[Scan]
initial_time=2016-01-18T16:45:53
final_time=2016-01-18T16:46:13
ip_count=19
run=1024
dataset=1
scan=48
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.78167E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-6.91175E-10
ql2_vset=
ql2_vmon=-7.62939E-4
ql2_imon=1.24414E-9
ql3_vset=
ql3_vmon=-8.80016E1
ql3_imon=-2.43425E-9
ql4_vset=
ql4_vmon=7.39098E-4
ql4_imon=1.41577E-8
mult1=-1.03387E-8
mult2=-2.78205E-9
rf_tmon=-4.81622E-3
rf_agc=3.25304E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.52859E-3
ql5_imon=6.36971E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65443E0
bslens_imon=2.49531E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19296E1
lens5a_imon=1.99823E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12553E2
lens4a_imon=2.05174E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54115E1
cs_ef1b_imon=2.77691E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04684E2
lens23_imon=1.0236E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04419E1
cs_ea1_imon=2.62484E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97166E0
lens1_imon=1.42647E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64723E1
os_ef1alow_imon=2.96756E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03525E1
cs_ea2_imon=1.48181E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84346E1
cs_ef1a_imon=2.93549E-5
olens2_vset=0.0E0
olens2_vmon=9.05991E-4
olens2_imon=1.00961E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11436E1
os_restr1_imon=4.28121E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14847E1
os_ea1_imon=2.40006E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63767E1
os_ef1bup_imon=3.08181E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23802E0
cs_ionrep_imon=1.16006E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92053E2
cs_nozzle_imon=1.93585E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01977E1
cs_anode1_imon=2.88431E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99968E1
olens4_imon=4.26549E-9
tplens_vset=0.0E0
tplens_vmon=-1.69836E0
tplens_imon=-1.23519E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99408E1
iondef3_imon=8.83853E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98305E1
iondef2_imon=9.27561E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03243E2
lens6_imon=2.9807E-4
ql6_vset=1.0E-1
ql6_vmon=9.64642E-2
ql6_imon=8.98552E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24904E0
ionrepsh_imon=1.71248E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33658E1
lens5b_imon=2.17013E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.13263E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.20741E0
os_ea2_imon=-4.46741E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06193E2
lens4b_imon=2.00667E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71089E1
cs_ef2a_imon=3.15569E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10501E0
os_ef2alow_imon=-2.49697E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.78203E-1
os_ef2bup_imon=-5.24679E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11274E1
os_restr2_imon=3.3831E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23102E2
cs_ionfoca_imon=6.30736E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01791E1
cs_anode2_imon=2.23055E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58097E1
iondef1_imon=5.30146E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50329E1
iondef4_imon=5.38851E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27955E1
olens3_imon=2.52019E-8
olens1_vset=0.0E0
olens1_vmon=1.62125E-3
olens1_imon=1.19259E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14215E0
cs_ionaccel_imon=-1.74374E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0215E2
cs_ionfocb_imon=1.47392E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56417E1
einzel_imon=7.61936E-6
window_vset=0.0E0
window_vmon=2.81013E-1
window_imon=-7.23817E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82818E2
mask1_imon=2.39163E-4
mask2_vset=0.0E0
mask2_vmon=-1.87251E1
mask2_imon=-4.96767E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92631E3
multa_neg_imon=7.62278E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93685E3
defgrida_imon=6.62006E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50152E3
multb_neg_imon=6.72657E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33001E0
defgridb_imon=6.06911E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33304E1
os_fil1_imon=9.41928E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06975E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6145E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30732E1
cs_fil1_imon=9.949E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61495E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62861E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.11986E-2
