[Scan]
initial_time=2016-01-18T16:49:04
final_time=2016-01-18T16:49:23
ip_count=19
run=1024
dataset=1
scan=55
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23189E-2
qbias_imon=-3.75309E-6
ql1_vset=
ql1_vmon=-8.80031E1
ql1_imon=-7.10034E-10
ql2_vset=
ql2_vmon=-1.19209E-4
ql2_imon=1.2248E-9
ql3_vset=
ql3_vmon=-8.80019E1
ql3_imon=-2.29372E-9
ql4_vset=
ql4_vmon=8.10623E-4
ql4_imon=1.40743E-8
mult1=-9.22746E-9
mult2=-2.70562E-9
rf_tmon=-5.01089E-3
rf_agc=3.28136E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.6478E-3
ql5_imon=6.38986E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63731E0
bslens_imon=2.6282E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1983E1
lens5a_imon=1.99465E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12524E2
lens4a_imon=2.04937E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53812E1
cs_ef1b_imon=2.80181E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04648E2
lens23_imon=1.02379E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04469E1
cs_ea1_imon=2.61617E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97992E0
lens1_imon=1.81414E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64568E1
os_ef1alow_imon=2.98009E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03555E1
cs_ea2_imon=1.48498E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84591E1
cs_ef1a_imon=2.91614E-5
olens2_vset=0.0E0
olens2_vmon=8.10623E-4
olens2_imon=1.01804E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1161E1
os_restr1_imon=4.28192E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14798E1
os_ea1_imon=2.40416E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63803E1
os_ef1bup_imon=3.08156E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23263E0
cs_ionrep_imon=1.1859E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92007E2
cs_nozzle_imon=1.93565E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02638E1
cs_anode1_imon=2.92205E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99972E1
olens4_imon=4.26251E-9
tplens_vset=0.0E0
tplens_vmon=-1.70278E0
tplens_imon=-3.4136E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99172E1
iondef3_imon=8.74784E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98505E1
iondef2_imon=9.28229E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03252E2
lens6_imon=2.98491E-4
ql6_vset=1.0E-1
ql6_vmon=9.64165E-2
ql6_imon=8.84509E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27333E0
ionrepsh_imon=1.72814E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33746E1
lens5b_imon=2.17021E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74629E1
cs_ef2b_imon=3.13161E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.18013E0
os_ea2_imon=-5.96198E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06201E2
lens4b_imon=2.00764E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71518E1
cs_ef2a_imon=3.15733E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06093E0
os_ef2alow_imon=-2.58153E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92597E-1
os_ef2bup_imon=-5.21925E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11506E1
os_restr2_imon=3.3714E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23078E2
cs_ionfoca_imon=6.30211E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01948E1
cs_anode2_imon=2.2409E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58297E1
iondef1_imon=5.25445E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50091E1
iondef4_imon=5.44283E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27954E1
olens3_imon=2.51729E-8
olens1_vset=0.0E0
olens1_vmon=1.19209E-3
olens1_imon=1.19119E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14115E0
cs_ionaccel_imon=-1.72662E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02137E2
cs_ionfocb_imon=1.47278E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56573E1
einzel_imon=7.7782E-6
window_vset=0.0E0
window_vmon=2.66919E-1
window_imon=-7.29223E-7
mask1_vset=-4.8E2
mask1_vmon=-4.828E2
mask1_imon=2.39168E-4
mask2_vset=0.0E0
mask2_vmon=-1.87201E1
mask2_imon=-6.28441E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=7.61169E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93689E3
defgrida_imon=6.33043E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=6.84364E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32878E0
defgridb_imon=6.29857E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33333E1
os_fil1_imon=9.41082E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07236E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62094E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3082E1
cs_fil1_imon=9.94723E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62233E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62858E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.88906E-2
