[Scan]
initial_time=2016-01-18T16:45:26
final_time=2016-01-18T16:45:46
ip_count=19
run=1024
dataset=1
scan=47
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.06958E-2
qbias_imon=-3.78654E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-7.43949E-10
ql2_vset=
ql2_vmon=-4.05312E-4
ql2_imon=1.23409E-9
ql3_vset=
ql3_vmon=-8.80017E1
ql3_imon=-2.30111E-9
ql4_vset=
ql4_vmon=7.62939E-4
ql4_imon=1.40942E-8
mult1=-9.03126E-9
mult2=-2.70558E-9
rf_tmon=-3.95745E-3
rf_agc=3.35872E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.74317E-3
ql5_imon=6.65641E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64992E0
bslens_imon=2.47286E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20115E1
lens5a_imon=1.99389E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12524E2
lens4a_imon=2.05096E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54055E1
cs_ef1b_imon=2.78412E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02308E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04441E1
cs_ea1_imon=2.60457E-5
lens1_vset=-2.7E0
lens1_vmon=-2.93922E0
lens1_imon=1.52476E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64885E1
os_ef1alow_imon=2.98342E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03774E1
cs_ea2_imon=1.46468E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8446E1
cs_ef1a_imon=2.93693E-5
olens2_vset=0.0E0
olens2_vmon=9.05991E-4
olens2_imon=1.01563E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11448E1
os_restr1_imon=4.27508E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14981E1
os_ea1_imon=2.39115E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63575E1
os_ef1bup_imon=3.06343E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23708E0
cs_ionrep_imon=1.17809E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92041E2
cs_nozzle_imon=1.93564E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02031E1
cs_anode1_imon=2.90377E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99971E1
olens4_imon=4.21342E-9
tplens_vset=0.0E0
tplens_vmon=-1.71594E0
tplens_imon=-1.33518E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99288E1
iondef3_imon=8.77072E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98508E1
iondef2_imon=9.46287E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03241E2
lens6_imon=2.98162E-4
ql6_vset=1.0E-1
ql6_vmon=9.66072E-2
ql6_imon=8.96633E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25811E0
ionrepsh_imon=1.72351E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33886E1
lens5b_imon=2.16945E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74579E1
cs_ef2b_imon=3.12109E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.21124E0
os_ea2_imon=-7.03101E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06233E2
lens4b_imon=2.0072E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71672E1
cs_ef2a_imon=3.16326E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06297E0
os_ef2alow_imon=-2.50418E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.73397E-1
os_ef2bup_imon=-5.26121E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11274E1
os_restr2_imon=3.37265E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.30108E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01971E1
cs_anode2_imon=2.22298E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57958E1
iondef1_imon=5.02878E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49616E1
iondef4_imon=5.42455E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27955E1
olens3_imon=2.52571E-8
olens1_vset=0.0E0
olens1_vmon=1.3113E-3
olens1_imon=1.19086E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14095E0
cs_ionaccel_imon=-1.68968E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02131E2
cs_ionfocb_imon=1.4737E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56417E1
einzel_imon=7.83921E-6
window_vset=0.0E0
window_vmon=2.70201E-1
window_imon=-7.02193E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82805E2
mask1_imon=2.39207E-4
mask2_vset=0.0E0
mask2_vmon=-1.87215E1
mask2_imon=-6.22906E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92628E3
multa_neg_imon=7.91274E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93687E3
defgrida_imon=6.44552E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=6.84207E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39856E0
defgridb_imon=5.95164E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33278E1
os_fil1_imon=9.38234E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06747E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61852E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30743E1
cs_fil1_imon=9.94137E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62432E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62408E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.05392E-2
