[Scan]
initial_time=2016-01-18T16:51:18
final_time=2016-01-18T16:51:38
ip_count=19
run=1024
dataset=1
scan=60
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.22418E-2
qbias_imon=-3.83044E-6
ql1_vset=
ql1_vmon=-8.80031E1
ql1_imon=-6.98936E-10
ql2_vset=
ql2_vmon=-5.00679E-4
ql2_imon=1.22926E-9
ql3_vset=
ql3_vmon=-8.80017E1
ql3_imon=-2.36602E-9
ql4_vset=
ql4_vmon=1.12057E-3
ql4_imon=1.39883E-8
mult1=-9.58211E-9
mult2=-2.81537E-9
rf_tmon=-4.01986E-3
rf_agc=3.35451E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.67165E-3
ql5_imon=6.49977E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65626E0
bslens_imon=2.24187E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19584E1
lens5a_imon=2.00448E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12569E2
lens4a_imon=2.05056E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54017E1
cs_ef1b_imon=2.78753E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04642E2
lens23_imon=1.02286E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04694E1
cs_ea1_imon=2.61713E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98268E0
lens1_imon=1.58809E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64696E1
os_ef1alow_imon=2.98963E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0377E1
cs_ea2_imon=1.47557E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84307E1
cs_ef1a_imon=2.9406E-5
olens2_vset=0.0E0
olens2_vmon=1.19209E-3
olens2_imon=1.01845E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11541E1
os_restr1_imon=4.27708E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14724E1
os_ea1_imon=2.38463E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.07833E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2221E0
cs_ionrep_imon=1.18136E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92026E2
cs_nozzle_imon=1.93618E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02252E1
cs_anode1_imon=2.90205E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99974E1
olens4_imon=4.22708E-9
tplens_vset=0.0E0
tplens_vmon=-1.71673E0
tplens_imon=-1.08828E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99496E1
iondef3_imon=8.96341E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98558E1
iondef2_imon=9.38948E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03215E2
lens6_imon=2.98357E-4
ql6_vset=1.0E-1
ql6_vmon=9.64403E-2
ql6_imon=8.6472E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24414E0
ionrepsh_imon=1.72166E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33823E1
lens5b_imon=2.17821E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74389E1
cs_ef2b_imon=3.13746E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.17435E0
os_ea2_imon=-6.01006E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06193E2
lens4b_imon=2.00748E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71233E1
cs_ef2a_imon=3.16104E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07514E0
os_ef2alow_imon=-2.48075E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.6582E-1
os_ef2bup_imon=-5.30266E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11379E1
os_restr2_imon=3.36988E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.31214E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01834E1
cs_anode2_imon=2.23999E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57938E1
iondef1_imon=5.22433E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50225E1
iondef4_imon=5.29633E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27956E1
olens3_imon=2.52862E-8
olens1_vset=0.0E0
olens1_vmon=9.77516E-4
olens1_imon=1.19587E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14885E0
cs_ionaccel_imon=-1.63118E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02143E2
cs_ionfocb_imon=1.47402E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56137E1
einzel_imon=7.75895E-6
window_vset=0.0E0
window_vmon=2.74359E-1
window_imon=-9.16352E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82818E2
mask1_imon=2.39103E-4
mask2_vset=0.0E0
mask2_vmon=-1.86918E1
mask2_imon=-6.05718E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.29221E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.52089E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=6.98368E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37597E0
defgridb_imon=6.02136E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33316E1
os_fil1_imon=9.38846E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06893E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61949E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30769E1
cs_fil1_imon=9.94355E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62153E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63439E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.83077E-2
os_fil2_imon=-2.74983E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95335E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.96352E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37181E-1