os_fil2_imon=-2.77344E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90656E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.6846E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34396E-1
cs_fil2_imon=-1.96834E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.65523E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22118E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.1187E-2
chamber_ion_pmon=2.2473E-9
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.03226E-1
res40_imon=-2.48075E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.35E3	1.0E0	1.47E2	4.1E1	-7.20871E-2	-8.80028E1	-1.43051E-4	-8.80019E1	1.16825E-3	3.50475E-3	9.67503E-2	1.58236E1	-1.98417E1	-1.99407E1	1.49912E1	2.23664E-9	2.52374E-3	2.52374E-3	6.3074E-3	2.11811E-2
2.0E0	2.97E3	1.0E0	3.16E2	1.6E2	-7.27053E-2	-8.80028E1	-5.24521E-4	-8.80018E1	7.86781E-4	3.74317E-3	9.67979E-2	1.5823E1	-1.98467E1	-1.99136E1	1.49854E1					
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80025E1	-5.24521E-4	-8.80016E1	6.91414E-4	3.52859E-3	9.68933E-2	1.57584E1	-1.98564E1	-1.99355E1	1.50334E1	2.23487E-9	2.51439E-3	2.51439E-3	6.33706E-3	2.13357E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.23964E-2	-8.80027E1	-8.10623E-4	-8.80016E1	7.62939E-4	3.67165E-3	9.68695E-2	1.58247E1	-1.98462E1	-1.99033E1	1.50117E1	2.24155E-9	2.51632E-3	2.51632E-3	6.29665E-3	2.11148E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.15461E-2	-8.80028E1	-7.39098E-4	-8.80017E1	5.96046E-4	3.62396E-3	9.66072E-2	1.58203E1	-1.98622E1	-1.99177E1	1.50434E1	2.23469E-9	2.51549E-3	2.51549E-3	6.33297E-3	2.12785E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.22418E-2	-8.80026E1	-4.76837E-4	-8.80017E1	6.4373E-4	4.00543E-3	9.65595E-2	1.57826E1	-1.98181E1	-1.99455E1	1.50187E1	2.23709E-9	2.51271E-3	2.51271E-3	6.3131E-3	2.11807E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.09279E-2	-8.80025E1	-3.57628E-4	-8.80018E1	3.33786E-4	3.38554E-3	9.66072E-2	1.58185E1	-1.98158E1	-1.99372E1	1.50437E1	2.23869E-9	2.52492E-3	2.52492E-3	6.32896E-3	2.11509E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.05415E-2	-8.80025E1	-6.91414E-4	-8.80018E1	4.05312E-4	3.43323E-3	9.67264E-2	1.58425E1	-1.98416E1	-1.99546E1	1.50217E1	2.24012E-9	2.51334E-3	2.51334E-3	6.31837E-3	2.12403E-2
1.2E1	6.9E1	0.0E0	4.85E2	3.23E2	-7.06958E-2	-8.80026E1	-3.8147E-4	-8.80018E1	8.82149E-4	3.6478E-3	9.66072E-2	1.58309E1	-1.98222E1	-1.9936E1	1.50286E1	2.24109E-9	2.52099E-3	2.52099E-3	6.35692E-3	2.11666E-2
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.0464E-2	-8.8003E1	-5.96046E-4	-8.80017E1	7.39098E-4	3.74317E-3	9.67503E-2	1.58209E1	-1.9824E1	-1.99166E1	1.50201E1	2.23678E-9	2.51739E-3	2.51739E-3	6.30202E-3	2.12051E-2
1.4E1	1.05E2	0.0E0	5.66E2	3.82E2	-7.10051E-2	-8.8003E1	-3.8147E-4	-8.80017E1	6.91414E-4	3.8147E-3	9.66072E-2	1.58137E1	-1.98302E1	-1.99624E1	1.50154E1	2.23392E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.12775E-2
1.5E1	6.0E1	0.0E0	6.06E2	4.11E2	-7.10825E-2	-8.80027E1	-4.05312E-4	-8.80016E1	1.0252E-3	4.12464E-3	9.68456E-2	1.58251E1	-1.9808E1	-1.99288E1	1.50124E1	2.23526E-9	2.52428E-3	2.52428E-3	6.32386E-3	2.12034E-2
1.6E1	3.07E2	0.0E0	6.47E2	4.41E2	-7.19325E-2	-8.80026E1	-2.6226E-4	-8.80017E1	1.21593E-3	3.57628E-3	9.62257E-2	1.58203E1	-1.98299E1	-1.99272E1	1.50244E1	2.24109E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.12403E-2
1.7E1	8.29E2	0.0E0	6.87E2	4.7E2	-7.22418E-2	-8.80029E1	-2.86102E-4	-8.80016E1	1.12057E-3	3.76701E-3	9.65118E-2	1.58093E1	-1.98147E1	-1.9961E1	1.50268E1	2.22631E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.1187E-2
1.8E1	3.233E3	2.0E0	7.27E2	5.0E2	-7.20871E-2	-8.80026E1	-1.66893E-4	-8.80017E1	1.12057E-3	3.79086E-3	9.66549E-2	1.57969E1	-1.98146E1	-1.99179E1	1.50256E1	2.22678E-9	2.51359E-3	2.51359E-3	6.3074E-3	2.12392E-2
1.9E1	1.76E3	0.0E0	7.68E2	5.29E2	-7.201E-2	-8.8003E1	-3.09944E-4	-8.80019E1	8.10623E-4	3.69549E-3	9.62257E-2	1.58197E1	-1.98789E1	-1.9936E1	1.50575E1	2.23138E-9	2.51771E-3	2.51771E-3	6.34588E-3	2.11482E-2
2.0E1	1.4E1	0.0E0	8.08E2	5.58E2	-7.25507E-2	-8.80031E1	-2.6226E-4	-8.80018E1	8.10623E-4	3.74317E-3	9.65118E-2	1.58292E1	-1.98263E1	-1.99732E1	1.50533E1	2.23138E-9	2.53087E-3	2.53087E-3	6.31288E-3	2.12034E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.19325E-2	-8.8003E1	-4.29153E-4	-8.80019E1	9.05991E-4	3.91006E-3	9.65357E-2	1.58449E1	-1.98008E1	-1.99612E1	1.50094E1	2.23297E-9	2.51632E-3	2.51632E-3	6.32896E-3	2.12594E-2
2.2E1	1.7E1	0.0E0	8.89E2	6.17E2	-7.33239E-2	-8.80032E1	-1.66893E-4	-8.80017E1	9.29832E-4	3.83854E-3	9.63449E-2	1.58335E1	-1.9835E1	-1.99179E1	1.50136E1	2.24207E-9	2.52428E-3	2.52428E-3	6.32936E-3	2.1185E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.23189E-2	-8.80031E1	-1.19209E-4	-8.80019E1	8.10623E-4	3.6478E-3	9.64165E-2	1.58297E1	-1.98505E1	-1.99172E1	1.50091E1	2.2473E-9	2.52276E-3	2.52276E-3	6.32356E-3	2.1187E-2