[Scan]
initial_time=2016-01-18T16:43:37
final_time=2016-01-18T16:43:57
ip_count=19
run=1024
dataset=1
scan=43
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17007E-2
qbias_imon=-3.81031E-6
ql1_vset=
ql1_vmon=-8.80031E1
ql1_imon=-7.71356E-10
ql2_vset=
ql2_vmon=-3.09944E-4
ql2_imon=1.28081E-9
ql3_vset=
ql3_vmon=-8.80014E1
ql3_imon=-2.51201E-9
ql4_vset=
ql4_vmon=6.67572E-4
ql4_imon=1.40517E-8
mult1=-9.28138E-9
mult2=-2.71647E-9
rf_tmon=-4.29877E-3
rf_agc=3.33765E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.31402E-3
ql5_imon=6.62684E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67801E0
bslens_imon=2.6459E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19925E1
lens5a_imon=2.01235E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12543E2
lens4a_imon=2.04976E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54217E1
cs_ef1b_imon=2.80358E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.02114E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04392E1
cs_ea1_imon=2.62184E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06251E0
lens1_imon=1.56284E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64783E1
os_ef1alow_imon=2.97081E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03779E1
cs_ea2_imon=1.48002E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84472E1
cs_ef1a_imon=2.95171E-5
olens2_vset=0.0E0
olens2_vmon=1.14441E-3
olens2_imon=1.02386E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.114E1
os_restr1_imon=4.2686E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14934E1
os_ea1_imon=2.37372E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63221E1
os_ef1bup_imon=3.08325E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23204E0
cs_ionrep_imon=1.16466E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92035E2
cs_nozzle_imon=1.93569E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01839E1
cs_anode1_imon=2.89909E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99971E1
olens4_imon=4.32514E-9
tplens_vset=0.0E0
tplens_vmon=-1.72579E0
tplens_imon=-7.59044E-8
iondef3_vset=-2.0E1
iondef3_vmon=-1.99168E1
iondef3_imon=9.02392E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98203E1
iondef2_imon=9.30707E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03238E2
lens6_imon=2.983E-4
ql6_vset=1.0E-1
ql6_vmon=9.70125E-2
ql6_imon=9.02271E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24856E0
ionrepsh_imon=1.73734E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34047E1
lens5b_imon=2.19215E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74699E1
cs_ef2b_imon=3.12722E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.20786E0
os_ea2_imon=-1.19082E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.06242E2
lens4b_imon=2.00495E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.713E1
cs_ef2a_imon=3.1784E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07858E0
os_ef2alow_imon=-2.58346E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.23252E-1
os_ef2bup_imon=-5.26842E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11147E1
os_restr2_imon=3.36616E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23082E2
cs_ionfoca_imon=6.30176E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01701E1
cs_anode2_imon=2.25434E-5
iondef1_vset=1.6E1
iondef1_vmon=1.5832E1
iondef1_imon=5.11995E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5019E1
iondef4_imon=5.33805E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27955E1
olens3_imon=2.52669E-8
olens1_vset=0.0E0
olens1_vmon=1.43051E-3
olens1_imon=1.20682E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15056E0
cs_ionaccel_imon=-1.77618E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02135E2
cs_ionfocb_imon=1.47522E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56531E1
einzel_imon=7.68784E-6
window_vset=0.0E0
window_vmon=2.94227E-1
window_imon=-8.60768E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82788E2
mask1_imon=2.38936E-4
mask2_vset=0.0E0
mask2_vmon=-1.87371E1
mask2_imon=-5.40015E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92544E3
multa_neg_imon=8.28064E-5
defgrida_vset=2.902E3
defgrida_vmon=2.936E3
defgrida_imon=7.22236E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50026E3
multb_neg_imon=4.34836E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29925E0
defgridb_imon=6.11098E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33285E1
os_fil1_imon=9.38516E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06963E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62675E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30662E1
cs_fil1_imon=9.95609E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63225E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63538E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.05368E-2
