[Scan]
initial_time=2016-01-18T16:48:10
final_time=2016-01-18T16:48:30
ip_count=19
run=1024
dataset=1
scan=53
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.86274E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-6.84738E-10
ql2_vset=
ql2_vmon=-1.43051E-4
ql2_imon=1.2447E-9
ql3_vset=
ql3_vmon=-8.80015E1
ql3_imon=-2.41323E-9
ql4_vset=
ql4_vmon=8.58307E-4
ql4_imon=1.40688E-8
mult1=-9.70033E-9
mult2=-2.81537E-9
rf_tmon=-4.40329E-3
rf_agc=3.31734E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.40939E-3
ql5_imon=6.30188E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66036E0
bslens_imon=1.9758E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19938E1
lens5a_imon=2.01884E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12578E2
lens4a_imon=2.04456E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5416E1
cs_ef1b_imon=2.77069E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04662E2
lens23_imon=1.02593E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04639E1
cs_ea1_imon=2.61445E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99974E0
lens1_imon=1.63513E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64515E1
os_ef1alow_imon=2.98065E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03709E1
cs_ea2_imon=1.47303E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84432E1
cs_ef1a_imon=2.92563E-5
olens2_vset=0.0E0
olens2_vmon=1.09673E-3
olens2_imon=1.00968E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11348E1
os_restr1_imon=4.27446E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14825E1
os_ea1_imon=2.39171E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63398E1
os_ef1bup_imon=3.07646E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22589E0
cs_ionrep_imon=1.17503E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92035E2
cs_nozzle_imon=1.93536E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01684E1
cs_anode1_imon=2.88559E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99972E1
olens4_imon=4.246E-9
tplens_vset=0.0E0
tplens_vmon=-1.66452E0
tplens_imon=-7.94438E-8
iondef3_vset=-2.0E1
iondef3_vmon=-1.9952E1
iondef3_imon=8.69931E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98381E1
iondef2_imon=9.28331E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03211E2
lens6_imon=2.98215E-4
ql6_vset=1.0E-1
ql6_vmon=9.71794E-2
ql6_imon=8.97503E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.32135E0
ionrepsh_imon=1.71411E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33227E1
lens5b_imon=2.18281E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74589E1
cs_ef2b_imon=3.13409E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.15851E0
os_ea2_imon=-6.29754E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06207E2
lens4b_imon=2.00608E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71457E1
cs_ef2a_imon=3.17077E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09261E0
os_ef2alow_imon=-2.52192E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.66444E-1
os_ef2bup_imon=-5.25026E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1156E1
os_restr2_imon=3.37774E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23091E2
cs_ionfoca_imon=6.31688E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01884E1
cs_anode2_imon=2.23363E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58103E1
iondef1_imon=5.29637E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50479E1
iondef4_imon=5.46849E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27954E1
olens3_imon=2.51682E-8
olens1_vset=0.0E0
olens1_vmon=8.82149E-4
olens1_imon=1.19086E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13264E0
cs_ionaccel_imon=-1.70604E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02129E2
cs_ionfocb_imon=1.47383E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56505E1
einzel_imon=7.78515E-6
window_vset=0.0E0
window_vmon=2.75607E-1
window_imon=-8.19045E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82801E2
mask1_imon=2.39103E-4
mask2_vset=0.0E0
mask2_vmon=-1.87024E1
mask2_imon=-5.34609E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.57997E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93735E3
defgrida_imon=6.82002E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.19813E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34939E0
defgridb_imon=6.14617E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33307E1
os_fil1_imon=9.42445E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07017E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61795E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30821E1
cs_fil1_imon=9.9554E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62846E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63045E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.25532E-2
os_fil2_imon=-2.70617E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85978E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.99123E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35568E-1
