[Scan]
initial_time=2016-01-18T16:40:21
final_time=2016-01-18T16:40:42
ip_count=19
run=1024
dataset=1
scan=36
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.74273E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-7.24661E-10
ql2_vset=
ql2_vmon=-5.00679E-4
ql2_imon=1.25847E-9
ql3_vset=
ql3_vmon=-8.80015E1
ql3_imon=-2.41956E-9
ql4_vset=
ql4_vmon=1.14441E-3
ql4_imon=1.37842E-8
mult1=-9.84219E-9
mult2=-2.73894E-9
rf_tmon=-6.40896E-3
rf_agc=3.12621E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.14713E-3
ql5_imon=6.66082E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6624E0
bslens_imon=2.41548E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19628E1
lens5a_imon=1.99157E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12548E2
lens4a_imon=2.05013E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53898E1
cs_ef1b_imon=2.82819E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04684E2
lens23_imon=1.02324E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04756E1
cs_ea1_imon=2.5708E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98225E0
lens1_imon=1.48981E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64796E1
os_ef1alow_imon=2.97026E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03406E1
cs_ea2_imon=1.48543E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8466E1
cs_ef1a_imon=2.94224E-5
olens2_vset=0.0E0
olens2_vmon=8.10623E-4
olens2_imon=1.05146E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1148E1
os_restr1_imon=4.26211E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14949E1
os_ea1_imon=2.3527E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63577E1
os_ef1bup_imon=3.07379E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24548E0
cs_ionrep_imon=1.17198E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92047E2
cs_nozzle_imon=1.93551E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0188E1
cs_anode1_imon=2.9364E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9997E1
olens4_imon=4.25986E-9
tplens_vset=0.0E0
tplens_vmon=-1.70301E0
tplens_imon=-4.29051E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99449E1
iondef3_imon=8.8991E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98358E1
iondef2_imon=9.31227E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03279E2
lens6_imon=2.98342E-4
ql6_vset=1.0E-1
ql6_vmon=9.69648E-2
ql6_imon=9.19712E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2574E0
ionrepsh_imon=1.72698E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33877E1
lens5b_imon=2.16359E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74547E1
cs_ef2b_imon=3.13179E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.22892E0
os_ea2_imon=-6.99202E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06203E2
lens4b_imon=2.00579E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71394E1
cs_ef2a_imon=3.16526E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04353E0
os_ef2alow_imon=-2.51773E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99154E-1
os_ef2bup_imon=-5.23065E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11435E1
os_restr2_imon=3.39063E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23078E2
cs_ionfoca_imon=6.30286E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01951E1
cs_anode2_imon=2.23384E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58469E1
iondef1_imon=5.24412E-6
iondef4_vset=1.53E1
iondef4_vmon=1.501E1
iondef4_imon=5.30187E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27954E1
olens3_imon=2.54726E-8
olens1_vset=0.0E0
olens1_vmon=1.54972E-3
olens1_imon=1.22956E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15155E0
cs_ionaccel_imon=-1.76652E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02151E2
cs_ionfocb_imon=1.47292E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56619E1
einzel_imon=7.67616E-6
window_vset=0.0E0
window_vmon=2.63281E-1
window_imon=-8.36261E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82811E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.87161E1
mask2_imon=-6.84462E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92664E3
multa_neg_imon=7.32587E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.51144E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50142E3
multb_neg_imon=7.08353E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36922E0
defgridb_imon=5.98306E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33258E1
os_fil1_imon=9.41019E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07018E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64119E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30648E1
cs_fil1_imon=9.95433E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62287E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65031E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.69989E-2
os_fil2_imon=-2.68471E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.87575E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.62653E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37203E-1
