[Scan]
initial_time=2016-01-18T16:53:05
final_time=2016-01-18T16:53:25
ip_count=19
run=1024
dataset=1
scan=64
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.13915E-2
qbias_imon=-3.784E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-6.43981E-10
ql2_vset=
ql2_vmon=-6.67572E-4
ql2_imon=1.22774E-9
ql3_vset=
ql3_vmon=-8.80013E1
ql3_imon=-2.23508E-9
ql4_vset=
ql4_vmon=8.34465E-4
ql4_imon=1.40035E-8
mult1=-9.12632E-9
mult2=-2.76253E-9
rf_tmon=-4.96304E-3
rf_agc=3.25765E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.71933E-3
ql5_imon=6.20377E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66851E0
bslens_imon=2.3741E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19835E1
lens5a_imon=2.00227E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12579E2
lens4a_imon=2.04872E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54085E1
cs_ef1b_imon=2.79094E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04643E2
lens23_imon=1.02099E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04676E1
cs_ea1_imon=2.59509E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98574E0
lens1_imon=1.2465E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64856E1
os_ef1alow_imon=2.96792E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03935E1
cs_ea2_imon=1.47116E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84409E1
cs_ef1a_imon=2.93818E-5
olens2_vset=0.0E0
olens2_vmon=9.53674E-4
olens2_imon=1.01969E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11319E1
os_restr1_imon=4.28616E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1492E1
os_ea1_imon=2.39712E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63693E1
os_ef1bup_imon=3.08653E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19945E0
cs_ionrep_imon=1.16447E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92028E2
cs_nozzle_imon=1.93482E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01833E1
cs_anode1_imon=2.90844E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9997E1
olens4_imon=4.2515E-9
tplens_vset=0.0E0
tplens_vmon=-1.70326E0
tplens_imon=-1.4923E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.9948E1
iondef3_imon=8.92301E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98741E1
iondef2_imon=9.47763E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03218E2
lens6_imon=2.98203E-4
ql6_vset=1.0E-1
ql6_vmon=9.65595E-2
ql6_imon=9.09424E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22639E0
ionrepsh_imon=1.71835E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3397E1
lens5b_imon=2.18849E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74673E1
cs_ef2b_imon=3.13243E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.23496E0
os_ea2_imon=-6.01006E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06207E2
lens4b_imon=2.00682E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71607E1
cs_ef2a_imon=3.16401E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02671E0
os_ef2alow_imon=-2.54593E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.91712E-1
os_ef2bup_imon=-5.2081E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11503E1
os_restr2_imon=3.37221E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.231E2
cs_ionfoca_imon=6.29194E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01797E1
cs_anode2_imon=2.22068E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58101E1
iondef1_imon=5.01864E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50388E1
iondef4_imon=5.32309E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27956E1
olens3_imon=2.50826E-8
olens1_vset=0.0E0
olens1_vmon=1.3113E-3
olens1_imon=1.19702E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15646E0
cs_ionaccel_imon=-1.62794E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02113E2
cs_ionfocb_imon=1.47307E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56442E1
einzel_imon=7.89347E-6
window_vset=0.0E0
window_vmon=2.89071E-1
window_imon=-8.20104E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82797E2
mask1_imon=2.39088E-4
mask2_vset=0.0E0
mask2_vmon=-1.86987E1
mask2_imon=-6.76898E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.40975E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.59802E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50104E3
multb_neg_imon=7.0351E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34226E0
defgridb_imon=6.10951E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33345E1
os_fil1_imon=9.4179E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0758E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62082E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30863E1
cs_fil1_imon=9.96349E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62139E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63652E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.90961E-2
os_fil2_imon=-2.77443E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.84001E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.59186E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35786E-1
