[Scan]
initial_time=2016-01-18T16:46:21
final_time=2016-01-18T16:46:41
ip_count=19
run=1024
dataset=1
scan=49
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.10051E-2
qbias_imon=-3.75737E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-6.6365E-10
ql2_vset=
ql2_vmon=-7.39098E-4
ql2_imon=1.24303E-9
ql3_vset=
ql3_vmon=-8.80015E1
ql3_imon=-2.27064E-9
ql4_vset=
ql4_vmon=7.15256E-4
ql4_imon=1.41883E-8
mult1=-9.54774E-9
mult2=-2.66871E-9
rf_tmon=-4.59053E-3
rf_agc=3.31894E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.26633E-3
ql5_imon=6.65045E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65259E0
bslens_imon=2.4145E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19884E1
lens5a_imon=1.99897E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12574E2
lens4a_imon=2.04953E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53832E1
cs_ef1b_imon=2.77079E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04644E2
lens23_imon=1.02308E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04602E1
cs_ea1_imon=2.61603E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96921E0
lens1_imon=1.72399E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64723E1
os_ef1alow_imon=2.98306E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03513E1
cs_ea2_imon=1.47998E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84502E1
cs_ef1a_imon=2.92648E-5
olens2_vset=0.0E0
olens2_vmon=1.12057E-3
olens2_imon=1.00599E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11556E1
os_restr1_imon=4.28698E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14987E1
os_ea1_imon=2.39638E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63149E1
os_ef1bup_imon=3.08758E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22761E0
cs_ionrep_imon=1.17732E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92048E2
cs_nozzle_imon=1.93435E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01695E1
cs_anode1_imon=2.88107E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99969E1
olens4_imon=4.24951E-9
tplens_vset=0.0E0
tplens_vmon=-1.73938E0
tplens_imon=-2.55746E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99185E1
iondef3_imon=8.75773E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.9814E1
iondef2_imon=9.37111E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03245E2
lens6_imon=2.98228E-4
ql6_vset=1.0E-1
ql6_vmon=9.70125E-2
ql6_imon=8.97515E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22761E0
ionrepsh_imon=1.70697E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33958E1
lens5b_imon=2.18996E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74681E1
cs_ef2b_imon=3.11929E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.19272E0
os_ea2_imon=-6.08352E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06216E2
lens4b_imon=2.00586E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70801E1
cs_ef2a_imon=3.16254E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08159E0
os_ef2alow_imon=-2.37083E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.62586E-1
os_ef2bup_imon=-5.19634E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11454E1
os_restr2_imon=3.37121E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.30259E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02037E1
cs_anode2_imon=2.23344E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58125E1
iondef1_imon=5.29779E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50034E1
iondef4_imon=5.34887E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27951E1
olens3_imon=2.52254E-8
olens1_vset=0.0E0
olens1_vmon=1.45435E-3
olens1_imon=1.1808E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15897E0
cs_ionaccel_imon=-1.7041E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02129E2
cs_ionfocb_imon=1.47533E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56285E1
einzel_imon=7.69144E-6
window_vset=0.0E0
window_vmon=2.93026E-1
window_imon=-9.50867E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82833E2
mask1_imon=2.39163E-4
mask2_vset=0.0E0
mask2_vmon=-1.87023E1
mask2_imon=-6.30114E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92683E3
multa_neg_imon=7.54564E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.39968E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50101E3
multb_neg_imon=7.25181E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34839E0
defgridb_imon=5.94423E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33281E1
os_fil1_imon=9.4206E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06741E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61659E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30789E1
cs_fil1_imon=9.97044E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61933E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62284E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.0016E-2
