[Scan]
initial_time=2016-01-18T16:44:04
final_time=2016-01-18T16:44:24
ip_count=19
run=1024
dataset=1
scan=44
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.20871E-2
qbias_imon=-3.75488E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-6.7097E-10
ql2_vset=
ql2_vmon=-8.10623E-4
ql2_imon=1.2905E-9
ql3_vset=
ql3_vmon=-8.80016E1
ql3_imon=-2.3563E-9
ql4_vset=
ql4_vmon=7.62939E-4
ql4_imon=1.40983E-8
mult1=-9.55847E-9
mult2=-2.7017E-9
rf_tmon=-4.79853E-3
rf_agc=3.19169E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.74317E-3
ql5_imon=6.58774E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68356E0
bslens_imon=2.59904E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19851E1
lens5a_imon=2.00867E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12554E2
lens4a_imon=2.04949E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54013E1
cs_ef1b_imon=2.79385E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04668E2
lens23_imon=1.01995E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04273E1
cs_ea1_imon=2.61105E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99269E0
lens1_imon=1.67617E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64831E1
os_ef1alow_imon=2.98414E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03588E1
cs_ea2_imon=1.48234E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84622E1
cs_ef1a_imon=2.94089E-5
olens2_vset=0.0E0
olens2_vmon=1.19209E-3
olens2_imon=1.02493E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11478E1
os_restr1_imon=4.28806E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15047E1
os_ea1_imon=2.38286E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63431E1
os_ef1bup_imon=3.06091E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2521E0
cs_ionrep_imon=1.17448E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9202E2
cs_nozzle_imon=1.93434E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01881E1
cs_anode1_imon=2.89296E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9997E1
olens4_imon=4.33251E-9
tplens_vset=0.0E0
tplens_vmon=-1.70392E0
tplens_imon=-1.37123E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99136E1
iondef3_imon=8.85363E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98251E1
iondef2_imon=9.21773E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03268E2
lens6_imon=2.98054E-4
ql6_vset=1.0E-1
ql6_vmon=9.68695E-2
ql6_imon=8.8917E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24429E0
ionrepsh_imon=1.7282E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33958E1
lens5b_imon=2.19504E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74808E1
cs_ef2b_imon=3.13479E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.27673E0
os_ea2_imon=-6.95891E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06238E2
lens4b_imon=2.00385E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7136E1
cs_ef2a_imon=3.16686E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06657E0
os_ef2alow_imon=-2.41047E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.77001E-1
os_ef2bup_imon=-5.30085E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11514E1
os_restr2_imon=3.3849E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.30938E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01887E1
cs_anode2_imon=2.23308E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57979E1
iondef1_imon=5.13332E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5031E1
iondef4_imon=5.35247E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27954E1
olens3_imon=2.52439E-8
olens1_vset=0.0E0
olens1_vmon=1.57356E-3
olens1_imon=1.20185E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14516E0
cs_ionaccel_imon=-1.79419E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02135E2
cs_ionfocb_imon=1.47381E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56495E1
einzel_imon=7.67342E-6
window_vset=0.0E0
window_vmon=2.56386E-1
window_imon=-7.88688E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8281E2
mask1_imon=2.39235E-4
mask2_vset=0.0E0
mask2_vmon=-1.87563E1
mask2_imon=-6.37322E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92523E3
multa_neg_imon=9.5602E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93882E3
defgrida_imon=5.93001E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.49851E3
multb_neg_imon=9.48089E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.62713E0
defgridb_imon=5.89036E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3328E1
os_fil1_imon=9.42594E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06518E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62492E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30663E1
cs_fil1_imon=9.95933E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62846E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63069E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.97653E-2
