[Scan]
initial_time=2016-01-18T16:52:39
final_time=2016-01-18T16:52:58
ip_count=19
run=1024
dataset=1
scan=63
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.20871E-2
qbias_imon=-3.76954E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-7.3024E-10
ql2_vset=
ql2_vmon=2.38419E-5
ql2_imon=1.22319E-9
ql3_vset=
ql3_vmon=-8.80021E1
ql3_imon=-2.25683E-9
ql4_vset=
ql4_vmon=6.67572E-4
ql4_imon=1.40055E-8
mult1=-9.47571E-9
mult2=-2.69386E-9
rf_tmon=-4.78083E-3
rf_agc=3.33622E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.93391E-3
ql5_imon=6.41263E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61987E0
bslens_imon=2.43681E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19995E1
lens5a_imon=1.99821E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12526E2
lens4a_imon=2.0483E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54073E1
cs_ef1b_imon=2.78809E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04676E2
lens23_imon=1.02189E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04567E1
cs_ea1_imon=2.61069E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96926E0
lens1_imon=1.22915E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64831E1
os_ef1alow_imon=2.97045E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03666E1
cs_ea2_imon=1.48054E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84562E1
cs_ef1a_imon=2.93513E-5
olens2_vset=0.0E0
olens2_vmon=7.86781E-4
olens2_imon=1.02266E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1125E1
os_restr1_imon=4.29887E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14957E1
os_ea1_imon=2.40016E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63593E1
os_ef1bup_imon=3.07352E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21785E0
cs_ionrep_imon=1.17592E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92113E2
cs_nozzle_imon=1.93561E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01761E1
cs_anode1_imon=2.89657E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9997E1
olens4_imon=4.20567E-9
tplens_vset=0.0E0
tplens_vmon=-1.72194E0
tplens_imon=-2.70506E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99331E1
iondef3_imon=8.9798E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98369E1
iondef2_imon=9.44484E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03237E2
lens6_imon=2.98173E-4
ql6_vset=1.0E-1
ql6_vmon=9.64165E-2
ql6_imon=8.76153E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2515E0
ionrepsh_imon=1.71847E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33796E1
lens5b_imon=2.19072E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74609E1
cs_ef2b_imon=3.12253E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.24068E0
os_ea2_imon=-6.41816E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06187E2
lens4b_imon=2.0063E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7121E1
cs_ef2a_imon=3.16903E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05816E0
os_ef2alow_imon=-2.55824E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.71595E-1
os_ef2bup_imon=-5.19634E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1134E1
os_restr2_imon=3.3795E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.30072E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01935E1
cs_anode2_imon=2.23272E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57867E1
iondef1_imon=5.32078E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50369E1
iondef4_imon=5.44617E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27952E1
olens3_imon=2.51931E-8
olens1_vset=0.0E0
olens1_vmon=1.74046E-3
olens1_imon=1.20109E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16678E0
cs_ionaccel_imon=-1.74014E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02138E2
cs_ionfocb_imon=1.47352E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56435E1
einzel_imon=7.69865E-6
window_vset=0.0E0
window_vmon=2.696E-1
window_imon=-7.95896E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82794E2
mask1_imon=2.39217E-4
mask2_vset=0.0E0
mask2_vmon=-1.87197E1
mask2_imon=-5.29203E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9264E3
multa_neg_imon=7.79017E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9374E3
defgrida_imon=6.61495E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.07639E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.66924E0
defgridb_imon=6.24364E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33339E1
os_fil1_imon=9.44781E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07263E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62707E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30834E1
cs_fil1_imon=9.97104E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6236E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6352E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.1184E-2
