[Scan]
initial_time=2016-01-18T16:44:59
final_time=2016-01-18T16:45:19
ip_count=19
run=1024
dataset=1
scan=46
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.15461E-2
qbias_imon=-3.81356E-6
ql1_vset=
ql1_vmon=-8.80029E1
ql1_imon=-6.91164E-10
ql2_vset=
ql2_vmon=-2.38419E-4
ql2_imon=1.2525E-9
ql3_vset=
ql3_vmon=-8.80016E1
ql3_imon=-2.36534E-9
ql4_vset=
ql4_vmon=7.15256E-4
ql4_imon=1.3929E-8
mult1=-1.01257E-8
mult2=-2.7765E-9
rf_tmon=-3.81547E-3
rf_agc=3.42108E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.48091E-3
ql5_imon=6.31833E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65619E0
bslens_imon=2.32028E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19565E1
lens5a_imon=2.00846E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1251E2
lens4a_imon=2.04973E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53995E1
cs_ef1b_imon=2.79565E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04695E2
lens23_imon=1.02093E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04546E1
cs_ea1_imon=2.62396E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00411E0
lens1_imon=1.61239E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64807E1
os_ef1alow_imon=2.97405E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03431E1
cs_ea2_imon=1.48816E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84604E1
cs_ef1a_imon=2.92576E-5
olens2_vset=0.0E0
olens2_vmon=9.29832E-4
olens2_imon=1.02524E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1137E1
os_restr1_imon=4.29202E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14916E1
os_ea1_imon=2.39001E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63311E1
os_ef1bup_imon=3.08577E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24797E0
cs_ionrep_imon=1.18908E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9202E2
cs_nozzle_imon=1.93569E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01935E1
cs_anode1_imon=2.90017E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99969E1
olens4_imon=4.30288E-9
tplens_vset=0.0E0
tplens_vmon=-1.70337E0
tplens_imon=-3.09505E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99384E1
iondef3_imon=8.85048E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98146E1
iondef2_imon=9.42741E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03229E2
lens6_imon=2.9824E-4
ql6_vset=1.0E-1
ql6_vmon=9.68695E-2
ql6_imon=9.21011E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23263E0
ionrepsh_imon=1.71504E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33935E1
lens5b_imon=2.16525E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74766E1
cs_ef2b_imon=3.1301E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.20019E0
os_ea2_imon=-6.77604E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06209E2
lens4b_imon=2.00708E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7148E1
cs_ef2a_imon=3.16002E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04014E0
os_ef2alow_imon=-2.55103E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89615E-1
os_ef2bup_imon=-5.2504E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11436E1
os_restr2_imon=3.38094E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.30565E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01857E1
cs_anode2_imon=2.24136E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58047E1
iondef1_imon=5.20489E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5037E1
iondef4_imon=5.35968E-6
olens3_vset=-1.28E1
olens3_vmon=-1.2795E1
olens3_imon=2.52661E-8
olens1_vset=0.0E0
olens1_vmon=1.71661E-3
olens1_imon=1.19962E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14996E0
cs_ionaccel_imon=-1.75095E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02145E2
cs_ionfocb_imon=1.47406E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56441E1
einzel_imon=7.79956E-6
window_vset=0.0E0
window_vmon=2.65996E-1
window_imon=-7.995E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82793E2
mask1_imon=2.3912E-4
mask2_vset=0.0E0
mask2_vmon=-1.87095E1
mask2_imon=-6.76965E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9264E3
multa_neg_imon=6.88611E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.54633E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50146E3
multb_neg_imon=6.92505E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.27563E0
defgridb_imon=6.06497E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33299E1
os_fil1_imon=9.4236E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06885E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62519E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30759E1
cs_fil1_imon=9.96383E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62714E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63204E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.16765E-2
