[Scan]
initial_time=2016-01-18T16:42:14
final_time=2016-01-18T16:42:34
ip_count=19
run=1024
dataset=1
scan=40
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.72615E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-7.37798E-10
ql2_vset=
ql2_vmon=-5.96046E-4
ql2_imon=1.25947E-9
ql3_vset=
ql3_vmon=-8.80014E1
ql3_imon=-2.39413E-9
ql4_vset=
ql4_vmon=9.77516E-4
ql4_imon=1.39435E-8
mult1=-1.13199E-8
mult2=-2.82321E-9
rf_tmon=-4.3325E-3
rf_agc=3.26425E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.02792E-3
ql5_imon=6.38068E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65974E0
bslens_imon=2.51862E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19732E1
lens5a_imon=1.99563E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12561E2
lens4a_imon=2.05108E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54098E1
cs_ef1b_imon=2.8025E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04657E2
lens23_imon=1.02297E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0477E1
cs_ea1_imon=2.60547E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96168E0
lens1_imon=1.71749E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64683E1
os_ef1alow_imon=2.98477E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03559E1
cs_ea2_imon=1.47939E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84475E1
cs_ef1a_imon=2.94098E-5
olens2_vset=0.0E0
olens2_vmon=1.45435E-3
olens2_imon=1.04102E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=4.28569E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14713E1
os_ea1_imon=2.36999E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63642E1
os_ef1bup_imon=3.07721E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27144E0
cs_ionrep_imon=1.193E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92027E2
cs_nozzle_imon=1.93495E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01884E1
cs_anode1_imon=2.91553E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99969E1
olens4_imon=4.23027E-9
tplens_vset=0.0E0
tplens_vmon=-1.7319E0
tplens_imon=-3.26522E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99626E1
iondef3_imon=8.77418E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.9844E1
iondef2_imon=9.27957E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03243E2
lens6_imon=2.98312E-4
ql6_vset=1.0E-1
ql6_vmon=9.73463E-2
ql6_imon=9.63652E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24835E0
ionrepsh_imon=1.74032E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33907E1
lens5b_imon=2.17458E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74589E1
cs_ef2b_imon=3.1311E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.23213E0
os_ea2_imon=-7.00882E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06215E2
lens4b_imon=2.00638E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7152E1
cs_ef2a_imon=3.15842E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05768E0
os_ef2alow_imon=-2.47701E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95137E-1
os_ef2bup_imon=-5.28769E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11286E1
os_restr2_imon=3.38185E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23089E2
cs_ionfoca_imon=6.30153E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01915E1
cs_anode2_imon=2.22989E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58038E1
iondef1_imon=5.43114E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49956E1
iondef4_imon=5.44229E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27953E1
olens3_imon=2.53595E-8
olens1_vset=0.0E0
olens1_vmon=1.07288E-3
olens1_imon=1.21763E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14698E0
cs_ionaccel_imon=-1.6761E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02149E2
cs_ionfocb_imon=1.47398E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5648E1
einzel_imon=7.72527E-6
window_vset=0.0E0
window_vmon=2.69993E-1
window_imon=-8.00332E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82817E2
mask1_imon=2.39118E-4
mask2_vset=0.0E0
mask2_vmon=-1.87298E1
mask2_imon=-6.39401E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92626E3
multa_neg_imon=7.62864E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93735E3
defgrida_imon=6.47935E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50077E3
multb_neg_imon=7.47141E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.54616E0
defgridb_imon=6.22853E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3328E1
os_fil1_imon=9.41597E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06924E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63252E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30698E1
cs_fil1_imon=9.9695E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62022E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64145E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.92048E-2
