[Scan]
initial_time=2016-01-18T16:52:12
final_time=2016-01-18T16:52:31
ip_count=19
run=1024
dataset=1
scan=62
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.14689E-2
qbias_imon=-3.78354E-6
ql1_vset=
ql1_vmon=-8.8003E1
ql1_imon=-6.57713E-10
ql2_vset=
ql2_vmon=-5.72205E-4
ql2_imon=1.23394E-9
ql3_vset=
ql3_vmon=-8.80014E1
ql3_imon=-2.33647E-9
ql4_vset=
ql4_vmon=7.62939E-4
ql4_imon=1.40282E-8
mult1=-9.18017E-9
mult2=-2.75853E-9
rf_tmon=-5.06398E-3
rf_agc=3.32383E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.8147E-3
ql5_imon=6.74844E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66974E0
bslens_imon=2.426E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19905E1
lens5a_imon=1.99425E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12532E2
lens4a_imon=2.051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53971E1
cs_ef1b_imon=2.77763E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04674E2
lens23_imon=1.02204E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04736E1
cs_ea1_imon=2.6179E-5
lens1_vset=-2.7E0
lens1_vmon=-2.929E0
lens1_imon=1.44545E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64993E1
os_ef1alow_imon=2.97261E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0345E1
cs_ea2_imon=1.49136E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84352E1
cs_ef1a_imon=2.94414E-5
olens2_vset=0.0E0
olens2_vmon=1.33514E-3
olens2_imon=1.02676E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11424E1
os_restr1_imon=4.27725E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14939E1
os_ea1_imon=2.40773E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.639E1
os_ef1bup_imon=3.08181E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22927E0
cs_ionrep_imon=1.17124E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92054E2
cs_nozzle_imon=1.93442E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01809E1
cs_anode1_imon=2.91567E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99971E1
olens4_imon=4.21989E-9
tplens_vset=0.0E0
tplens_vmon=-1.69491E0
tplens_imon=-3.49815E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99502E1
iondef3_imon=8.63733E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98299E1
iondef2_imon=9.34751E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03217E2
lens6_imon=2.98285E-4
ql6_vset=1.0E-1
ql6_vmon=9.66549E-2
ql6_imon=9.06324E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24248E0
ionrepsh_imon=1.7282E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34012E1
lens5b_imon=2.17882E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74597E1
cs_ef2b_imon=3.12073E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.23948E0
os_ea2_imon=-5.73322E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06212E2
lens4b_imon=2.00832E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71318E1
cs_ef2a_imon=3.17047E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03834E0
os_ef2alow_imon=-2.42849E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95622E-1
os_ef2bup_imon=-5.1603E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11183E1
os_restr2_imon=3.37842E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.2982E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01707E1
cs_anode2_imon=2.22479E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58368E1
iondef1_imon=5.37485E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50184E1
iondef4_imon=5.51465E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27955E1
olens3_imon=2.51466E-8
olens1_vset=0.0E0
olens1_vmon=1.35899E-3
olens1_imon=1.2023E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16078E0
cs_ionaccel_imon=-1.78699E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02158E2
cs_ionfocb_imon=1.47291E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56465E1
einzel_imon=7.78875E-6
window_vset=0.0E0
window_vmon=2.9663E-1
window_imon=-8.75184E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82816E2
mask1_imon=2.39102E-4
mask2_vset=0.0E0
mask2_vmon=-1.86825E1
mask2_imon=-4.89559E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92616E3
multa_neg_imon=7.42967E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.36982E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50099E3
multb_neg_imon=6.91056E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47074E0
defgridb_imon=6.11387E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33322E1
os_fil1_imon=9.41916E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07449E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62221E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30813E1
cs_fil1_imon=9.95104E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63147E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63416E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.88625E-2
