[Scan]
initial_time=2016-01-18T16:47:43
final_time=2016-01-18T16:48:03
ip_count=19
run=1024
dataset=1
scan=52
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.82301E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-6.84011E-10
ql2_vset=
ql2_vmon=-7.15256E-4
ql2_imon=1.2635E-9
ql3_vset=
ql3_vmon=-8.80017E1
ql3_imon=-2.37367E-9
ql4_vset=
ql4_vmon=1.07288E-3
ql4_imon=1.41761E-8
mult1=-1.27149E-8
mult2=-2.6919E-9
rf_tmon=-4.89881E-3
rf_agc=3.26897E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.55244E-3
ql5_imon=6.44481E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65088E0
bslens_imon=2.4123E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19913E1
lens5a_imon=1.97979E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12553E2
lens4a_imon=2.05075E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54073E1
cs_ef1b_imon=2.78484E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04672E2
lens23_imon=1.02103E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04487E1
cs_ea1_imon=2.59812E-5
lens1_vset=-2.7E0
lens1_vmon=-2.95927E0
lens1_imon=1.66548E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65708E1
os_ef1alow_imon=2.98162E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03761E1
cs_ea2_imon=1.48179E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8458E1
cs_ef1a_imon=2.91963E-5
olens2_vset=0.0E0
olens2_vmon=1.0252E-3
olens2_imon=1.01301E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11508E1
os_restr1_imon=4.28265E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15258E1
os_ea1_imon=2.37585E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63419E1
os_ef1bup_imon=3.08938E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22437E0
cs_ionrep_imon=1.16254E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92027E2
cs_nozzle_imon=1.93618E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02121E1
cs_anode1_imon=2.89584E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99968E1
olens4_imon=4.20027E-9
tplens_vset=0.0E0
tplens_vmon=-1.73936E0
tplens_imon=-2.2456E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99296E1
iondef3_imon=8.67705E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98505E1
iondef2_imon=9.40263E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03272E2
lens6_imon=2.98268E-4
ql6_vset=1.0E-1
ql6_vmon=9.68695E-2
ql6_imon=8.93307E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24266E0
ionrepsh_imon=1.70619E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3364E1
lens5b_imon=2.18401E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74705E1
cs_ef2b_imon=3.12758E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.24679E0
os_ea2_imon=-6.59907E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06198E2
lens4b_imon=2.00534E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71444E1
cs_ef2a_imon=3.17191E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07618E0
os_ef2alow_imon=-2.51138E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.85411E-1
os_ef2bup_imon=-5.35131E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11364E1
os_restr2_imon=3.37085E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23048E2
cs_ionfoca_imon=6.2876E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01743E1
cs_anode2_imon=2.22407E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57843E1
iondef1_imon=5.32877E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50346E1
iondef4_imon=5.47861E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27952E1
olens3_imon=2.51733E-8
olens1_vset=0.0E0
olens1_vmon=1.3113E-3
olens1_imon=1.18389E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16498E0
cs_ionaccel_imon=-1.75816E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02124E2
cs_ionfocb_imon=1.47367E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56519E1
einzel_imon=7.66982E-6
window_vset=0.0E0
window_vmon=2.44372E-1
window_imon=-7.63461E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82792E2
mask1_imon=2.3925E-4
mask2_vset=0.0E0
mask2_vmon=-1.86969E1
mask2_imon=-7.09401E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.54444E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.24548E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50114E3
multb_neg_imon=7.37101E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44985E0
defgridb_imon=6.1393E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33299E1
os_fil1_imon=9.40738E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06753E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61561E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30807E1
cs_fil1_imon=9.94804E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6218E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62193E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.01569E-2
os_fil2_imon=-2.72003E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96513E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.91746E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34701E-1
