[Scan]
initial_time=2016-01-18T16:47:16
final_time=2016-01-18T16:47:36
ip_count=19
run=1024
dataset=1
scan=51
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.79326E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-7.06017E-10
ql2_vset=
ql2_vmon=-5.00679E-4
ql2_imon=1.2628E-9
ql3_vset=
ql3_vmon=-8.80015E1
ql3_imon=-2.38671E-9
ql4_vset=
ql4_vmon=7.86781E-4
ql4_imon=1.41443E-8
mult1=-9.48754E-9
mult2=-2.81842E-9
rf_tmon=-5.61794E-3
rf_agc=3.18736E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.52859E-3
ql5_imon=6.30534E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65796E0
bslens_imon=2.51494E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19736E1
lens5a_imon=1.99182E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12532E2
lens4a_imon=2.04927E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53839E1
cs_ef1b_imon=2.7971E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04653E2
lens23_imon=1.02015E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04363E1
cs_ea1_imon=2.61228E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97225E0
lens1_imon=1.72565E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.63833E1
os_ef1alow_imon=2.96432E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03608E1
cs_ea2_imon=1.47755E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84544E1
cs_ef1a_imon=2.9308E-5
olens2_vset=0.0E0
olens2_vmon=7.39098E-4
olens2_imon=1.01565E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1149E1
os_restr1_imon=4.28878E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14881E1
os_ea1_imon=2.3939E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63695E1
os_ef1bup_imon=3.08181E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22673E0
cs_ionrep_imon=1.16466E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92034E2
cs_nozzle_imon=1.93402E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01707E1
cs_anode1_imon=2.88756E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99971E1
olens4_imon=4.27313E-9
tplens_vset=0.0E0
tplens_vmon=-1.69983E0
tplens_imon=-2.59954E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.9927E1
iondef3_imon=8.81155E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98603E1
iondef2_imon=9.4628E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03254E2
lens6_imon=2.98201E-4
ql6_vset=1.0E-1
ql6_vmon=9.69172E-2
ql6_imon=8.50701E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25328E0
ionrepsh_imon=1.71964E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33894E1
lens5b_imon=2.18507E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74585E1
cs_ef2b_imon=3.12578E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.19901E0
os_ea2_imon=-7.20077E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06197E2
lens4b_imon=2.0057E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7145E1
cs_ef2a_imon=3.16074E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07078E0
os_ef2alow_imon=-2.47174E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.69193E-1
os_ef2bup_imon=-5.11345E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11418E1
os_restr2_imon=3.3813E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23066E2
cs_ionfoca_imon=6.2961E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01689E1
cs_anode2_imon=2.24425E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58017E1
iondef1_imon=5.33231E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50238E1
iondef4_imon=5.31643E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27956E1
olens3_imon=2.5212E-8
olens1_vset=0.0E0
olens1_vmon=1.07288E-3
olens1_imon=1.18256E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16078E0
cs_ionaccel_imon=-1.6212E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0212E2
cs_ionfocb_imon=1.47266E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56441E1
einzel_imon=7.72748E-6
window_vset=0.0E0
window_vmon=2.61792E-1
window_imon=-9.22035E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82811E2
mask1_imon=2.39199E-4
mask2_vset=0.0E0
mask2_vmon=-1.86897E1
mask2_imon=-6.33718E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.28607E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.59588E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=6.9569E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37898E0
defgridb_imon=6.16761E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33303E1
os_fil1_imon=9.40288E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06945E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61634E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.308E1
cs_fil1_imon=9.94431E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61621E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62882E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.15499E-2
