[Scan]
initial_time=2016-01-18T16:44:31
final_time=2016-01-18T16:44:51
ip_count=19
run=1024
dataset=1
scan=45
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.07733E-2
qbias_imon=-3.73557E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-7.23064E-10
ql2_vset=
ql2_vmon=-6.67572E-4
ql2_imon=1.25931E-9
ql3_vset=
ql3_vmon=-8.80019E1
ql3_imon=-2.29129E-9
ql4_vset=
ql4_vmon=5.72205E-4
ql4_imon=1.40239E-8
mult1=-9.28285E-9
mult2=-2.76851E-9
rf_tmon=-5.85227E-3
rf_agc=3.16933E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.76701E-3
ql5_imon=6.37245E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65786E0
bslens_imon=2.40257E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19725E1
lens5a_imon=1.99863E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12547E2
lens4a_imon=2.04973E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54287E1
cs_ef1b_imon=2.7955E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04655E2
lens23_imon=1.01975E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0477E1
cs_ea1_imon=2.61857E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98476E0
lens1_imon=1.53031E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64537E1
os_ef1alow_imon=2.97843E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03653E1
cs_ea2_imon=1.4618E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.85108E1
cs_ef1a_imon=2.93445E-5
olens2_vset=0.0E0
olens2_vmon=1.0252E-3
olens2_imon=1.01694E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11454E1
os_restr1_imon=4.2804E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15075E1
os_ea1_imon=2.38871E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63531E1
os_ef1bup_imon=3.06951E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2078E0
cs_ionrep_imon=1.17541E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92054E2
cs_nozzle_imon=1.93648E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01841E1
cs_anode1_imon=2.90993E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99971E1
olens4_imon=4.17871E-9
tplens_vset=0.0E0
tplens_vmon=-1.73315E0
tplens_imon=-1.50572E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99618E1
iondef3_imon=8.6207E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98513E1
iondef2_imon=9.18224E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03248E2
lens6_imon=2.98249E-4
ql6_vset=1.0E-1
ql6_vmon=9.68933E-2
ql6_imon=9.41324E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23962E0
ionrepsh_imon=1.72684E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34194E1
lens5b_imon=2.17645E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74839E1
cs_ef2b_imon=3.13296E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.19158E0
os_ea2_imon=-6.55959E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06209E2
lens4b_imon=2.00548E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.17266E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.01304E0
os_ef2alow_imon=-2.4282E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.51798E-1
os_ef2bup_imon=-5.23843E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11357E1
os_restr2_imon=3.37934E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2309E2
cs_ionfoca_imon=6.29629E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01951E1
cs_anode2_imon=2.23656E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58413E1
iondef1_imon=5.2814E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50322E1
iondef4_imon=5.25905E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27954E1
olens3_imon=2.52626E-8
olens1_vset=0.0E0
olens1_vmon=1.26362E-3
olens1_imon=1.19348E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1509E0
cs_ionaccel_imon=-1.78209E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02146E2
cs_ionfocb_imon=1.47296E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56489E1
einzel_imon=7.83964E-6
window_vset=0.0E0
window_vmon=2.54199E-1
window_imon=-6.76677E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82823E2
mask1_imon=2.39158E-4
mask2_vset=0.0E0
mask2_vmon=-1.87246E1
mask2_imon=-6.33862E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.37407E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93689E3
defgrida_imon=6.69274E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5011E3
multb_neg_imon=7.02966E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39624E0
defgridb_imon=6.06756E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33284E1
os_fil1_imon=9.41071E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06966E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6242E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30679E1
cs_fil1_imon=9.96374E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62002E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63032E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.16156E-2
