[Scan]
initial_time=2016-01-18T16:49:57
final_time=2016-01-18T16:50:17
ip_count=19
run=1024
dataset=1
scan=57
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.12368E-2
qbias_imon=-3.83648E-6
ql1_vset=
ql1_vmon=-8.80028E1
ql1_imon=-6.78742E-10
ql2_vset=
ql2_vmon=-2.6226E-4
ql2_imon=1.23849E-9
ql3_vset=
ql3_vmon=-8.80012E1
ql3_imon=-2.31477E-9
ql4_vset=
ql4_vmon=4.76837E-4
ql4_imon=1.40793E-8
mult1=-1.00173E-8
mult2=-2.68468E-9
rf_tmon=-4.66864E-3
rf_agc=3.32915E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.26633E-3
ql5_imon=6.29485E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66798E0
bslens_imon=2.50786E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19665E1
lens5a_imon=1.99784E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12564E2
lens4a_imon=2.04796E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54061E1
cs_ef1b_imon=2.77826E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04661E2
lens23_imon=1.02496E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04386E1
cs_ea1_imon=2.62219E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02298E0
lens1_imon=1.5593E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64924E1
os_ef1alow_imon=2.98349E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0372E1
cs_ea2_imon=1.4871E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84592E1
cs_ef1a_imon=2.92582E-5
olens2_vset=0.0E0
olens2_vmon=9.29832E-4
olens2_imon=1.02095E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11572E1
os_restr1_imon=4.27892E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14975E1
os_ea1_imon=2.36983E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63721E1
os_ef1bup_imon=3.08717E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23794E0
cs_ionrep_imon=1.16289E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92001E2
cs_nozzle_imon=1.9376E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02122E1
cs_anode1_imon=2.90883E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99968E1
olens4_imon=4.23489E-9
tplens_vset=0.0E0
tplens_vmon=-1.68863E0
tplens_imon=-1.6085E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99456E1
iondef3_imon=8.70183E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98681E1
iondef2_imon=9.28937E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03251E2
lens6_imon=2.98066E-4
ql6_vset=1.0E-1
ql6_vmon=9.65357E-2
ql6_imon=8.86631E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25151E0
ionrepsh_imon=1.72495E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33433E1
lens5b_imon=2.18614E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74867E1
cs_ef2b_imon=3.13742E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.22732E0
os_ea2_imon=-6.63446E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06234E2
lens4b_imon=2.00782E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71376E1
cs_ef2a_imon=3.17811E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07255E0
os_ef2alow_imon=-2.53117E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.77569E-1
os_ef2bup_imon=-5.20623E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11253E1
os_restr2_imon=3.36989E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23046E2
cs_ionfoca_imon=6.30353E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02027E1
cs_anode2_imon=2.23547E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58365E1
iondef1_imon=5.26152E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50388E1
iondef4_imon=5.33832E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27954E1
olens3_imon=2.51296E-8
olens1_vset=0.0E0
olens1_vmon=1.14441E-3
olens1_imon=1.19254E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14901E0
cs_ionaccel_imon=-1.82702E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0214E2
cs_ionfocb_imon=1.47332E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56665E1
einzel_imon=7.79753E-6
window_vset=0.0E0
window_vmon=2.56735E-1
window_imon=-7.12415E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82811E2
mask1_imon=2.3913E-4
mask2_vset=0.0E0
mask2_vmon=-1.86946E1
mask2_imon=-6.62877E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92664E3
multa_neg_imon=7.62231E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.69145E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.44888E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.56796E0
defgridb_imon=5.79951E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33306E1
os_fil1_imon=9.43246E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06675E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62379E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30837E1
cs_fil1_imon=9.95054E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62525E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63271E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.15499E-2