os_fil2_imon=-2.68999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00717E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.60429E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36384E-1
cs_fil2_imon=-2.4257E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.38249E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22262E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.11689E-2
chamber_ion_pmon=2.23773E-9
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.71906E-1
res40_imon=-2.5294E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.297E3	2.0E0	1.47E2	4.1E1	-7.27053E-2	-8.80027E1	-3.8147E-4	-8.80013E1	9.05991E-4	3.93391E-3	9.65357E-2	1.57985E1	-1.98558E1	-1.99296E1	1.50248E1	2.24012E-9	2.51443E-3	2.51443E-3	6.31837E-3	2.1185E-2
2.0E0	2.951E3	4.0E0	3.16E2	1.6E2	-7.30146E-2	-8.80024E1	-9.53674E-5	-8.80011E1	1.12057E-3	3.8147E-3	9.67026E-2	1.58258E1	-1.98343E1	-1.99579E1	1.50422E1	2.23678E-9	2.52492E-3	2.52492E-3	6.3074E-3	2.11689E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80026E1	2.38419E-5	-8.80013E1	1.07288E-3	3.93391E-3	9.67979E-2	1.5828E1	-1.98328E1	-1.99537E1	1.49912E1	2.2327E-9	2.51915E-3	2.51915E-3	6.3074E-3	2.13145E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.22418E-2	-8.80028E1	-9.53674E-5	-8.80011E1	1.07288E-3	3.60012E-3	9.68218E-2	1.58221E1	-1.98322E1	-1.99425E1	1.50112E1	2.24207E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.12034E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.8003E1	-1.43051E-4	-8.80011E1	1.28746E-3	3.67165E-3	9.65357E-2	1.58168E1	-1.98694E1	-1.99207E1	1.50508E1	2.2345E-9	2.51287E-3	2.51287E-3	6.30212E-3	2.11712E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.8003E1	-3.8147E-4	-8.80013E1	1.14441E-3	3.31402E-3	9.65834E-2	1.58053E1	-1.98483E1	-1.99306E1	1.50172E1	2.23235E-9	2.51007E-3	2.51007E-3	6.34037E-3	2.12403E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.26282E-2	-8.80032E1	-5.72205E-4	-8.80014E1	1.33514E-3	3.91006E-3	9.66311E-2	1.581E1	-1.98383E1	-1.99795E1	1.50282E1	2.23657E-9	2.51617E-3	2.51617E-3	6.31541E-3	2.12238E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.3401E-2	-8.8003E1	-2.86102E-4	-8.80011E1	1.33514E-3	3.76701E-3	9.65834E-2	1.58307E1	-1.98351E1	-1.99253E1	1.50042E1					
1.2E1	7.0E1	0.0E0	4.85E2	3.23E2	-7.30918E-2	-8.80027E1	-2.38419E-4	-8.80012E1	1.21593E-3	3.67165E-3	9.64403E-2	1.58119E1	-1.98284E1	-1.99222E1	1.5028E1	2.24064E-9	2.51758E-3	2.51758E-3	6.33648E-3	2.11201E-2
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.39421E-2	-8.80027E1	-4.52995E-4	-8.80013E1	7.86781E-4	3.62396E-3	9.66549E-2	1.58144E1	-1.98169E1	-1.9916E1	1.50277E1	2.24109E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.12034E-2
1.4E1	1.19E2	0.0E0	5.66E2	3.82E2	-7.35556E-2	-8.80029E1	-3.8147E-4	-8.80012E1	7.39098E-4	3.8147E-3	9.64165E-2	1.58257E1	-1.9835E1	-1.9927E1	1.49932E1	2.23818E-9	2.51225E-3	2.51225E-3	6.34037E-3	2.12772E-2
1.5E1	6.9E1	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.8003E1	-5.24521E-4	-8.80012E1	8.34465E-4	3.93391E-3	9.66311E-2	1.58221E1	-1.98483E1	-1.9948E1	1.50485E1	2.23623E-9	2.52318E-3	2.52318E-3	6.29098E-3	2.11482E-2
1.6E1	2.88E2	0.0E0	6.47E2	4.41E2	-7.24736E-2	-8.80028E1	-6.67572E-4	-8.80011E1	9.29832E-4	3.95775E-3	9.65595E-2	1.58115E1	-1.9831E1	-1.99425E1	1.50238E1	2.24109E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.12403E-2
1.7E1	7.9E2	0.0E0	6.87E2	4.7E2	-7.25507E-2	-8.80026E1	-5.96046E-4	-8.80012E1	5.72205E-4	3.88622E-3	9.62734E-2	1.58209E1	-1.98447E1	-1.99285E1	1.50334E1	2.23392E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.11689E-2
1.8E1	3.399E3	1.0E0	7.27E2	5.0E2	-7.10051E-2	-8.80026E1	-5.24521E-4	-8.80012E1	7.62939E-4	3.86238E-3	9.64165E-2	1.57896E1	-1.98257E1	-1.99419E1	1.50334E1	2.23623E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.12403E-2
1.9E1	1.839E3	2.0E0	7.68E2	5.29E2	-7.14689E-2	-8.80028E1	-8.58307E-4	-8.80014E1	7.39098E-4	3.93391E-3	9.63211E-2	1.58179E1	-1.98287E1	-1.99231E1	1.50178E1	2.22945E-9	2.51552E-3	2.51552E-3	6.31288E-3	2.1185E-2
2.0E1	2.0E1	0.0E0	8.08E2	5.58E2	-7.20871E-2	-8.80027E1	-6.4373E-4	-8.80013E1	8.34465E-4	3.93391E-3	9.66549E-2	1.58014E1	-1.98664E1	-1.99419E1	1.50304E1	2.23869E-9	2.5131E-3	2.5131E-3	6.31817E-3	2.11689E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.15461E-2	-8.80028E1	-4.76837E-4	-8.80015E1	8.34465E-4	3.76701E-3	9.66311E-2	1.58256E1	-1.98269E1	-1.99355E1	1.5012E1	2.23297E-9	2.51525E-3	2.51525E-3	6.3074E-3	2.12413E-2
2.2E1	9.0E0	0.0E0	8.89E2	6.17E2	-7.17007E-2	-8.80028E1	-8.82149E-4	-8.80017E1	9.05991E-4	4.1008E-3	9.65118E-2	1.57902E1	-1.98399E1	-1.9939E1	1.50244E1	2.23869E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.1332E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.14689E-2	-8.8003E1	-5.72205E-4	-8.80014E1	7.62939E-4	3.8147E-3	9.66549E-2	1.58368E1	-1.98299E1	-1.99502E1	1.50184E1	2.23773E-9	2.51954E-3	2.51954E-3	6.3074E-3	2.11689E-2