os_fil2_imon=-2.50379E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86902E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.11718E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34701E-1
cs_fil2_imon=-2.56986E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.35245E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22039E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.11689E-2
chamber_ion_pmon=2.2406E-9
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.95332E-1
res40_imon=-2.44651E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.283E3	2.0E0	1.47E2	4.1E1	-7.22418E-2	-8.80025E1	-5.96046E-4	-8.80017E1	9.77516E-4	3.50475E-3	9.67979E-2	1.58486E1	-1.9811E1	-1.99596E1	1.50148E1	2.24012E-9	2.5188E-3	2.5188E-3	6.29645E-3	2.12034E-2
2.0E0	2.905E3	2.0E0	3.16E2	1.6E2	-7.27828E-2	-8.80025E1	-8.58307E-4	-8.80016E1	9.77516E-4	3.60012E-3	9.67979E-2	1.58453E1	-1.98309E1	-1.99612E1	1.5012E1	2.23964E-9	2.52492E-3	2.52492E-3	6.32356E-3	2.13139E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80025E1	-7.15256E-4	-8.80016E1	1.0252E-3	3.86238E-3	9.66072E-2	1.57973E1	-1.98187E1	-1.99349E1	1.49964E1	2.242E-9	2.51182E-3	2.51182E-3	6.31798E-3	2.11534E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.17007E-2	-8.80029E1	-9.29832E-4	-8.80017E1	7.15256E-4	3.74317E-3	9.68218E-2	1.58369E1	-1.98196E1	-1.99212E1	1.50142E1	2.23869E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.12594E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.80028E1	-1.0252E-3	-8.80017E1	6.91414E-4	3.83854E-3	9.67503E-2	1.58119E1	-1.98747E1	-1.9954E1	1.5013E1	2.23915E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.12034E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.17779E-2	-8.80027E1	-5.72205E-4	-8.80018E1	9.53674E-4	3.79086E-3	9.65357E-2	1.58368E1	-1.9824E1	-1.99307E1	1.5019E1	2.2372E-9	2.51552E-3	2.51552E-3	6.32936E-3	2.12587E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80027E1	-3.8147E-4	-8.80016E1	9.05991E-4	3.74317E-3	9.64403E-2	1.57902E1	-1.98293E1	-1.99355E1	1.50282E1	2.23869E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.12413E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80026E1	-5.72205E-4	-8.80017E1	6.91414E-4	3.8147E-3	9.66311E-2	1.57783E1	-1.98615E1	-1.993E1	1.50316E1	2.23623E-9	2.51662E-3	2.51662E-3	6.30192E-3	2.12034E-2
1.2E1	7.0E1	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80029E1	-5.96046E-4	-8.80014E1	7.15256E-4	3.88622E-3	9.67026E-2	1.5815E1	-1.98216E1	-1.98989E1	1.49962E1	2.23392E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.1187E-2
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80024E1	-5.24521E-4	-8.80013E1	7.86781E-4	3.83854E-3	9.65118E-2	1.58173E1	-1.98362E1	-1.99228E1	1.50491E1	2.23623E-9	2.51116E-3	2.51116E-3	6.31837E-3	2.12957E-2
1.4E1	9.8E1	0.0E0	5.66E2	3.82E2	-7.23964E-2	-8.80026E1	-2.86102E-4	-8.80015E1	6.91414E-4	3.76701E-3	9.65118E-2	1.58215E1	-1.98513E1	-1.99197E1	1.50142E1	2.24499E-9	2.5199E-3	2.5199E-3	6.29645E-3	2.13327E-2
1.5E1	5.4E1	0.0E0	6.06E2	4.11E2	-7.26282E-2	-8.80027E1	-8.34465E-4	-8.80017E1	6.4373E-4	3.76701E-3	9.64165E-2	1.58083E1	-1.98585E1	-1.9921E1	1.50274E1	2.24207E-9	2.52538E-3	2.52538E-3	6.31837E-3	2.12218E-2
1.6E1	2.64E2	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80026E1	-6.67572E-4	-8.80014E1	9.77516E-4	3.79086E-3	9.68218E-2	1.58256E1	-1.98352E1	-1.99526E1	1.50155E1	2.2406E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.12413E-2
1.7E1	8.38E2	0.0E0	6.87E2	4.7E2	-7.27828E-2	-8.80027E1	-8.10623E-4	-8.80019E1	6.4373E-4	3.6478E-3	9.67741E-2	1.58245E1	-1.98152E1	-1.99336E1	1.50178E1	2.23964E-9	2.52061E-3	2.52061E-3	6.30202E-3	2.1187E-2
1.8E1	3.179E3	2.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80026E1	-1.12057E-3	-8.80014E1	6.67572E-4	3.17097E-3	9.70125E-2	1.58056E1	-1.98482E1	-1.99402E1	1.50172E1	2.23332E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.11298E-2
1.9E1	1.759E3	0.0E0	7.68E2	5.29E2	-7.29374E-2	-8.80025E1	-1.07288E-3	-8.80013E1	5.72205E-4	3.43323E-3	9.69887E-2	1.58131E1	-1.98152E1	-1.99456E1	1.50076E1	2.23332E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.12587E-2
2.0E1	1.5E1	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.80025E1	-7.39098E-4	-8.80012E1	6.19888E-4	3.60012E-3	9.67979E-2	1.58209E1	-1.97701E1	-1.9951E1	1.50136E1	2.24442E-9	2.52492E-3	2.52492E-3	6.32356E-3	2.10968E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80023E1	-4.52995E-4	-8.80012E1	8.34465E-4	3.79086E-3	9.67503E-2	1.58197E1	-1.97992E1	-1.99614E1	1.50346E1	2.24558E-9	2.52362E-3	2.52362E-3	6.31858E-3	2.11454E-2
2.2E1	1.2E1	0.0E0	8.89E2	6.17E2	-7.26282E-2	-8.80027E1	-7.86781E-4	-8.80016E1	7.39098E-4	3.67165E-3	9.67503E-2	1.58504E1	-1.98564E1	-1.99408E1	1.50124E1	2.23731E-9	2.51919E-3	2.51919E-3	6.29684E-3	2.11712E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.34782E-2	-8.80025E1	-7.62939E-4	-8.80016E1	7.39098E-4	3.52859E-3	9.64642E-2	1.58097E1	-1.98305E1	-1.99408E1	1.50329E1	2.2406E-9	2.51417E-3	2.51417E-3	6.32356E-3	2.11689E-2