cs_fil2_imon=-2.57518E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0676E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22263E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.12218E-2
chamber_ion_pmon=2.24402E-9
chamber_cvt_pmon=2.52757E-3
foreline_cvt_pmon=2.52757E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.03048E-1
res40_imon=-2.51069E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.312E3	3.0E0	1.47E2	4.1E1	-7.27053E-2	-8.80028E1	-2.14577E-4	-8.80011E1	5.24521E-4	3.48091E-3	9.70364E-2	1.58047E1	-1.9833E1	-1.99355E1	1.50254E1	2.24109E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.1185E-2
2.0E0	2.963E3	3.0E0	3.16E2	1.6E2	-7.34782E-2	-8.80029E1	-3.57628E-4	-8.80016E1	7.86781E-4	3.31402E-3	9.6941E-2	1.58041E1	-1.98254E1	-1.99445E1	1.5016E1	2.23487E-9	2.51847E-3	2.51847E-3	6.33436E-3	2.13139E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.35556E-2	-8.8003E1	-2.86102E-4	-8.80013E1	6.4373E-4	3.60012E-3	9.65834E-2	1.58356E1	-1.98381E1	-1.99355E1	1.50225E1	2.2381E-9	2.51838E-3	2.51838E-3	6.29035E-3	2.11616E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.3401E-2	-8.8003E1	-2.38419E-4	-8.80017E1	6.4373E-4	3.43323E-3	9.66072E-2	1.58274E1	-1.98499E1	-1.99703E1	1.5037E1	2.2406E-9	2.52492E-3	2.52492E-3	6.31278E-3	2.13139E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80028E1	-4.05312E-4	-8.80016E1	7.86781E-4	3.88622E-3	9.68456E-2	1.58347E1	-1.98242E1	-1.99137E1	1.5007E1	2.24634E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.1187E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.37874E-2	-8.8003E1	-3.09944E-4	-8.80014E1	7.39098E-4	3.67165E-3	9.68933E-2	1.58168E1	-1.98452E1	-1.99437E1	1.50393E1	2.23332E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.11482E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.29374E-2	-8.80029E1	-8.34465E-4	-8.80013E1	5.96046E-4	3.69549E-3	9.67979E-2	1.5805E1	-1.98447E1	-1.9942E1	1.50212E1	2.23487E-9	2.52492E-3	2.52492E-3	6.33977E-3	2.11689E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.80028E1	-6.91414E-4	-8.80015E1	9.77516E-4	3.6478E-3	9.66549E-2	1.57926E1	-1.98175E1	-1.99195E1	1.50178E1	2.23429E-9	2.53087E-3	2.53087E-3	6.32386E-3	2.12034E-2
1.2E1	8.6E1	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.8003E1	-6.67572E-4	-8.80013E1	8.34465E-4	3.93391E-3	9.67741E-2	1.58215E1	-1.98266E1	-1.99276E1	1.50437E1	2.2372E-9	2.51552E-3	2.51552E-3	6.31288E-3	2.12403E-2
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.30146E-2	-8.8003E1	-6.91414E-4	-8.80015E1	9.77516E-4	3.91006E-3	9.6488E-2	1.57807E1	-1.98032E1	-1.99396E1	1.50208E1	2.2372E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.12772E-2
1.4E1	1.28E2	0.0E0	5.66E2	3.82E2	-7.21643E-2	-8.80029E1	-5.00679E-4	-8.80016E1	1.0252E-3	3.91006E-3	9.65595E-2	1.58117E1	-1.98275E1	-1.99294E1	1.50335E1	2.24207E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.1185E-2
1.5E1	6.2E1	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.8003E1	-5.24521E-4	-8.80014E1	1.16825E-3	3.62396E-3	9.67264E-2	1.58172E1	-1.98485E1	-1.99346E1	1.50347E1	2.24012E-9	2.5165E-3	2.5165E-3	6.31761E-3	2.11926E-2
1.6E1	3.0E2	2.0E0	6.47E2	4.41E2	-7.23964E-2	-8.80028E1	-5.72205E-4	-8.80016E1	9.05991E-4	3.52859E-3	9.67741E-2	1.58233E1	-1.98218E1	-1.99534E1	1.5007E1	2.23961E-9	2.51527E-3	2.51527E-3	6.33648E-3	2.1237E-2
1.7E1	7.65E2	0.0E0	6.87E2	4.7E2	-7.27053E-2	-8.8003E1	-5.72205E-4	-8.80017E1	7.86781E-4	3.0756E-3	9.63211E-2	1.57855E1	-1.97942E1	-1.99738E1	1.501E1	2.23915E-9	2.52647E-3	2.52647E-3	6.29098E-3	2.12034E-2
1.8E1	3.255E3	2.0E0	7.27E2	5.0E2	-7.16233E-2	-8.80034E1	-6.67572E-4	-8.80014E1	5.72205E-4	3.71933E-3	9.66787E-2	1.58011E1	-1.98332E1	-1.99426E1	1.50358E1	2.24012E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.12403E-2
1.9E1	1.802E3	0.0E0	7.68E2	5.29E2	-7.14689E-2	-8.80033E1	-9.53674E-4	-8.80016E1	1.00136E-3	3.55244E-3	9.64403E-2	1.57981E1	-1.9805E1	-1.99342E1	1.50064E1	2.22916E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.12413E-2
2.0E1	2.2E1	0.0E0	8.08E2	5.58E2	-7.32464E-2	-8.8003E1	-7.62939E-4	-8.80017E1	7.62939E-4	3.67165E-3	9.66311E-2	1.58293E1	-1.98314E1	-1.99149E1	1.50226E1	2.23041E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.11666E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.23964E-2	-8.80032E1	-5.24521E-4	-8.80016E1	9.29832E-4	3.50475E-3	9.66072E-2	1.5792E1	-1.98027E1	-1.99384E1	1.49999E1	2.23468E-9	2.51915E-3	2.51915E-3	6.32978E-3	2.1258E-2
2.2E1	2.1E1	0.0E0	8.89E2	6.17E2	-7.201E-2	-8.80032E1	-4.29153E-4	-8.80015E1	8.82149E-4	3.67165E-3	9.66311E-2	1.58119E1	-1.98615E1	-1.99402E1	1.50315E1	2.23487E-9	2.52492E-3	2.52492E-3	6.3074E-3	2.12051E-2
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.22418E-2	-8.80031E1	-5.00679E-4	-8.80017E1	1.12057E-3	3.67165E-3	9.64403E-2	1.57938E1	-1.98558E1	-1.99496E1	1.50225E1	2.24402E-9	2.52757E-3	2.52757E-3	6.31837E-3	2.12218E-2