[Scan]
initial_time=2016-01-18T16:51:45
final_time=2016-01-18T16:52:05
ip_count=19
run=1024
dataset=1
scan=61
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37874E-2
qbias_imon=-3.7966E-6
ql1_vset=
ql1_vmon=-8.80031E1
ql1_imon=-7.60353E-10
ql2_vset=
ql2_vmon=-3.57628E-4
ql2_imon=1.20574E-9
ql3_vset=
ql3_vmon=-8.80012E1
ql3_imon=-2.30962E-9
ql4_vset=
ql4_vmon=7.86781E-4
ql4_imon=1.39934E-8
mult1=-9.78855E-9
mult2=-2.73658E-9
rf_tmon=-5.93638E-3
rf_agc=3.2204E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.69549E-3
ql5_imon=6.47271E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65445E0
bslens_imon=2.24067E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19846E1
lens5a_imon=1.99713E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12568E2
lens4a_imon=2.04874E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54222E1
cs_ef1b_imon=2.79005E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04665E2
lens23_imon=1.02157E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04372E1
cs_ea1_imon=2.61887E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02662E0
lens1_imon=1.56927E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64998E1
os_ef1alow_imon=2.98505E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03452E1
cs_ea2_imon=1.47709E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84433E1
cs_ef1a_imon=2.9255E-5
olens2_vset=0.0E0
olens2_vmon=9.05991E-4
olens2_imon=1.02584E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11292E1
os_restr1_imon=4.28663E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15101E1
os_ea1_imon=2.39521E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63622E1
os_ef1bup_imon=3.08236E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22826E0
cs_ionrep_imon=1.18231E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9206E2
cs_nozzle_imon=1.93543E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02451E1
cs_anode1_imon=2.91694E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9997E1
olens4_imon=4.32676E-9
tplens_vset=0.0E0
tplens_vmon=-1.7189E0
tplens_imon=-2.22465E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99053E1
iondef3_imon=8.73224E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98573E1
iondef2_imon=9.28843E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03213E2
lens6_imon=2.98286E-4
ql6_vset=1.0E-1
ql6_vmon=9.66311E-2
ql6_imon=8.78096E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25408E0
ionrepsh_imon=1.72261E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34016E1
lens5b_imon=2.1775E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74696E1
cs_ef2b_imon=3.12439E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.19317E0
os_ea2_imon=-6.87283E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06191E2
lens4b_imon=2.00591E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71361E1
cs_ef2a_imon=3.16215E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08635E0
os_ef2alow_imon=-2.45156E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.56987E-1
os_ef2bup_imon=-5.24622E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1137E1
os_restr2_imon=3.37194E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.28816E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01951E1
cs_anode2_imon=2.23423E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58131E1
iondef1_imon=5.24014E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50226E1
iondef4_imon=5.35247E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27954E1
olens3_imon=2.51115E-8
olens1_vset=0.0E0
olens1_vmon=1.12057E-3
olens1_imon=1.1943E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17296E0
cs_ionaccel_imon=-1.79376E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02144E2
cs_ionfocb_imon=1.47339E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56392E1
einzel_imon=7.68006E-6
window_vset=0.0E0
window_vmon=2.45117E-1
window_imon=-7.38954E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82808E2
mask1_imon=2.39142E-4
mask2_vset=0.0E0
mask2_vmon=-1.86889E1
mask2_imon=-7.42846E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.31792E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93741E3
defgrida_imon=6.4439E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50108E3
multb_neg_imon=7.23052E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43219E0
defgridb_imon=6.10224E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33287E1
os_fil1_imon=9.42569E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07141E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62458E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30842E1
cs_fil1_imon=9.95965E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6149E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63458E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.02681E-2
os_fil2_imon=-2.65227E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.79142E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.56833E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3958E-1