cs_fil2_imon=-2.50515E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.22018E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22257E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.12051E-2
chamber_ion_pmon=2.23202E-9
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.66987E-1
res40_imon=-2.46514E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=216
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.359E3	3.0E0	1.47E2	4.1E1	-7.19325E-2	-8.80025E1	-3.8147E-4	-8.80017E1	5.72205E-4	3.52859E-3	9.65834E-2	1.5812E1	-1.98588E1	-1.99437E1	1.50062E1	2.2372E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.12034E-2
2.0E0	2.985E3	0.0E0	3.16E2	1.6E2	-7.25507E-2	-8.80026E1	-3.09944E-4	-8.80016E1	6.4373E-4	3.76701E-3	9.67264E-2	1.58369E1	-1.983E1	-1.99549E1	1.50253E1	2.23392E-9	2.52384E-3	2.52384E-3	6.30202E-3	2.12232E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.15461E-2	-8.80025E1	-2.38419E-4	-8.80013E1	1.04904E-3	3.93391E-3	9.65595E-2	1.57908E1	-1.98859E1	-1.9972E1	1.50172E1	2.23468E-9	2.51581E-3	2.51581E-3	6.32978E-3	2.12204E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.16233E-2	-8.80025E1	-3.8147E-4	-8.80013E1	9.77516E-4	4.02927E-3	9.68933E-2	1.58221E1	-1.98257E1	-1.99408E1	1.50088E1	2.23202E-9	2.51739E-3	2.51739E-3	6.29665E-3	2.12413E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.12368E-2	-8.80025E1	-8.10623E-4	-8.80011E1	8.58307E-4	3.57628E-3	9.67264E-2	1.57519E1	-1.98163E1	-1.99573E1	1.50178E1	2.23964E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.13139E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.14689E-2	-8.80025E1	-8.10623E-4	-8.80013E1	6.91414E-4	3.6478E-3	9.67264E-2	1.58335E1	-1.98434E1	-1.9921E1	1.50256E1	2.24304E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.12772E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.13915E-2	-8.80028E1	-5.96046E-4	-8.80014E1	1.07288E-3	3.43323E-3	9.67264E-2	1.57921E1	-1.98062E1	-1.99666E1	1.50028E1	2.23623E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.12218E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.11597E-2	-8.80026E1	-6.19888E-4	-8.80013E1	9.29832E-4	3.52859E-3	9.70602E-2	1.58011E1	-1.98332E1	-1.99468E1	1.50274E1	2.23487E-9	2.52276E-3	2.52276E-3	6.30202E-3	2.12413E-2
1.2E1	6.5E1	0.0E0	4.85E2	3.23E2	-7.10051E-2	-8.80027E1	-6.67572E-4	-8.80017E1	1.12057E-3	3.55244E-3	9.65595E-2	1.58284E1	-1.98185E1	-1.99014E1	1.50242E1	2.23526E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.12034E-2
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.06187E-2	-8.80026E1	-2.38419E-4	-8.80016E1	1.09673E-3	3.88622E-3	9.68456E-2	1.58101E1	-1.97978E1	-1.99155E1	1.50242E1	2.23731E-9	2.51814E-3	2.51814E-3	6.29157E-3	2.11712E-2
1.4E1	1.17E2	0.0E0	5.66E2	3.82E2	-7.13143E-2	-8.80024E1	4.76837E-5	-8.80013E1	7.86781E-4	3.98159E-3	9.66311E-2	1.58293E1	-1.98284E1	-1.99354E1	1.5024E1	2.23764E-9	2.52809E-3	2.52809E-3	6.34661E-3	2.12768E-2
1.5E1	6.6E1	0.0E0	6.06E2	4.11E2	-7.16233E-2	-8.80028E1	-3.8147E-4	-8.80013E1	6.91414E-4	3.52859E-3	9.65834E-2	1.58097E1	-1.98305E1	-1.99414E1	1.50178E1	2.23487E-9	2.51954E-3	2.51954E-3	6.29665E-3	2.11689E-2
1.6E1	2.91E2	2.0E0	6.47E2	4.41E2	-7.21643E-2	-8.80025E1	-4.05312E-4	-8.80013E1	1.09673E-3	3.93391E-3	9.6488E-2	1.58174E1	-1.98499E1	-1.99437E1	1.50033E1	2.23235E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.11482E-2
1.7E1	7.63E2	1.0E0	6.87E2	4.7E2	-7.17779E-2	-8.80029E1	-2.86102E-4	-8.80011E1	9.05991E-4	3.95775E-3	9.6488E-2	1.58174E1	-1.98281E1	-1.99319E1	1.50575E1	2.23356E-9	2.51814E-3	2.51814E-3	6.3074E-3	2.11534E-2
1.8E1	3.325E3	2.0E0	7.27E2	5.0E2	-7.13915E-2	-8.80031E1	-6.4373E-4	-8.80011E1	9.77516E-4	3.91006E-3	9.6941E-2	1.58474E1	-1.98867E1	-1.9921E1	1.50232E1	2.23235E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.12218E-2
1.9E1	1.81E3	1.0E0	7.68E2	5.29E2	-7.07733E-2	-8.80029E1	-6.67572E-4	-8.80014E1	8.58307E-4	3.45707E-3	9.68456E-2	1.58389E1	-1.98344E1	-1.99306E1	1.50196E1	2.23818E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.12403E-2
2.0E1	2.8E1	0.0E0	8.08E2	5.58E2	-7.16233E-2	-8.8003E1	-5.24521E-4	-8.80016E1	9.77516E-4	3.74317E-3	9.67026E-2	1.58299E1	-1.98338E1	-1.99222E1	1.50094E1	2.24538E-9	2.51847E-3	2.51847E-3	6.33436E-3	2.14415E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.20871E-2	-8.80028E1	-5.48363E-4	-8.80013E1	9.53674E-4	3.48091E-3	9.67741E-2	1.58221E1	-1.98641E1	-1.99555E1	1.50271E1	2.24304E-9	2.52318E-3	2.52318E-3	6.29098E-3	2.12034E-2
2.2E1	8.0E0	0.0E0	8.89E2	6.17E2	-7.13915E-2	-8.8003E1	-6.67572E-4	-8.80011E1	6.67572E-4	3.86238E-3	9.68456E-2	1.58303E1	-1.98074E1	-1.99248E1	1.50292E1	2.24109E-9	2.51552E-3	2.51552E-3	6.32936E-3	2.1185E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.13915E-2	-8.80027E1	-6.67572E-4	-8.80013E1	8.34465E-4	3.71933E-3	9.65595E-2	1.58101E1	-1.98741E1	-1.9948E1	1.50388E1	2.23202E-9	2.52169E-3	2.52169E-3	6.32896E-3	2.12051E-2