os_fil2_imon=-2.77376E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91467E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.61879E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37724E-1
cs_fil2_imon=-2.4494E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.88781E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22094E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.12413E-2
chamber_ion_pmon=2.24155E-9
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.23235E-1
res40_imon=-2.42148E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=214
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.371E3	0.0E0	1.47E2	4.1E1	-7.27053E-2	-8.80028E1	-6.67572E-4	-8.80017E1	9.77516E-4	3.57628E-3	9.66072E-2	1.58075E1	-1.98322E1	-1.992E1	1.50223E1	2.23332E-9	2.5188E-3	2.5188E-3	6.29645E-3	2.11482E-2
2.0E0	2.998E3	4.0E0	3.16E2	1.6E2	-7.27828E-2	-8.80028E1	-5.96046E-4	-8.80013E1	1.0252E-3	3.71933E-3	9.68695E-2	1.58289E1	-1.98316E1	-1.9931E1	1.50016E1	2.23711E-9	2.51474E-3	2.51474E-3	6.32197E-3	2.11976E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.35556E-2	-8.80026E1	-3.33786E-4	-8.80013E1	1.19209E-3	3.79086E-3	9.66549E-2	1.5822E1	-1.98233E1	-1.99072E1	1.50391E1	2.24012E-9	2.51947E-3	2.51947E-3	6.29455E-3	2.11658E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.37103E-2	-8.80033E1	-1.90735E-4	-8.80014E1	8.58307E-4	3.57628E-3	9.64403E-2	1.58116E1	-1.98272E1	-1.99283E1	1.50147E1	2.23108E-9	2.51956E-3	2.51956E-3	6.31251E-3	2.12097E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80031E1	-3.09944E-4	-8.80018E1	1.26362E-3	3.67165E-3	9.65595E-2	1.58227E1	-1.98194E1	-1.99324E1	1.49836E1	2.23608E-9	2.52293E-3	2.52293E-3	6.3131E-3	2.11807E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23189E-2	-8.80033E1	-2.38419E-4	-8.80014E1	9.77516E-4	3.74317E-3	9.67741E-2	1.58137E1	-1.98368E1	-1.99252E1	1.50184E1	2.24109E-9	2.52209E-3	2.52209E-3	6.33486E-3	2.12218E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80031E1	-1.90735E-4	-8.80012E1	9.05991E-4	3.52859E-3	9.68695E-2	1.58065E1	-1.98266E1	-1.99288E1	1.50028E1	2.2406E-9	2.51954E-3	2.51954E-3	6.33436E-3	2.12232E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.80029E1	-3.33786E-4	-8.80012E1	1.0252E-3	3.83854E-3	9.66072E-2	1.58115E1	-1.98275E1	-1.99384E1	1.49732E1	2.23332E-9	2.51662E-3	2.51662E-3	6.30192E-3	2.12772E-2
1.2E1	7.4E1	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.8003E1	-7.15256E-5	-8.80016E1	7.15256E-4	3.67165E-3	9.63211E-2	1.58047E1	-1.9832E1	-1.99504E1	1.50166E1	2.23915E-9	2.52318E-3	2.52318E-3	6.33486E-3	2.12772E-2
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.21643E-2	-8.80031E1	-2.6226E-4	-8.80016E1	7.39098E-4	3.6478E-3	9.64165E-2	1.58342E1	-1.9851E1	-1.99384E1	1.50618E1	2.23773E-9	2.50989E-3	2.50989E-3	6.29128E-3	2.12594E-2
1.4E1	1.08E2	0.0E0	5.66E2	3.82E2	-7.25507E-2	-8.8003E1	-5.00679E-4	-8.80016E1	1.28746E-3	3.76701E-3	9.65834E-2	1.58054E1	-1.98478E1	-1.99009E1	1.50135E1	2.23011E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.11328E-2
1.5E1	6.6E1	0.0E0	6.06E2	4.11E2	-7.201E-2	-8.80028E1	-1.90735E-4	-8.80015E1	8.34465E-4	3.57628E-3	9.63449E-2	1.58215E1	-1.98242E1	-1.99336E1	1.50334E1	2.23369E-9	2.51915E-3	2.51915E-3	6.31299E-3	2.12392E-2
1.6E1	3.15E2	0.0E0	6.47E2	4.41E2	-7.29374E-2	-8.80028E1	-5.24521E-4	-8.80016E1	1.00136E-3	3.79086E-3	9.64165E-2	1.58551E1	-1.98246E1	-1.99738E1	1.5016E1	2.21882E-9	2.52099E-3	2.52099E-3	6.29645E-3	2.12772E-2
1.7E1	7.74E2	0.0E0	6.87E2	4.7E2	-7.20871E-2	-8.80028E1	-6.19888E-4	-8.80014E1	8.34465E-4	3.55244E-3	9.63688E-2	1.58083E1	-1.9838E1	-1.99005E1	1.50412E1	2.21786E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.12034E-2
1.8E1	3.288E3	2.0E0	7.27E2	5.0E2	-7.19325E-2	-8.80028E1	-5.24521E-4	-8.80015E1	8.82149E-4	3.74317E-3	9.65595E-2	1.58053E1	-1.98422E1	-1.99336E1	1.50016E1	2.23041E-9	2.52428E-3	2.52428E-3	6.33486E-3	2.12403E-2
1.9E1	1.806E3	4.0E0	7.68E2	5.29E2	-7.23964E-2	-8.80029E1	-6.4373E-4	-8.80012E1	6.67572E-4	3.62396E-3	9.63926E-2	1.58191E1	-1.98246E1	-1.99514E1	1.50225E1	2.23041E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.12403E-2
2.0E1	1.5E1	0.0E0	8.08E2	5.58E2	-7.26282E-2	-8.80024E1	-4.05312E-4	-8.80012E1	7.39098E-4	3.60012E-3	9.65357E-2	1.58203E1	-1.98275E1	-1.99622E1	1.50241E1	2.23169E-9	2.52131E-3	2.52131E-3	6.29157E-3	2.12422E-2
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80024E1	-1.90735E-4	-8.80013E1	8.34465E-4	3.79086E-3	9.65595E-2	1.58575E1	-1.98399E1	-1.99343E1	1.50242E1	2.23004E-9	2.51952E-3	2.51952E-3	6.29035E-3	2.1219E-2
2.2E1	7.0E0	0.0E0	8.89E2	6.17E2	-7.17779E-2	-8.80027E1	-5.00679E-4	-8.80013E1	9.05991E-4	3.71933E-3	9.67503E-2	1.58044E1	-1.98358E1	-1.99083E1	1.50184E1	2.23773E-9	2.51203E-3	2.51203E-3	6.31278E-3	2.12051E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.12368E-2	-8.80028E1	-2.6226E-4	-8.80012E1	4.76837E-4	3.26633E-3	9.65357E-2	1.58365E1	-1.98681E1	-1.99456E1	1.50388E1	2.24155E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.12413E-2