cs_fil2_imon=-2.46415E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.54576E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22199E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=2.12218E-2
chamber_ion_pmon=2.23235E-9
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40094E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.17966E-1
res40_imon=-2.46324E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=203
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.354E3	0.0E0	1.47E2	4.1E1	-7.17779E-2	-8.80026E1	-7.15256E-4	-8.80016E1	7.39098E-4	3.67165E-3	9.70602E-2	1.58345E1	-1.98411E1	-1.99461E1	1.50142E1	2.24222E-9	2.52029E-3	2.52029E-3	6.30149E-3	2.11761E-2
2.0E0	3.117E3	2.0E0	3.16E2	1.6E2	-7.11597E-2	-8.80027E1	-5.48363E-4	-8.80015E1	9.05991E-4	3.24249E-3	9.71317E-2	1.57939E1	-1.98392E1	-1.99456E1	1.50148E1	2.23392E-9	2.52707E-3	2.52707E-3	6.31278E-3	2.12051E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80028E1	-5.48363E-4	-8.80018E1	6.19888E-4	3.38554E-3	9.69648E-2	1.57957E1	-1.98537E1	-1.99486E1	1.50467E1	2.23665E-9	2.5225E-3	2.5225E-3	6.32978E-3	2.12204E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.25507E-2	-8.80032E1	-4.05312E-4	-8.80017E1	3.57628E-4	3.33786E-3	9.67979E-2	1.58356E1	-1.98192E1	-1.99514E1	1.50256E1	2.23526E-9	2.51771E-3	2.51771E-3	6.29645E-3	2.11298E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.10825E-2	-8.8003E1	-5.00679E-4	-8.80019E1	6.4373E-4	3.29018E-3	9.7084E-2	1.57999E1	-1.98753E1	-1.98909E1	1.50155E1	2.23583E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.12232E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.12368E-2	-8.80028E1	-7.62939E-4	-8.80017E1	4.76837E-4	3.38554E-3	9.68695E-2	1.58091E1	-1.98458E1	-1.9913E1	1.49974E1	2.2406E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.12957E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.10825E-2	-8.80031E1	-4.52995E-4	-8.80018E1	7.39098E-4	3.52859E-3	9.68218E-2	1.58486E1	-1.98254E1	-1.99432E1	1.50346E1	2.23623E-9	2.51443E-3	2.51443E-3	6.32386E-3	2.12403E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.15461E-2	-8.8003E1	-1.19209E-4	-8.8002E1	4.05312E-4	3.38554E-3	9.70125E-2	1.58398E1	-1.98334E1	-1.99036E1	1.50088E1	2.23392E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.12775E-2
1.2E1	7.8E1	0.0E0	4.85E2	3.23E2	-7.22418E-2	-8.8003E1	-2.86102E-4	-8.8002E1	6.4373E-4	3.19481E-3	9.65595E-2	1.58383E1	-1.98248E1	-1.99161E1	1.5019E1	2.23429E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.11666E-2
1.3E1	5.0E0	0.0E0	5.25E2	3.53E2	-7.13915E-2	-8.80028E1	-3.33786E-4	-8.80018E1	9.29832E-4	3.12328E-3	9.67026E-2	1.58516E1	-1.98216E1	-1.99213E1	1.50068E1	2.23332E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.11115E-2
1.4E1	9.6E1	0.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80029E1	-5.72205E-4	-8.80018E1	9.29832E-4	3.09944E-3	9.71556E-2	1.58197E1	-1.98813E1	-1.99408E1	1.50172E1	2.23869E-9	2.51203E-3	2.51203E-3	6.31817E-3	2.12051E-2
1.5E1	8.3E1	0.0E0	6.06E2	4.11E2	-7.20871E-2	-8.80028E1	-3.8147E-4	-8.80018E1	5.48363E-4	3.09944E-3	9.65118E-2	1.58173E1	-1.98386E1	-1.99582E1	1.50148E1	2.23429E-9	2.51443E-3	2.51443E-3	6.31837E-3	2.11115E-2
1.6E1	3.31E2	0.0E0	6.47E2	4.41E2	-7.24736E-2	-8.80028E1	-5.96046E-4	-8.80018E1	6.4373E-4	3.14713E-3	9.67503E-2	1.58365E1	-1.98723E1	-1.99798E1	1.50509E1	2.23526E-9	2.52757E-3	2.52757E-3	6.3074E-3	2.12772E-2
1.7E1	7.49E2	2.0E0	6.87E2	4.7E2	-7.25507E-2	-8.80025E1	-5.72205E-4	-8.80018E1	7.15256E-4	2.98023E-3	9.68218E-2	1.58044E1	-1.98611E1	-1.99496E1	1.49878E1	2.23487E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.11148E-2
1.8E1	3.358E3	2.0E0	7.27E2	5.0E2	-7.23189E-2	-8.80023E1	-2.86102E-4	-8.80018E1	9.53674E-4	3.24249E-3	9.67979E-2	1.58125E1	-1.98374E1	-1.99252E1	1.5013E1	2.22945E-9	2.5188E-3	2.5188E-3	6.33486E-3	2.10748E-2
1.9E1	1.8E3	5.0E0	7.68E2	5.29E2	-7.18554E-2	-8.80026E1	-7.86781E-4	-8.80015E1	8.34465E-4	3.40939E-3	9.71317E-2	1.57987E1	-1.98555E1	-1.99354E1	1.50094E1	2.22461E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.11298E-2
2.0E1	1.6E1	0.0E0	8.08E2	5.58E2	-7.30918E-2	-8.80027E1	-5.48363E-4	-8.80017E1	1.04904E-3	3.43323E-3	9.69648E-2	1.58167E1	-1.98489E1	-1.99408E1	1.50064E1	2.23818E-9	2.52647E-3	2.52647E-3	6.32386E-3	2.11482E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.32464E-2	-8.80026E1	-5.48363E-4	-8.80016E1	8.58307E-4	3.38554E-3	9.6941E-2	1.58065E1	-1.98464E1	-1.99089E1	1.50277E1	2.23526E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.12403E-2
2.2E1	1.8E1	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80025E1	-2.6226E-4	-8.80016E1	9.77516E-4	3.3617E-3	9.71794E-2	1.58263E1	-1.9844E1	-1.993E1	1.50202E1	2.22726E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.12051E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.80026E1	-5.00679E-4	-8.80015E1	1.14441E-3	3.14713E-3	9.69648E-2	1.58469E1	-1.98358E1	-1.99449E1	1.501E1	2.23235E-9	2.51443E-3	2.51443E-3	6.33486E-3	2.12218E-2