cs_fil2_imon=-2.43171E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.62024E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22073E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=2.12034E-2
chamber_ion_pmon=2.23818E-9
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.79714E-1
res40_imon=-2.51499E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=179
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.243E3	0.0E0	1.47E2	4.1E1	-7.27053E-2	-8.80028E1	-4.05312E-4	-8.80015E1	5.00679E-4	3.83854E-3	9.6941E-2	1.58262E1	-1.98316E1	-1.99537E1	1.5025E1	2.23773E-9	2.52169E-3	2.52169E-3	6.33436E-3	2.12413E-2
2.0E0	2.998E3	4.0E0	3.16E2	1.6E2	-7.23189E-2	-8.80029E1	-3.57628E-4	-8.80014E1	8.58307E-4	3.6478E-3	9.70602E-2	1.57904E1	-1.98697E1	-1.99445E1	1.50028E1	2.2372E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.12403E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.29374E-2	-8.80032E1	-9.53674E-5	-8.80016E1	1.12057E-3	3.86238E-3	9.69172E-2	1.58197E1	-1.98305E1	-1.99225E1	1.50244E1	2.22678E-9	2.52697E-3	2.52697E-3	6.33538E-3	2.11267E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.15461E-2	-8.80034E1	-5.96046E-4	-8.80014E1	9.53674E-4	3.76701E-3	9.68218E-2	1.58185E1	-1.98399E1	-1.99195E1	1.50423E1	2.21779E-9	2.51417E-3	2.51417E-3	6.31278E-3	2.12232E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.14689E-2	-8.8003E1	-8.10623E-4	-8.80016E1	8.58307E-4	3.6478E-3	9.68933E-2	1.57861E1	-1.98597E1	-1.99053E1	1.50393E1	2.22347E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.12775E-2
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.13915E-2	-8.80029E1	-6.91414E-4	-8.80015E1	7.62939E-4	3.88622E-3	9.68456E-2	1.58014E1	-1.9819E1	-1.99322E1	1.50209E1	2.23235E-9	2.5199E-3	2.5199E-3	6.29645E-3	2.11115E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17779E-2	-8.80027E1	-3.57628E-4	-8.80015E1	7.62939E-4	3.83854E-3	9.69887E-2	1.58238E1	-1.9824E1	-1.99331E1	1.5016E1	2.2327E-9	2.51804E-3	2.51804E-3	6.32978E-3	2.12204E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.17007E-2	-8.80026E1	-3.33786E-4	-8.80016E1	9.05991E-4	3.95775E-3	9.64403E-2	1.57985E1	-1.98228E1	-1.99502E1	1.50242E1	2.23869E-9	2.52169E-3	2.52169E-3	6.32896E-3	2.1187E-2
1.2E1	9.8E1	0.0E0	4.85E2	3.23E2	-7.37874E-2	-8.80031E1	-5.00679E-4	-8.80012E1	1.12057E-3	3.76701E-3	9.68695E-2	1.58287E1	-1.98248E1	-1.98819E1	1.50232E1	2.23678E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.12232E-2
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.38649E-2	-8.80032E1	-6.4373E-4	-8.80013E1	9.53674E-4	3.60012E-3	9.67503E-2	1.58136E1	-1.98398E1	-1.995E1	1.5019E1	2.21593E-9	2.52099E-3	2.52099E-3	6.29645E-3	2.12403E-2
1.4E1	1.1E2	0.0E0	5.66E2	3.82E2	-7.30146E-2	-8.80028E1	-4.05312E-4	-8.80016E1	7.86781E-4	3.57628E-3	9.70364E-2	1.57999E1	-1.98495E1	-1.99276E1	1.50412E1	2.23863E-9	2.52921E-3	2.52921E-3	6.29067E-3	2.1258E-2
1.5E1	8.7E1	0.0E0	6.06E2	4.11E2	-7.201E-2	-8.80028E1	-2.14577E-4	-8.80016E1	9.05991E-4	3.83854E-3	9.6941E-2	1.58155E1	-1.98332E1	-1.99071E1	1.49998E1	2.23235E-9	2.52428E-3	2.52428E-3	6.32386E-3	2.11666E-2
1.6E1	2.9E2	1.0E0	6.47E2	4.41E2	-7.20871E-2	-8.80026E1	-4.52995E-4	-8.80018E1	6.67572E-4	3.69549E-3	9.69172E-2	1.57879E1	-1.98316E1	-1.99113E1	1.50136E1	2.2372E-9	2.52428E-3	2.52428E-3	6.3074E-3	2.12218E-2
1.7E1	7.89E2	0.0E0	6.87E2	4.7E2	-7.18554E-2	-8.80028E1	-2.86102E-4	-8.8002E1	9.53674E-4	3.6478E-3	9.70602E-2	1.58228E1	-1.98508E1	-1.99316E1	1.50575E1	2.23818E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.1185E-2
1.8E1	3.375E3	2.0E0	7.27E2	5.0E2	-7.25507E-2	-8.80027E1	-3.33786E-4	-8.80017E1	1.23978E-3	3.71933E-3	9.7084E-2	1.57761E1	-1.9883E1	-1.9949E1	1.50575E1	2.23429E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.12034E-2
1.9E1	1.845E3	1.0E0	7.68E2	5.29E2	-7.24736E-2	-8.80027E1	-5.24521E-4	-8.80019E1	8.10623E-4	3.8147E-3	9.68456E-2	1.58111E1	-1.98324E1	-1.99188E1	1.50124E1	2.23235E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.11482E-2
2.0E1	1.9E1	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.8003E1	-5.96046E-4	-8.80017E1	8.10623E-4	3.62396E-3	9.68218E-2	1.58174E1	-1.98045E1	-1.9988E1	1.50118E1	2.23235E-9	2.5188E-3	2.5188E-3	6.29645E-3	2.11666E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80028E1	-7.62939E-4	-8.80015E1	1.00136E-3	3.74317E-3	9.72509E-2	1.57896E1	-1.97833E1	-1.99585E1	1.49964E1	2.23915E-9	2.5188E-3	2.5188E-3	6.29645E-3	2.12587E-2
2.2E1	1.2E1	0.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80028E1	-5.96046E-4	-8.80014E1	8.34465E-4	3.8147E-3	9.67979E-2	1.58149E1	-1.98386E1	-1.9927E1	1.50358E1	2.23918E-9	2.52131E-3	2.52131E-3	6.3074E-3	2.11534E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80026E1	-7.15256E-4	-8.80017E1	1.07288E-3	3.55244E-3	9.68695E-2	1.57843E1	-1.98505E1	-1.99296E1	1.50346E1	2.23818E-9	2.5188E-3	2.5188E-3	6.33486E-3	2.12034E-2