[Scan]
initial_time=2016-01-18T16:50:24
final_time=2016-01-18T16:50:44
ip_count=19
run=1024
dataset=1
scan=58
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.19325E-2
qbias_imon=-3.79623E-6
ql1_vset=
ql1_vmon=-8.8003E1
ql1_imon=-7.05242E-10
ql2_vset=
ql2_vmon=-3.33786E-4
ql2_imon=1.20257E-9
ql3_vset=
ql3_vmon=-8.80016E1
ql3_imon=-2.35182E-9
ql4_vset=
ql4_vmon=6.91414E-4
ql4_imon=1.40634E-8
mult1=-1.02702E-8
mult2=-2.80644E-9
rf_tmon=-4.8609E-3
rf_agc=3.26066E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.95775E-3
ql5_imon=6.36101E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66444E0
bslens_imon=2.51848E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19529E1
lens5a_imon=1.98934E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12549E2
lens4a_imon=2.04895E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53908E1
cs_ef1b_imon=2.78003E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04656E2
lens23_imon=1.0211E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04634E1
cs_ea1_imon=2.61936E-5
lens1_vset=-2.7E0
lens1_vmon=-2.92978E0
lens1_imon=1.577E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64706E1
os_ef1alow_imon=2.97075E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03543E1
cs_ea2_imon=1.47047E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84674E1
cs_ef1a_imon=2.93643E-5
olens2_vset=0.0E0
olens2_vmon=9.53674E-4
olens2_imon=1.02098E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1146E1
os_restr1_imon=4.28387E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15205E1
os_ea1_imon=2.4077E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63744E1
os_ef1bup_imon=3.08257E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21552E0
cs_ionrep_imon=1.19439E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92001E2
cs_nozzle_imon=1.93431E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02092E1
cs_anode1_imon=2.90282E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9997E1
olens4_imon=4.22858E-9
tplens_vset=0.0E0
tplens_vmon=-1.72166E0
tplens_imon=-4.33385E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99414E1
iondef3_imon=8.64166E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98308E1
iondef2_imon=9.33538E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03233E2
lens6_imon=2.98289E-4
ql6_vset=1.0E-1
ql6_vmon=9.66072E-2
ql6_imon=8.87477E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28277E0
ionrepsh_imon=1.70053E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33457E1
lens5b_imon=2.1833E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74596E1
cs_ef2b_imon=3.11866E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.18721E0
os_ea2_imon=-6.28052E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06204E2
lens4b_imon=2.00428E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71352E1
cs_ef2a_imon=3.16926E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09083E0
os_ef2alow_imon=-2.43564E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.7521E-1
os_ef2bup_imon=-5.26285E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11247E1
os_restr2_imon=3.37343E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.29256E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01727E1
cs_anode2_imon=2.24077E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58251E1
iondef1_imon=5.14118E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50058E1
iondef4_imon=5.39493E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27956E1
olens3_imon=2.51704E-8
olens1_vset=0.0E0
olens1_vmon=1.28746E-3
olens1_imon=1.2001E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14488E0
cs_ionaccel_imon=-1.66779E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02109E2
cs_ionfocb_imon=1.47407E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56358E1
einzel_imon=7.79399E-6
window_vset=0.0E0
window_vmon=2.9153E-1
window_imon=-7.26569E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82805E2
mask1_imon=2.39204E-4
mask2_vset=0.0E0
mask2_vmon=-1.86987E1
mask2_imon=-6.91185E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=7.30022E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93692E3
defgrida_imon=6.30919E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.11263E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39965E0
defgridb_imon=6.07913E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33315E1
os_fil1_imon=9.4104E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07707E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61921E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30856E1
cs_fil1_imon=9.95001E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62832E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63169E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.93972E-2
os_fil2_imon=-2.76786E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92647E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.88329E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36071E-1
