[Scan]
initial_time=2016-01-18T16:50:51
final_time=2016-01-18T16:51:11
ip_count=19
run=1024
dataset=1
scan=59
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.19325E-2
qbias_imon=-3.85273E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-7.49493E-10
ql2_vset=
ql2_vmon=-5.72205E-4
ql2_imon=1.23591E-9
ql3_vset=
ql3_vmon=-8.80014E1
ql3_imon=-2.46925E-9
ql4_vset=
ql4_vmon=8.34465E-4
ql4_imon=1.39444E-8
mult1=-9.73136E-9
mult2=-2.70271E-9
rf_tmon=-3.91568E-3
rf_agc=3.46296E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.8147E-3
ql5_imon=6.37138E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64999E0
bslens_imon=2.45505E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19783E1
lens5a_imon=1.99217E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12566E2
lens4a_imon=2.04951E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53859E1
cs_ef1b_imon=2.78732E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04664E2
lens23_imon=1.02297E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04772E1
cs_ea1_imon=2.62159E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98693E0
lens1_imon=1.66111E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65011E1
os_ef1alow_imon=2.98038E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03417E1
cs_ea2_imon=1.47878E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84628E1
cs_ef1a_imon=2.92589E-5
olens2_vset=0.0E0
olens2_vmon=9.05991E-4
olens2_imon=1.01967E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11467E1
os_restr1_imon=4.28624E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14982E1
os_ea1_imon=2.38341E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63454E1
os_ef1bup_imon=3.06796E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24192E0
cs_ionrep_imon=1.17571E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92038E2
cs_nozzle_imon=1.93619E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01757E1
cs_anode1_imon=2.89086E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99968E1
olens4_imon=4.2542E-9
tplens_vset=0.0E0
tplens_vmon=-1.68978E0
tplens_imon=-2.43575E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99373E1
iondef3_imon=8.76838E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98249E1
iondef2_imon=9.26078E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03224E2
lens6_imon=2.98266E-4
ql6_vset=1.0E-1
ql6_vmon=9.64403E-2
ql6_imon=8.73196E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25273E0
ionrepsh_imon=1.70933E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33938E1
lens5b_imon=2.16851E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74638E1
cs_ef2b_imon=3.13023E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.2082E0
os_ea2_imon=-5.22217E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06177E2
lens4b_imon=2.00756E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71381E1
cs_ef2a_imon=3.16254E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0591E0
os_ef2alow_imon=-2.36982E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.72557E-1
os_ef2bup_imon=-5.16059E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11396E1
os_restr2_imon=3.38751E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23078E2
cs_ionfoca_imon=6.28325E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02042E1
cs_anode2_imon=2.22489E-5
iondef1_vset=1.6E1
iondef1_vmon=1.5811E1
iondef1_imon=5.06207E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50068E1
iondef4_imon=5.4381E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27952E1
olens3_imon=2.51491E-8
olens1_vset=0.0E0
olens1_vmon=1.12057E-3
olens1_imon=1.19968E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15933E0
cs_ionaccel_imon=-1.8755E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02143E2
cs_ionfocb_imon=1.47335E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56288E1
einzel_imon=7.66838E-6
window_vset=0.0E0
window_vmon=2.64579E-1
window_imon=-8.0123E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82799E2
mask1_imon=2.39267E-4
mask2_vset=0.0E0
mask2_vmon=-1.87058E1
mask2_imon=-7.03923E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92619E3
multa_neg_imon=7.63855E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.61941E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=7.05073E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32178E0
defgridb_imon=6.27206E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3332E1
os_fil1_imon=9.40824E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.09042E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61826E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30821E1
cs_fil1_imon=9.9579E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6195E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63204E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.90446E-2