os_fil2_imon=-2.62392E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.851E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.05414E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35737E-1
cs_fil2_imon=-2.61792E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25034E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22039E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.12051E-2
chamber_ion_pmon=2.23487E-9
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.52374E-1
res40_imon=-2.5222E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.361E3	0.0E0	1.47E2	4.1E1	-7.34782E-2	-8.80029E1	-8.10623E-4	-8.80012E1	8.34465E-4	3.74317E-3	9.70602E-2	1.58233E1	-1.98588E1	-1.99443E1	1.49993E1	2.21689E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.12034E-2
2.0E0	3.055E3	5.0E0	3.16E2	1.6E2	-7.40967E-2	-8.80028E1	-9.05991E-4	-8.80015E1	8.82149E-4	3.62396E-3	9.69648E-2	1.58185E1	-1.98465E1	-1.99285E1	1.50035E1	2.22237E-9	2.51919E-3	2.51919E-3	6.31269E-3	2.12067E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.3401E-2	-8.80028E1	-5.48363E-4	-8.80012E1	5.48363E-4	3.57628E-3	9.69887E-2	1.57943E1	-1.98511E1	-1.99296E1	1.49986E1	2.23709E-9	2.51838E-3	2.51838E-3	6.29603E-3	2.12381E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.33239E-2	-8.80024E1	-2.86102E-4	-8.80014E1	3.33786E-4	3.79086E-3	9.68456E-2	1.58451E1	-1.98659E1	-1.99378E1	1.50387E1	2.23869E-9	2.52492E-3	2.52492E-3	6.28592E-3	2.12232E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.33239E-2	-8.80025E1	-5.00679E-4	-8.80013E1	6.4373E-4	3.50475E-3	9.68456E-2	1.58289E1	-1.98282E1	-1.99181E1	1.50094E1	2.23678E-9	2.51954E-3	2.51954E-3	6.33436E-3	2.12232E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80026E1	-5.00679E-4	-8.80013E1	6.91414E-4	3.83854E-3	9.66787E-2	1.58203E1	-1.98272E1	-1.99113E1	1.50328E1	2.24207E-9	2.5199E-3	2.5199E-3	6.34037E-3	2.12957E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.80026E1	-5.72205E-4	-8.80012E1	5.00679E-4	3.67165E-3	9.68218E-2	1.58185E1	-1.98404E1	-1.99288E1	1.50242E1	2.23818E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.11482E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80028E1	-2.86102E-4	-8.80016E1	6.4373E-4	3.88622E-3	9.69172E-2	1.5825E1	-1.98617E1	-1.99242E1	1.50137E1	2.23369E-9	2.52027E-3	2.52027E-3	6.32418E-3	2.1108E-2
1.2E1	7.1E1	0.0E0	4.85E2	3.23E2	-7.286E-2	-8.80028E1	-6.91414E-4	-8.80015E1	5.72205E-4	3.33786E-3	9.68933E-2	1.58102E1	-1.98403E1	-1.99338E1	1.50251E1	2.24287E-9	2.51256E-3	2.51256E-3	6.32067E-3	2.12213E-2
1.3E1	4.0E0	0.0E0	5.25E2	3.53E2	-7.38649E-2	-8.80026E1	-2.86102E-4	-8.80015E1	6.19888E-4	3.40939E-3	9.67979E-2	1.58271E1	-1.98361E1	-1.99579E1	1.49992E1	2.23241E-9	2.51065E-3	2.51065E-3	6.29002E-3	2.1198E-2
1.4E1	1.06E2	0.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80027E1	-1.43051E-4	-8.80016E1	5.24521E-4	3.31402E-3	9.66072E-2	1.58191E1	-1.98104E1	-1.99155E1	1.5031E1	2.23429E-9	2.5199E-3	2.5199E-3	6.29098E-3	2.12218E-2
1.5E1	5.1E1	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80025E1	-5.24521E-4	-8.80015E1	5.72205E-4	3.17097E-3	9.66311E-2	1.57997E1	-1.98605E1	-1.99036E1	1.50142E1	2.23332E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.12403E-2
1.6E1	3.28E2	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80025E1	-6.4373E-4	-8.80018E1	7.62939E-4	3.38554E-3	9.67503E-2	1.58227E1	-1.982E1	-1.99564E1	1.50213E1	2.24304E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.1185E-2
1.7E1	7.84E2	0.0E0	6.87E2	4.7E2	-7.25507E-2	-8.80026E1	-6.4373E-4	-8.80016E1	6.19888E-4	3.48091E-3	9.66549E-2	1.58362E1	-1.98637E1	-1.99806E1	1.50166E1	2.23964E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.1187E-2
1.8E1	3.371E3	2.0E0	7.27E2	5.0E2	-7.27053E-2	-8.80026E1	-5.72205E-4	-8.80016E1	6.91414E-4	3.57628E-3	9.68456E-2	1.58451E1	-1.98305E1	-1.99266E1	1.50184E1	2.23171E-9	2.51581E-3	2.51581E-3	6.3074E-3	2.12392E-2
1.9E1	1.83E3	0.0E0	7.68E2	5.29E2	-7.29374E-2	-8.80027E1	-7.86781E-4	-8.80013E1	4.05312E-4	3.21865E-3	9.68218E-2	1.57789E1	-1.98585E1	-1.99197E1	1.50147E1	2.23487E-9	2.51525E-3	2.51525E-3	6.32356E-3	2.1187E-2
2.0E1	1.3E1	0.0E0	8.08E2	5.58E2	-7.34782E-2	-8.80024E1	-4.76837E-4	-8.80016E1	7.15256E-4	3.45707E-3	9.70364E-2	1.58474E1	-1.98434E1	-1.99113E1	1.50142E1	2.2426E-9	2.51915E-3	2.51915E-3	6.32978E-3	2.12768E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.80027E1	-5.48363E-4	-8.80016E1	5.00679E-4	3.33786E-3	9.72271E-2	1.57936E1	-1.98168E1	-1.99483E1	1.50219E1	2.23429E-9	2.52099E-3	2.52099E-3	6.29645E-3	2.1185E-2
2.2E1	1.4E1	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80025E1	-1.43051E-4	-8.80015E1	7.39098E-4	3.62396E-3	9.69648E-2	1.57987E1	-1.98531E1	-1.98981E1	1.50259E1	2.23731E-9	2.51919E-3	2.51919E-3	6.32328E-3	2.11534E-2
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.80024E1	-5.00679E-4	-8.80015E1	7.86781E-4	3.52859E-3	9.69172E-2	1.58017E1	-1.98603E1	-1.9927E1	1.50238E1	2.23487E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.12051E-2