cs_fil2_imon=-2.73837E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.23398E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22148E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.12413E-2
chamber_ion_pmon=2.23773E-9
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.93748E-1
res40_imon=-2.47102E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.235E3	1.0E0	1.47E2	4.1E1	-7.11597E-2	-8.80024E1	-7.62939E-4	-8.80015E1	9.77516E-4	4.00543E-3	9.63211E-2	1.58005E1	-1.98308E1	-1.99161E1	1.50004E1	2.21968E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.10968E-2
2.0E0	3.002E3	2.0E0	3.16E2	1.6E2	-7.10825E-2	-8.80028E1	-7.86781E-4	-8.80016E1	9.05991E-4	3.67165E-3	9.65834E-2	1.58203E1	-1.98288E1	-1.99341E1	1.50359E1	2.24207E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.11482E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.12368E-2	-8.80029E1	-3.8147E-4	-8.80015E1	5.96046E-4	3.71933E-3	9.67979E-2	1.58174E1	-1.98504E1	-1.99518E1	1.50091E1	2.24012E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.12403E-2
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.12368E-2	-8.80031E1	-5.48363E-4	-8.80016E1	6.91414E-4	3.83854E-3	9.65357E-2	1.5825E1	-1.98364E1	-1.99207E1	1.50039E1	2.23964E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.10968E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.12368E-2	-8.80032E1	-3.33786E-4	-8.80013E1	9.05991E-4	3.79086E-3	9.6488E-2	1.58299E1	-1.98543E1	-1.99558E1	1.50388E1	2.23773E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.12051E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.12368E-2	-8.80031E1	-3.8147E-4	-8.80016E1	6.19888E-4	3.45707E-3	9.65118E-2	1.57807E1	-1.98374E1	-1.99288E1	1.50016E1	2.23526E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.12034E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.11597E-2	-8.80028E1	-2.14577E-4	-8.80014E1	7.39098E-4	3.33786E-3	9.66787E-2	1.58244E1	-1.98729E1	-1.9926E1	1.50268E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.18554E-2	-8.8003E1	-1.90735E-4	-8.80015E1	8.58307E-4	3.69549E-3	9.66311E-2	1.58143E1	-1.98717E1	-1.99552E1	1.50292E1	2.23583E-9	2.52384E-3	2.52384E-3	6.33977E-3	2.11689E-2
1.2E1	7.2E1	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.8003E1	-2.86102E-4	-8.80014E1	8.10623E-4	3.40939E-3	9.65595E-2	1.58179E1	-1.98362E1	-1.99204E1	1.50118E1	2.2372E-9	2.52099E-3	2.52099E-3	6.29645E-3	2.11666E-2
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.25507E-2	-8.8003E1	-1.90735E-4	-8.80012E1	1.00136E-3	3.60012E-3	9.66787E-2	1.58239E1	-1.98519E1	-1.9924E1	1.50202E1	2.23623E-9	2.51334E-3	2.51334E-3	6.32386E-3	2.10748E-2
1.4E1	9.9E1	0.0E0	5.66E2	3.82E2	-7.29374E-2	-8.80027E1	-4.29153E-4	-8.80015E1	8.34465E-4	3.62396E-3	9.68695E-2	1.58056E1	-1.98063E1	-1.99402E1	1.50259E1	2.24207E-9	2.5188E-3	2.5188E-3	6.29098E-3	2.12587E-2
1.5E1	6.1E1	0.0E0	6.06E2	4.11E2	-7.24736E-2	-8.80028E1	-5.96046E-4	-8.80014E1	6.91414E-4	3.95775E-3	9.63211E-2	1.58485E1	-1.9852E1	-1.99469E1	1.50091E1	2.23678E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.12594E-2
1.6E1	3.15E2	0.0E0	6.47E2	4.41E2	-7.23964E-2	-8.80031E1	-2.14577E-4	-8.80015E1	7.62939E-4	3.57628E-3	9.64165E-2	1.58191E1	-1.9823E1	-1.99492E1	1.50256E1	2.23915E-9	2.51225E-3	2.51225E-3	6.34037E-3	2.12034E-2
1.7E1	7.73E2	0.0E0	6.87E2	4.7E2	-7.30918E-2	-8.80031E1	-2.14577E-4	-8.80013E1	5.96046E-4	3.88622E-3	9.66787E-2	1.58035E1	-1.98115E1	-1.99648E1	1.50217E1	2.23526E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.12034E-2
1.8E1	3.178E3	4.0E0	7.27E2	5.0E2	-7.36328E-2	-8.80032E1	0.0E0	-8.80013E1	5.72205E-4	3.69549E-3	9.65834E-2	1.58197E1	-1.98403E1	-1.99402E1	1.5001E1	2.23414E-9	2.51886E-3	2.51886E-3	6.3074E-3	2.11733E-2
1.9E1	1.853E3	1.0E0	7.68E2	5.29E2	-7.30918E-2	-8.8003E1	-3.8147E-4	-8.80015E1	8.58307E-4	3.3617E-3	9.67979E-2	1.58299E1	-1.98338E1	-1.9936E1	1.50064E1	2.23344E-9	2.5199E-3	2.5199E-3	6.29581E-3	2.11007E-2
2.0E1	2.2E1	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.80028E1	-4.52995E-4	-8.80015E1	3.57628E-4	3.67165E-3	9.66072E-2	1.58208E1	-1.98307E1	-1.99039E1	1.50086E1	2.23235E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.11666E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.32464E-2	-8.80027E1	-3.57628E-4	-8.80016E1	8.58307E-4	4.07696E-3	9.67503E-2	1.5814E1	-1.98628E1	-1.99185E1	1.50452E1	2.234E-9	2.52285E-3	2.52285E-3	6.31234E-3	2.12458E-2
2.2E1	1.6E1	0.0E0	8.89E2	6.17E2	-7.19325E-2	-8.80029E1	-2.6226E-4	-8.80016E1	5.48363E-4	3.93391E-3	9.65357E-2	1.58191E1	-1.98092E1	-1.9939E1	1.50364E1	2.24012E-9	2.51498E-3	2.51498E-3	6.3074E-3	2.11712E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.19325E-2	-8.8003E1	-3.33786E-4	-8.80016E1	6.91414E-4	3.95775E-3	9.66072E-2	1.58251E1	-1.98308E1	-1.99414E1	1.50058E1	2.23773E-9	2.51632E-3	2.51632E-3	6.33436E-3	2.12413E-2