[Scan]
initial_time=2016-01-18T16:40:49
final_time=2016-01-18T16:41:10
ip_count=19
run=1024
dataset=1
scan=37
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23964E-2
qbias_imon=-3.77621E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-7.51352E-10
ql2_vset=
ql2_vmon=-2.6226E-4
ql2_imon=1.23255E-9
ql3_vset=
ql3_vmon=-8.80018E1
ql3_imon=-2.49119E-9
ql4_vset=
ql4_vmon=6.67572E-4
ql4_imon=1.38261E-8
mult1=-6.76129E-9
mult2=-2.87767E-9
rf_tmon=-1.0139E-2
rf_agc=2.66543E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.60012E-3
ql5_imon=6.57761E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68356E0
bslens_imon=2.28901E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19556E1
lens5a_imon=1.99929E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12517E2
lens4a_imon=2.04869E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54211E1
cs_ef1b_imon=2.81764E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04704E2
lens23_imon=1.02081E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04634E1
cs_ea1_imon=2.61178E-5
lens1_vset=-2.7E0
lens1_vmon=-2.94943E0
lens1_imon=1.43103E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64837E1
os_ef1alow_imon=2.97549E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03606E1
cs_ea2_imon=1.47982E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84478E1
cs_ef1a_imon=2.93513E-5
olens2_vset=0.0E0
olens2_vmon=1.23978E-3
olens2_imon=1.04946E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11334E1
os_restr1_imon=4.27292E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15071E1
os_ea1_imon=2.37241E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63197E1
os_ef1bup_imon=3.05406E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23588E0
cs_ionrep_imon=1.16331E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92065E2
cs_nozzle_imon=1.93366E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02272E1
cs_anode1_imon=2.92612E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9997E1
olens4_imon=4.24613E-9
tplens_vset=0.0E0
tplens_vmon=-1.69971E0
tplens_imon=-1.11888E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.98576E1
iondef3_imon=8.73467E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98952E1
iondef2_imon=9.23936E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03247E2
lens6_imon=2.98407E-4
ql6_vset=1.0E-1
ql6_vmon=9.70364E-2
ql6_imon=9.00257E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23888E0
ionrepsh_imon=1.72171E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34355E1
lens5b_imon=2.16404E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74585E1
cs_ef2b_imon=3.13371E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.20704E0
os_ea2_imon=-6.27397E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06184E2
lens4b_imon=2.00659E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71288E1
cs_ef2a_imon=3.16903E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04074E0
os_ef2alow_imon=-2.65915E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.80605E-1
os_ef2bup_imon=-5.17471E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11328E1
os_restr2_imon=3.38022E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23114E2
cs_ionfoca_imon=6.29243E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01881E1
cs_anode2_imon=2.23668E-5
iondef1_vset=1.6E1
iondef1_vmon=1.5925E1
iondef1_imon=5.45055E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50217E1
iondef4_imon=5.42815E-6
olens3_vset=-1.28E1
olens3_vmon=-1.2795E1
olens3_imon=2.54198E-8
olens1_vset=0.0E0
olens1_vmon=1.69277E-3
olens1_imon=1.22687E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14756E0
cs_ionaccel_imon=-1.64283E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02144E2
cs_ionfocb_imon=1.47165E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56441E1
einzel_imon=7.69144E-6
window_vset=0.0E0
window_vmon=2.80412E-1
window_imon=-7.70669E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82806E2
mask1_imon=2.39131E-4
mask2_vset=0.0E0
mask2_vmon=-1.87251E1
mask2_imon=-7.16609E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92623E3
multa_neg_imon=7.78656E-5
defgrida_vset=2.902E3
defgrida_vmon=2.937E3
defgrida_imon=6.67984E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.45491E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31134E0
defgridb_imon=5.94083E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33247E1
os_fil1_imon=9.38288E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0641E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63753E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30694E1
cs_fil1_imon=9.95404E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62047E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64206E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.77017E-2
