[Scan]
initial_time=2016-01-18T16:42:42
final_time=2016-01-18T16:43:02
ip_count=19
run=1024
dataset=1
scan=41
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.18554E-2
qbias_imon=-3.78899E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-6.96576E-10
ql2_vset=
ql2_vmon=-1.90735E-4
ql2_imon=1.26047E-9
ql3_vset=
ql3_vmon=-8.80014E1
ql3_imon=-2.35986E-9
ql4_vset=
ql4_vmon=8.58307E-4
ql4_imon=1.40117E-8
mult1=-9.86583E-9
mult2=-2.92708E-9
rf_tmon=-3.1409E-3
rf_agc=3.41763E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.91006E-3
ql5_imon=6.73616E-10
bslens_vset=-6.2E0
bslens_vmon=-6.58623E0
bslens_imon=1.38777E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18871E1
lens5a_imon=2.03606E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12696E2
lens4a_imon=2.05962E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54181E1
cs_ef1b_imon=2.80322E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.01422E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.03258E1
cs_ea1_imon=2.57212E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08221E0
lens1_imon=2.56659E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64873E1
os_ef1alow_imon=2.97874E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04153E1
cs_ea2_imon=1.44197E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84328E1
cs_ef1a_imon=2.93441E-5
olens2_vset=0.0E0
olens2_vmon=5.72205E-4
olens2_imon=1.03149E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11189E1
os_restr1_imon=4.27869E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.13575E1
os_ea1_imon=2.32122E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63623E1
os_ef1bup_imon=3.06271E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23407E0
cs_ionrep_imon=1.23721E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92156E2
cs_nozzle_imon=1.93964E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02175E1
cs_anode1_imon=2.91531E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99972E1
olens4_imon=4.30027E-9
tplens_vset=0.0E0
tplens_vmon=-1.65766E0
tplens_imon=-1.25466E-6
iondef3_vset=-2.0E1
iondef3_vmon=-1.99803E1
iondef3_imon=8.96178E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98399E1
iondef2_imon=1.00108E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03229E2
lens6_imon=2.97715E-4
ql6_vset=1.0E-1
ql6_vmon=9.73701E-2
ql6_imon=8.6596E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.11811E0
ionrepsh_imon=1.69648E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34913E1
lens5b_imon=2.26354E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74645E1
cs_ef2b_imon=3.14164E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.22987E0
os_ea2_imon=-1.03115E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.06063E2
lens4b_imon=2.00309E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7151E1
cs_ef2a_imon=3.1647E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02933E0
os_ef2alow_imon=-2.35281E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.1244E-1
os_ef2bup_imon=-5.28283E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11292E1
os_restr2_imon=3.37445E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23091E2
cs_ionfoca_imon=6.37679E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01731E1
cs_anode2_imon=2.23524E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57141E1
iondef1_imon=5.27391E-6
iondef4_vset=1.53E1
iondef4_vmon=1.503E1
iondef4_imon=5.32364E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27952E1
olens3_imon=2.53235E-8
olens1_vset=0.0E0
olens1_vmon=1.16825E-3
olens1_imon=1.20422E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14816E0
cs_ionaccel_imon=-1.85546E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02157E2
cs_ionfocb_imon=1.47421E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56327E1
einzel_imon=7.93651E-6
window_vset=0.0E0
window_vmon=2.7861E-1
window_imon=-7.77877E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82809E2
mask1_imon=2.39185E-4
mask2_vset=0.0E0
mask2_vmon=-1.87215E1
mask2_imon=-7.13005E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92748E3
multa_neg_imon=5.61638E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93546E3
defgrida_imon=8.41383E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50317E3
multb_neg_imon=3.28398E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.84969E0
defgridb_imon=6.82404E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33296E1
os_fil1_imon=9.40612E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07678E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63004E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30695E1
cs_fil1_imon=9.97002E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6233E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63795E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.01522E-2
os_fil2_imon=-2.82214E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98915E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.2988E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34831E-1