os_fil2_imon=-2.68399E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86302E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.8352E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38197E-1
cs_fil2_imon=-2.55184E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08216E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21972E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.1187E-2
chamber_ion_pmon=2.24442E-9
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.70104E-1
res40_imon=-2.54022E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.291E3	0.0E0	1.47E2	4.1E1	-7.19325E-2	-8.80024E1	-3.57628E-4	-8.80015E1	7.62939E-4	3.62396E-3	9.68695E-2	1.58085E1	-1.98411E1	-1.99408E1	1.50259E1	2.24012E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.11482E-2
2.0E0	3.077E3	6.0E0	3.16E2	1.6E2	-7.27053E-2	-8.80025E1	-5.72205E-4	-8.80016E1	6.67572E-4	3.57628E-3	9.69172E-2	1.58152E1	-1.98434E1	-1.99442E1	1.49918E1	2.2406E-9	2.51954E-3	2.51954E-3	6.29665E-3	2.12232E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.26282E-2	-8.80025E1	-4.29153E-4	-8.80016E1	7.86781E-4	4.02927E-3	9.69648E-2	1.58015E1	-1.98325E1	-1.98999E1	1.5012E1	2.2369E-9	2.52197E-3	2.52197E-3	6.31779E-3	2.10864E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.26282E-2	-8.80023E1	-7.15256E-4	-8.80015E1	6.91414E-4	3.88622E-3	9.71317E-2	1.58029E1	-1.98243E1	-1.99518E1	1.50143E1	2.2427E-9	2.52106E-3	2.52106E-3	6.31321E-3	2.1198E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.18554E-2	-8.80027E1	-6.4373E-4	-8.80016E1	6.91414E-4	3.71933E-3	9.70364E-2	1.58132E1	-1.98523E1	-1.99319E1	1.50433E1	2.23263E-9	2.51919E-3	2.51919E-3	6.31269E-3	2.11889E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.18554E-2	-8.80026E1	-6.67572E-4	-8.80018E1	8.58307E-4	3.55244E-3	9.68218E-2	1.57993E1	-1.98356E1	-1.99264E1	1.50178E1	2.23235E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.11482E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80026E1	-7.62939E-4	-8.80014E1	6.67572E-4	3.91006E-3	9.70602E-2	1.58149E1	-1.98218E1	-1.9954E1	1.50382E1	2.2372E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.13327E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.20871E-2	-8.80025E1	-5.24521E-4	-8.80013E1	6.91414E-4	3.76701E-3	9.67264E-2	1.57837E1	-1.98452E1	-1.99354E1	1.50352E1	2.23429E-9	2.52209E-3	2.52209E-3	6.33486E-3	2.11666E-2
1.2E1	8.5E1	0.0E0	4.85E2	3.23E2	-7.18554E-2	-8.80024E1	-3.09944E-4	-8.80014E1	9.05991E-4	3.74317E-3	9.67264E-2	1.57979E1	-1.98387E1	-1.99089E1	1.50172E1	2.23429E-9	2.5188E-3	2.5188E-3	6.29645E-3	2.12218E-2
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.17779E-2	-8.80027E1	-2.6226E-4	-8.80012E1	1.14441E-3	3.88622E-3	9.71079E-2	1.58467E1	-1.98269E1	-1.99457E1	1.50346E1	2.23487E-9	2.51417E-3	2.51417E-3	6.3074E-3	2.11689E-2
1.4E1	9.0E1	0.0E0	5.66E2	3.82E2	-7.16233E-2	-8.80025E1	-1.19209E-4	-8.80015E1	8.58307E-4	3.52859E-3	9.71079E-2	1.58209E1	-1.98222E1	-1.99732E1	1.5028E1	2.23468E-9	2.52027E-3	2.52027E-3	6.31858E-3	2.11267E-2
1.5E1	6.0E1	1.0E0	6.06E2	4.11E2	-7.21643E-2	-8.80025E1	-6.67572E-4	-8.80016E1	5.72205E-4	3.8147E-3	9.68218E-2	1.57987E1	-1.98272E1	-1.99318E1	1.50154E1	2.23773E-9	2.52276E-3	2.52276E-3	6.3074E-3	2.10968E-2
1.6E1	3.27E2	0.0E0	6.47E2	4.41E2	-7.11597E-2	-8.80027E1	-6.67572E-4	-8.80015E1	5.48363E-4	4.22001E-3	9.67741E-2	1.57967E1	-1.98222E1	-1.99408E1	1.50317E1	2.2406E-9	2.52384E-3	2.52384E-3	6.31817E-3	2.11509E-2
1.7E1	7.8E2	2.0E0	6.87E2	4.7E2	-7.09279E-2	-8.80025E1	-5.72205E-4	-8.80014E1	5.96046E-4	3.74317E-3	9.72033E-2	1.58065E1	-1.98693E1	-1.99318E1	1.50256E1	2.24207E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.12218E-2
1.8E1	3.325E3	2.0E0	7.27E2	5.0E2	-7.13143E-2	-8.80028E1	-4.29153E-4	-8.80016E1	1.04904E-3	3.95775E-3	9.69887E-2	1.58174E1	-1.98187E1	-1.99331E1	1.49998E1	2.23964E-9	2.52169E-3	2.52169E-3	6.33977E-3	2.11328E-2
1.9E1	1.791E3	1.0E0	7.68E2	5.29E2	-7.13915E-2	-8.80025E1	-5.24521E-4	-8.80017E1	9.53674E-4	3.93391E-3	9.74417E-2	1.58325E1	-1.98291E1	-1.99086E1	1.50165E1	2.23526E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.13327E-2
2.0E1	1.8E1	0.0E0	8.08E2	5.58E2	-7.05415E-2	-8.80028E1	-4.05312E-4	-8.80017E1	1.04904E-3	3.93391E-3	9.71794E-2	1.58091E1	-1.98399E1	-1.99113E1	1.50328E1	2.23866E-9	2.52154E-3	2.52154E-3	6.31974E-3	2.12957E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.13915E-2	-8.80029E1	-7.15256E-5	-8.80016E1	8.82149E-4	3.62396E-3	9.6941E-2	1.58227E1	-1.98399E1	-1.99419E1	1.50178E1	2.23915E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.11298E-2
2.2E1	1.6E1	0.0E0	8.89E2	6.17E2	-7.17779E-2	-8.80028E1	-3.33786E-4	-8.80013E1	8.10623E-4	3.83854E-3	9.70125E-2	1.58168E1	-1.98187E1	-1.99508E1	1.49732E1	2.22916E-9	2.51847E-3	2.51847E-3	6.29665E-3	2.12232E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.15461E-2	-8.80029E1	-2.38419E-4	-8.80016E1	7.15256E-4	3.48091E-3	9.68695E-2	1.58047E1	-1.98146E1	-1.99384E1	1.5037E1	2.24442E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.1187E-2