os_fil2_imon=-2.75607E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86302E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.90462E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35608E-1
cs_fil2_imon=-2.5999E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.14823E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.218E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.12594E-2
chamber_ion_pmon=2.23773E-9
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.55688E-1
res40_imon=-2.59428E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.362E3	1.0E0	1.47E2	4.1E1	-7.33239E-2	-8.8003E1	-7.15256E-4	-8.80014E1	3.57628E-4	3.57628E-3	9.68456E-2	1.58286E1	-1.98464E1	-1.99461E1	1.49896E1	2.23507E-9	2.51322E-3	2.51322E-3	6.32916E-3	2.12408E-2
2.0E0	3.002E3	2.0E0	3.16E2	1.6E2	-7.20871E-2	-8.80028E1	-6.4373E-4	-8.80013E1	5.48363E-4	3.60012E-3	9.70125E-2	1.58222E1	-1.98214E1	-1.99512E1	1.50153E1					
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.80027E1	-4.29153E-4	-8.80012E1	5.72205E-4	3.50475E-3	9.70364E-2	1.5805E1	-1.98251E1	-1.99237E1	1.49836E1	2.23566E-9	2.51915E-3	2.51915E-3	6.30182E-3	2.10707E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.33239E-2	-8.80027E1	-5.48363E-4	-8.80013E1	4.52995E-4	3.38554E-3	9.7084E-2	1.58586E1	-1.98163E1	-1.99307E1	1.49918E1	2.242E-9	2.52025E-3	2.52025E-3	6.3074E-3	2.11712E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.8003E1	-5.96046E-4	-8.80016E1	5.96046E-4	3.62396E-3	9.68933E-2	1.58091E1	-1.98092E1	-1.99467E1	1.50533E1	2.23429E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.12403E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.19325E-2	-8.80026E1	-4.76837E-4	-8.80013E1	4.76837E-4	3.67165E-3	9.6488E-2	1.57891E1	-1.98386E1	-1.99145E1	1.50412E1	2.23202E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.11689E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80026E1	-9.29832E-4	-8.80015E1	2.14577E-4	3.57628E-3	9.6941E-2	1.58156E1	-1.98033E1	-1.9929E1	1.5007E1	2.23526E-9	2.52209E-3	2.52209E-3	6.3514E-3	2.12587E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80031E1	-6.19888E-4	-8.80016E1	6.4373E-4	3.69549E-3	9.71317E-2	1.58109E1	-1.98387E1	-1.99567E1	1.50076E1	2.24347E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.11509E-2
1.2E1	6.5E1	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.80025E1	-4.76837E-4	-8.80013E1	8.10623E-4	3.6478E-3	9.69172E-2	1.58131E1	-1.98284E1	-1.99414E1	1.50208E1	2.2372E-9	2.51443E-3	2.51443E-3	6.3074E-3	2.11482E-2
1.3E1	5.0E0	0.0E0	5.25E2	3.53E2	-7.16233E-2	-8.80027E1	-7.86781E-4	-8.80015E1	1.14441E-3	3.50475E-3	9.70602E-2	1.58305E1	-1.98188E1	-1.99246E1	1.50635E1	2.23526E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.1185E-2
1.4E1	1.14E2	0.0E0	5.66E2	3.82E2	-7.201E-2	-8.80025E1	-7.86781E-4	-8.80016E1	1.07288E-3	3.38554E-3	9.68218E-2	1.58071E1	-1.98296E1	-1.99378E1	1.50225E1	2.24109E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.12034E-2
1.5E1	7.5E1	0.0E0	6.06E2	4.11E2	-7.20871E-2	-8.80025E1	-5.24521E-4	-8.80016E1	6.91414E-4	3.74317E-3	9.6941E-2	1.5875E1	-1.98038E1	-1.98969E1	1.50384E1	2.24207E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.1185E-2
1.6E1	3.1E2	0.0E0	6.47E2	4.41E2	-7.36328E-2	-8.80024E1	-7.86781E-4	-8.80013E1	5.00679E-4	3.60012E-3	9.66072E-2	1.58191E1	-1.98392E1	-1.99218E1	1.49926E1	2.23818E-9	2.5199E-3	2.5199E-3	6.29098E-3	2.1185E-2
1.7E1	7.67E2	1.0E0	6.87E2	4.7E2	-7.23189E-2	-8.80025E1	-8.34465E-4	-8.80013E1	5.72205E-4	3.29018E-3	9.67026E-2	1.57831E1	-1.98222E1	-1.99325E1	1.50106E1	2.24012E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.1185E-2
1.8E1	3.337E3	4.0E0	7.27E2	5.0E2	-7.32464E-2	-8.80023E1	-5.72205E-4	-8.80014E1	3.33786E-4	3.09944E-3	9.67503E-2	1.58227E1	-1.98535E1	-1.99366E1	1.50254E1	2.23235E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.12772E-2
1.9E1	1.723E3	0.0E0	7.68E2	5.29E2	-7.31692E-2	-8.80026E1	-4.05312E-4	-8.80013E1	5.00679E-4	3.48091E-3	9.68218E-2	1.57946E1	-1.98416E1	-1.99377E1	1.50178E1	2.2406E-9	2.52061E-3	2.52061E-3	6.34518E-3	2.11689E-2
2.0E1	2.5E1	0.0E0	8.08E2	5.58E2	-7.286E-2	-8.80029E1	-5.48363E-4	-8.80013E1	6.91414E-4	3.67165E-3	9.71317E-2	1.5828E1	-1.98246E1	-1.99473E1	1.4977E1	2.23623E-9	2.52428E-3	2.52428E-3	6.31837E-3	2.12587E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.23189E-2	-8.80029E1	-4.05312E-4	-8.80016E1	6.67572E-4	3.74317E-3	9.69172E-2	1.58073E1	-1.98487E1	-1.9949E1	1.50028E1	2.23526E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.12587E-2
2.2E1	1.7E1	0.0E0	8.89E2	6.17E2	-7.15461E-2	-8.80025E1	-6.4373E-4	-8.80015E1	5.96046E-4	3.74317E-3	9.66549E-2	1.58179E1	-1.98483E1	-1.99204E1	1.50045E1	2.23773E-9	2.51203E-3	2.51203E-3	6.32356E-3	2.12051E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.06958E-2	-8.80023E1	-4.05312E-4	-8.80017E1	7.62939E-4	3.74317E-3	9.66072E-2	1.57958E1	-1.98508E1	-1.99288E1	1.49616E1	2.23773E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.12594E-2