cs_fil2_imon=-2.46914E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.24532E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22093E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.12232E-2
chamber_ion_pmon=2.23869E-9
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40038E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.00979E-1
res40_imon=-2.40216E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.345E3	2.0E0	1.47E2	4.1E1	-7.42513E-2	-8.80029E1	-5.24521E-4	-8.80017E1	6.4373E-4	3.95775E-3	9.66549E-2	1.57955E1	-1.98529E1	-1.99378E1	1.50178E1	2.23306E-9	2.52293E-3	2.52293E-3	6.3245E-3	2.1219E-2
2.0E0	2.962E3	2.0E0	3.16E2	1.6E2	-7.31692E-2	-8.80031E1	-5.00679E-4	-8.80018E1	6.67572E-4	3.91006E-3	9.70602E-2	1.58307E1	-1.98214E1	-1.99543E1	1.50284E1	2.23869E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.12594E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.40192E-2	-8.80029E1	-6.67572E-4	-8.80016E1	7.39098E-4	3.91006E-3	9.68695E-2	1.57849E1	-1.98558E1	-1.99337E1	1.50178E1	2.23863E-9	2.5225E-3	2.5225E-3	6.30182E-3	2.1258E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.40967E-2	-8.80032E1	-7.15256E-4	-8.80017E1	7.62939E-4	4.07696E-3	9.66072E-2	1.58313E1	-1.98148E1	-1.98951E1	1.50357E1	2.24155E-9	2.52061E-3	2.52061E-3	6.29665E-3	2.12051E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.40192E-2	-8.80029E1	-4.76837E-4	-8.80013E1	9.29832E-4	3.60012E-3	9.68933E-2	1.58204E1	-1.98234E1	-1.99214E1	1.50308E1	2.2379E-9	2.51223E-3	2.51223E-3	6.3275E-3	2.12788E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.38649E-2	-8.80029E1	-4.05312E-4	-8.80015E1	8.10623E-4	3.71933E-3	9.66549E-2	1.58245E1	-1.98416E1	-1.99222E1	1.50388E1	2.23907E-9	2.52384E-3	2.52384E-3	6.3074E-3	2.11166E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37103E-2	-8.80031E1	-3.57628E-4	-8.80013E1	8.34465E-4	3.83854E-3	9.66311E-2	1.58144E1	-1.98234E1	-1.99319E1	1.50184E1	2.24402E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.12034E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.34782E-2	-8.80029E1	-3.57628E-4	-8.80013E1	8.34465E-4	3.50475E-3	9.67026E-2	1.58268E1	-1.98393E1	-1.99667E1	1.5025E1	2.23332E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.12034E-2
1.2E1	8.8E1	0.0E0	4.85E2	3.23E2	-7.19325E-2	-8.80031E1	-3.09944E-4	-8.80015E1	8.58307E-4	3.71933E-3	9.67503E-2	1.58017E1	-1.98314E1	-1.99606E1	1.5016E1	2.23107E-9	2.51954E-3	2.51954E-3	6.33436E-3	2.11509E-2
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.25507E-2	-8.80032E1	-4.05312E-4	-8.80019E1	4.29153E-4	3.43323E-3	9.65118E-2	1.57789E1	-1.98422E1	-1.98981E1	1.5001E1	2.2406E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.12051E-2
1.4E1	1.04E2	0.0E0	5.66E2	3.82E2	-7.23189E-2	-8.80032E1	-6.19888E-4	-8.80016E1	6.91414E-4	3.57628E-3	9.66072E-2	1.57955E1	-1.98039E1	-1.99225E1	1.50242E1	2.23332E-9	2.52538E-3	2.52538E-3	6.31837E-3	2.10931E-2
1.5E1	4.5E1	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.8003E1	-7.15256E-4	-8.80018E1	6.91414E-4	3.19481E-3	9.66549E-2	1.58125E1	-1.98296E1	-1.99444E1	1.50142E1	2.23678E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.12051E-2
1.6E1	3.04E2	0.0E0	6.47E2	4.41E2	-7.23189E-2	-8.80031E1	-3.8147E-4	-8.80014E1	9.29832E-4	3.52859E-3	9.6941E-2	1.58077E1	-1.9817E1	-1.99197E1	1.50431E1	2.2309E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.12034E-2
1.7E1	7.43E2	0.0E0	6.87E2	4.7E2	-7.24736E-2	-8.80029E1	-3.57628E-4	-8.80017E1	1.00136E-3	3.6478E-3	9.68456E-2	1.58498E1	-1.98555E1	-1.9948E1	1.49968E1					
1.8E1	3.389E3	2.0E0	7.27E2	5.0E2	-7.27053E-2	-8.80027E1	-2.86102E-4	-8.80012E1	5.00679E-4	3.60012E-3	9.68218E-2	1.58095E1	-1.9832E1	-1.99498E1	1.50154E1	2.24109E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.12587E-2
1.9E1	1.746E3	0.0E0	7.68E2	5.29E2	-7.24736E-2	-8.80028E1	-2.86102E-4	-8.80012E1	5.48363E-4	3.67165E-3	9.67979E-2	1.58371E1	-1.982E1	-1.99294E1	1.50443E1	2.23526E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.11482E-2
2.0E1	1.7E1	0.0E0	8.08E2	5.58E2	-7.286E-2	-8.80029E1	-1.43051E-4	-8.80014E1	6.91414E-4	3.83854E-3	9.69648E-2	1.58563E1	-1.98588E1	-1.99496E1	1.50274E1	2.23429E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.12957E-2
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80029E1	1.43051E-4	-8.80017E1	6.4373E-4	3.6478E-3	9.68933E-2	1.57578E1	-1.97545E1	-1.99288E1	1.50082E1	2.23678E-9	2.5131E-3	2.5131E-3	6.31278E-3	2.1187E-2
2.2E1	1.8E1	0.0E0	8.89E2	6.17E2	-7.30146E-2	-8.80025E1	-2.38419E-4	-8.80014E1	9.29832E-4	3.62396E-3	9.69648E-2	1.58356E1	-1.98434E1	-1.99349E1	1.49999E1	2.23915E-9	2.51552E-3	2.51552E-3	6.32936E-3	2.1185E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80026E1	-1.43051E-4	-8.80015E1	8.58307E-4	3.40939E-3	9.71794E-2	1.58103E1	-1.98381E1	-1.9952E1	1.50479E1	2.23869E-9	2.51632E-3	2.51632E-3	6.33436E-3	2.12232E-2