cs_fil2_imon=-2.44468E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.15653E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22249E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.12772E-2
chamber_ion_pmon=2.24109E-9
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40041E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.45212E-1
res40_imon=-2.54887E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=513
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.292E3	1.0E0	1.47E2	4.1E1	-7.24736E-2	-8.80026E1	-5.72205E-4	-8.80014E1	1.0252E-3	3.62396E-3	9.6488E-2	1.58041E1	-1.98712E1	-1.99129E1	1.5012E1	2.24173E-9	2.51227E-3	2.51227E-3	6.32555E-3	2.11534E-2
2.0E0	2.94E3	3.0E0	3.16E2	1.6E2	-7.36328E-2	-8.80026E1	-5.24521E-4	-8.80014E1	1.04904E-3	3.52859E-3	9.67503E-2	1.58079E1	-1.98539E1	-1.99542E1	1.50317E1	2.23583E-9	2.51954E-3	2.51954E-3	6.32896E-3	2.11509E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.37103E-2	-8.80024E1	-5.72205E-4	-8.80013E1	1.21593E-3	3.62396E-3	9.67264E-2	1.58323E1	-1.9817E1	-1.99137E1	1.50213E1	2.23893E-9	2.52572E-3	2.52572E-3	6.31413E-3	2.11148E-2
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.27053E-2	-8.80025E1	-5.24521E-4	-8.80014E1	7.39098E-4	3.60012E-3	9.67741E-2	1.58244E1	-1.98263E1	-1.99526E1	1.50431E1	2.23773E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.12051E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80025E1	-2.86102E-4	-8.80015E1	1.07288E-3	3.71933E-3	9.6941E-2	1.57961E1	-1.98322E1	-1.99526E1	1.5012E1	2.24442E-9	2.52169E-3	2.52169E-3	6.32356E-3	2.11509E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.24736E-2	-8.80026E1	-5.24521E-4	-8.80015E1	1.09673E-3	3.55244E-3	9.64165E-2	1.58239E1	-1.9841E1	-1.99204E1	1.50202E1	2.24694E-9	2.51443E-3	2.51443E-3	6.31837E-3	2.11666E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.29374E-2	-8.80026E1	-7.62939E-4	-8.80014E1	9.05991E-4	3.26633E-3	9.6488E-2	1.58144E1	-1.98322E1	-1.99596E1	1.50166E1	2.22654E-9	2.51225E-3	2.51225E-3	6.3074E-3	2.1185E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80025E1	-5.24521E-4	-8.80014E1	1.07288E-3	3.6478E-3	9.63211E-2	1.57826E1	-1.98458E1	-1.98942E1	1.50412E1	2.22916E-9	2.51417E-3	2.51417E-3	6.34518E-3	2.12594E-2
1.2E1	6.3E1	0.0E0	4.85E2	3.23E2	-7.19325E-2	-8.80026E1	-4.76837E-4	-8.80015E1	1.00136E-3	3.86238E-3	9.67503E-2	1.57799E1	-1.98686E1	-1.9912E1	1.5025E1	2.22726E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.12594E-2
1.3E1	2.2E1	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80028E1	-6.91414E-4	-8.80012E1	1.0252E-3	3.55244E-3	9.67026E-2	1.57981E1	-1.98603E1	-1.98717E1	1.5001E1	2.22751E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.12403E-2
1.4E1	1.08E2	0.0E0	5.66E2	3.82E2	-7.36328E-2	-8.8003E1	-5.24521E-4	-8.80014E1	9.29832E-4	3.38554E-3	9.66549E-2	1.58546E1	-1.98374E1	-1.99486E1	1.50148E1	2.2327E-9	2.51804E-3	2.51804E-3	6.31299E-3	2.13712E-2
1.5E1	6.4E1	0.0E0	6.06E2	4.11E2	-7.32464E-2	-8.80027E1	-4.76837E-4	-8.80014E1	9.53674E-4	3.50475E-3	9.66072E-2	1.58191E1	-1.9832E1	-1.99798E1	1.49968E1	2.23869E-9	2.51739E-3	2.51739E-3	6.29128E-3	2.14598E-2
1.6E1	3.02E2	0.0E0	6.47E2	4.41E2	-7.23964E-2	-8.80031E1	-4.29153E-4	-8.80017E1	8.82149E-4	3.33786E-3	9.67026E-2	1.57755E1	-1.98617E1	-1.99313E1	1.50304E1	2.2372E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.12957E-2
1.7E1	7.9E2	3.0E0	6.87E2	4.7E2	-7.27053E-2	-8.80029E1	-3.09944E-4	-8.80018E1	8.58307E-4	3.71933E-3	9.66311E-2	1.57855E1	-1.98645E1	-1.99396E1	1.50298E1	2.23526E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.11666E-2
1.8E1	3.216E3	5.0E0	7.27E2	5.0E2	-7.32464E-2	-8.80029E1	-4.76837E-4	-8.80015E1	6.91414E-4	3.52859E-3	9.65357E-2	1.58369E1	-1.98465E1	-1.98092E1	1.5025E1	2.22945E-9	2.52538E-3	2.52538E-3	6.32386E-3	2.13513E-2
1.9E1	1.773E3	1.0E0	7.68E2	5.29E2	-7.3401E-2	-8.80027E1	-6.4373E-4	-8.80018E1	5.24521E-4	3.29018E-3	9.6488E-2	1.58156E1	-1.98287E1	-1.99296E1	1.50329E1	2.23623E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.12218E-2
2.0E1	2.0E1	0.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80031E1	-3.8147E-4	-8.80014E1	6.91414E-4	3.57628E-3	9.63211E-2	1.58203E1	-1.98037E1	-1.99555E1	1.50126E1	2.23429E-9	2.5188E-3	2.5188E-3	6.34037E-3	2.12957E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.8003E1	-4.05312E-4	-8.80013E1	6.4373E-4	3.43323E-3	9.65357E-2	1.5796E1	-1.98521E1	-1.99587E1	1.50184E1	2.23235E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.12034E-2
2.2E1	1.4E1	0.0E0	8.89E2	6.17E2	-7.33239E-2	-8.80031E1	-1.90735E-4	-8.80012E1	7.62939E-4	3.76701E-3	9.64642E-2	1.58492E1	-1.98152E1	-1.99252E1	1.50425E1	2.21495E-9	2.52169E-3	2.52169E-3	6.33977E-3	2.11328E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.37874E-2	-8.80031E1	-3.57628E-4	-8.80012E1	7.86781E-4	3.69549E-3	9.66311E-2	1.58131E1	-1.98573E1	-1.99053E1	1.50226E1	2.24109E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.12772E-2