os_fil2_imon=-2.75006E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83298E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.07909E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37032E-1
cs_fil2_imon=-2.12537E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.41892E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21933E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.1187E-2
chamber_ion_pmon=2.23964E-9
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.16355E-1
res40_imon=-2.54382E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=208
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.308E3	1.0E0	1.47E2	4.1E1	-7.19325E-2	-8.80028E1	-2.86102E-4	-8.8002E1	5.00679E-4	3.67165E-3	9.67264E-2	1.58398E1	-1.9824E1	-1.99402E1	1.50202E1	2.23764E-9	2.52473E-3	2.52473E-3	6.31299E-3	2.11829E-2
2.0E0	2.869E3	1.0E0	3.16E2	1.6E2	-7.25507E-2	-8.80029E1	-2.6226E-4	-8.80016E1	7.62939E-4	3.55244E-3	9.67503E-2	1.58142E1	-1.98508E1	-1.99249E1	1.5013E1	2.24109E-9	2.51443E-3	2.51443E-3	6.31837E-3	2.12218E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80026E1	-6.19888E-4	-8.80017E1	1.04904E-3	3.45707E-3	9.67503E-2	1.58168E1	-1.98446E1	-1.99361E1	1.50346E1	2.23369E-9	2.51581E-3	2.51581E-3	6.34099E-3	2.11829E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.20871E-2	-8.80027E1	-4.76837E-4	-8.80015E1	8.58307E-4	3.21865E-3	9.68695E-2	1.58029E1	-1.9838E1	-1.9942E1	1.50219E1	2.23918E-9	2.51498E-3	2.51498E-3	6.31269E-3	2.11712E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.12368E-2	-8.8003E1	-4.05312E-4	-8.80014E1	8.10623E-4	3.31402E-3	9.68456E-2	1.58067E1	-1.98334E1	-1.99508E1	1.50142E1	2.23651E-9	2.51538E-3	2.51538E-3	6.30469E-3	2.12042E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23189E-2	-8.80031E1	-1.19209E-4	-8.80016E1	8.10623E-4	3.26633E-3	9.67979E-2	1.58449E1	-1.98561E1	-1.99222E1	1.50202E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.80025E1	-2.14577E-4	-8.80013E1	7.62939E-4	3.45707E-3	9.70364E-2	1.58257E1	-1.98657E1	-1.99432E1	1.50262E1	2.23429E-9	2.52209E-3	2.52209E-3	6.32936E-3	2.12957E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80029E1	-3.57628E-4	-8.80016E1	5.24521E-4	3.93391E-3	9.70125E-2	1.58017E1	-1.98242E1	-1.99582E1	1.50274E1	2.23332E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.12587E-2
1.2E1	8.7E1	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.80025E1	-4.52995E-4	-8.80018E1	3.8147E-4	3.69549E-3	9.67979E-2	1.58421E1	-1.98293E1	-1.99278E1	1.5034E1	2.24155E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.12232E-2
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.13143E-2	-8.80028E1	-7.15256E-5	-8.80014E1	5.96046E-4	4.02927E-3	9.68695E-2	1.58269E1	-1.98639E1	-1.99185E1	1.50196E1	2.24207E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.12772E-2
1.4E1	1.18E2	0.0E0	5.66E2	3.82E2	-7.11597E-2	-8.80027E1	-9.53674E-5	-8.80015E1	7.62939E-4	3.93391E-3	9.68218E-2	1.57672E1	-1.98204E1	-1.99089E1	1.50226E1	2.2406E-9	2.52492E-3	2.52492E-3	6.31278E-3	2.12594E-2
1.5E1	6.1E1	0.0E0	6.06E2	4.11E2	-7.11597E-2	-8.80026E1	0.0E0	-8.80016E1	4.05312E-4	3.62396E-3	9.66787E-2	1.58154E1	-1.98312E1	-1.99261E1	1.49986E1	2.23487E-9	2.52169E-3	2.52169E-3	6.33436E-3	2.11148E-2
1.6E1	3.21E2	2.0E0	6.47E2	4.41E2	-7.08504E-2	-8.80031E1	-2.38419E-4	-8.80014E1	9.29832E-4	3.50475E-3	9.68933E-2	1.58173E1	-1.9814E1	-1.99618E1	1.5016E1	2.24359E-9	2.51804E-3	2.51804E-3	6.32418E-3	2.12204E-2
1.7E1	8.11E2	0.0E0	6.87E2	4.7E2	-7.16233E-2	-8.80028E1	-4.29153E-4	-8.80016E1	7.62939E-4	3.50475E-3	9.67979E-2	1.58149E1	-1.98362E1	-1.99414E1	1.5028E1	2.24499E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.11115E-2
1.8E1	3.276E3	1.0E0	7.27E2	5.0E2	-7.17007E-2	-8.80028E1	-3.57628E-4	-8.80018E1	8.82149E-4	3.17097E-3	9.68933E-2	1.58091E1	-1.98316E1	-1.99337E1	1.50142E1	2.23915E-9	2.51225E-3	2.51225E-3	6.33486E-3	2.10931E-2
1.9E1	1.798E3	3.0E0	7.68E2	5.29E2	-7.17007E-2	-8.80023E1	-4.05312E-4	-8.80016E1	6.67572E-4	3.50475E-3	9.68933E-2	1.58221E1	-1.98218E1	-1.99432E1	1.50214E1	2.23526E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.12034E-2
2.0E1	1.3E1	0.0E0	8.08E2	5.58E2	-7.07733E-2	-8.80024E1	-1.43051E-4	-8.80017E1	1.04904E-3	3.50475E-3	9.68456E-2	1.58113E1	-1.9808E1	-1.99252E1	1.50238E1	2.22821E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.11509E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.14689E-2	-8.80024E1	-5.48363E-4	-8.80015E1	6.91414E-4	3.60012E-3	9.6941E-2	1.57672E1	-1.98428E1	-1.99331E1	1.50219E1	2.2372E-9	2.51662E-3	2.51662E-3	6.29098E-3	2.12218E-2
2.2E1	1.0E1	0.0E0	8.89E2	6.17E2	-7.20871E-2	-8.80025E1	-5.00679E-4	-8.80016E1	6.91414E-4	3.24249E-3	9.68218E-2	1.58073E1	-1.98334E1	-1.99248E1	1.50256E1	2.24304E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.12034E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.10051E-2	-8.80027E1	-7.39098E-4	-8.80015E1	7.15256E-4	3.26633E-3	9.70125E-2	1.58125E1	-1.9814E1	-1.99185E1	1.50034E1	2.23964E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.1187E-2