os_fil2_imon=-2.72488E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88473E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.15865E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34223E-1
cs_fil2_imon=-2.43795E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.09879E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22141E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.1187E-2
chamber_ion_pmon=2.23011E-9
chamber_cvt_pmon=2.51096E-3
foreline_cvt_pmon=2.51096E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.92246E-1
res40_imon=-2.49946E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.345E3	1.0E0	1.47E2	4.1E1	-7.06187E-2	-8.80027E1	-6.19888E-4	-8.80014E1	7.15256E-4	3.86238E-3	9.71556E-2	1.5769E1	-1.98287E1	-1.99797E1	1.50242E1	2.24315E-9	2.52293E-3	2.52293E-3	6.30171E-3	2.11616E-2
2.0E0	3.189E3	0.0E0	3.16E2	1.6E2	-7.0464E-2	-8.80026E1	-6.4373E-4	-8.80017E1	6.67572E-4	3.6478E-3	9.70364E-2	1.58283E1	-1.98196E1	-1.99273E1	1.50141E1	2.23869E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.12413E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.14689E-2	-8.80024E1	-4.76837E-4	-8.80015E1	8.82149E-4	3.38554E-3	9.70364E-2	1.57832E1	-1.98539E1	-1.99072E1	1.50115E1	2.23468E-9	2.52027E-3	2.52027E-3	6.31858E-3	2.12016E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.10825E-2	-8.80024E1	-5.72205E-4	-8.80014E1	5.48363E-4	3.43323E-3	9.68218E-2	1.58221E1	-1.98281E1	-1.99378E1	1.50254E1	2.24012E-9	2.51814E-3	2.51814E-3	6.3074E-3	2.11357E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.20871E-2	-8.80025E1	-4.76837E-4	-8.80016E1	7.39098E-4	3.43323E-3	9.69648E-2	1.58588E1	-1.98266E1	-1.98909E1	1.50412E1	2.23773E-9	2.52384E-3	2.52384E-3	6.33436E-3	2.12775E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.80025E1	-9.53674E-5	-8.80016E1	6.67572E-4	3.60012E-3	9.71794E-2	1.5789E1	-1.98257E1	-1.99325E1	1.5013E1	2.23138E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.11666E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80026E1	-1.90735E-4	-8.80017E1	5.72205E-4	3.48091E-3	9.68933E-2	1.58083E1	-1.98555E1	-1.99173E1	1.50412E1	2.23678E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.12413E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.80026E1	-3.09944E-4	-8.80016E1	6.91414E-4	3.00407E-3	9.72033E-2	1.58017E1	-1.9826E1	-1.99444E1	1.5037E1	2.23429E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.12587E-2
1.2E1	8.8E1	0.0E0	4.85E2	3.23E2	-7.17007E-2	-8.80025E1	-3.8147E-4	-8.80015E1	6.4373E-4	3.12328E-3	9.70602E-2	1.58101E1	-1.98549E1	-1.99173E1	1.5019E1	2.23429E-9	2.52318E-3	2.52318E-3	6.29645E-3	2.12218E-2
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.17007E-2	-8.80027E1	-4.76837E-4	-8.80013E1	7.86781E-4	3.17097E-3	9.72748E-2	1.58167E1	-1.98392E1	-1.99336E1	1.5022E1	2.23623E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.10748E-2
1.4E1	8.6E1	0.0E0	5.66E2	3.82E2	-7.286E-2	-8.80026E1	-5.00679E-4	-8.80015E1	8.58307E-4	3.40939E-3	9.73463E-2	1.57831E1	-1.98627E1	-1.9945E1	1.50016E1	2.24657E-9	2.5225E-3	2.5225E-3	6.32418E-3	2.12016E-2
1.5E1	7.2E1	0.0E0	6.06E2	4.11E2	-7.22418E-2	-8.80028E1	-4.29153E-4	-8.80012E1	8.34465E-4	3.45707E-3	9.7394E-2	1.58451E1	-1.97968E1	-1.99313E1	1.50154E1	2.2406E-9	2.51525E-3	2.51525E-3	6.3074E-3	2.11689E-2
1.6E1	2.99E2	0.0E0	6.47E2	4.41E2	-7.20871E-2	-8.80027E1	-4.76837E-4	-8.80015E1	7.39098E-4	3.57628E-3	9.71794E-2	1.58119E1	-1.98573E1	-1.99588E1	1.50254E1	2.21401E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.12051E-2
1.7E1	8.17E2	0.0E0	6.87E2	4.7E2	-7.286E-2	-8.80028E1	-4.76837E-4	-8.80014E1	8.82149E-4	3.55244E-3	9.7084E-2	1.58095E1	-1.98476E1	-1.9948E1	1.50196E1	2.22075E-9	2.52647E-3	2.52647E-3	6.3074E-3	2.12218E-2
1.8E1	3.428E3	1.0E0	7.27E2	5.0E2	-7.31692E-2	-8.80027E1	-3.57628E-4	-8.80015E1	8.58307E-4	3.67165E-3	9.71317E-2	1.58251E1	-1.98206E1	-1.99588E1	1.50383E1	2.21689E-9	2.51662E-3	2.51662E-3	6.28552E-3	2.11482E-2
1.9E1	1.724E3	4.0E0	7.68E2	5.29E2	-7.286E-2	-8.80029E1	-3.33786E-4	-8.80016E1	8.82149E-4	3.60012E-3	9.70364E-2	1.57987E1	-1.9823E1	-1.98999E1	1.50128E1	2.21401E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.12034E-2
2.0E1	2.1E1	0.0E0	8.08E2	5.58E2	-7.25507E-2	-8.80027E1	-5.00679E-4	-8.80017E1	1.00136E-3	3.62396E-3	9.72271E-2	1.58564E1	-1.98519E1	-1.9939E1	1.50292E1	2.22364E-9	2.51443E-3	2.51443E-3	6.31288E-3	2.12587E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80026E1	-3.57628E-4	-8.80014E1	1.0252E-3	3.45707E-3	9.70364E-2	1.58209E1	-1.9847E1	-1.99166E1	1.49914E1	2.23041E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.11298E-2
2.2E1	1.3E1	0.0E0	8.89E2	6.17E2	-7.30146E-2	-8.80028E1	-7.86781E-4	-8.80016E1	8.58307E-4	3.55244E-3	9.72509E-2	1.57512E1	-1.98464E1	-1.99258E1	1.50214E1	2.23138E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.12218E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80024E1	-5.96046E-4	-8.80014E1	9.77516E-4	3.02792E-3	9.73463E-2	1.58038E1	-1.9844E1	-1.99626E1	1.49956E1	2.23011E-9	2.51096E-3	2.51096E-3	6.32356E-3	2.1187E-2