cs_fil2_imon=-2.71402E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.53575E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21904E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.11689E-2
chamber_ion_pmon=2.23773E-9
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.4002E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.47879E-1
res40_imon=-2.62311E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.394E3	0.0E0	1.47E2	4.1E1	-7.12368E-2	-8.80029E1	-3.09944E-4	-8.80017E1	7.39098E-4	3.3617E-3	9.7394E-2	1.56971E1	-1.98242E1	-2.00417E1	1.50226E1	2.23818E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.12772E-2
2.0E0	2.967E3	4.0E0	3.16E2	1.6E2	-7.17779E-2	-8.80028E1	-4.29153E-4	-8.80018E1	1.12057E-3	3.40939E-3	9.74655E-2	1.58281E1	-1.9814E1	-1.99041E1	1.50124E1	2.24109E-9	2.52647E-3	2.52647E-3	6.32936E-3	2.12772E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.18554E-2	-8.80026E1	-8.10623E-4	-8.80018E1	1.16825E-3	3.50475E-3	9.73225E-2	1.58185E1	-1.98334E1	-1.99402E1	1.50154E1	2.23623E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.12587E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.16233E-2	-8.80027E1	-5.48363E-4	-8.80016E1	1.23978E-3	3.31402E-3	9.7537E-2	1.58144E1	-1.98499E1	-1.9929E1	1.50288E1	2.22726E-9	2.52384E-3	2.52384E-3	6.33436E-3	2.11148E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.22418E-2	-8.80023E1	-8.58307E-4	-8.8002E1	9.29832E-4	3.45707E-3	9.73225E-2	1.58551E1	-1.98393E1	-1.99266E1	1.50244E1	2.21873E-9	2.5131E-3	2.5131E-3	6.32356E-3	2.1187E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.19325E-2	-8.80027E1	-5.72205E-4	-8.80019E1	6.4373E-4	3.62396E-3	9.7394E-2	1.58185E1	-1.98288E1	-1.9901E1	1.5034E1	2.21401E-9	2.51334E-3	2.51334E-3	6.31837E-3	2.11666E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.80029E1	-7.62939E-4	-8.80016E1	6.91414E-4	3.79086E-3	9.73463E-2	1.58427E1	-1.98334E1	-1.99325E1	1.5022E1	2.21497E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.12218E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.8003E1	-5.72205E-4	-8.80017E1	1.16825E-3	3.95775E-3	9.74655E-2	1.58215E1	-1.98476E1	-1.99216E1	1.50393E1	2.21401E-9	2.51954E-3	2.51954E-3	6.30202E-3	2.12413E-2
1.2E1	8.4E1	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.80029E1	-6.19888E-4	-8.80017E1	6.4373E-4	3.93391E-3	9.75132E-2	1.58014E1	-1.97909E1	-1.99526E1	1.50298E1	2.23429E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.1185E-2
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.18554E-2	-8.80026E1	-7.39098E-4	-8.80016E1	1.00136E-3	3.8147E-3	9.73701E-2	1.57915E1	-1.98212E1	-1.99432E1	1.5016E1	2.23869E-9	2.52923E-3	2.52923E-3	6.3074E-3	2.12594E-2
1.4E1	1.17E2	0.0E0	5.66E2	3.82E2	-7.18554E-2	-8.80026E1	-7.39098E-4	-8.80016E1	1.07288E-3	3.67165E-3	9.72509E-2	1.57464E1	-1.98182E1	-1.99378E1	1.50166E1	2.2372E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.11666E-2
1.5E1	6.2E1	0.0E0	6.06E2	4.11E2	-7.17779E-2	-8.80027E1	-8.34465E-4	-8.8002E1	1.16825E-3	4.02927E-3	9.71794E-2	1.58044E1	-1.98411E1	-1.99113E1	1.50208E1	2.23429E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.12034E-2
1.6E1	3.2E2	0.0E0	6.47E2	4.41E2	-7.18554E-2	-8.80028E1	-5.72205E-4	-8.80018E1	1.07288E-3	3.69549E-3	9.73701E-2	1.58456E1	-1.97822E1	-1.99294E1	1.5034E1	2.23818E-9	2.52318E-3	2.52318E-3	6.30192E-3	2.1185E-2
1.7E1	8.1E2	1.0E0	6.87E2	4.7E2	-7.30918E-2	-8.80026E1	-6.67572E-4	-8.80019E1	1.07288E-3	3.86238E-3	9.73701E-2	1.57855E1	-1.98579E1	-1.99684E1	1.5007E1	2.24155E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.11509E-2
1.8E1	3.373E3	2.0E0	7.27E2	5.0E2	-7.13915E-2	-8.80026E1	-5.72205E-4	-8.80018E1	9.29832E-4	3.8147E-3	9.7537E-2	1.58017E1	-1.98495E1	-1.99119E1	1.50304E1	2.2372E-9	2.52428E-3	2.52428E-3	6.32386E-3	2.12218E-2
1.9E1	1.848E3	0.0E0	7.68E2	5.29E2	-7.20871E-2	-8.80025E1	-3.33786E-4	-8.80018E1	6.91414E-4	3.91006E-3	9.74417E-2	1.58493E1	-1.98469E1	-1.99037E1	1.5E1	2.23764E-9	2.51915E-3	2.51915E-3	6.32418E-3	2.1258E-2
2.0E1	1.8E1	0.0E0	8.08E2	5.58E2	-7.14689E-2	-8.80025E1	-5.72205E-4	-8.80019E1	8.82149E-4	3.71933E-3	9.72509E-2	1.58864E1	-1.98257E1	-1.98948E1	1.50238E1	2.23461E-9	2.51625E-3	2.51625E-3	6.32936E-3	2.12341E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.18554E-2	-8.80023E1	-4.76837E-4	-8.80014E1	5.48363E-4	3.67165E-3	9.72509E-2	1.58091E1	-1.98523E1	-1.99207E1	1.50671E1	2.23869E-9	2.52599E-3	2.52599E-3	6.32356E-3	2.12594E-2
2.2E1	9.0E0	0.0E0	8.89E2	6.17E2	-7.20871E-2	-8.80026E1	-4.52995E-4	-8.80015E1	8.82149E-4	3.76701E-3	9.70602E-2	1.56758E1	-1.98086E1	-1.99596E1	1.50226E1	2.23297E-9	2.51525E-3	2.51525E-3	6.32896E-3	2.12232E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.18554E-2	-8.80025E1	-1.90735E-4	-8.80014E1	8.58307E-4	3.91006E-3	9.73701E-2	1.57141E1	-1.98399E1	-1.99803E1	1.503E1	2.23773E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.11689E-2