os_fil2_imon=-2.92425E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.65278E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.88246E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.40657E-1
cs_fil2_imon=-2.37765E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.99846E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21948E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.12775E-2
chamber_ion_pmon=2.23773E-9
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.23252E-1
res40_imon=-2.72041E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.375E3	1.0E0	1.47E2	4.1E1	-7.20871E-2	-8.80034E1	-5.24521E-4	-8.80015E1	9.53674E-4	3.6478E-3	9.69887E-2	1.58156E1	-1.98051E1	-1.99225E1	1.50226E1	2.23915E-9	2.52757E-3	2.52757E-3	6.30192E-3	2.12772E-2
2.0E0	3.047E3	6.0E0	3.16E2	1.6E2	-7.13915E-2	-8.80031E1	-2.86102E-4	-8.80016E1	1.07288E-3	3.26633E-3	9.67264E-2	1.58307E1	-1.98765E1	-1.99322E1	1.50521E1	2.22751E-9	2.51443E-3	2.51443E-3	6.31288E-3	2.12218E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80028E1	-3.57628E-4	-8.8002E1	8.82149E-4	3.33786E-3	9.68218E-2	1.58029E1	-1.98194E1	-1.99342E1	1.50148E1	2.23332E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.11666E-2
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.30146E-2	-8.80026E1	-4.76837E-4	-8.80019E1	7.86781E-4	3.33786E-3	9.67979E-2	1.58429E1	-1.98359E1	-1.99153E1	1.50296E1	2.22974E-9	2.51248E-3	2.51248E-3	6.31299E-3	2.1258E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.08504E-2	-8.80026E1	-5.00679E-4	-8.80019E1	1.12057E-3	3.74317E-3	9.67264E-2	1.57837E1	-1.98284E1	-1.99107E1	1.49835E1	2.23414E-9	2.52301E-3	2.52301E-3	6.2815E-3	2.12782E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.14689E-2	-8.80024E1	-6.19888E-4	-8.80017E1	9.05991E-4	3.74317E-3	9.67741E-2	1.58256E1	-1.98051E1	-1.99195E1	1.5023E1	2.23665E-9	2.52139E-3	2.52139E-3	6.32418E-3	2.12392E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17779E-2	-8.80027E1	-5.00679E-4	-8.80017E1	1.0252E-3	3.55244E-3	9.6941E-2	1.57825E1	-1.98344E1	-1.99312E1	1.50388E1	2.23011E-9	2.51203E-3	2.51203E-3	6.32356E-3	2.12957E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.0464E-2	-8.80027E1	-5.24521E-4	-8.80018E1	9.53674E-4	3.38554E-3	9.67979E-2	1.58185E1	-1.9823E1	-1.9921E1	1.5031E1	2.23818E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.1185E-2
1.2E1	1.02E2	0.0E0	4.85E2	3.23E2	-7.09279E-2	-8.80027E1	-4.52995E-4	-8.80016E1	6.4373E-4	3.50475E-3	9.68695E-2	1.57981E1	-1.98284E1	-1.99312E1	1.50088E1	2.22252E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.12413E-2
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.10051E-2	-8.80026E1	-7.15256E-4	-8.80018E1	7.39098E-4	3.60012E-3	9.67503E-2	1.58323E1	-1.98416E1	-1.99576E1	1.50028E1	2.22751E-9	2.52428E-3	2.52428E-3	6.30192E-3	2.11298E-2
1.4E1	9.6E1	0.0E0	5.66E2	3.82E2	-7.20871E-2	-8.80026E1	-6.67572E-4	-8.8002E1	9.05991E-4	3.09944E-3	9.68218E-2	1.57933E1	-1.98332E1	-1.99204E1	1.50184E1	2.23138E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.11482E-2
1.5E1	7.2E1	0.0E0	6.06E2	4.11E2	-7.12368E-2	-8.80026E1	-5.72205E-4	-8.80015E1	9.53674E-4	3.33786E-3	9.66549E-2	1.57789E1	-1.98278E1	-1.99191E1	1.50196E1	2.23566E-9	2.51581E-3	2.51581E-3	6.34099E-3	2.1258E-2
1.6E1	3.18E2	0.0E0	6.47E2	4.41E2	-7.05415E-2	-8.80025E1	-5.48363E-4	-8.80017E1	1.04904E-3	3.67165E-3	9.67264E-2	1.58323E1	-1.98116E1	-1.99408E1	1.50334E1	2.23297E-9	2.51632E-3	2.51632E-3	6.32356E-3	2.11328E-2
1.7E1	7.67E2	0.0E0	6.87E2	4.7E2	-7.07733E-2	-8.80025E1	-3.09944E-4	-8.80017E1	1.23978E-3	3.55244E-3	9.67503E-2	1.58077E1	-1.98092E1	-1.99149E1	1.4986E1	2.24012E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.11482E-2
1.8E1	3.474E3	0.0E0	7.27E2	5.0E2	-7.16233E-2	-8.80023E1	-2.6226E-4	-8.80019E1	1.38283E-3	3.55244E-3	9.67503E-2	1.58005E1	-1.9823E1	-1.99546E1	1.50154E1	2.23526E-9	2.51552E-3	2.51552E-3	6.32936E-3	2.12218E-2
1.9E1	1.845E3	1.0E0	7.68E2	5.29E2	-7.22418E-2	-8.80024E1	-5.48363E-4	-8.80018E1	9.29832E-4	3.57628E-3	9.65357E-2	1.58077E1	-1.98146E1	-1.99179E1	1.50118E1	2.2327E-9	2.5225E-3	2.5225E-3	6.29067E-3	2.1108E-2
2.0E1	1.5E1	0.0E0	8.08E2	5.58E2	-7.18554E-2	-8.80023E1	-2.6226E-4	-8.80017E1	1.09673E-3	3.3617E-3	9.68933E-2	1.58262E1	-1.98222E1	-1.99048E1	1.49986E1	2.23583E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.10968E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.23189E-2	-8.80023E1	-2.6226E-4	-8.80016E1	7.62939E-4	3.55244E-3	9.67741E-2	1.58044E1	-1.98452E1	-1.99378E1	1.50068E1	2.23011E-9	2.52492E-3	2.52492E-3	6.3074E-3	2.11689E-2
2.2E1	1.2E1	0.0E0	8.89E2	6.17E2	-7.201E-2	-8.80026E1	-9.53674E-5	-8.80019E1	8.82149E-4	3.55244E-3	9.66311E-2	1.58233E1	-1.9835E1	-1.99342E1	1.5013E1	2.23915E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.11666E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.23964E-2	-8.80026E1	-2.6226E-4	-8.80018E1	6.67572E-4	3.60012E-3	9.70364E-2	1.5925E1	-1.98952E1	-1.98576E1	1.50217E1	2.23773E-9	2.51417E-3	2.51417E-3	6.32356E-3	2.12775E-2