os_fil2_imon=-2.7861E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97714E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.11447E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35737E-1
cs_fil2_imon=-2.81013E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01608E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22336E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.12594E-2
chamber_ion_pmon=2.23583E-9
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.04342E-1
res40_imon=-2.45732E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.3E3	0.0E0	1.47E2	4.1E1	-7.19325E-2	-8.8003E1	-6.19888E-4	-8.80015E1	1.14441E-3	3.55244E-3	9.68456E-2	1.58315E1	-1.98835E1	-1.99337E1	1.50323E1	2.23583E-9	2.51739E-3	2.51739E-3	6.31548E-3	2.12322E-2
2.0E0	2.941E3	0.0E0	3.16E2	1.6E2	-7.20871E-2	-8.80029E1	-6.91414E-4	-8.80014E1	9.53674E-4	3.74317E-3	9.6941E-2	1.58111E1	-1.98496E1	-1.99396E1	1.50091E1					
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80029E1	-5.24521E-4	-8.80015E1	8.58307E-4	3.74317E-3	9.6488E-2	1.57896E1	-1.98263E1	-1.99437E1	1.50433E1	2.23709E-9	2.52179E-3	2.52179E-3	6.3074E-3	2.11616E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.286E-2	-8.80027E1	-5.72205E-4	-8.80016E1	8.58307E-4	3.74317E-3	9.65595E-2	1.58365E1	-1.98344E1	-1.99234E1	1.50473E1	2.24388E-9	2.51709E-3	2.51709E-3	6.31798E-3	2.12957E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.8003E1	-7.39098E-4	-8.80015E1	5.96046E-4	3.57628E-3	9.66787E-2	1.58168E1	-1.98316E1	-1.99443E1	1.50202E1	2.23526E-9	2.5188E-3	2.5188E-3	6.34037E-3	2.12403E-2
6.0E0	3.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.8003E1	-3.8147E-4	-8.80015E1	9.29832E-4	3.45707E-3	9.67503E-2	1.58179E1	-1.98422E1	-1.99246E1	1.50238E1	2.23818E-9	2.51552E-3	2.51552E-3	6.3074E-3	2.12034E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.80029E1	-5.48363E-4	-8.80014E1	9.53674E-4	3.67165E-3	9.66549E-2	1.57981E1	-1.98266E1	-1.9933E1	1.50202E1	2.23773E-9	2.52384E-3	2.52384E-3	6.29665E-3	2.12051E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.15461E-2	-8.8003E1	-6.91414E-4	-8.80014E1	1.12057E-3	3.31402E-3	9.66311E-2	1.58389E1	-1.98182E1	-1.99432E1	1.49968E1	2.23332E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.12403E-2
1.2E1	7.6E1	0.0E0	4.85E2	3.23E2	-7.15461E-2	-8.80031E1	-6.91414E-4	-8.80015E1	1.12057E-3	3.76701E-3	9.66072E-2	1.57945E1	-1.98483E1	-1.9948E1	1.50563E1	2.22579E-9	2.51693E-3	2.51693E-3	6.32418E-3	2.12204E-2
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.19325E-2	-8.8003E1	-7.86781E-4	-8.80015E1	1.21593E-3	3.45707E-3	9.66787E-2	1.58374E1	-1.98511E1	-1.9906E1	1.50068E1	2.23392E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.12232E-2
1.4E1	1.09E2	1.0E0	5.66E2	3.82E2	-7.21643E-2	-8.80029E1	-8.10623E-4	-8.80014E1	9.53674E-4	3.62396E-3	9.65357E-2	1.58581E1	-1.98611E1	-1.99478E1	1.50142E1	2.2406E-9	2.51847E-3	2.51847E-3	6.33436E-3	2.12594E-2
1.5E1	7.3E1	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80028E1	-6.19888E-4	-8.80016E1	1.09673E-3	3.91006E-3	9.67503E-2	1.57971E1	-1.98318E1	-1.99255E1	1.50725E1	2.24499E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.12772E-2
1.6E1	3.47E2	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80027E1	-2.86102E-4	-8.80015E1	1.14441E-3	3.67165E-3	9.66549E-2	1.58126E1	-1.98411E1	-1.99343E1	1.50256E1	2.24012E-9	2.52428E-3	2.52428E-3	6.29645E-3	2.1185E-2
1.7E1	7.55E2	0.0E0	6.87E2	4.7E2	-7.26282E-2	-8.80028E1	-2.6226E-4	-8.80015E1	6.91414E-4	3.86238E-3	9.67503E-2	1.58383E1	-1.98693E1	-1.99396E1	1.5016E1	2.23332E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.1185E-2
1.8E1	3.32E3	4.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80027E1	-3.57628E-4	-8.80015E1	6.91414E-4	3.50475E-3	9.63211E-2	1.5887E1	-1.99017E1	-1.98495E1	1.50503E1	2.23773E-9	2.52599E-3	2.52599E-3	6.33436E-3	2.12957E-2
1.9E1	1.825E3	2.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80026E1	-6.4373E-4	-8.80016E1	6.67572E-4	3.31402E-3	9.63926E-2	1.58377E1	-1.98308E1	-1.99522E1	1.5022E1	2.24109E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.11482E-2
2.0E1	1.9E1	0.0E0	8.08E2	5.58E2	-7.22418E-2	-8.80026E1	-5.48363E-4	-8.80019E1	7.15256E-4	3.76701E-3	9.65834E-2	1.58315E1	-1.98511E1	-1.99508E1	1.499E1	2.23041E-9	2.52538E-3	2.52538E-3	6.31837E-3	2.12403E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80026E1	-5.48363E-4	-8.80018E1	9.05991E-4	3.93391E-3	9.65118E-2	1.57783E1	-1.98326E1	-1.99474E1	1.50106E1	2.23915E-9	2.5199E-3	2.5199E-3	6.33486E-3	2.12218E-2
2.2E1	1.0E1	0.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80025E1	-6.67572E-4	-8.80016E1	5.24521E-4	3.98159E-3	9.67741E-2	1.58185E1	-1.98204E1	-1.99154E1	1.50112E1	2.23202E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.12594E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.20871E-2	-8.80026E1	2.38419E-5	-8.80021E1	6.67572E-4	3.93391E-3	9.64165E-2	1.57867E1	-1.98369E1	-1.99331E1	1.50369E1	2.23583E-9	2.52061E-3	2.52061E-3	6.30202E-3	2.12594E-2