os_fil2_imon=-2.6059E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88104E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.54413E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-2.43171E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01608E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21946E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=2.10748E-2
chamber_ion_pmon=2.23526E-9
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.65899E-1
res40_imon=-2.23027E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.386E3	1.0E0	1.47E2	4.1E1	-7.25507E-2	-8.8003E1	-5.72205E-4	-8.80016E1	8.34465E-4	4.17233E-3	9.68218E-2	1.57837E1	-1.98392E1	-1.99378E1	1.50202E1	2.23869E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.1187E-2
2.0E0	3.012E3	1.0E0	3.16E2	1.6E2	-7.30146E-2	-8.80029E1	-8.10623E-4	-8.80017E1	8.34465E-4	4.19617E-3	9.69887E-2	1.57952E1	-1.98306E1	-1.99622E1	1.50035E1	2.24012E-9	2.5199E-3	2.5199E-3	6.29645E-3	2.1185E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.33239E-2	-8.80026E1	-7.15256E-4	-8.80016E1	9.53674E-4	4.19617E-3	9.71556E-2	1.58383E1	-1.98212E1	-1.99486E1	1.50393E1	2.23863E-9	2.52139E-3	2.52139E-3	6.32418E-3	2.11829E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.25507E-2	-8.80027E1	-9.29832E-4	-8.80015E1	6.67572E-4	3.91006E-3	9.72033E-2	1.57855E1	-1.98307E1	-1.9935E1	1.50575E1	2.23623E-9	2.51334E-3	2.51334E-3	6.32386E-3	2.12403E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.80028E1	-3.09944E-4	-8.80017E1	5.48363E-4	3.93391E-3	9.72033E-2	1.58179E1	-1.98519E1	-1.99228E1	1.50166E1	2.23918E-9	2.52025E-3	2.52025E-3	6.31269E-3	2.12244E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.80027E1	-4.05312E-4	-8.80013E1	4.29153E-4	4.14848E-3	9.67026E-2	1.58089E1	-1.98519E1	-1.99642E1	1.50184E1	2.24012E-9	2.53196E-3	2.53196E-3	6.3074E-3	2.12218E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37103E-2	-8.80026E1	-6.19888E-4	-8.80014E1	6.19888E-4	4.43459E-3	9.67979E-2	1.57933E1	-1.98176E1	-1.99504E1	1.50051E1	2.23818E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.12034E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.34782E-2	-8.80027E1	-4.29153E-4	-8.80013E1	5.00679E-4	3.76701E-3	9.71556E-2	1.58431E1	-1.98362E1	-1.99197E1	1.50172E1	2.23623E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.1185E-2
1.2E1	7.3E1	0.0E0	4.85E2	3.23E2	-7.27828E-2	-8.80028E1	-5.48363E-4	-8.80015E1	5.72205E-4	3.71933E-3	9.73225E-2	1.58604E1	-1.98428E1	-1.99278E1	1.50112E1	2.23235E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.11482E-2
1.3E1	1.9E1	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80028E1	-9.05991E-4	-8.80018E1	6.4373E-4	4.02927E-3	9.75847E-2	1.5828E1	-1.98567E1	-1.99057E1	1.50381E1	2.23523E-9	2.52374E-3	2.52374E-3	6.3074E-3	2.12196E-2
1.4E1	1.04E2	0.0E0	5.66E2	3.82E2	-7.27828E-2	-8.80029E1	-6.67572E-4	-8.80017E1	9.05991E-4	3.91006E-3	9.72748E-2	1.57587E1	-1.98338E1	-1.99181E1	1.50016E1					
1.5E1	6.6E1	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80028E1	-6.91414E-4	-8.80017E1	6.91414E-4	4.1008E-3	9.6941E-2	1.58859E1	-1.98354E1	-1.99321E1	1.50262E1	2.23487E-9	2.51675E-3	2.51675E-3	6.32518E-3	2.12757E-2
1.6E1	3.08E2	0.0E0	6.47E2	4.41E2	-7.20871E-2	-8.80029E1	-8.58307E-4	-8.80015E1	6.67572E-4	3.62396E-3	9.7084E-2	1.58089E1	-1.98753E1	-1.99065E1	1.50477E1	2.23407E-9	2.52066E-3	2.52066E-3	6.3131E-3	2.12381E-2
1.7E1	8.08E2	0.0E0	6.87E2	4.7E2	-7.23964E-2	-8.80031E1	-5.96046E-4	-8.80017E1	3.33786E-4	3.62396E-3	9.75847E-2	1.5825E1	-1.98322E1	-1.99408E1	1.5024E1	2.24012E-9	2.51725E-3	2.51725E-3	6.3245E-3	2.11235E-2
1.8E1	3.309E3	1.0E0	7.27E2	5.0E2	-7.18554E-2	-8.80033E1	-6.91414E-4	-8.80012E1	5.48363E-4	3.8147E-3	9.72748E-2	1.57658E1	-1.98318E1	-1.99377E1	1.50224E1	2.23915E-9	2.52538E-3	2.52538E-3	6.28006E-3	2.12403E-2
1.9E1	1.776E3	0.0E0	7.68E2	5.29E2	-7.21643E-2	-8.8003E1	-5.24521E-4	-8.80013E1	8.34465E-4	3.33786E-3	9.75132E-2	1.58191E1	-1.98505E1	-1.99549E1	1.50242E1	2.24109E-9	2.52428E-3	2.52428E-3	6.32936E-3	2.11666E-2
2.0E1	1.6E1	0.0E0	8.08E2	5.58E2	-7.13915E-2	-8.80027E1	-2.38419E-4	-8.80015E1	9.77516E-4	3.12328E-3	9.72748E-2	1.58173E1	-1.98618E1	-1.9931E1	1.50403E1	2.24304E-9	2.52318E-3	2.52318E-3	6.29645E-3	2.12772E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.11597E-2	-8.80026E1	-3.33786E-4	-8.80012E1	7.39098E-4	3.26633E-3	9.70602E-2	1.58564E1	-1.9811E1	-1.99318E1	1.50256E1	2.2426E-9	2.52362E-3	2.52362E-3	6.3074E-3	2.12392E-2
2.2E1	1.3E1	0.0E0	8.89E2	6.17E2	-7.13915E-2	-8.80027E1	-4.76837E-4	-8.80012E1	9.29832E-4	3.21865E-3	9.70125E-2	1.5771E1	-1.98254E1	-1.99426E1	1.5016E1	2.23332E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.11115E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.17007E-2	-8.80031E1	-3.09944E-4	-8.80014E1	6.67572E-4	3.31402E-3	9.70125E-2	1.5832E1	-1.98203E1	-1.99168E1	1.5019E1	2.23526E-9	2.51334E-3	2.51334E-3	6.29645E-3	2.10748E-2