74178E-2	1.58431E1	-1.98585E1	-1.99318E1	1.50268E1	2.2372E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.12957E-2
1.4E1	1.1E2	0.0E0	5.66E2	3.82E2	-7.23964E-2	-8.80025E1	-5.96046E-4	-8.80016E1	1.33514E-3	3.40939E-3	9.72509E-2	1.58227E1	-1.97951E1	-1.98812E1	1.50256E1	2.23526E-9	2.52209E-3	2.52209E-3	6.28552E-3	2.12957E-2
1.5E1	7.2E1	0.0E0	6.06E2	4.11E2	-7.21643E-2	-8.80025E1	-5.96046E-4	-8.80014E1	1.07288E-3	3.43323E-3	9.72271E-2	1.58445E1	-1.98411E1	-1.99254E1	1.5034E1	2.24109E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.12034E-2
1.6E1	3.1E2	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.80027E1	-6.4373E-4	-8.80013E1	1.07288E-3	3.45707E-3	9.71556E-2	1.58083E1	-1.98483E1	-1.99432E1	1.50097E1	2.23011E-9	2.52384E-3	2.52384E-3	6.31817E-3	2.11689E-2
1.7E1	9.09E2	0.0E0	6.87E2	4.7E2	-7.15461E-2	-8.80026E1	-8.10623E-4	-8.80017E1	8.34465E-4	3.43323E-3	9.74178E-2	1.57997E1	-1.98611E1	-1.99195E1	1.49932E1	2.23429E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.12403E-2
1.8E1	3.435E3	1.0E0	7.27E2	5.0E2	-7.17779E-2	-8.80028E1	-6.67572E-4	-8.80013E1	9.53674E-4	3.45707E-3	9.69172E-2	1.58263E1	-1.98188E1	-1.99378E1	1.50256E1	2.23964E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.1187E-2
1.9E1	1.909E3	0.0E0	7.68E2	5.29E2	-7.201E-2	-8.80026E1	-5.48363E-4	-8.80013E1	7.86781E-4	3.14713E-3	9.70602E-2	1.57789E1	-1.98495E1	-1.99612E1	1.50112E1	2.23487E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.12232E-2
2.0E1	1.8E1	0.0E0	8.08E2	5.58E2	-7.13143E-2	-8.80028E1	-5.72205E-4	-8.80013E1	1.07288E-3	3.31402E-3	9.7394E-2	1.5851E1	-1.98314E1	-1.99318E1	1.5028E1	2.24161E-9	2.51915E-3	2.51915E-3	6.29067E-3	2.11267E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.20871E-2	-8.80024E1	-5.96046E-4	-8.80015E1	1.16825E-3	3.00407E-3	9.71317E-2	1.57807E1	-1.98158E1	-1.99324E1	1.50274E1	2.23429E-9	2.51443E-3	2.51443E-3	6.31288E-3	2.11482E-2
2.2E1	1.3E1	0.0E0	8.89E2	6.17E2	-7.10825E-2	-8.80025E1	-6.91414E-4	-8.80014E1	6.4373E-4	3.02792E-3	9.70602E-2	1.5838E1	-1.99054E1	-1.98659E1	1.50329E1	2.22252E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.12413E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.18554E-2	-8.80023E1	-3.8147E-4	-8.80014E1	6.4373E-4	2.98023E-3	9.68933E-2	1.58053E1	-1.9835E1	-1.99324E1	1.49981E1	2.24207E-9	2.51443E-3	2.51443E-3	6.34037E-3	2.1185E-2