os_fil2_imon=-2.56794E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.99252E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.98044E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37343E-1
cs_fil2_imon=-2.37981E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.09081E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22026E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28056E-3
inlet_lpb_pmon=2.12594E-2
chamber_ion_pmon=2.23011E-9
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.13327E-1
res40_imon=-2.75126E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.309E3	0.0E0	1.47E2	4.1E1	-7.32464E-2	-8.80032E1	-4.76837E-4	-8.80014E1	7.15256E-4	3.8147E-3	9.67264E-2	1.58126E1	-1.9857E1	-1.99325E1	1.50196E1	2.24417E-9	2.51725E-3	2.51725E-3	6.3131E-3	2.12381E-2
2.0E0	3.019E3	3.0E0	3.16E2	1.6E2	-7.27053E-2	-8.8003E1	-4.05312E-4	-8.80014E1	9.77516E-4	3.91006E-3	9.69172E-2	1.58093E1	-1.98355E1	-1.99194E1	1.50378E1	2.23429E-9	2.5199E-3	2.5199E-3	6.34037E-3	2.12772E-2
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.23964E-2	-8.8003E1	-3.8147E-4	-8.80015E1	9.29832E-4	4.14848E-3	9.68456E-2	1.58115E1	-1.98387E1	-1.99054E1	1.50265E1	2.23566E-9	2.5147E-3	2.5147E-3	6.32978E-3	2.14091E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.37874E-2	-8.80029E1	-4.76837E-4	-8.80016E1	7.86781E-4	3.8147E-3	9.65118E-2	1.57932E1	-1.98523E1	-1.99343E1	1.50196E1	2.2473E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.12051E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.41738E-2	-8.80029E1	-5.96046E-4	-8.80015E1	4.05312E-4	3.8147E-3	9.65118E-2	1.58191E1	-1.98153E1	-1.9953E1	1.5007E1	2.23678E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.12413E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.40192E-2	-8.80027E1	-7.15256E-4	-8.80016E1	7.39098E-4	3.62396E-3	9.63449E-2	1.58239E1	-1.98368E1	-1.99185E1	1.50232E1	2.23369E-9	2.51359E-3	2.51359E-3	6.32418E-3	2.1108E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40967E-2	-8.80029E1	-7.86781E-4	-8.80012E1	7.86781E-4	3.83854E-3	9.66311E-2	1.58179E1	-1.98747E1	-1.9939E1	1.50058E1	2.23583E-9	2.52169E-3	2.52169E-3	6.29665E-3	2.1332E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.80026E1	-6.67572E-4	-8.80015E1	8.34465E-4	3.71933E-3	9.68695E-2	1.5792E1	-1.98139E1	-1.99449E1	1.50376E1	2.23468E-9	2.51359E-3	2.51359E-3	6.31299E-3	2.12016E-2
1.2E1	8.7E1	0.0E0	4.85E2	3.23E2	-7.31692E-2	-8.80028E1	-5.72205E-4	-8.80016E1	5.00679E-4	3.69549E-3	9.68695E-2	1.58053E1	-1.9817E1	-1.99276E1	1.50274E1	2.23869E-9	2.51096E-3	2.51096E-3	6.31278E-3	2.11689E-2
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.23189E-2	-8.80026E1	-5.96046E-4	-8.80014E1	7.62939E-4	3.88622E-3	9.66549E-2	1.58126E1	-1.98269E1	-1.99561E1	1.49999E1	2.24012E-9	2.51552E-3	2.51552E-3	6.34588E-3	2.12218E-2
1.4E1	1.21E2	0.0E0	5.66E2	3.82E2	-7.27828E-2	-8.80028E1	-7.86781E-4	-8.80014E1	6.91414E-4	3.93391E-3	9.69648E-2	1.58136E1	-1.98373E1	-1.99463E1	1.50315E1	2.23297E-9	2.52599E-3	2.52599E-3	6.32356E-3	2.1187E-2
1.5E1	6.9E1	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.80032E1	-7.86781E-4	-8.80013E1	6.91414E-4	3.52859E-3	9.66787E-2	1.58041E1	-1.98382E1	-1.99471E1	1.50219E1	2.23915E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.12587E-2
1.6E1	3.2E2	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80028E1	-7.15256E-4	-8.80016E1	1.04904E-3	3.76701E-3	9.67979E-2	1.5786E1	-1.98341E1	-1.99327E1	1.50372E1	2.23773E-9	2.51525E-3	2.51525E-3	6.32896E-3	2.12051E-2
1.7E1	8.14E2	2.0E0	6.87E2	4.7E2	-7.22418E-2	-8.80025E1	-4.29153E-4	-8.80013E1	6.91414E-4	3.86238E-3	9.67503E-2	1.58071E1	-1.98296E1	-1.9927E1	1.5019E1	2.23072E-9	2.52027E-3	2.52027E-3	6.28511E-3	2.12204E-2
1.8E1	3.263E3	3.0E0	7.27E2	5.0E2	-7.20871E-2	-8.80027E1	-5.24521E-4	-8.80014E1	7.39098E-4	3.76701E-3	9.67264E-2	1.58191E1	-1.98068E1	-1.99252E1	1.50106E1	2.23138E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.12034E-2
1.9E1	1.807E3	0.0E0	7.68E2	5.29E2	-7.201E-2	-8.80028E1	-5.96046E-4	-8.80015E1	7.39098E-4	3.79086E-3	9.66549E-2	1.58197E1	-1.98446E1	-1.99419E1	1.50064E1	2.22383E-9	2.5147E-3	2.5147E-3	6.32978E-3	2.11267E-2
2.0E1	1.4E1	0.0E0	8.08E2	5.58E2	-7.23964E-2	-8.80026E1	-3.09944E-4	-8.80017E1	8.10623E-4	3.79086E-3	9.67026E-2	1.58389E1	-1.98759E1	-1.98975E1	1.50254E1	2.23487E-9	2.51847E-3	2.51847E-3	6.29665E-3	2.11148E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.25507E-2	-8.80029E1	-4.76837E-4	-8.80016E1	1.0252E-3	3.43323E-3	9.66311E-2	1.58323E1	-1.98302E1	-1.99065E1	1.5034E1	2.23818E-9	2.51443E-3	2.51443E-3	6.32386E-3	2.12218E-2
2.2E1	1.4E1	0.0E0	8.89E2	6.17E2	-7.22418E-2	-8.80026E1	-3.33786E-4	-8.80017E1	1.12057E-3	3.43323E-3	9.68695E-2	1.58109E1	-1.98175E1	-1.99461E1	1.5016E1	2.22631E-9	2.51525E-3	2.51525E-3	6.29665E-3	2.12232E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.19325E-2	-8.80026E1	-5.72205E-4	-8.80014E1	8.34465E-4	3.8147E-3	9.64403E-2	1.5811E1	-1.98249E1	-1.99373E1	1.50068E1	2.23011E-9	2.52169E-3	2.52169E-3	6.28056E-3	2.12594E-2