os_fil2_imon=-2.70801E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.6708E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.84919E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33407E-1
cs_fil2_imon=-2.2395E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.67701E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21859E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.12587E-2
chamber_ion_pmon=2.23138E-9
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.54797E-1
res40_imon=-2.48976E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.436E3	2.0E0	1.47E2	4.1E1	-7.24736E-2	-8.80027E1	-3.8147E-4	-8.80015E1	5.72205E-4	3.50475E-3	9.71794E-2	1.5812E1	-1.98411E1	-1.99425E1	1.49976E1	2.24012E-9	2.52428E-3	2.52428E-3	6.31288E-3	2.11298E-2
2.0E0	3.029E3	2.0E0	3.16E2	1.6E2	-7.17007E-2	-8.80023E1	-4.29153E-4	-8.80017E1	7.39098E-4	3.29018E-3	9.68933E-2	1.58552E1	-1.9833E1	-1.992E1	1.49829E1	2.23583E-9	2.51632E-3	2.51632E-3	6.32356E-3	2.11509E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.17779E-2	-8.80024E1	-5.00679E-4	-8.80013E1	7.39098E-4	3.17097E-3	9.6941E-2	1.57831E1	-1.98287E1	-1.99337E1	1.49728E1	2.23915E-9	2.52318E-3	2.52318E-3	6.29645E-3	2.12034E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.13143E-2	-8.80027E1	-3.57628E-4	-8.80016E1	9.29832E-4	3.62396E-3	9.69172E-2	1.58173E1	-1.98308E1	-1.99504E1	1.50184E1	2.23429E-9	2.51552E-3	2.51552E-3	6.33486E-3	2.12034E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.11597E-2	-8.80028E1	-6.91414E-4	-8.80014E1	1.09673E-3	3.71933E-3	9.67979E-2	1.57973E1	-1.98411E1	-1.99532E1	1.50557E1	2.23818E-9	2.52428E-3	2.52428E-3	6.32386E-3	2.12034E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.16233E-2	-8.80027E1	-2.6226E-4	-8.80015E1	6.4373E-4	3.86238E-3	9.67979E-2	1.58299E1	-1.98272E1	-1.99408E1	1.50659E1	2.24155E-9	2.51525E-3	2.51525E-3	6.33977E-3	2.11689E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.18554E-2	-8.80029E1	-3.8147E-4	-8.80016E1	8.82149E-4	3.98159E-3	9.66549E-2	1.58468E1	-1.98801E1	-1.99222E1	1.50256E1	2.23818E-9	2.52209E-3	2.52209E-3	6.33486E-3	2.12034E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80026E1	-4.76837E-4	-8.80013E1	9.05991E-4	3.76701E-3	9.69172E-2	1.57903E1	-1.98326E1	-1.99282E1	1.50088E1	2.23623E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.1185E-2
1.2E1	8.7E1	0.0E0	4.85E2	3.23E2	-7.31692E-2	-8.80032E1	-5.24521E-4	-8.80015E1	1.16825E-3	3.83854E-3	9.67503E-2	1.5743E1	-1.98529E1	-1.99054E1	1.50334E1	2.24694E-9	2.51552E-3	2.51552E-3	6.31288E-3	2.12587E-2
1.3E1	4.0E0	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80029E1	-6.91414E-4	-8.80016E1	9.53674E-4	3.69549E-3	9.70364E-2	1.58504E1	-1.98278E1	-1.99149E1	1.50161E1	2.23678E-9	2.51739E-3	2.51739E-3	6.29665E-3	2.12413E-2
1.4E1	9.2E1	0.0E0	5.66E2	3.82E2	-7.33239E-2	-8.80027E1	-4.05312E-4	-8.80017E1	1.07288E-3	3.6478E-3	9.71556E-2	1.58203E1	-1.98086E1	-1.99347E1	1.50253E1	2.23332E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.10931E-2
1.5E1	6.5E1	0.0E0	6.06E2	4.11E2	-7.15461E-2	-8.80028E1	-5.00679E-4	-8.80014E1	8.82149E-4	3.83854E-3	9.72271E-2	1.57951E1	-1.98266E1	-1.99618E1	1.50346E1	2.23235E-9	2.52318E-3	2.52318E-3	6.30192E-3	2.11298E-2
1.6E1	2.92E2	0.0E0	6.47E2	4.41E2	-7.201E-2	-8.80025E1	-5.00679E-4	-8.80015E1	8.82149E-4	3.88622E-3	9.67264E-2	1.58286E1	-1.98104E1	-1.99608E1	1.499E1	2.23915E-9	2.5199E-3	2.5199E-3	6.33486E-3	2.11666E-2
1.7E1	7.86E2	0.0E0	6.87E2	4.7E2	-7.22418E-2	-8.80025E1	-7.15256E-4	-8.80015E1	8.58307E-4	3.79086E-3	9.66549E-2	1.57972E1	-1.98527E1	-1.99363E1	1.50268E1	2.23818E-9	2.52977E-3	2.52977E-3	6.32386E-3	2.11298E-2
1.8E1	3.272E3	3.0E0	7.27E2	5.0E2	-7.20871E-2	-8.80023E1	-8.10623E-4	-8.80012E1	7.39098E-4	3.74317E-3	9.68695E-2	1.57828E1	-1.98505E1	-1.99701E1	1.50365E1	2.23523E-9	2.51923E-3	2.51923E-3	6.33253E-3	2.11438E-2
1.9E1	1.782E3	0.0E0	7.68E2	5.29E2	-7.32464E-2	-8.80025E1	-5.96046E-4	-8.80018E1	6.19888E-4	3.48091E-3	9.71317E-2	1.58215E1	-1.98894E1	-1.99313E1	1.50154E1	2.23004E-9	2.52066E-3	2.52066E-3	6.31879E-3	2.11807E-2
2.0E1	1.9E1	0.0E0	8.08E2	5.58E2	-7.30146E-2	-8.80024E1	-5.48363E-4	-8.80019E1	9.77516E-4	4.12464E-3	9.68695E-2	1.57943E1	-1.98139E1	-1.99585E1	1.5007E1	2.24012E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.11666E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.21643E-2	-8.80024E1	-4.52995E-4	-8.80015E1	6.67572E-4	3.6478E-3	9.69887E-2	1.58209E1	-1.98579E1	-1.99315E1	1.50317E1	2.23773E-9	2.52276E-3	2.52276E-3	6.33436E-3	2.12594E-2
2.2E1	9.0E0	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80026E1	-3.8147E-4	-8.80016E1	2.86102E-4	3.67165E-3	9.7084E-2	1.58498E1	-1.98266E1	-1.99528E1	1.50091E1	2.23918E-9	2.52236E-3	2.52236E-3	6.31269E-3	2.11889E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.20871E-2	-8.80026E1	-8.10623E-4	-8.80016E1	7.62939E-4	3.74317E-3	9.68695E-2	1.57979E1	-1.98251E1	-1.99136E1	1.5031E1	2.23138E-9	2.51443E-3	2.51443E-3	6.31288E-3	2.12587E-2