os_fil2_imon=-2.63281E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97954E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.74761E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-2.72363E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01945E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21897E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=2.1185E-2
chamber_ion_pmon=2.24109E-9
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.89325E-1
res40_imon=-2.50216E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.353E3	0.0E0	1.47E2	4.1E1	-7.14689E-2	-8.80024E1	-1.43051E-4	-8.80019E1	4.52995E-4	3.57628E-3	9.67741E-2	1.58221E1	-1.98163E1	-1.99473E1	1.5019E1	2.23755E-9	2.51411E-3	2.51411E-3	6.29002E-3	2.1198E-2
2.0E0	2.967E3	1.0E0	3.16E2	1.6E2	-7.17779E-2	-8.80023E1	-2.86102E-4	-8.80018E1	4.05312E-4	3.67165E-3	9.68456E-2	1.58387E1	-1.98269E1	-1.99598E1	1.5022E1	2.24347E-9	2.5131E-3	2.5131E-3	6.33436E-3	2.12051E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.18554E-2	-8.80028E1	-5.24521E-4	-8.80017E1	7.62939E-4	3.76701E-3	9.68218E-2	1.58286E1	-1.98523E1	-1.99537E1	1.5022E1	2.24062E-9	2.52473E-3	2.52473E-3	6.32418E-3	2.1258E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.18554E-2	-8.80028E1	-7.39098E-4	-8.80016E1	6.91414E-4	3.67165E-3	9.67026E-2	1.58005E1	-1.98489E1	-1.99107E1	1.50088E1	2.23773E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.12413E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.17007E-2	-8.80027E1	-2.6226E-4	-8.80016E1	9.77516E-4	3.50475E-3	9.68456E-2	1.57926E1	-1.98434E1	-1.99113E1	1.5031E1	2.23818E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.11666E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.80027E1	-5.00679E-4	-8.80011E1	9.05991E-4	3.93391E-3	9.69648E-2	1.58425E1	-1.98338E1	-1.99504E1	1.50132E1	2.23678E-9	2.51632E-3	2.51632E-3	6.31278E-3	2.12413E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.12368E-2	-8.80027E1	-3.57628E-4	-8.80013E1	1.00136E-3	3.52859E-3	9.6941E-2	1.58125E1	-1.98248E1	-1.99576E1	1.50053E1	2.24207E-9	2.52209E-3	2.52209E-3	6.32936E-3	2.12587E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.10051E-2	-8.80027E1	-5.72205E-4	-8.80014E1	7.86781E-4	3.38554E-3	9.70364E-2	1.58221E1	-1.979E1	-1.9933E1	1.50172E1	2.2372E-9	2.52318E-3	2.52318E-3	6.30192E-3	2.12218E-2
1.2E1	6.1E1	0.0E0	4.85E2	3.23E2	-7.12368E-2	-8.80027E1	-9.53674E-5	-8.80016E1	7.62939E-4	3.55244E-3	9.68695E-2	1.58233E1	-1.9838E1	-1.99426E1	1.50166E1	2.24402E-9	2.51443E-3	2.51443E-3	6.3514E-3	2.11115E-2
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.13915E-2	-8.80027E1	-7.15256E-5	-8.80013E1	5.96046E-4	3.86238E-3	9.68933E-2	1.58053E1	-1.98374E1	-1.993E1	1.50047E1	2.24109E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.12587E-2
1.4E1	9.6E1	1.0E0	5.66E2	3.82E2	-7.201E-2	-8.80028E1	-2.86102E-4	-8.80014E1	8.58307E-4	3.76701E-3	9.67264E-2	1.58425E1	-1.98218E1	-1.99059E1	1.50416E1	2.23332E-9	2.51771E-3	2.51771E-3	6.28552E-3	2.12403E-2
1.5E1	7.3E1	0.0E0	6.06E2	4.11E2	-7.11597E-2	-8.80027E1	-6.91414E-4	-8.80016E1	6.91414E-4	3.8147E-3	9.67503E-2	1.58335E1	-1.98464E1	-1.99612E1	1.5013E1	2.23818E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.12403E-2
1.6E1	3.06E2	0.0E0	6.47E2	4.41E2	-7.21643E-2	-8.80028E1	-4.29153E-4	-8.80015E1	8.34465E-4	3.79086E-3	9.67741E-2	1.58516E1	-1.98729E1	-1.98971E1	1.50244E1	2.23964E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.12051E-2
1.7E1	7.67E2	0.0E0	6.87E2	4.7E2	-7.286E-2	-8.80027E1	-3.09944E-4	-8.80013E1	4.29153E-4	3.60012E-3	9.67979E-2	1.58758E1	-1.99331E1	-1.9926E1	1.50132E1	2.23818E-9	2.52538E-3	2.52538E-3	6.34037E-3	2.1185E-2
1.8E1	3.367E3	4.0E0	7.27E2	5.0E2	-7.27053E-2	-8.80026E1	-4.05312E-4	-8.80015E1	5.24521E-4	3.95775E-3	9.69172E-2	1.58329E1	-1.98579E1	-1.99173E1	1.4968E1	2.23825E-9	2.52025E-3	2.52025E-3	6.33919E-3	2.13314E-2
1.9E1	1.862E3	1.0E0	7.68E2	5.29E2	-7.19325E-2	-8.80027E1	-5.48363E-4	-8.80013E1	7.39098E-4	3.8147E-3	9.67503E-2	1.58119E1	-1.98308E1	-1.993E1	1.50629E1	2.23623E-9	2.51771E-3	2.51771E-3	6.29645E-3	2.11666E-2
2.0E1	1.4E1	0.0E0	8.08E2	5.58E2	-7.26282E-2	-8.80026E1	-7.62939E-4	-8.80013E1	7.62939E-4	3.83854E-3	9.67979E-2	1.57496E1	-1.98799E1	-1.99715E1	1.50076E1	2.23138E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.12034E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80024E1	-6.91414E-4	-8.80013E1	5.48363E-4	3.60012E-3	9.71079E-2	1.58534E1	-1.98555E1	-1.9966E1	1.50449E1	2.24442E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.12232E-2
2.2E1	1.3E1	0.0E0	8.89E2	6.17E2	-7.14689E-2	-8.80024E1	-5.00679E-4	-8.80017E1	2.14577E-4	3.71933E-3	9.73463E-2	1.58462E1	-1.98464E1	-1.99522E1	1.50172E1	2.24109E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.11482E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.07733E-2	-8.80024E1	-6.67572E-4	-8.80019E1	5.72205E-4	3.76701E-3	9.68933E-2	1.58413E1	-1.98513E1	-1.99618E1	1.50322E1	2.24109E-9	2.52099E-3	2.52099E-3	6.29098E-3	2.1185E-2